JP6800815B2 - 半導体装置 - Google Patents
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- JP6800815B2 JP6800815B2 JP2017125211A JP2017125211A JP6800815B2 JP 6800815 B2 JP6800815 B2 JP 6800815B2 JP 2017125211 A JP2017125211 A JP 2017125211A JP 2017125211 A JP2017125211 A JP 2017125211A JP 6800815 B2 JP6800815 B2 JP 6800815B2
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- 239000004065 semiconductor Substances 0.000 title claims description 43
- 239000010410 layer Substances 0.000 claims description 146
- 238000009966 trimming Methods 0.000 claims description 39
- 239000011229 interlayer Substances 0.000 claims description 30
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 14
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 4
- 229920005591 polysilicon Polymers 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims description 3
- 230000010355 oscillation Effects 0.000 description 17
- 238000010586 diagram Methods 0.000 description 11
- 239000003990 capacitor Substances 0.000 description 7
- 230000007547 defect Effects 0.000 description 7
- 230000002950 deficient Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000012858 packaging process Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910016570 AlCu Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
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- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
- H01L23/49883—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials the conductive materials containing organic materials or pastes, e.g. for thick films
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- H01L27/0203—Particular design considerations for integrated circuits
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
- H03K3/01—Details
- H03K3/011—Modifications of generator to compensate for variations in physical values, e.g. voltage, temperature
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
- H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
- H03K3/353—Generators characterised by the type of circuit or by the means used for producing pulses by the use, as active elements, of field-effect transistors with internal or external positive feedback
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- H03K3/356104—Bistable circuits using complementary field-effect transistors
- H03K3/356113—Bistable circuits using complementary field-effect transistors using additional transistors in the input circuit
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Description
R=(k+1)×Rxy_lower+2k×Rz+k×Rxy_upper (数1)
これは、抵抗素子が上層導電層52で他素子と接続された場合の式である。同様に、下層導電層51で他素子と接続された場合には(数2)で表される。
R=k×Rxy_lower+2k×Rz+(k+1)×Rxy_upper (数2)
また、抵抗素子のZ方向成分が主抵抗とされるため、
Rz>Rxy_lower+Rxy_upper (数3)
(数3)の関係が成立するものとする。後述するように、配線層に形成されZ方向成分を主抵抗とする本実施例の抵抗素子はモールドパッケージプロセスによって半導体基板に生じる応力の影響をほとんど受けない。このため、本実施例の抵抗素子の配置位置には制限がなく、また、抵抗素子が所望の抵抗値になるよう下層導電層51、層間導電層53及び上層導電層52を直列接続すればよく、個々の導電層の配置や個数についても制限はない。
Claims (13)
- 半導体基板と、
前記半導体基板上に形成され、少なくとも第1の配線層及び第2の配線層を含む複数の配線層を有し、
前記複数の配線層において抵抗素子が形成されており、
前記抵抗素子は、前記第1の配線層に形成される第1導電層、前記第2の配線層に形成される第2導電層及び前記第1導電層と前記第2導電層とを接続する層間導電層の繰り返しパターンを有し、
前記第1の配線層において、前記第1導電層の長手方向を第1の方向とし、前記第1の方向と垂直な方向を第2の方向とするとき、前記抵抗素子に含まれる複数の前記層間導電層は、前記第1の方向及び前記第2の方向にマトリクス状に配列されている半導体装置。 - 請求項1において、
前記層間導電層の抵抗値は、前記第1導電層の抵抗値と前記第2導電層の抵抗値の和よりも大きい半導体装置。 - 請求項1において、
前記層間導電層は、前記第1導電層と前記第2導電層との間に形成される金属層もしくはポリシリコン層を含む半導体装置。 - 請求項1において、
前記複数の配線層は、前記第1の配線層と前記第2の配線層との間に第3の配線層を有し、
前記層間導電層は、前記第3の配線層に形成される台座と、前記第1導電層と前記台座とを接続する第1ビアと、前記第2導電層と前記台座とを接続する第2ビアとを有する半導体装置。 - 請求項4において、
前記第1ビア及び前記第2ビアは、TiN層にW層が埋め込まれた埋め込み層が形成されている半導体装置。 - 請求項1において、
前記抵抗素子に含まれる隣接する前記層間導電層同士は、半導体装置におけるビアの最小間隔で配置される半導体装置。 - 請求項1において、
複数の前記抵抗素子を用いたトリミング回路を有する半導体装置。 - 半導体基板と、
前記半導体基板上に形成される複数の配線層と、
前記複数の配線層において形成された抵抗素子を含むトリミング回路とを有し、
前記複数の配線層は、少なくとも第1の配線層及び第2の配線層を含み、
前記抵抗素子は、前記第1の配線層に形成される第1導電層、前記第2の配線層に形成される第2導電層及び前記第1導電層と前記第2導電層とを接続する層間導電層の繰り返しパターンを有し、
前記第1の配線層において、前記第1導電層の長手方向を第1の方向とし、前記第1の方向と垂直な方向を第2の方向とするとき、前記抵抗素子に含まれる複数の前記層間導電層は、前記第1の方向及び前記第2の方向にマトリクス状に配列されている半導体装置。 - 請求項8において、
前記トリミング回路は、直列接続される複数の前記抵抗素子と、複数の前記抵抗素子のそれぞれに対して並列に接続されるスイッチとを有する半導体装置。 - 請求項8において、
前記層間導電層の抵抗値は、前記第1導電層の抵抗値と前記第2導電層の抵抗値の和よりも大きい半導体装置。 - 請求項8において、
前記層間導電層は、前記第1導電層と前記第2導電層との間に形成される金属層もしくはポリシリコン層を含む半導体装置。 - 請求項8において、
前記複数の配線層は、前記第1の配線層と前記第2の配線層との間に第3の配線層を有し、
前記層間導電層は、前記第3の配線層に形成される台座と、前記第1導電層と前記台座とを接続する第1ビアと、前記第2導電層と前記台座とを接続する第2ビアとを有する半導体装置。 - 請求項8において、
前記抵抗素子に含まれる隣接する前記層間導電層同士は、半導体装置におけるビアの最小間隔で配置される半導体装置。
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JP2017125211A JP6800815B2 (ja) | 2017-06-27 | 2017-06-27 | 半導体装置 |
TW107118367A TWI805583B (zh) | 2017-06-27 | 2018-05-30 | 半導體裝置 |
US16/004,014 US10958250B2 (en) | 2017-06-27 | 2018-06-08 | Semiconductor device |
KR1020180065959A KR102536213B1 (ko) | 2017-06-27 | 2018-06-08 | 반도체 장치 |
EP18178761.5A EP3422406A1 (en) | 2017-06-27 | 2018-06-20 | Semiconductor device |
CN201820986413.5U CN208589437U (zh) | 2017-06-27 | 2018-06-25 | 半导体装置 |
CN201810662239.3A CN109148423A (zh) | 2017-06-27 | 2018-06-25 | 半导体装置 |
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JP7015754B2 (ja) * | 2018-08-30 | 2022-02-03 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US10796729B2 (en) * | 2019-02-05 | 2020-10-06 | Micron Technology, Inc. | Dynamic allocation of a capacitive component in a memory device |
CN109860154A (zh) * | 2019-03-01 | 2019-06-07 | 德淮半导体有限公司 | 电阻结构及其形成方法 |
JP7157027B2 (ja) * | 2019-09-12 | 2022-10-19 | 株式会社東芝 | 半導体装置 |
US11171086B2 (en) | 2019-12-02 | 2021-11-09 | Renesas Electronics Corporation | Semiconductor device |
JP7365925B2 (ja) * | 2020-02-17 | 2023-10-20 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US11901288B2 (en) | 2020-07-09 | 2024-02-13 | Renesas Electronics Corporation | Semiconductor device and method of manufacturing the same |
EP4145332A1 (en) | 2021-07-20 | 2023-03-08 | Changxin Memory Technologies, Inc. | Clock circuit, memory, and manufacturing method for semiconductor structure |
CN117916874A (zh) * | 2021-09-09 | 2024-04-19 | 株式会社索思未来 | 半导体集成电路装置 |
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JP2004040009A (ja) * | 2002-07-08 | 2004-02-05 | Renesas Technology Corp | 回路素子および半導体装置 |
JP5263469B2 (ja) * | 2007-05-07 | 2013-08-14 | セイコーエプソン株式会社 | 半導体装置 |
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JP6077240B2 (ja) * | 2012-08-21 | 2017-02-08 | ラピスセミコンダクタ株式会社 | 抵抗構造体、集積回路および抵抗構造体の製造方法 |
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US10958250B2 (en) | 2021-03-23 |
CN109148423A (zh) | 2019-01-04 |
JP2019009345A (ja) | 2019-01-17 |
US20180375497A1 (en) | 2018-12-27 |
TW201911473A (zh) | 2019-03-16 |
TWI805583B (zh) | 2023-06-21 |
EP3422406A1 (en) | 2019-01-02 |
KR102536213B1 (ko) | 2023-05-25 |
CN208589437U (zh) | 2019-03-08 |
KR20190001512A (ko) | 2019-01-04 |
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