JP6848640B2 - 走査型プローブ顕微鏡 - Google Patents

走査型プローブ顕微鏡 Download PDF

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Publication number
JP6848640B2
JP6848640B2 JP2017081170A JP2017081170A JP6848640B2 JP 6848640 B2 JP6848640 B2 JP 6848640B2 JP 2017081170 A JP2017081170 A JP 2017081170A JP 2017081170 A JP2017081170 A JP 2017081170A JP 6848640 B2 JP6848640 B2 JP 6848640B2
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Japan
Prior art keywords
sample
sample surface
initial position
cantilever
probe
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JP2017081170A
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English (en)
Japanese (ja)
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JP2018179824A (ja
JP2018179824A5 (https=
Inventor
大田　昌弘
昌弘 大田
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Shimadzu Corp
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Shimadzu Corp
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Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2017081170A priority Critical patent/JP6848640B2/ja
Priority to US15/938,185 priority patent/US10802044B2/en
Priority to CN201810324335.7A priority patent/CN108732386B/zh
Publication of JP2018179824A publication Critical patent/JP2018179824A/ja
Publication of JP2018179824A5 publication Critical patent/JP2018179824A5/ja
Application granted granted Critical
Publication of JP6848640B2 publication Critical patent/JP6848640B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2017081170A 2017-04-17 2017-04-17 走査型プローブ顕微鏡 Active JP6848640B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017081170A JP6848640B2 (ja) 2017-04-17 2017-04-17 走査型プローブ顕微鏡
US15/938,185 US10802044B2 (en) 2017-04-17 2018-03-28 Scanning probe microscope
CN201810324335.7A CN108732386B (zh) 2017-04-17 2018-04-12 扫描型探针显微镜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017081170A JP6848640B2 (ja) 2017-04-17 2017-04-17 走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JP2018179824A JP2018179824A (ja) 2018-11-15
JP2018179824A5 JP2018179824A5 (https=) 2019-09-12
JP6848640B2 true JP6848640B2 (ja) 2021-03-24

Family

ID=63790541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017081170A Active JP6848640B2 (ja) 2017-04-17 2017-04-17 走査型プローブ顕微鏡

Country Status (3)

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US (1) US10802044B2 (https=)
JP (1) JP6848640B2 (https=)
CN (1) CN108732386B (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6631739B1 (ja) * 2019-04-04 2020-01-15 株式会社島津製作所 表面分析装置
JP7310717B2 (ja) * 2020-05-27 2023-07-19 株式会社島津製作所 表面分析装置
JP7639934B2 (ja) * 2021-11-08 2025-03-05 株式会社島津製作所 走査型プローブ顕微鏡

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5237859A (en) * 1989-12-08 1993-08-24 Digital Instruments, Inc. Atomic force microscope
JPH10206433A (ja) * 1997-01-23 1998-08-07 Olympus Optical Co Ltd 走査型プローブ顕微鏡
JP4098921B2 (ja) * 1999-05-19 2008-06-11 日立建機株式会社 走査型プローブ顕微鏡の探針押付け力設定方法
JP4489869B2 (ja) * 1999-06-04 2010-06-23 株式会社島津製作所 走査型プローブ顕微鏡
JP3883790B2 (ja) * 1999-12-08 2007-02-21 エスアイアイ・ナノテクノロジー株式会社 走査型原子間力顕微鏡
JP2002031589A (ja) * 2000-07-14 2002-01-31 Shimadzu Corp 走査型プローブ顕微鏡
JP2005257420A (ja) * 2004-03-11 2005-09-22 Sii Nanotechnology Inc 走査型プローブ顕微鏡
JP2005283433A (ja) 2004-03-30 2005-10-13 Canon Inc 試料と相互作用する探針を有するプローブ、該プローブの製造方法、該プローブを用いた分子間の相互作用の測定方法及び測定装置
JP2007085764A (ja) * 2005-09-20 2007-04-05 Hitachi Kenki Fine Tech Co Ltd 走査型プローブ顕微鏡の探針制御方法
JP2007309919A (ja) * 2006-04-20 2007-11-29 Hitachi Kenki Fine Tech Co Ltd 走査プローブ顕微鏡
JP4873460B2 (ja) * 2006-05-25 2012-02-08 株式会社島津製作所 探針位置制御装置
WO2008083694A1 (de) * 2006-12-28 2008-07-17 Nambition Gmbh Vorrichtung und verfahren zur untersuchung biologischer systeme sowie festkörpersysteme
JP2009150696A (ja) * 2007-12-19 2009-07-09 Hitachi Kenki Fine Tech Co Ltd 走査プローブ顕微鏡
US8342867B2 (en) * 2009-12-01 2013-01-01 Raytheon Company Free floating connector engagement and retention system and method for establishing a temporary electrical connection
JP6116579B2 (ja) * 2011-12-12 2017-04-19 ウニヴェルズィテート バーゼル 走査型プローブ顕微鏡制御方法及び走査型プローブ顕微鏡装置
WO2014090971A1 (en) * 2012-12-12 2014-06-19 Universität Basel Method and device for controlling a scanning probe microscope
CN104345739A (zh) * 2013-07-25 2015-02-11 中国科学院沈阳自动化研究所 原子力显微镜针尖基底微小距离控制方法
WO2015085316A1 (en) * 2013-12-07 2015-06-11 Bruker Nano, Inc. Force measurement with real-time baseline determination
WO2017042946A1 (ja) * 2015-09-11 2017-03-16 株式会社島津製作所 走査型プローブ顕微鏡
JP2017181135A (ja) * 2016-03-29 2017-10-05 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡及びそのプローブ接触検出方法

Also Published As

Publication number Publication date
CN108732386B (zh) 2021-03-02
US10802044B2 (en) 2020-10-13
JP2018179824A (ja) 2018-11-15
US20180299480A1 (en) 2018-10-18
CN108732386A (zh) 2018-11-02

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