JP6867429B2 - 金属ケイ素化合物層を形成する方法及びそこから形成された金属ケイ素化合物層 - Google Patents
金属ケイ素化合物層を形成する方法及びそこから形成された金属ケイ素化合物層 Download PDFInfo
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- JP6867429B2 JP6867429B2 JP2019073230A JP2019073230A JP6867429B2 JP 6867429 B2 JP6867429 B2 JP 6867429B2 JP 2019073230 A JP2019073230 A JP 2019073230A JP 2019073230 A JP2019073230 A JP 2019073230A JP 6867429 B2 JP6867429 B2 JP 6867429B2
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- 238000000034 method Methods 0.000 title claims description 55
- 239000000758 substrate Substances 0.000 claims description 95
- 229910052751 metal Inorganic materials 0.000 claims description 65
- 239000002184 metal Substances 0.000 claims description 65
- 229910052710 silicon Inorganic materials 0.000 claims description 62
- 239000010703 silicon Substances 0.000 claims description 62
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 57
- 238000000137 annealing Methods 0.000 claims description 42
- 238000004544 sputter deposition Methods 0.000 claims description 30
- 238000000151 deposition Methods 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 13
- 238000002161 passivation Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 150000003377 silicon compounds Chemical class 0.000 claims description 9
- 229910021471 metal-silicon alloy Inorganic materials 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 7
- -1 nickel monosilicon compound Chemical class 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910021484 silicon-nickel alloy Inorganic materials 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 229910005883 NiSi Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 description 31
- 238000005240 physical vapour deposition Methods 0.000 description 25
- 239000000463 material Substances 0.000 description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 8
- 150000003961 organosilicon compounds Chemical class 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000005452 bending Methods 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- PEUPIGGLJVUNEU-UHFFFAOYSA-N nickel silicon Chemical compound [Si].[Ni] PEUPIGGLJVUNEU-UHFFFAOYSA-N 0.000 description 4
- 229910000676 Si alloy Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 238000005477 sputtering target Methods 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 239000012809 cooling fluid Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 238000003746 solid phase reaction Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- VLJQDHDVZJXNQL-UHFFFAOYSA-N 4-methyl-n-(oxomethylidene)benzenesulfonamide Chemical compound CC1=CC=C(S(=O)(=O)N=C=O)C=C1 VLJQDHDVZJXNQL-UHFFFAOYSA-N 0.000 description 1
- 229910001339 C alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910019001 CoSi Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010041 TiAlC Inorganic materials 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001803 electron scattering Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910021340 platinum monosilicide Inorganic materials 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28194—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation by deposition, e.g. evaporation, ALD, CVD, sputtering, laser deposition
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0682—Silicides
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
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- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
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- H01L21/28035—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities
- H01L21/28044—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer
- H01L21/28052—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer the conductor comprising a silicide layer formed by the silicidation reaction of silicon with a metal layer
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- H01L21/28061—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer the conductor comprising a metal or metal silicide formed by deposition, e.g. sputter deposition, i.e. without a silicidation reaction
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Description
101 側壁
102 チャンバリッド
103 チャンバベース
104 処理空間
105 基板支持体
106 可動支持シャフト
108 開口部
109 カソード
110 ターゲットアセンブリ
111 カソードハウジング
112 ハウジング空間
113 磁石アセンブリ
114 スパッタリングターゲット
115 ターゲットバッキング板
116 回転可能シャフト
117 電源
120 ベローズ
200 アニールチャンバ
201 チャンバ本体
202 処理空間
203 基板支持体
204 抵抗加熱器
205 高圧ガス源
206a バルブ
206b バルブ
300 方法
301 動作
302 動作
303 動作
304 動作
310 方法
311 動作
312 動作
313 動作
400 基板
400a パターン形成された基板
400b パターン形成された基板
401 基板
402 誘電体層
403 開口部
404a 金属とケイ素の層
404b 金属ケイ素化合物層
405 パッシベーション層
Claims (9)
- 基板を処理する方法であって、
基板の上に金属とケイ素の層を形成することであって、
第1の処理チャンバの処理空間である第1の処理空間に、第1のスパッタリングガスを流入させることと、
前記第1の処理空間に配置された第1のターゲットに電力を印加することであって、前記第1のターゲットが金属−ケイ素合金を含み、そのスパッタリング面が、10°から50°の間で基板の表面に対して傾斜する、電力を印加することと、
前記第1のターゲットの前記スパッタリング面に近接した領域に第1のプラズマを形成することと、
前記基板の前記表面に前記金属とケイ素の層を堆積することと
を含む、金属とケイ素の層を形成すること、および
第2の処理チャンバの処理空間である第2の処理空間の中で、前記金属とケイ素の層をアニーリングすることであって、
その内部に供給された加圧ガスを用いて、前記第2の処理空間を大気圧の1倍を上回る圧力まで加圧することと、
前記基板を400℃以下のアニール温度まで加熱することと、
前記基板を30秒以上の間、前記アニール温度で維持することと
を含む、前記金属とケイ素の層をアニーリングすること、
を含む方法。 - 前記金属−ケイ素合金の金属が、Ti、Ni、Pt、Co、又はそれらの組み合わせである、請求項1に記載の方法。
- 前記金属−ケイ素合金が、NiXSi(1−X)の原子組成を有する非結晶性のニッケル−ケイ素合金であり、Xが0.4から0.6の間である、請求項2に記載の方法。
- 前記基板が、その中に形成された複数の開口部を有する誘電体層を含み、前記基板の上に前記金属とケイ素の層を堆積することが、複数のNiSi相互結合を形成するために、前記複数の開口部の中に前記金属とケイ素の層を堆積することを含む、請求項3に記載の方法。
- 前記第1のターゲットの直径が、200mm以下である、請求項1から4のいずれか一項に記載の方法。
- 前記金属とケイ素の層の上に、金属酸化物、金属窒化物、酸化ケイ素、窒化ケイ素、又はそれらの組み合わせのうちの1つを含むパッシベーション層を堆積することを更に含む、請求項1から5のいずれか一項に記載の方法。
- デバイス製造方法であって、
その上に配置された誘電体層の中に形成された複数の開口部を有する、パターン形成された基板を提供することと、
前記複数の開口部の中に結晶性の金属ケイ素化合物を配置することと
を含み、
前記結晶性の金属ケイ素化合物を配置することが、
前記複数の開口部の中にかつ前記誘電体層のフィールド面の上に金属とケイ素の層を形成することであって、
前記パターン形成された基板が配置された第1の処理チャンバの処理空間である第1の処理空間に、第1のスパッタリングガスを流入させることと、
前記第1の処理空間に配置された第1のターゲットに電力を印加することであって、前記第1のターゲットが金属−ケイ素合金を含み、そのスパッタリング面が、10°から50°の間で前記基板の表面に対して傾斜する、電力を印加することと、
前記第1のターゲットの前記スパッタリング面に近接した領域に第1のプラズマを形成することと、
前記複数の開口部の中にかつ前記誘電体層の前記フィールド面の上に前記金属とケイ素の層を堆積することと
を含む、金属とケイ素の層を形成すること、および
第2の処理チャンバの処理空間である第2の処理空間の中で、前記金属とケイ素の層をアニーリングすることであって、
その内部に供給された加圧ガスを用いて、前記第2の処理空間を大気圧の1倍を上回る圧力まで加圧することと、
前記基板を400℃以下のアニール温度まで加熱することと、
前記基板を30秒以上の間、前記アニール温度で維持することと
を含む、前記金属とケイ素の層をアニーリングすること、
を含む、デバイス製造方法。 - 前記複数の開口部の中に配置された前記結晶性の金属ケイ素化合物の個々の要素が、20nm未満の幅と、前記幅の2倍以上の高さとを有するものとされる、請求項7に記載のデバイス製造方法。
- 前記複数の開口部の中に配置された前記結晶性の金属ケイ素化合物は、ニッケルモノケイ素化合物であり、かつ200μohm−cm以下の抵抗を有するものとされる、請求項7または8に記載のデバイス製造方法。
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