JP6783708B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6783708B2 JP6783708B2 JP2017117572A JP2017117572A JP6783708B2 JP 6783708 B2 JP6783708 B2 JP 6783708B2 JP 2017117572 A JP2017117572 A JP 2017117572A JP 2017117572 A JP2017117572 A JP 2017117572A JP 6783708 B2 JP6783708 B2 JP 6783708B2
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- 239000011229 interlayer Substances 0.000 claims description 100
- 210000000746 body region Anatomy 0.000 claims description 64
- 239000000463 material Substances 0.000 claims description 24
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- 238000000034 method Methods 0.000 description 43
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- 230000000052 comparative effect Effects 0.000 description 7
- 150000004706 metal oxides Chemical class 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 6
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Description
以下に、第1実施形態に係る半導体装置の構成を説明する。
図6に示すように、第1実施形態に係る半導体装置の製造方法は、フロントエンド工程S1と、バックエンド工程S2とを有している。フロントエンド工程S1においては、図7及び図8に示すように、半導体基板SUBと、ゲート絶縁膜GOと、ゲート電極GEとが形成される。
まず、第1実施形態に係る半導体装置の一般的な効果を説明する。第1実施形態に係る半導体装置においては、第1導電膜FCLが、第2配線WL2と絶縁されながら対向している。また、第1実施形態に係る半導体装置においては、第1導電膜FCLがドレイン領域DRAに電気的に接続されており、第2配線WL2がソース領域SRと電気的に接続されている。すなわち、第1実施形態に係る半導体装置においては、ソースドレイン間容量Cが平面視において素子領域ERの内側に配置されている。そのため、第1実施形態に係る半導体装置においては、ソースドレイン間容量を形成するために、チップ面積を大きくする必要がない。
以下に、第2実施形態に係る半導体装置の構成を説明する。以下においては、第1実施形態に係る半導体装置の構成と異なる点について主に説明し、重複する説明は繰り返さない。
以下に、第3実施形態に係る半導体装置の構成を説明する。以下においては、第2実施形態に係る半導体装置の構成と異なる点について主に説明し、重複する説明は繰り返さない。
Claims (12)
- 第1面と、前記第1面の反対面である第2面とを有する半導体基板と、
前記第1面の上に配置される第1配線及び第2配線と、
前記第1配線に電気的に接続される第1導電膜と、
ゲート電極とを備え、
前記半導体基板は、前記第1面に位置する第1導電型のソース領域と、前記第2面に位置する前記第1導電型のドレイン領域と、前記ドレイン領域の上に位置する前記第1導電型のドリフト領域と、前記ソース領域と前記ドリフト領域とにより挟み込まれる前記第1導電型の反対の導電型である第2導電型のボディ領域とを有し、
前記ドリフト領域は、平面視において前記ボディ領域を取り囲むように配置され、
前記第1配線は、平面視において前記ドリフト領域と前記ボディ領域との境界を跨ぐように配置され、かつ前記ドリフト領域に電気的に接続される第1部分を有し、
前記ゲート電極は、前記ソース領域と前記ドリフト領域とにより挟み込まれる前記ボディ領域と絶縁されながら対向し、
前記第2配線は、前記ソース領域と電気的に接続され、
前記第1導電膜は、前記第2配線と絶縁されながら対向する、半導体装置。 - 前記境界を跨ぐように配置され、かつ前記ゲート電極に電気的に接続される第2導電膜をさらに備える、請求項1に記載の半導体装置。
- 前記第2導電膜は、前記境界に沿って延在する、請求項2に記載の半導体装置。
- 前記第2導電膜は、平面視において、前記第1部分と重なるように配置される、請求項2に記載の半導体装置。
- 前記第2導電膜は、前記ドレイン領域の上に位置する第1端と、前記第1端の反対側の端である第2端とを有し、
前記境界と前記第1端との距離は、3μm以上であり、
前記境界と前記第2端との距離は、3μm以上である、請求項2に記載の半導体装置。 - 前記第1導電膜と前記第2導電膜とは、同一層内に位置し、かつ同一材料により構成される、請求項2に記載の半導体装置。
- 前記第1面の上に配置され、かつ前記ゲート電極に電気的に接続される第3配線をさらに備え、
前記第3配線は、前記境界を跨ぎ、かつ前記境界に沿って延在し、
前記第3配線は、第3端と、前記第3端から離間して配置される第4端とを有し、
前記第1部分は、平面視において前記第3端と前記第4端との間を通過する、請求項2に記載の半導体装置。 - 前記第3配線は、前記第3端及び前記第4端において、前記第2導電膜に電気的に接続される、請求項7に記載の半導体装置。
- 前記第1面の上に配置される層間絶縁膜をさらに備え、
前記層間絶縁膜中には、前記第2導電膜が埋め込まれる少なくとも1以上の溝が設けられる、請求項2に記載の半導体装置。 - 前記溝の数は複数であり、
前記溝の幅を互いに隣接する前記溝の間隔で除した値は、0.5以上1以下である、請求項9に記載の半導体装置。 - 前記溝の前記幅は、0.2μm以上0.4μm以下である、請求項10に記載の半導体装置。
- 前記第2導電膜は、一体に形成されている、請求項2に記載の半導体装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017117572A JP6783708B2 (ja) | 2017-06-15 | 2017-06-15 | 半導体装置 |
US15/956,611 US10600904B2 (en) | 2017-06-15 | 2018-04-18 | Semiconductor device |
TW107115867A TWI776892B (zh) | 2017-06-15 | 2018-05-10 | 半導體裝置 |
EP18177155.1A EP3416187A1 (en) | 2017-06-15 | 2018-06-12 | Vertical mosfet with additional source-drain capacitance |
KR1020180068081A KR102470036B1 (ko) | 2017-06-15 | 2018-06-14 | 반도체 장치 |
CN201820923789.1U CN208538858U (zh) | 2017-06-15 | 2018-06-14 | 半导体器件 |
CN201810613343.3A CN109148446A (zh) | 2017-06-15 | 2018-06-14 | 半导体器件 |
Applications Claiming Priority (1)
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US5998833A (en) | 1998-10-26 | 1999-12-07 | North Carolina State University | Power semiconductor devices having improved high frequency switching and breakdown characteristics |
GB0005650D0 (en) * | 2000-03-10 | 2000-05-03 | Koninkl Philips Electronics Nv | Field-effect semiconductor devices |
JP2004022644A (ja) * | 2002-06-13 | 2004-01-22 | Toyota Central Res & Dev Lab Inc | Mosfet |
US7348656B2 (en) * | 2005-09-22 | 2008-03-25 | International Rectifier Corp. | Power semiconductor device with integrated passive component |
JP5612268B2 (ja) | 2008-03-28 | 2014-10-22 | 株式会社東芝 | 半導体装置及びdc−dcコンバータ |
TWI406393B (zh) * | 2010-08-30 | 2013-08-21 | Sinopower Semiconductor Inc | 具有額外電容結構之半導體元件及其製作方法 |
JP2012244071A (ja) * | 2011-05-23 | 2012-12-10 | Semiconductor Components Industries Llc | 絶縁ゲート型半導体装置 |
US8796745B2 (en) * | 2011-07-05 | 2014-08-05 | Texas Instruments Incorporated | Monolithically integrated active snubber |
US9356133B2 (en) * | 2012-02-01 | 2016-05-31 | Texas Instruments Incorporated | Medium voltage MOSFET device |
JP6284421B2 (ja) * | 2014-05-09 | 2018-02-28 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP2016062981A (ja) * | 2014-09-16 | 2016-04-25 | 株式会社東芝 | 半導体装置及びその製造方法 |
US9627328B2 (en) * | 2014-10-09 | 2017-04-18 | Infineon Technologies Americas Corp. | Semiconductor structure having integrated snubber resistance |
JP6462367B2 (ja) * | 2015-01-13 | 2019-01-30 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP6509621B2 (ja) * | 2015-04-22 | 2019-05-08 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP6560059B2 (ja) * | 2015-08-20 | 2019-08-14 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP6602698B2 (ja) * | 2016-03-11 | 2019-11-06 | ルネサスエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
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