JP6879908B2 - 二次イオン質量分析計のためのセシウム一次イオン源 - Google Patents

二次イオン質量分析計のためのセシウム一次イオン源 Download PDF

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JP6879908B2
JP6879908B2 JP2017519876A JP2017519876A JP6879908B2 JP 6879908 B2 JP6879908 B2 JP 6879908B2 JP 2017519876 A JP2017519876 A JP 2017519876A JP 2017519876 A JP2017519876 A JP 2017519876A JP 6879908 B2 JP6879908 B2 JP 6879908B2
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Japan
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ion source
primary ion
reservoir
conical
graphite
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Japanese (ja)
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JP2017532744A5 (enExample
JP2017532744A (ja
Inventor
ピーター ウィリアムズ
ピーター ウィリアムズ
カレン アマンダ ウィリアムズ
カレン アマンダ ウィリアムズ
マイトライー ボーズ
マイトライー ボーズ
ジョン プリンス
ジョン プリンス
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Arizona State University ASU
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Arizona State University ASU
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/22—Metal ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2255—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident ion beams, e.g. proton beams
    • G01N23/2258—Measuring secondary ion emission, e.g. secondary ion mass spectrometry [SIMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H3/00—Mechanisms for operating contacts
    • H01H3/02—Operating parts, i.e. for operating driving mechanism by a mechanical force external to the switch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0004—Imaging particle spectrometry
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/26—Automatic control of frequency or phase; Synchronisation using energy levels of molecules, atoms, or subatomic particles as a frequency reference

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2017519876A 2014-10-13 2015-10-13 二次イオン質量分析計のためのセシウム一次イオン源 Active JP6879908B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462063023P 2014-10-13 2014-10-13
US62/063,023 2014-10-13
PCT/US2015/055261 WO2016061057A1 (en) 2014-10-13 2015-10-13 Cesium primary ion source for secondary ion mass spectrometer

Publications (3)

Publication Number Publication Date
JP2017532744A JP2017532744A (ja) 2017-11-02
JP2017532744A5 JP2017532744A5 (enExample) 2018-11-22
JP6879908B2 true JP6879908B2 (ja) 2021-06-02

Family

ID=55747202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017519876A Active JP6879908B2 (ja) 2014-10-13 2015-10-13 二次イオン質量分析計のためのセシウム一次イオン源

Country Status (6)

Country Link
US (1) US9941089B2 (enExample)
EP (1) EP3207636B1 (enExample)
JP (1) JP6879908B2 (enExample)
KR (1) KR102518443B1 (enExample)
CN (1) CN107210749B (enExample)
WO (1) WO2016061057A1 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10672602B2 (en) * 2014-10-13 2020-06-02 Arizona Board Of Regents On Behalf Of Arizona State University Cesium primary ion source for secondary ion mass spectrometer
US20190019662A1 (en) * 2017-07-14 2019-01-17 Purdue Research Foundation Electrophoretic mass spectrometry probes and systems and uses thereof
CN110504154B (zh) * 2018-11-25 2020-09-22 中国科学院大连化学物理研究所 一种高气密性离子迁移管
CN109360781B (zh) * 2018-11-29 2019-11-26 清华大学深圳研究生院 二次电喷雾离子源装置及质谱检测设备
US11705321B2 (en) * 2019-06-12 2023-07-18 Topanga Asia Limited Electrodeless plasma lamps, transmission lines and radio frequency systems
CN110444463B (zh) * 2019-08-12 2020-11-10 电子科技大学 一种微电流铯离子源
US11170973B2 (en) 2019-10-09 2021-11-09 Applied Materials, Inc. Temperature control for insertable target holder for solid dopant materials
US11289299B2 (en) 2019-10-24 2022-03-29 Arizona Board Of Regents On Behalf Of Arizona State University Duoplasmatron ion source with a partially ferromagnetic anode
US10957509B1 (en) * 2019-11-07 2021-03-23 Applied Materials, Inc. Insertable target holder for improved stability and performance for solid dopant materials
CN110967962B (zh) * 2019-11-26 2021-04-06 北京无线电计量测试研究所 一种铯炉的电击穿系统和方法
US11031205B1 (en) * 2020-02-04 2021-06-08 Georg-August-Universität Göttingen Stiftung Öffentlichen Rechts, Universitätsmedizin Device for generating negative ions by impinging positive ions on a target
US11854760B2 (en) 2021-06-21 2023-12-26 Applied Materials, Inc. Crucible design for liquid metal in an ion source

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JPS5069571U (enExample) * 1973-10-25 1975-06-20
US3967115A (en) * 1974-10-09 1976-06-29 Frequency & Time Systems, Inc. Atomic beam tube
JPS5846091B2 (ja) * 1977-11-02 1983-10-14 富士通株式会社 粒子ビ−ム装置
JPS5794159U (enExample) * 1980-12-01 1982-06-10
JPS5838906B2 (ja) * 1981-09-03 1983-08-26 日本電子株式会社 金属イオン源
JPS58192249A (ja) * 1982-05-07 1983-11-09 Hitachi Ltd 高周波誘導加熱型液体金属イオン源
JPS5966031A (ja) * 1982-10-07 1984-04-14 Ulvac Corp 高輝度表面電離型イオン源およびその製造法
US4617203A (en) 1985-04-08 1986-10-14 Hughes Aircraft Company Preparation of liquid metal source structures for use in ion beam evaporation of boron-containing alloys
US4791273A (en) * 1987-05-15 1988-12-13 Varian Associates, Inc. Vaporizer system for ion source
DE3739253A1 (de) * 1987-11-19 1989-06-01 Max Planck Gesellschaft Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen
GB2213636B (en) * 1988-01-07 1993-01-27 Toshiba Kk Apparatus for introducing samples into an inductively coupled,plasma source mass spectrometer
IT1238337B (it) * 1990-01-23 1993-07-12 Cons Ric Microelettronica Dispositivo per la ionizzazione di metalli ad alta temperatura di fusione, utilizzabile su impiantatori ionici del tipo impiegante sorgenti di ioni di tipo freeman o assimilabili
FR2722333B1 (fr) * 1994-07-07 1996-09-13 Rech Scient Snrs Centre Nat De Source d'ions de metaux liquides
AU2002950505A0 (en) * 2002-07-31 2002-09-12 Varian Australia Pty Ltd Mass spectrometry apparatus and method
JP4177645B2 (ja) * 2002-11-14 2008-11-05 エスアイアイ・ナノテクノロジー株式会社 マイクロキャピラリー型Ｇａ液体金属イオン源
JP2004281213A (ja) * 2003-03-14 2004-10-07 Nec Kyushu Ltd イオン源用オーブン
JP4359131B2 (ja) * 2003-12-08 2009-11-04 株式会社日立ハイテクノロジーズ 液体金属イオン銃、及びイオンビーム装置
CN1828818A (zh) * 2004-10-15 2006-09-06 安捷伦科技有限公司 用于增强离子产生的装置和方法
US7235796B2 (en) * 2004-11-24 2007-06-26 Technion Research & Development Foundation Ltd. Method and apparatus for the generation of anionic and neutral particulate beams and a system using same
EP1979925A2 (en) * 2006-01-13 2008-10-15 Technion Research And Development Foundation, Ltd. Method and apparatus for generating ion beam
CN200997383Y (zh) * 2006-06-20 2007-12-26 周振 大气压离子源接口
JP5296341B2 (ja) * 2006-07-14 2013-09-25 ティーイーエル・エピオン・インコーポレーテッド ガスクラスターイオンビーム加工装置における粒子汚染を低減するための装置および方法
CN201465988U (zh) * 2009-06-04 2010-05-12 北京大学 质谱离子传输管外延长接口装置
CN203631482U (zh) * 2013-12-09 2014-06-04 中芯国际集成电路制造(北京)有限公司 离子源及离子注入机

Also Published As

Publication number Publication date
KR20170117364A (ko) 2017-10-23
CN107210749A (zh) 2017-09-26
US20170309433A1 (en) 2017-10-26
EP3207636A4 (en) 2018-10-31
EP3207636A1 (en) 2017-08-23
EP3207636B1 (en) 2019-12-04
US9941089B2 (en) 2018-04-10
JP2017532744A (ja) 2017-11-02
WO2016061057A1 (en) 2016-04-21
KR102518443B1 (ko) 2023-04-06
CN107210749B (zh) 2021-03-19

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