JP6887839B2 - 保護膜形成装置 - Google Patents
保護膜形成装置 Download PDFInfo
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- JP6887839B2 JP6887839B2 JP2017055068A JP2017055068A JP6887839B2 JP 6887839 B2 JP6887839 B2 JP 6887839B2 JP 2017055068 A JP2017055068 A JP 2017055068A JP 2017055068 A JP2017055068 A JP 2017055068A JP 6887839 B2 JP6887839 B2 JP 6887839B2
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Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017055068A JP6887839B2 (ja) | 2017-03-21 | 2017-03-21 | 保護膜形成装置 |
| JP2021084807A JP7194228B2 (ja) | 2017-03-21 | 2021-05-19 | 保護膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017055068A JP6887839B2 (ja) | 2017-03-21 | 2017-03-21 | 保護膜形成装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021084807A Division JP7194228B2 (ja) | 2017-03-21 | 2021-05-19 | 保護膜形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018153791A JP2018153791A (ja) | 2018-10-04 |
| JP2018153791A5 JP2018153791A5 (enExample) | 2020-03-12 |
| JP6887839B2 true JP6887839B2 (ja) | 2021-06-16 |
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017055068A Active JP6887839B2 (ja) | 2017-03-21 | 2017-03-21 | 保護膜形成装置 |
| JP2021084807A Active JP7194228B2 (ja) | 2017-03-21 | 2021-05-19 | 保護膜形成装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021084807A Active JP7194228B2 (ja) | 2017-03-21 | 2021-05-19 | 保護膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP6887839B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114887830B (zh) * | 2022-05-09 | 2023-05-23 | 广东寅创科技有限公司 | 一种特种机器人的生产工艺及装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07314461A (ja) * | 1994-05-27 | 1995-12-05 | Olympus Optical Co Ltd | 複合型光学素子の離型方法および装置 |
| JPH08323780A (ja) * | 1995-06-01 | 1996-12-10 | Olympus Optical Co Ltd | 複合型光学素子の離型方法および装置 |
| JP3971429B2 (ja) * | 2005-03-25 | 2007-09-05 | Ｔｄｋ株式会社 | 光ディスクの製造装置及び製造方法 |
| US8377361B2 (en) * | 2006-11-28 | 2013-02-19 | Wei Zhang | Imprint lithography with improved substrate/mold separation |
| JP2008290357A (ja) | 2007-05-25 | 2008-12-04 | Seiko Epson Corp | マイクロレンズアレイの製造方法 |
| JP5704393B2 (ja) | 2011-03-01 | 2015-04-22 | 宇部興産機械株式会社 | 多層成形装置及び多層成形方法 |
-
2017
- 2017-03-21 JP JP2017055068A patent/JP6887839B2/ja active Active
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2021
- 2021-05-19 JP JP2021084807A patent/JP7194228B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP7194228B2 (ja) | 2022-12-21 |
| JP2018153791A (ja) | 2018-10-04 |
| JP2021130112A (ja) | 2021-09-09 |
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