JP6805801B2 - 圧電素子及び圧電素子応用デバイス - Google Patents
圧電素子及び圧電素子応用デバイス Download PDFInfo
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- JP6805801B2 JP6805801B2 JP2016245876A JP2016245876A JP6805801B2 JP 6805801 B2 JP6805801 B2 JP 6805801B2 JP 2016245876 A JP2016245876 A JP 2016245876A JP 2016245876 A JP2016245876 A JP 2016245876A JP 6805801 B2 JP6805801 B2 JP 6805801B2
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- piezoelectric
- electrode
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- 229910052700 potassium Inorganic materials 0.000 claims description 19
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
- H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
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Description
かかる態様によれば、リーク電流量が良好であり高い絶縁性を有していることから、層の結晶配向性が向上し、また、圧電体層の結晶配向性を向上させることによって、エンジニアード・ドメイン構造が得られやすくなり、圧電特性を向上させることが可能となる。
これによれば、リーク特性の良好な圧電素子を得ることが可能となる。
(KX,Na(1−X))(Nb(1−y),Mny)O3 ・・・(1)
(前記式(1)中において、xは、0.1≦x≦0.9、好ましくは0.3≦x≦0.7、より好ましくは0.4≦x≦0.6であり、yは、0.003≦y≦0.02、好ましくは、0.005≦y≦0.01である。)
これによれば、圧電特性に優れた圧電素子を得ることが可能となる。
かかる態様によれば、機能的に優れたデバイスを提供することが可能となる。
まず、液体噴射装置の一例であるインクジェット式記録装置について、図1を参照して説明する。
(KX,Na(1−X))(Nb(1−y),Mny)O3 ・・・(2)
(KaX,Naa(1−X))(Nb(1−y),Mny)O3 ・・(3)
まず、6インチの(100)面のシリコン単結晶基板(Si基板)(基板10)を熱酸化することで、当該Si基板の表面にSiO2膜(弾性膜51)を形成した。SiO2膜上にジルコニウム膜をスパッタリング法によって成膜し、ジルコニウム膜を熱酸化することで、ZnO2膜(絶縁体膜52)を形成した。次いで、ZnO2膜上に、RFマグネトロンスパッタ法により、Ti膜を形成し、当該Ti膜を熱酸化することで、TiOX膜(密着層56)を形成した。次いで、TiOX膜上に、RFマグネトロンスパッタ法により、Pt膜(第1電極60)を形成した。
(K0.416Na0.624)(Nb0.995Mn0.005)O3 ・・(4)
下記式(5)の組成のペロブスカイト型複合酸化物層を形成したこと以外はサンプル1と同様にしてサンプル2を得た。
(K0.4Na0.6)(Nb0.995Mn0.005)O3 ・・・(5)
サンプル1及びサンプル2について、サーモフィッシャーサイエンティフィック(Thermo Fisher Scientific)社製「ESCALAB250」を用い、X線光電子分光(XPS)を測定し、X線源にはスポット径500μm2のAl−Kα線を用いて帯電補正のため電子銃照射した状態で評価した。
サンプル1について、X線回折(XRD)を、ブルカー・エイエックスエス(Bruker AXS)社製「D8 Discover」を用い、線源はCuKα、検出器は2次元検出器(GADDS)を使用して測定した。
下記表2の組成のペロブスカイト型複合酸化物層を形成したこと以外はサンプル1と同様にしてサンプル3〜サンプル8をそれぞれ得た。また、サンプル1と同様にして、サンプル3〜サンプル8についてX線光電子分光(XPS)を測定し、表面組成及びMnの価数を算出し、その結果を下記表2に示した。なお、表2には、サンプル3〜サンプル8のリーク電流量(A/cm2)を測定した結果についても併記した。
上記実施形態1では、圧電素子応用デバイスの一例として、液体噴射装置に搭載される液体噴射ヘッドを挙げて説明したが、本発明の適用範囲はこれに限定されるものではない。また、液体噴射ヘッドの一例としてインクジェット式記録ヘッドを挙げて説明したが、本発明は、インク以外の液体を噴射する液体噴射ヘッドにも勿論適用することができる。インク以外の液体を噴射する液体噴射ヘッドとしては、例えば、液晶ディスプレイ等のカラーフィルターの製造に用いられる色材噴射ヘッド、有機ELディスプレイ、FED(電界放出ディスプレイ)等の電極形成に用いられる電極材料噴射ヘッド、バイオチップの製造に用いられる生体有機物噴射ヘッド等が挙げられる。
Claims (3)
- 基板上に形成された第1電極と、
前記第1電極上に形成され、カリウム(K)、ナトリウム(Na)、ニオブ(Nb)及びマンガン(Mn)を含む一般式ABO 3 で表されるペロブスカイト構造の複合酸化物からなる圧電体層と、
前記圧電体層上に形成された第2電極と、を具備する圧電素子であって、
前記複合酸化物におけるAサイトの元素は、Bサイトの元素に対して過剰に添加され、その過剰量は4%以上6%未満であり、
前記マンガンは、2価のマンガン(Mn2+)と、3価のマンガン(Mn3+)と、4
価のマンガン(Mn4+)とを含み、
前記3価のマンガンと前記4価のマンガンとの和に対する前記2価のマンガンのモル比(Mn2+/(Mn3++Mn4+))が1以上2.29未満であり、
且つ、前記ナトリウムに対する前記カリウムのモル比(K/Na)が0.8以上1.1未満であることを特徴とする圧電素子。 - 前記ペロブスカイト構造の複合酸化物は、下記式(1)で表されるものであることを特徴とする請求項1に記載の圧電素子。
(KX,Na(1−X))(Nb(1−y),Mny)O3 ・・・(1)
(前記式(1)中において、xは、0.1≦x≦0.9、好ましくは0.3≦x≦0.7、より好ましくは0.4≦x≦0.6であり、yは、0.003≦y≦0.02、好ましくは、0.005≦y≦0.01である。) - 請求項1又は請求項2の何れか一項に記載の圧電素子を具備することを特徴とする圧電素子応用デバイス。
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JP2016245876A JP6805801B2 (ja) | 2016-12-19 | 2016-12-19 | 圧電素子及び圧電素子応用デバイス |
CN201711094954.3A CN108206237A (zh) | 2016-12-19 | 2017-11-06 | 压电元件以及压电元件应用设备 |
EP17204674.0A EP3336912B1 (en) | 2016-12-19 | 2017-11-30 | Piezoelectric film element |
US15/834,280 US20180175277A1 (en) | 2016-12-19 | 2017-12-07 | Piezoelectric element and piezoelectric element device |
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- 2017-11-06 CN CN201711094954.3A patent/CN108206237A/zh active Pending
- 2017-11-30 EP EP17204674.0A patent/EP3336912B1/en active Active
- 2017-12-07 US US15/834,280 patent/US20180175277A1/en not_active Abandoned
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EP3336912B1 (en) | 2020-04-15 |
US20180175277A1 (en) | 2018-06-21 |
CN108206237A (zh) | 2018-06-26 |
JP2018101672A (ja) | 2018-06-28 |
EP3336912A1 (en) | 2018-06-20 |
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