JP6881677B2 - 位置合わせ方法および位置合わせ装置 - Google Patents
位置合わせ方法および位置合わせ装置 Download PDFInfo
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Description
特許文献1 特開2013−118369号公報
Claims (20)
- 積層する二つの基板を位置合わせする位置合わせ方法であって、
前記二つの基板の少なくとも一方の基板に配された複数のマークから選択されたマークの位置を計測する段階と、
計測した前記マークの位置に基づいて、前記二つの基板を位置合わせする段階と、
を含み、
計測される前記マークは、前記少なくとも一方の基板の歪みに関する情報に基づいて選択される位置合わせ方法。 - 前記選択する段階は、前記一方の基板の変形による変位に基づいて前記マークを選択する請求項1に記載の位置合わせ方法。
- 前記複数のマークのそれぞれの変位の値は、前記一方の基板の設計位置に対する変位の実測値に対応する請求項2に記載の位置合わせ方法。
- 前記複数のマークのそれぞれの変位の値は、前記一方の基板の解析結果および製造プロセス条件の少なくとも一方に基づいて予測される請求項2に記載の位置合わせ方法。
- 前記選択する段階は、前記一方の基板に生じた変形の再現性に基づいて前記マークを選択する請求項1から4のいずれか一項に記載の位置合わせ方法。
- 前記選択する段階は、前記一方の基板に生じた変形による変位の少なくとも一部が打ち消し合う前記マークの組合せを選択する請求項1から5のいずれか一項に記載の位置合わせ方法。
- 前記位置合わせする段階において、前記一方の基板に生じた変形の非線形成分に起因する選択した前記マークの変位を考慮して位置合わせする請求項1から6のいずれか一項に記載の位置合わせ方法。
- 前記マークを選択する段階は、前記一方の基板の面方向と平行な第1の方向について前記一方の基板の位置を示す第1のマークを選択する段階と、前記一方の基板の面方向と平行であり、前記第1の方向と交差する第2の方向について前記一方の基板の位置を示す、前記第1のマークと異なるマークを含む第2のマークを選択する段階とを含み、
前記位置合わせする段階は、前記第1のマークを使用して位置合わせする段階と、前記第2のマークを使用して位置合わせする段階とをそれぞれ含む請求項1から7のいずれか一項に記載の位置合わせ方法。 - 前記一方の基板が、積層された複数の基板を含む積層基板である場合に、前記一方の基板に配された前記複数のマークのうち、前記二つの基板の他方を前記一方の基板に位置合わせする目的で選択された前記マークが、前記一方の基板に含まれる前記複数の基板を位置合わせする場合に使用したマークと異なるマークを含む請求項1から8のいずれか一項に記載の位置合わせ方法。
- 前記二つの基板の他方を前記一方の基板に位置合わせするときに用いた前記マークの数が、前記一方の基板において前記複数の基板を積層する場合に用いたマークの数と異なる請求項9に記載の位置合わせ方法。
- 請求項1から10のいずれか一項に記載の位置合わせ方法で前記二つの基板を位置合せする段階と、
位置合せされた前記二つの基板を接合する段階と、
を含む基板積層方法。 - 積層する二つの基板を位置合わせする位置合わせ方法であって、
前記二つの基板の少なくとも一方の基板に配された複数のマークの位置を計測する段階と、
計測した前記複数のマークの位置に基づいて、前記二つの基板を位置合わせする段階と、
を含み、
前記複数のマークは、前記少なくとも一方の基板の歪み量が閾値より小さい領域に配されているマークである位置合わせ方法。 - 積層する二つの基板を位置合わせする位置合わせ方法であって、
前記二つの基板の少なくとも一方の基板に配された複数のマークの位置を計測する段階と、
計測した前記複数のマークの位置に基づいて、前記二つの基板を位置合わせする段階と、
を含み、
前記複数のマークは、前記少なくとも一方の基板に生じる歪みの再現性が閾値より大きい領域に配されているマークである位置合わせ方法。 - 積層する二つの基板を位置合わせする位置合わせ装置であって、
前記二つの基板の一方の基板に配された複数のマークのうち、少なくとも前記一方の基板に生じた歪みに関する情報に基づいて選択されたマークの位置を計測する計測部と、
前記計測部が計測した前記マークの位置に基づいて、前記二つの基板を位置合わせする位置合わせ部と、
を含む位置合わせ装置。 - 積層する二つの基板を位置合わせする位置合わせ装置であって、
前記二つの基板のうちの少なくとも一方の基板に配された複数のマークの位置を計測する計測部と、
前記計測部が計測した前記複数のマークの位置に基づいて、前記二つの基板を位置合わせする位置合わせ部と、
を備え、
前記複数のマークは、前記少なくとも一方の基板の歪み量が閾値より小さい領域に配されているマークである位置合わせ装置。 - 積層する二つの基板を位置合わせする位置合わせ装置であって、
前記二つの基板のうちの少なくとも一方の基板に配された複数のマークの位置を計測する計測部と、
前記計測部が計測した前記複数のマークの位置に基づいて、前記二つの基板を位置合わせする位置合わせ部と、
を備え、
前記複数のマークは、前記少なくとも一方の基板に生じる歪みの再現性が閾値より大きい領域に配されているマークである位置合わせ装置。 - 前記閾値は、前記二つの基板の目標となる位置合せ精度および接合精度の少なくとも一方により決定される請求項15または16に記載の位置合せ装置。
- 請求項14から17のいずれか一項に記載の位置合せ装置と、
前記位置合せ装置で位置合せされた前記二つの基板を接合する接合部と、
を備える基板積層装置。 - 前記二つの基板を前記位置合せ装置で位置合せする前または後に、前記二つの基板の接合面を活性化する活性化装置を備える請求項18に記載の基板積層装置。
- 積層する二つの基板のうちの一方の基板に配された複数のマークのうち、少なくとも前記一方の基板に生じた歪みに関する情報に基づいて、計測するマークを選択する選択部と、
前記選択部で選択された前記マークの位置に基づいて、前記二つの基板を接合する基板積層装置と、
を備える積層基板製造システム。
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