JP6871763B2 - 中空糸膜装置の清浄度の評価方法、洗浄方法及び中空糸膜装置の洗浄装置 - Google Patents
中空糸膜装置の清浄度の評価方法、洗浄方法及び中空糸膜装置の洗浄装置 Download PDFInfo
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
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Description
限外ろ過膜装置10の透過水は液体供給配管25及び液体供給管37を通ってろ過器本体32の内部空間34に流入する。透過水は遠心力によって両側の第1のろ過膜35に押し付けられ、第1のろ過膜35でろ過される。透過水はろ過され、第1のろ過膜35の半径方向外側の空間に達し、ろ過水としてチャンバ33の外部に排出される。ろ過水の排水配管(図示せず)には積算流量計(図示せず)が設けられており、排水されたろ過水の積算量が測定される。第1のろ過膜35には微粒子が捕捉される。
10 限外ろ過膜装置
12 ハウジング
13 中空糸膜
21 洗浄装置
22 洗浄水の供給ライン
23 第1の出口ライン
24 第2の出口ライン
25 液体供給配管
31 遠心ろ過器
32 ろ過器本体
35 第1のろ過膜
35’ 第2のろ過膜
Claims (9)
- 超純水製造装置に設置される前の中空糸膜装置を透過した超純水の透過水中の微粒子を第1のろ過膜で捕捉することと、
前記第1のろ過膜に捕捉された微粒子を分析することと、を有し、
前記第1のろ過膜の孔径は、前記第1のろ過膜より孔径の小さい第2のろ過膜に捕捉された微粒子の粒径の最頻値と同程度であり、前記第2のろ過膜に捕捉された微粒子は、前記中空糸膜装置と同型式の評価用中空糸膜装置に通水した超純水の、前記評価用中空糸膜装置を透過した透過水に含まれる微粒子である、中空糸膜装置の清浄度の評価方法。 - 前記第1のろ過膜の孔径は30nm以上である、請求項1に記載の方法。
- 前記評価用中空糸膜装置に超純水を通水し、前記透過水中の微粒子を前記第2のろ過膜で捕捉することと、
前記第2のろ過膜に捕捉された微粒子の粒径分布を求めることと、
前記粒径分布から粒径の最頻値を求めることと、を有する、請求項1または2に記載の方法。 - 前記第1のろ過膜に捕捉された微粒子を分析することは、前記微粒子を走査型電子顕微鏡で観察するとともに、前記透過水の単位容積あたりの前記微粒子の数を前記走査型電子顕微鏡によって計測することを含む、請求項1から3のいずれか1項に記載の方法。
- 前記第1のろ過膜に捕捉された微粒子を分析することは、前記微粒子の成分をエネルギー分散型X線分析法または電子エネルギー損失分光法によって解析することを含む、請求項1から4のいずれか1項に記載の方法。
- 前記中空糸膜装置は超純水製造装置の最後段に設置される限外ろ過膜装置である、請求項1から5のいずれか1項に記載の方法。
- 前記超純水製造装置に設置される前の前記中空糸膜装置に超純水を通水して、前記中空糸膜装置を洗浄することと、
請求項1から6のいずれか1項に記載の方法に従って前記中空糸膜装置を評価することと、を有する中空糸膜装置の洗浄方法。 - 超純水製造装置に設置される前の中空糸膜装置に通水し、前記中空糸膜装置を洗浄する洗浄機構と、
前記中空糸膜装置の透過水を収集し、前記透過水に含まれる微粒子を捕捉する第1のろ過膜が装着可能な微粒子捕捉機構と、を有し、
前記第1のろ過膜の孔径は、前記第1のろ過膜より孔径の小さい第2のろ過膜に捕捉された微粒子の粒径の最頻値と同程度であり、前記第2のろ過膜に捕捉された微粒子は、前記中空糸膜装置と同型式の評価用中空糸膜装置に通水した超純水の、前記評価用中空糸膜装置を透過した透過水に含まれる微粒子である、中空糸膜装置の洗浄装置。 - 前記微粒子捕捉機構は遠心ろ過器を含む、請求項8に記載の中空糸膜装置の洗浄装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017044836A JP6871763B2 (ja) | 2017-03-09 | 2017-03-09 | 中空糸膜装置の清浄度の評価方法、洗浄方法及び中空糸膜装置の洗浄装置 |
US16/491,989 US11351507B2 (en) | 2017-03-09 | 2018-02-08 | Method of evaluating level of cleanliness of hollow fiber membrane device, method of washing hollow fiber membrane device, and washing device for hollow fiber membrane device |
PCT/JP2018/004393 WO2018163705A1 (ja) | 2017-03-09 | 2018-02-08 | 中空糸膜装置の清浄度の評価方法、洗浄方法及び中空糸膜装置の洗浄装置 |
KR1020197029151A KR102276965B1 (ko) | 2017-03-09 | 2018-02-08 | 중공사막장치의 청정도의 평가방법, 세정방법 및 중공사막장치의 세정장치 |
CN201880016129.8A CN110382092B (zh) | 2017-03-09 | 2018-02-08 | 评价中空纤维膜装置的清洁度水平的方法、洗涤中空纤维膜装置的方法和用于中空纤维膜装置的洗涤装置 |
TW107106921A TWI762594B (zh) | 2017-03-09 | 2018-03-02 | 中空纖維薄膜裝置之潔淨度的評估方法、清洗方法及中空纖維薄膜裝置之清洗裝置 |
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