JP7157027B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7157027B2 JP7157027B2 JP2019166231A JP2019166231A JP7157027B2 JP 7157027 B2 JP7157027 B2 JP 7157027B2 JP 2019166231 A JP2019166231 A JP 2019166231A JP 2019166231 A JP2019166231 A JP 2019166231A JP 7157027 B2 JP7157027 B2 JP 7157027B2
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- conductive member
- semiconductor
- length
- semiconductor layer
- semiconductor device
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- 239000004065 semiconductor Substances 0.000 title claims description 212
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 49
- 230000000694 effects Effects 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/20—Resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/535—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including internal interconnections, e.g. cross-under constructions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/404—Multiple field plate structures
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
以下、第1の実施形態について説明する。
次に、第2の実施形態について説明する。
次に、第3の実施形態について説明する。
次に、第4の実施形態について説明する。
次に、第5の実施形態について説明する。
次に、第6の実施形態について説明する。
次に、第7の実施形態について説明する。
11、11a、11b、12、12a、12b:抵抗素子
20:半導体層
20a:上面
21:半導体部分
21a、21b:部分
23:導電部材
23a:上端
23b:下端
24:導電部材
24a:上端
24b:下端
25、26:絶縁膜
30:層間絶縁膜
31、32:コンタクト
33、34、35、36、37:配線
40:半導体部分
41:絶縁部材
42、43、44:部分
46:エアギャップ
51:絶縁部材
52、53:貫通孔
54:エアギャップ
90:半導体パッケージ
91:樹脂部材
101:半導体装置
111:抵抗素子
120:半導体層
121:半導体領域
122:STI
I:電流経路
Lx11:抵抗素子11のX方向の長さ
Lx23:導電部材23のX方向の長さ
Lx24:導電部材24のX方向の長さ
Lx40:半導体部分のX方向の長さ
Lx41:絶縁部材41のX方向の長さ
Lx42:部分42のX方向の長さ
Lx44:部分44のX方向の長さ
Ly23:導電部材23のY方向の長さ
Ly40:半導体部分40のY方向の長さ
Ly41:絶縁部材41のY方向の長さ
Lz23:導電部材23のZ方向の長さ
Lz40:半導体部分40のZ方向の長さ
Lz41:絶縁部材41のZ方向の長さ
Sx:X方向における導電部材23と導電部材24との距離
Claims (5)
- 第1導電形の半導体層と、
前記半導体層中に設けられた第2導電形の第1半導体部分と、
上端が前記半導体層の上面に達し、下端が前記第1半導体部分に接続された第1導電部材と、
上端が前記半導体層の上面に達し、下端が前記第1半導体部分に接続された第2導電部材と、
前記第1導電部材の側面を覆う第1絶縁膜と、
前記第2導電部材の側面を覆う第2絶縁膜と、
を備え、
前記第1導電部材の上端から下端までの長さは、前記半導体層の上面に平行な方向であって前記第1導電部材から前記第2導電部材に向かう方向における前記第1導電部材の長さ、前記第1導電部材と前記第2導電部材との距離、及び、前記第2導電部材の長さの合計長さよりも長く、
前記第1半導体部分、前記第1導電部材、及び、前記第2導電部材により抵抗素子が形成される半導体装置。 - 前記半導体層上に設けられ、前記第1導電部材の前記上端に接続され、抵抗率が前記第1導電部材の抵抗率よりも低い第1コンタクトをさらに備えた請求項1記載の半導体装置。
- 前記第1導電部材及び前記第2導電部材はシリコンを含む請求項1または2に記載の半導体装置。
- 前記半導体層と前記第1半導体部分との間には、逆方向バイアスが印加される請求項1~3のいずれか1つに記載の半導体装置。
- 前記半導体層中に設けられ、前記第1半導体部分から離隔し、前記第2導電形の第2半導体部分と、
上端が前記半導体層の上面に達し、下端が前記第2半導体部分に接続された第3導電部材と、
上端が前記半導体層の上面に達し、下端が前記第2半導体部分に接続された第4導電部材と、
前記第2導電部材の上端と前記第3導電部材に上端との間に接続された配線と、
をさらに備えた請求項1~4のいずれか1つに記載の半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019166231A JP7157027B2 (ja) | 2019-09-12 | 2019-09-12 | 半導体装置 |
CN201911356286.6A CN112490241B (zh) | 2019-09-12 | 2019-12-25 | 半导体装置 |
US16/807,030 US11404547B2 (en) | 2019-09-12 | 2020-03-02 | Semiconductor device with conductive members that extend from a semiconductor portion to an upper surface of a semiconductor layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019166231A JP7157027B2 (ja) | 2019-09-12 | 2019-09-12 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021044434A JP2021044434A (ja) | 2021-03-18 |
JP7157027B2 true JP7157027B2 (ja) | 2022-10-19 |
Family
ID=74863189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019166231A Active JP7157027B2 (ja) | 2019-09-12 | 2019-09-12 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US11404547B2 (ja) |
JP (1) | JP7157027B2 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002009245A (ja) | 2000-06-21 | 2002-01-11 | Nec Corp | 誘電体分離型半導体装置 |
JP2003303960A (ja) | 2002-04-09 | 2003-10-24 | Sanyo Electric Co Ltd | 縦型mos半導体装置およびその製造方法 |
JP2009272453A (ja) | 2008-05-08 | 2009-11-19 | Sanyo Electric Co Ltd | トランジスタ、半導体装置及びその製造方法 |
JP2019009345A (ja) | 2017-06-27 | 2019-01-17 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6196757A (ja) * | 1984-10-17 | 1986-05-15 | Nec Corp | 半導体装置 |
JPH07112005B2 (ja) | 1986-11-10 | 1995-11-29 | 日本電気株式会社 | 半導体装置 |
JPS63177456A (ja) * | 1987-01-16 | 1988-07-21 | Nec Corp | 半導体装置 |
US4962365A (en) * | 1989-03-30 | 1990-10-09 | Texas Instruments Incorporated | Integrated circuit trench resistor |
JPH02299261A (ja) * | 1989-05-15 | 1990-12-11 | Seiko Epson Corp | 半導体装置 |
JPH04112565A (ja) | 1990-08-31 | 1992-04-14 | Nec Corp | 半導体抵抗素子及びその製造方法 |
CA2092370C (en) | 1993-03-24 | 1997-03-18 | John M. Boyd | Forming resistors for integrated circuits |
US5981995A (en) * | 1997-06-13 | 1999-11-09 | Advanced Micro Devices, Inc. | Static random access memory cell having buried sidewall transistors, buried bit lines, and buried vdd and vss nodes |
JP3528750B2 (ja) | 2000-03-16 | 2004-05-24 | 株式会社デンソー | 半導体装置 |
JP2002076311A (ja) | 2000-09-01 | 2002-03-15 | Seiko Epson Corp | 半導体装置およびその製造方法 |
US7939420B2 (en) * | 2002-08-14 | 2011-05-10 | Advanced Analogic Technologies, Inc. | Processes for forming isolation structures for integrated circuit devices |
US7084483B2 (en) * | 2004-05-25 | 2006-08-01 | International Business Machines Corporation | Trench type buried on-chip precision programmable resistor |
US7795681B2 (en) * | 2007-03-28 | 2010-09-14 | Advanced Analogic Technologies, Inc. | Isolated lateral MOSFET in epi-less substrate |
JP2012009545A (ja) * | 2010-06-23 | 2012-01-12 | Toshiba Corp | 半導体装置の製造方法 |
US9153569B1 (en) * | 2014-03-21 | 2015-10-06 | Texas Instruments Incorporated | Segmented NPN vertical bipolar transistor |
-
2019
- 2019-09-12 JP JP2019166231A patent/JP7157027B2/ja active Active
-
2020
- 2020-03-02 US US16/807,030 patent/US11404547B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002009245A (ja) | 2000-06-21 | 2002-01-11 | Nec Corp | 誘電体分離型半導体装置 |
JP2003303960A (ja) | 2002-04-09 | 2003-10-24 | Sanyo Electric Co Ltd | 縦型mos半導体装置およびその製造方法 |
JP2009272453A (ja) | 2008-05-08 | 2009-11-19 | Sanyo Electric Co Ltd | トランジスタ、半導体装置及びその製造方法 |
JP2019009345A (ja) | 2017-06-27 | 2019-01-17 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Also Published As
Publication number | Publication date |
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JP2021044434A (ja) | 2021-03-18 |
CN112490241A (zh) | 2021-03-12 |
US11404547B2 (en) | 2022-08-02 |
US20210083059A1 (en) | 2021-03-18 |
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