JP6855853B2 - 物理量センサー、物理量センサーデバイス、電子機器および移動体 - Google Patents
物理量センサー、物理量センサーデバイス、電子機器および移動体 Download PDFInfo
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- JP6855853B2 JP6855853B2 JP2017050215A JP2017050215A JP6855853B2 JP 6855853 B2 JP6855853 B2 JP 6855853B2 JP 2017050215 A JP2017050215 A JP 2017050215A JP 2017050215 A JP2017050215 A JP 2017050215A JP 6855853 B2 JP6855853 B2 JP 6855853B2
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- drive
- spring portion
- physical quantity
- quantity sensor
- suspension spring
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- 239000008103 glucose Substances 0.000 description 1
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
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- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/60—Other road transportation technologies with climate change mitigation effect
- Y02T10/62—Hybrid vehicles
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- Gyroscopes (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017050215A JP6855853B2 (ja) | 2017-03-15 | 2017-03-15 | 物理量センサー、物理量センサーデバイス、電子機器および移動体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017050215A JP6855853B2 (ja) | 2017-03-15 | 2017-03-15 | 物理量センサー、物理量センサーデバイス、電子機器および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018155501A JP2018155501A (ja) | 2018-10-04 |
| JP2018155501A5 JP2018155501A5 (enExample) | 2020-03-05 |
| JP6855853B2 true JP6855853B2 (ja) | 2021-04-07 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017050215A Active JP6855853B2 (ja) | 2017-03-15 | 2017-03-15 | 物理量センサー、物理量センサーデバイス、電子機器および移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6855853B2 (enExample) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007271514A (ja) * | 2006-03-31 | 2007-10-18 | Mitsubishi Electric Corp | 角速度センサ |
| JP2016099269A (ja) * | 2014-11-25 | 2016-05-30 | セイコーエプソン株式会社 | ジャイロセンサー、電子機器、および移動体 |
-
2017
- 2017-03-15 JP JP2017050215A patent/JP6855853B2/ja active Active
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| Publication number | Publication date |
|---|---|
| JP2018155501A (ja) | 2018-10-04 |
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