JP6788395B2 - シリンダ駆動装置 - Google Patents
シリンダ駆動装置 Download PDFInfo
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- 239000012530 fluid Substances 0.000 claims description 101
- 230000007423 decrease Effects 0.000 claims description 18
- 238000000638 solvent extraction Methods 0.000 claims description 2
- 239000010720 hydraulic oil Substances 0.000 description 154
- 230000008602 contraction Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 7
- 230000005484 gravity Effects 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
- F15B11/04—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed
- F15B11/044—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed by means in the return line, i.e. "meter out"
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
- F15B11/04—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed
- F15B11/042—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed by means in the feed line, i.e. "meter in"
- F15B11/0426—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed by means in the feed line, i.e. "meter in" by controlling the number of pumps or parallel valves switched on
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/08—Servomotor systems without provision for follow-up action; Circuits therefor with only one servomotor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/02—Mechanical layout characterised by the means for converting the movement of the fluid-actuated element into movement of the finally-operated member
- F15B15/04—Mechanical layout characterised by the means for converting the movement of the fluid-actuated element into movement of the finally-operated member with oscillating cylinder
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/18—Combined units comprising both motor and pump
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
- F15B2211/205—Systems with pumps
- F15B2211/20507—Type of prime mover
- F15B2211/20515—Electric motor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
- F15B2211/205—Systems with pumps
- F15B2211/2053—Type of pump
- F15B2211/20561—Type of pump reversible
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
- F15B2211/27—Directional control by means of the pressure source
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/305—Directional control characterised by the type of valves
- F15B2211/30505—Non-return valves, i.e. check valves
- F15B2211/3051—Cross-check valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/405—Flow control characterised by the type of flow control means or valve
- F15B2211/40507—Flow control characterised by the type of flow control means or valve with constant throttles or orifices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/405—Flow control characterised by the type of flow control means or valve
- F15B2211/40576—Assemblies of multiple valves
- F15B2211/40592—Assemblies of multiple valves with multiple valves in parallel flow paths
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/41—Flow control characterised by the positions of the valve element
- F15B2211/411—Flow control characterised by the positions of the valve element the positions being discrete
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/415—Flow control characterised by the connections of the flow control means in the circuit
- F15B2211/41572—Flow control characterised by the connections of the flow control means in the circuit being connected to a pressure source and an output member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/415—Flow control characterised by the connections of the flow control means in the circuit
- F15B2211/4159—Flow control characterised by the connections of the flow control means in the circuit being connected to a pressure source, an output member and a return line
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/42—Flow control characterised by the type of actuation
- F15B2211/428—Flow control characterised by the type of actuation actuated by fluid pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/46—Control of flow in the return line, i.e. meter-out control
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/47—Flow control in one direction only
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/50—Pressure control
- F15B2211/505—Pressure control characterised by the type of pressure control means
- F15B2211/50509—Pressure control characterised by the type of pressure control means the pressure control means controlling a pressure upstream of the pressure control means
- F15B2211/50518—Pressure control characterised by the type of pressure control means the pressure control means controlling a pressure upstream of the pressure control means using pressure relief valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
- F15B2211/76—Control of force or torque of the output member
- F15B2211/761—Control of a negative load, i.e. of a load generating hydraulic energy
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
- F15B2211/785—Compensation of the difference in flow rate in closed fluid circuits using differential actuators
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/80—Other types of control related to particular problems or conditions
- F15B2211/86—Control during or prevention of abnormal conditions
- F15B2211/8613—Control during or prevention of abnormal conditions the abnormal condition being oscillations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/80—Other types of control related to particular problems or conditions
- F15B2211/895—Manual override
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B7/00—Systems in which the movement produced is definitely related to the output of a volumetric pump; Telemotors
- F15B7/005—With rotary or crank input
- F15B7/006—Rotary pump input
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Fluid-Pressure Circuits (AREA)
Description
Claims (4)
- シリンダ駆動装置であって、
電動モータと、
前記電動モータによって駆動され、作動流体を吐出するポンプと、
それぞれが前記ポンプに接続され、前記ポンプからの作動流体が選択的に導かれる第1通路及び第2通路と、
前記第1通路及び前記第2通路に接続され、前記第1通路及び前記第2通路の一方から供給される作動流体によって作動するとともに作動時に前記第1通路及び前記第2通路の他方に作動流体を排出する流体圧シリンダと、
前記第2通路に設けられ、前記ポンプから前記流体圧シリンダへ向かう作動流体の流れを許容する一方、前記流体圧シリンダから前記ポンプへ向かう作動流体の流れを前記第1通路内の圧力の上昇に応じて許容する制御弁と、
前記第2通路における前記流体圧シリンダと前記制御弁との間に設けられ、前記流体圧シリンダから前記制御弁へ向かう作動流体の流れを絞る絞り弁と、を備え、
前記絞り弁の開口面積は、前記流体圧シリンダから前記第2通路に排出される作動流体の流量の上昇に応じて減少し、
前記絞り弁は、前記流体圧シリンダが前記第1通路から吸い込む作動流体の流量が前記ポンプの最大吐出流量に達したときに前記開口面積が減少するように設定されることを特徴とするシリンダ駆動装置。 - シリンダ駆動装置であって、
電動モータと、
前記電動モータによって駆動され、作動流体を吐出するポンプと、
それぞれが前記ポンプに接続され、前記ポンプからの作動流体が選択的に導かれる第1通路及び第2通路と、
前記第1通路及び前記第2通路に接続され、前記第1通路及び前記第2通路の一方から供給される作動流体によって作動するとともに作動時に前記第1通路及び前記第2通路の他方に作動流体を排出する流体圧シリンダと、
前記ポンプに接続され、前記流体圧シリンダの作動により生じる容積変化を補償するタンクと、
前記第2通路に設けられ、前記ポンプから前記流体圧シリンダへ向かう作動流体の流れを許容する一方、前記流体圧シリンダから前記ポンプへ向かう作動流体の流れを前記第1通路内の圧力の上昇に応じて許容する制御弁と、
前記第2通路における前記流体圧シリンダと前記制御弁との間に設けられ、前記流体圧シリンダから前記制御弁へ向かう作動流体の流れを絞る絞り弁と、を備え、
前記流体圧シリンダ、前記ポンプ、前記電動モータ、前記タンク、前記第1通路、前記第2通路、前記制御弁及び前記絞り弁は、1つのユニットを構成しており、
前記流体圧シリンダは、
シリンダと、
前記シリンダから延出し、前記シリンダに対して進退自在であるピストンロッドと、
前記ピストンロッドに連結され、前記シリンダの内部を反ロッド側室とロッド側室とに区画するピストンと、を備え、
前記第1通路は、前記反ロッド側室に接続され、
前記第2通路は、前記ロッド側室に接続され、
前記流体圧シリンダが作動するとき、前記ロッド側室と前記第2通路との間を行き来する作動流体の流量は、前記反ロッド側室と前記第1通路との間を行き来する作動流体の流量に比べ、少なく、
前記制御弁及び前記絞り弁は、前記第2通路における前記ロッド側室と前記ポンプとの間に設けられ、
前記絞り弁の開口面積は、前記流体圧シリンダにおける前記ロッド側室から前記第2通路に排出される作動流体の流量の上昇に応じて減少することを特徴とするシリンダ駆動装置。 - 請求項1又は2に記載のシリンダ駆動装置であって、
前記絞り弁は、
前記流体圧シリンダに接続される第1ポートと、
前記制御弁に接続される第2ポートと、
前記第1ポートと前記第2ポートとを連通する流路と、
前記流路に設けられる弁座と、
前記流路に設けられ前記弁座に離着座する弁体と、
前記弁体を前記弁座から離座させる方向に前記弁体を付勢する付勢部材と、
前記弁体に形成され、前記第1ポートと前記第2ポートとを連通する第1絞り部と、
前記弁体に形成され、前記弁体が前記弁座から離座した状態において前記第1ポートと前記第2ポートとを連通し前記弁体が前記弁座に着座した状態において前記第1ポートと前記第2ポートとの連通を遮断する第2絞り部と、
を有することを特徴とするシリンダ駆動装置。 - 請求項3に記載のシリンダ駆動装置であって、
前記第2絞り部の開口面積は前記第1絞り部の開口面積よりも大きいことを特徴とするシリンダ駆動装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016130544A JP6788395B2 (ja) | 2016-06-30 | 2016-06-30 | シリンダ駆動装置 |
KR1020187036869A KR20190025837A (ko) | 2016-06-30 | 2017-06-26 | 실린더 구동 장치 |
US16/312,323 US10794404B2 (en) | 2016-06-30 | 2017-06-26 | Cylinder driving device |
CN201780041174.4A CN109416060B (zh) | 2016-06-30 | 2017-06-26 | 缸驱动装置 |
PCT/JP2017/023440 WO2018003753A1 (ja) | 2016-06-30 | 2017-06-26 | シリンダ駆動装置 |
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JP2016130544A JP6788395B2 (ja) | 2016-06-30 | 2016-06-30 | シリンダ駆動装置 |
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JP2018003943A JP2018003943A (ja) | 2018-01-11 |
JP6788395B2 true JP6788395B2 (ja) | 2020-11-25 |
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US (1) | US10794404B2 (ja) |
JP (1) | JP6788395B2 (ja) |
KR (1) | KR20190025837A (ja) |
CN (1) | CN109416060B (ja) |
WO (1) | WO2018003753A1 (ja) |
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US10760599B2 (en) * | 2018-06-29 | 2020-09-01 | Kti Hydraulics Inc. | Power units with manual override controls for hydraulic systems |
WO2020059427A1 (ja) * | 2018-09-19 | 2020-03-26 | 株式会社Kokusai Electric | 基板処理装置及び蓋開閉機構及び半導体装置の製造方法及び流体圧駆動システム |
JP2021134907A (ja) * | 2020-02-28 | 2021-09-13 | Kyb株式会社 | 流体圧駆動ユニット |
JP7510271B2 (ja) * | 2020-04-17 | 2024-07-03 | カヤバ株式会社 | 電動流体圧シリンダ |
US12085099B1 (en) * | 2020-06-18 | 2024-09-10 | Vacuworx Global, LLC | Flow control block for use with a vacuum material handler |
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JPS5315225A (en) * | 1976-07-28 | 1978-02-10 | Sumitomo Metal Ind | Method of making ingot by bottom pouring |
JPS5422994Y2 (ja) | 1978-03-30 | 1979-08-08 | ||
JPH09242716A (ja) * | 1996-03-05 | 1997-09-16 | Hitachi Constr Mach Co Ltd | 油圧シリンダ装置 |
WO2005075867A1 (ja) * | 2004-02-04 | 2005-08-18 | Kosmek Ltd. | 流量制御弁および流量制御弁付きシリンダ装置 |
JP4616672B2 (ja) | 2005-03-14 | 2011-01-19 | カヤバ工業株式会社 | フィルタ一体化オリフィス、スローリターン弁、油圧駆動ユニット |
JP2008309212A (ja) | 2007-06-13 | 2008-12-25 | Sumitomo (Shi) Construction Machinery Manufacturing Co Ltd | 建設機械におけるアウトリガー制御装置 |
CN202833361U (zh) * | 2012-09-08 | 2013-03-27 | 中色科技股份有限公司 | 一种双锥头夹紧对中液压系统 |
CN203176024U (zh) * | 2013-03-09 | 2013-09-04 | 山东永平再生资源有限公司 | 剪切机液控系统 |
CN105358844B (zh) * | 2013-04-22 | 2017-05-24 | 派克汉尼芬公司 | 用于控制液压致动器中压力的方法 |
CN103807227A (zh) * | 2014-01-24 | 2014-05-21 | 大连液压件有限公司 | 重载汽车车桥提升液压系统 |
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CN109416060B (zh) | 2021-06-11 |
US10794404B2 (en) | 2020-10-06 |
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