JP6780457B2 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP6780457B2 JP6780457B2 JP2016219745A JP2016219745A JP6780457B2 JP 6780457 B2 JP6780457 B2 JP 6780457B2 JP 2016219745 A JP2016219745 A JP 2016219745A JP 2016219745 A JP2016219745 A JP 2016219745A JP 6780457 B2 JP6780457 B2 JP 6780457B2
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- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
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- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
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- B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
- B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
- B22F7/062—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/045—Carbides composed of metals from groups of the periodic table
- H01L2924/0455—5th Group
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- H01L2924/0456—6th Group
- H01L2924/04563—WC
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/053—Oxides composed of metals from groups of the periodic table
- H01L2924/0535—5th Group
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- H01L2924/053—Oxides composed of metals from groups of the periodic table
- H01L2924/0536—6th Group
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
- H01L2924/15747—Copper [Cu] as principal constituent
Description
第1実施形態について図面を参照しつつ説明する。本実施形態の半導体装置は、図1に示されるように、第1放熱部材1上に半導体チップ2が搭載され、半導体チップ2上に放熱ブロック3を介して第2放熱部材4が配置されることで構成されている。また、第1放熱部材1と半導体チップ2との間には第1接合部材5が配置され、半導体チップ2と放熱ブロック3との間には第2接合部材6が配置され、放熱ブロック3と第2放熱部材4との間には第3接合部材7が配置されている。
本発明は上記した実施形態に限定されるものではなく、特許請求の範囲に記載した範囲内において適宜変更が可能である。
2 半導体チップ(搭載部材)
3 放熱ブロック(導電性部材)
5 第1接合部材
6 第2接合部材
21 一面電極
22 他面電極
Claims (4)
- 電極(21、22)を有する搭載部材(2)が接合部材(5、6)を介して導電性部材(1、3)に電気的、機械的に接続された半導体装置において、
前記電極を有する前記搭載部材と、
前記電極と対向して配置される前記導電性部材と、
前記搭載部材と前記導電性部材との間に配置され、前記電極と前記導電性部材とを電気的、機械的に接続する前記接合部材と、を備え、
前記接合部材は、銀粒子(8)に、銀原子より凝集エネルギーが高い金属原子を含む補助粒子(9)が添加された焼結体で構成されており、
前記補助粒子は、前記金属原子の酸化物、または炭化物で構成されると共に、前記接合部材内に点在して配置されている半導体装置。 - 前記補助粒子は、前記銀粒子よりも平均粒径が小さくされている請求項1に記載の半導体装置。
- 前記金属原子は、タングステン、モリブデン、ニオブ、またはバナジウムのいずれかである請求項1または2に記載の半導体装置。
- 電極(21、22)を有する搭載部材(2)と、
前記電極と対向して配置される導電性部材(1、3)と、
前記搭載部材と前記導電性部材との間に配置され、前記電極と前記導電性部材とを電気的、機械的に接続する接合部材(5、6)と、を備え、
前記接合部材は、銀粒子(8)に、銀原子より凝集エネルギーが高い金属原子を含む補助粒子(9)が添加された焼結体で構成されており、
前記補助粒子は、前記金属原子の酸化物、または炭化物で構成されると共に、前記接合部材内に点在して配置されている半導体装置の製造方法であって、
前記銀粒子に前記補助粒子が添加されたペースト材料を用意することを行い、
前記ペースト材料を所定箇所に塗布した後に焼結することにより、前記接合部材を構成する半導体装置の製造方法。
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