JP6834207B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP6834207B2 JP6834207B2 JP2016138837A JP2016138837A JP6834207B2 JP 6834207 B2 JP6834207 B2 JP 6834207B2 JP 2016138837 A JP2016138837 A JP 2016138837A JP 2016138837 A JP2016138837 A JP 2016138837A JP 6834207 B2 JP6834207 B2 JP 6834207B2
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- protective film
- manufacturing
- nitride semiconductor
- semiconductor layer
- film
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- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
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Description
[先行技術文献]
[特許文献]
[特許文献1] 特開平08−186332号公報
[特許文献2] 特許第2540791号公報
[特許文献3] 特開2013−149979号公報
[非特許文献]
[非特許文献1] J.C.Zolper et al.,"Sputtered AlN encapsulant for high‐temperature annealing of GaN",Applied Physics Letters,Volume 69,Issue 4,538,22 July 1996
[非特許文献2] X.A.Cao et al.,"Ultrahigh Si+ implant activation efficiency in GaN using a high‐temperature rapid thermal process system",Applied Physics Letters,Volume 73,Issue 2,229,13 July 1998
[非特許文献3] C.E.Hager IV et al.,"Activation of ion implanted Si in GaN using a dual AlN annealing cap",Journal of Applied Physics,Volume 105,Issue 3,033713,February 2009
Claims (11)
- 窒化物半導体層を有する半導体装置の製造方法であって、
前記窒化物半導体層に対するn型またはp型不純物を前記窒化物半導体層の予め定められた領域に注入する段階と、
少なくとも前記予め定められた領域上に直接接する窒化物の第1の保護膜を原子層堆積法により形成する段階と、
前記原子層堆積法とは異なる方法により、前記第1の保護膜上に直接接し、前記第1の保護膜よりも厚い第2の保護膜を形成する段階と、
前記窒化物半導体層、前記第1の保護膜および前記第2の保護膜を1300℃以上の温度でアニールする段階と
を備え、
前記第2の保護膜は、スパッタリング法で成膜される、
半導体装置の製造方法。 - 前記第1の保護膜を前記原子層堆積法により形成する段階においては、
アルミニウム原子含有ガスまたはシリコン原子含有ガスと窒素原子含有ガスとを交互に前記窒化物半導体層上に供給することにより、窒化アルミニウムまたは窒化シリコンを有する前記第1の保護膜を形成する
請求項1に記載の半導体装置の製造方法。 - 前記第1の保護膜を前記原子層堆積法により形成する段階において、前記窒化物半導体層の温度は600℃以下である
請求項1または2に記載の半導体装置の製造方法。 - 前記第1の保護膜を前記原子層堆積法により形成する段階において、前記窒化物半導体層の温度は300℃以上である
請求項1から3のいずれか一項に記載の半導体装置の製造方法。 - 前記第1の保護膜は、2nm以上100nm以下の厚みを有する
請求項1から4のいずれか一項に記載の半導体装置の製造方法。 - 前記第1の保護膜を前記原子層堆積法により形成する段階は、
(a)前記窒化物半導体層上にトリメチルアルミニウムを供給する段階と、
(b)前記窒化物半導体層が載置された反応チャンバを排気する段階と、
(c)前記窒化物半導体層上に、窒素を有するガスのプラズマを照射する段階と、
(d)前記反応チャンバを排気する段階と
を有し、
(a)から(d)の1サイクルを複数回繰り返すことにより、前記第1の保護膜を形成する
請求項1から5のいずれか一項に記載の半導体装置の製造方法。 - 前記窒化物半導体層は、ゲート絶縁膜およびゲート電極が設けられるトレンチを有し、
前記第1の保護膜は、前記トレンチの底部および側部を被覆して設けられる
請求項1から6のいずれか一項に記載の半導体装置の製造方法。 - 前記注入する段階は、前記第1の保護膜を前記原子層堆積法により形成する段階の後に、前記p型不純物を前記予め定められた領域に注入することを含む
請求項1から7のいずれか一項に記載の半導体装置の製造方法。 - 前記注入する段階は、前記p型不純物を前記予め定められた領域に注入する前に、前記窒化物半導体層に対するn型不純物を前記窒化物半導体層の予め定められた他の領域に注入することを含み、
前記n型不純物を注入する段階の前に、前記予め定められた他の領域上に直接接して、シリコンおよび酸素の一種類以上を含む第3の保護膜を形成する段階をさらに備え、
前記第3の保護膜を除去した後に、前記第1の保護膜を前記原子層堆積法により形成する
請求項8に記載の半導体装置の製造方法。 - 前記第2の保護膜は、前記第1の保護膜よりも耐熱性の高い材料を有する、請求項1から9のいずれか一項に記載の半導体装置の製造方法。
- 前記第1の保護膜を前記原子層堆積法により形成する段階において、反応チャンバに残留する酸素との反応を低減すべく、前記窒化物半導体層の温度は300℃以上に加熱される、請求項1から10のいずれか一項に記載の半導体装置の製造方法。
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CN108962995A (zh) * | 2018-07-17 | 2018-12-07 | 深圳大学 | 复合GaN基膜和MOSFET器件 |
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