JP6791213B2 - 分光分析装置及び分光分析方法 - Google Patents
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Description
10 レーザコントローラ
11 第1発光部
12 第2発光部
21 第1参照セル
22 第2参照セル
31 第1受光部
32 第2受光部
33 第3受光部
34 第4受光部
41 第1切替部
42 第2切替部
51 第1変換部
52 第2変換部
60 タイミング調整コントローラ
71 第1記憶部
72 第2記憶部
73 第3記憶部
74 第4記憶部
80 CPU
100 制御部
C1、C2 分析対象成分
G 被測定ガス
G1、G2 ガス
S1 第1受光信号
S2 第2受光信号
S3 第3受光信号
S4 第4受光信号
T1 第1時間
T2 第2時間
T3 第3時間
T4 第4時間
Claims (16)
- 第1照射光を照射する第1発光部と、
第2照射光を照射する第2発光部と、
分光スペクトルに関する情報をそれぞれ含む第1受光信号及び第2受光信号を前記第1照射光及び前記第2照射光のそれぞれに対して取得し、制御部による制御に基づき前記第1受光信号又は前記第2受光信号に出力を切り替える第1切替部及び第2切替部と、
前記第1切替部及び前記第2切替部のそれぞれから出力される前記第1受光信号又は前記第2受光信号をデジタル信号に変換する第1変換部及び第2変換部と、
を備え、
前記制御部は、
前記第1受光信号が前記第1変換部へ繰り返し入力される時間である第1時間よりも、前記第2受光信号が前記第1変換部へ繰り返し入力される時間である第2時間が短くなるように前記第1切替部を制御し、
前記第1受光信号が前記第2変換部へ繰り返し入力される時間である第3時間よりも、前記第2受光信号が前記第2変換部へ繰り返し入力される時間である第4時間が短くなるように前記第2切替部を制御する、
分光分析装置。 - 前記制御部は、前記第1切替部からの出力が前記第1受光信号に切り替わってから経過した時間が前記第1時間に到達すると、前記第1時間の間に前記第1変換部によって変換された前記第1受光信号に基づいて分光スペクトルを分析する、
請求項1に記載の分光分析装置。 - 前記制御部は、
積算された前記第2時間が予め設定された第1所定時間に到達したか否かを判定し、
積算された前記第2時間が前記第1所定時間に到達したと判定すると、積算された前記第2時間の間に前記第1変換部によって変換された前記第2受光信号に基づいて分光スペクトルを分析する、
請求項1又は2に記載の分光分析装置。 - 前記第1所定時間は、前記第1時間に等しい、
請求項3に記載の分光分析装置。 - 前記制御部は、前記第2切替部からの出力が前記第1受光信号に切り替わってから経過した時間が前記第3時間に到達すると、前記第3時間の間に前記第2変換部によって変換された前記第1受光信号に基づいて分光スペクトルを分析する、
請求項1乃至4のいずれか1項に記載の分光分析装置。 - 前記制御部は、
積算された前記第4時間が予め設定された第2所定時間に到達したか否かを判定し、
積算された前記第4時間が前記第2所定時間に到達したと判定すると、積算された前記第4時間の間に前記第2変換部によって変換された前記第2受光信号に基づいて分光スペクトルを分析する、
請求項1乃至5のいずれか1項に記載の分光分析装置。 - 前記第2所定時間は、前記第3時間に等しい、
請求項6に記載の分光分析装置。 - 前記第1受光信号は、被測定ガス中の分析対象成分の光吸収スペクトルに関する情報を含み、
前記第2受光信号は、前記被測定ガス中の前記分析対象成分と同一で、かつ既知濃度のガスの光吸収スペクトルに関する情報を含む、
請求項1乃至7のいずれか1項に記載の分光分析装置。 - 分光分析装置による分光分析方法であって、
第1照射光を照射する第1照射ステップと、
第2照射光を照射する第2照射ステップと、
分光スペクトルに関する情報をそれぞれ含む第1受光信号及び第2受光信号を前記第1照射光及び前記第2照射光のそれぞれに対して取得し、前記第1受光信号又は前記第2受光信号に出力を切り替える第1切替ステップ及び第2切替ステップと、
前記第1切替ステップ及び前記第2切替ステップにおいてそれぞれ切り替えられた前記第1受光信号又は前記第2受光信号をデジタル信号に変換する第1変換ステップ及び第2変換ステップと、
を含み、
前記第1変換ステップにおいて、前記第1受光信号が繰り返される時間である第1時間よりも、前記第2受光信号が繰り返される時間である第2時間が短く、
前記第2変換ステップにおいて、前記第1受光信号が繰り返される時間である第3時間よりも、前記第2受光信号が繰り返される時間である第4時間が短い、
分光分析方法。 - 前記第1受光信号に切り替わってから経過した時間が前記第1時間に到達すると、前記第1時間の間に前記デジタル信号に変換された前記第1受光信号に基づいて分光スペクトルを分析するステップをさらに含む、
請求項9に記載の分光分析方法。 - 積算された前記第2時間が予め設定された第1所定時間に到達したか否かを判定するステップと、
積算された前記第2時間が前記第1所定時間に到達したと判定すると、積算された前記第2時間の間に前記デジタル信号に変換された前記第2受光信号に基づいて分光スペクトルを分析するステップと、
をさらに含む、
請求項9又は10に記載の分光分析方法。 - 前記第1所定時間は、前記第1時間に等しい、
請求項11に記載の分光分析方法。 - 前記第1受光信号に切り替わってから経過した時間が前記第3時間に到達すると、前記第3時間の間に前記デジタル信号に変換された前記第1受光信号に基づいて分光スペクトルを分析するステップをさらに含む、
請求項9乃至12のいずれか1項に記載の分光分析方法。 - 積算された前記第4時間が予め設定された第2所定時間に到達したか否かを判定するステップと、
積算された前記第4時間が前記第2所定時間に到達したと判定すると、積算された前記第4時間の間に前記デジタル信号に変換された前記第2受光信号に基づいて分光スペクトルを分析するステップと、
をさらに含む、
請求項9乃至13のいずれか1項に記載の分光分析方法。 - 前記第2所定時間は、前記第3時間に等しい、
請求項14に記載の分光分析方法。 - 前記第1受光信号は、被測定ガス中の分析対象成分の光吸収スペクトルに関する情報を含み、
前記第2受光信号は、前記被測定ガス中の前記分析対象成分と同一で、かつ既知濃度のガスの光吸収スペクトルに関する情報を含む、
請求項9乃至15のいずれか1項に記載の分光分析方法。
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