JP6775304B2 - 赤外線透過感光性樹脂組成物 - Google Patents
赤外線透過感光性樹脂組成物 Download PDFInfo
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- JP6775304B2 JP6775304B2 JP2016035186A JP2016035186A JP6775304B2 JP 6775304 B2 JP6775304 B2 JP 6775304B2 JP 2016035186 A JP2016035186 A JP 2016035186A JP 2016035186 A JP2016035186 A JP 2016035186A JP 6775304 B2 JP6775304 B2 JP 6775304B2
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- photosensitive resin
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- 229920005989 resin Polymers 0.000 claims description 37
- 238000002834 transmittance Methods 0.000 claims description 33
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- 239000002904 solvent Substances 0.000 claims description 27
- 239000002270 dispersing agent Substances 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 24
- 238000004040 coloring Methods 0.000 claims description 21
- 239000003999 initiator Substances 0.000 claims description 18
- 239000001055 blue pigment Substances 0.000 claims description 14
- 239000001054 red pigment Substances 0.000 claims description 14
- 239000007787 solid Substances 0.000 claims description 14
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- -1 metal complex salts Chemical class 0.000 description 33
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- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
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- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
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- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
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- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 3
- 239000000980 acid dye Substances 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 3
- 239000001045 blue dye Substances 0.000 description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 3
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
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- 229910052751 metal Inorganic materials 0.000 description 3
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- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 3
- 239000012860 organic pigment Substances 0.000 description 3
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
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- 239000004065 semiconductor Substances 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IBABXJRXGSAJLQ-UHFFFAOYSA-N 1,4-bis(2,6-diethyl-4-methylanilino)anthracene-9,10-dione Chemical compound CCC1=CC(C)=CC(CC)=C1NC(C=1C(=O)C2=CC=CC=C2C(=O)C=11)=CC=C1NC1=C(CC)C=C(C)C=C1CC IBABXJRXGSAJLQ-UHFFFAOYSA-N 0.000 description 2
- KTEFLEFPDDQMCB-UHFFFAOYSA-N 1,4-bis(4-butylanilino)-5,8-dihydroxyanthracene-9,10-dione Chemical compound C1=CC(CCCC)=CC=C1NC(C=1C(=O)C2=C(O)C=CC(O)=C2C(=O)C=11)=CC=C1NC1=CC=C(CCCC)C=C1 KTEFLEFPDDQMCB-UHFFFAOYSA-N 0.000 description 2
- OCQDPIXQTSYZJL-UHFFFAOYSA-N 1,4-bis(butylamino)anthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C(NCCCC)=CC=C2NCCCC OCQDPIXQTSYZJL-UHFFFAOYSA-N 0.000 description 2
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
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- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 2
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 2
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- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 2
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- 125000003118 aryl group Chemical group 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 2
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 2
- 230000001588 bifunctional effect Effects 0.000 description 2
- 125000002091 cationic group Chemical group 0.000 description 2
- 239000003093 cationic surfactant Substances 0.000 description 2
- 239000012986 chain transfer agent Substances 0.000 description 2
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 2
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- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
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- FVQMJJQUGGVLEP-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy 2-ethylhexaneperoxoate Chemical compound CCCCC(CC)C(=O)OOOC(C)(C)C FVQMJJQUGGVLEP-UHFFFAOYSA-N 0.000 description 1
- DTCCVIYSGXONHU-CJHDCQNGSA-N (z)-2-(2-phenylethenyl)but-2-enedioic acid Chemical compound OC(=O)\C=C(C(O)=O)\C=CC1=CC=CC=C1 DTCCVIYSGXONHU-CJHDCQNGSA-N 0.000 description 1
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- CKBFYMOTEJMJTP-UHFFFAOYSA-N 1,5-bis(3-methylanilino)anthracene-9,10-dione Chemical compound CC1=CC=CC(NC=2C=3C(=O)C4=CC=CC(NC=5C=C(C)C=CC=5)=C4C(=O)C=3C=CC=2)=C1 CKBFYMOTEJMJTP-UHFFFAOYSA-N 0.000 description 1
- QSNJWMJODWUDPJ-UHFFFAOYSA-N 1,5-bis(cyclohexylamino)anthracene-9,10-dione Chemical compound C=12C(=O)C3=CC=CC(NC4CCCCC4)=C3C(=O)C2=CC=CC=1NC1CCCCC1 QSNJWMJODWUDPJ-UHFFFAOYSA-N 0.000 description 1
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- ZNQIAQXHADXXQI-UHFFFAOYSA-N 1-anilino-4-hydroxyanthracene-9,10-dione Chemical compound C1=2C(=O)C3=CC=CC=C3C(=O)C=2C(O)=CC=C1NC1=CC=CC=C1 ZNQIAQXHADXXQI-UHFFFAOYSA-N 0.000 description 1
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- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 description 1
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 1
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 235000019794 sodium silicate Nutrition 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- AXMCIYLNKNGNOT-UHFFFAOYSA-M sodium;3-[[4-[(4-dimethylazaniumylidenecyclohexa-2,5-dien-1-ylidene)-[4-[ethyl-[(3-sulfonatophenyl)methyl]amino]phenyl]methyl]-n-ethylanilino]methyl]benzenesulfonate Chemical compound [Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](C)C)C=2C=CC(=CC=2)N(CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S([O-])(=O)=O)=C1 AXMCIYLNKNGNOT-UHFFFAOYSA-M 0.000 description 1
- FJBHGWADYLMEJG-UHFFFAOYSA-M sodium;3-[[4-[[4-(diethylamino)phenyl]-[4-[ethyl-[(3-sulfonatophenyl)methyl]azaniumylidene]cyclohexa-2,5-dien-1-ylidene]methyl]-n-ethylanilino]methyl]benzenesulfonate Chemical compound [Na+].C1=CC(N(CC)CC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC=1C=C(C=CC=1)S([O-])(=O)=O)=C(C=C1)C=CC1=[N+](CC)CC1=CC=CC(S([O-])(=O)=O)=C1 FJBHGWADYLMEJG-UHFFFAOYSA-M 0.000 description 1
- STZCRXQWRGQSJD-UHFFFAOYSA-N sodium;4-[[4-(dimethylamino)phenyl]diazenyl]benzenesulfonic acid Chemical compound [Na+].C1=CC(N(C)C)=CC=C1N=NC1=CC=C(S(O)(=O)=O)C=C1 STZCRXQWRGQSJD-UHFFFAOYSA-N 0.000 description 1
- MWZFQMUXPSUDJQ-KVVVOXFISA-M sodium;[(z)-octadec-9-enyl] sulfate Chemical compound [Na+].CCCCCCCC\C=C/CCCCCCCCOS([O-])(=O)=O MWZFQMUXPSUDJQ-KVVVOXFISA-M 0.000 description 1
- HIEHAIZHJZLEPQ-UHFFFAOYSA-M sodium;naphthalene-1-sulfonate Chemical compound [Na+].C1=CC=C2C(S(=O)(=O)[O-])=CC=CC2=C1 HIEHAIZHJZLEPQ-UHFFFAOYSA-M 0.000 description 1
- 239000011973 solid acid Substances 0.000 description 1
- 239000000992 solvent dye Substances 0.000 description 1
- LJFWQNJLLOFIJK-UHFFFAOYSA-N solvent violet 13 Chemical compound C1=CC(C)=CC=C1NC1=CC=C(O)C2=C1C(=O)C1=CC=CC=C1C2=O LJFWQNJLLOFIJK-UHFFFAOYSA-N 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010421 standard material Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 229940124530 sulfonamide Drugs 0.000 description 1
- 150000003456 sulfonamides Chemical class 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- WNQPPENQFWLADQ-UHFFFAOYSA-J tetrasodium;4-hydroxy-5-[[4-[[4-[(8-hydroxy-3,6-disulfonatonaphthalen-1-yl)diazenyl]-2-methoxy-5-methylphenyl]carbamoylamino]-5-methoxy-2-methylphenyl]diazenyl]naphthalene-2,7-disulfonate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]S(=O)(=O)C1=CC(O)=C2C(N=NC3=C(C)C=C(C(=C3)OC)NC(=O)NC3=CC(C)=C(N=NC=4C5=C(O)C=C(C=C5C=C(C=4)S([O-])(=O)=O)S([O-])(=O)=O)C=C3OC)=CC(S([O-])(=O)=O)=CC2=C1 WNQPPENQFWLADQ-UHFFFAOYSA-J 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- WUUHFRRPHJEEKV-UHFFFAOYSA-N tripotassium borate Chemical compound [K+].[K+].[K+].[O-]B([O-])[O-] WUUHFRRPHJEEKV-UHFFFAOYSA-N 0.000 description 1
- VRVDFJOCCWSFLI-UHFFFAOYSA-K trisodium 3-[[4-[(6-anilino-1-hydroxy-3-sulfonatonaphthalen-2-yl)diazenyl]-5-methoxy-2-methylphenyl]diazenyl]naphthalene-1,5-disulfonate Chemical compound [Na+].[Na+].[Na+].COc1cc(N=Nc2cc(c3cccc(c3c2)S([O-])(=O)=O)S([O-])(=O)=O)c(C)cc1N=Nc1c(O)c2ccc(Nc3ccccc3)cc2cc1S([O-])(=O)=O VRVDFJOCCWSFLI-UHFFFAOYSA-K 0.000 description 1
- BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 description 1
- UJMBCXLDXJUMFB-UHFFFAOYSA-K trisodium;5-oxo-1-(4-sulfonatophenyl)-4-[(4-sulfonatophenyl)diazenyl]-4h-pyrazole-3-carboxylate Chemical compound [Na+].[Na+].[Na+].[O-]C(=O)C1=NN(C=2C=CC(=CC=2)S([O-])(=O)=O)C(=O)C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 UJMBCXLDXJUMFB-UHFFFAOYSA-K 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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- Materials For Photolithography (AREA)
- Optical Filters (AREA)
Description
前記色材(a1)は、青色(blue)顔料、赤色(red)顔料及び黄色(yellow)顔料を含む、赤外線透過感光性樹脂組成物。
前記青色顔料は、C.I.ピグメントブルー15:3、15:4、15:6、16、21、28、60、64及び76からなる群より選ばれる1種以上であり、
前記赤色顔料は、C.I.ピグメントレッド9、97、105、122、123、144、149、166、168、176、177、179、180、192、215、216、224、242、254、255及び264からなる群より選ばれる1種以上であり、
前記黄色顔料は、C.I.ピグメントイエロー20、24、31、53、83、86、93、94、109、110、117、125、137、138、139、147、148、150、153、154、166、173、180及び185からなる群より選ばれる1種以上である、赤外線透過感光性樹脂組成物。
固形分の全重量に対して、(A)前記顔料分散組成物10〜80重量%、(B)前記アルカリ可溶性樹脂10〜80重量%、(C)前記光重合性化合物5〜45重量%、及び(D)前記光重合開始剤0.1〜40重量%を含み、
前記固形分100重量部に対して(E)前記溶剤100〜300重量部を含む、赤外線透過感光性樹脂組成物。
前記色材(a1)は、青色(blue)顔料、赤色(red)顔料及び黄色(yellow)顔料を含み、黒色顔料を5重量%以下で含む、赤外線透過感光性樹脂組成物。
顔料分散組成物(A)は、色材(a1)を含む。
赤色顔料としては、C.I.ピグメントレッド149、C.I.ピグメントレッド177、C.I.ピグメントレッド179、C.I.ピグメントレッド242、C.I.ピグメントレッド254、C.I.ピグメントレッド255等が使用できる。
黄色顔料としては、C.I.ピグメントイエロー138、C.I.ピグメントイエロー139、C.I.ピグメントイエロー150、C.I.ピグメントイエロー185等が使用できる。これらは単独に又は2種以上混合して用いることができる。
前記分散剤(a2)は、顔料の脱凝集及び安定性の維持のために添加されるものであり、当該分野において一般的に用いられるものを制限なく使用できる。例えば、カチオン系、アニオン系、ノニオン系、両性、ポリエステル系、ポリアミン系などの界面活性剤等が挙げられる。これらはそれぞれ単独に又は2種以上を組み合わせて用いることができる。
分散助剤とは、顔料を微細な粒子に分散してその再凝集を防止する役割を果たす製剤をいう。前記分散助剤は、コントラスト比が高く、かつ透過度に優れたカラーフィルタを構成するのに有効である。
前記R5〜R8は、互いに独立して、水素、ハロゲンまたはSO3 −であり、
前記R9は、水素、炭素数1〜8の線状又は非線状のアルキル基、若しくは下記化学式2で表される置換基である。)
分散溶媒(a4)は、特に制限されず、当該分野で用いられている各種の有機溶剤を用いることができる。
分散樹脂(a5)は、色材(a1)の分散媒として作用するものであり、選択的に添加することができる。分散剤(a2)の単独使用よりも分散樹脂(a5)との混合使用の方が、より優れた顔料分散組成物の製造が可能である。
アルカリ可溶性樹脂(B)は、下記化学式4〜7のモノマーを含んで重合したものであってもよい。
光重合性化合物(C)は、後述する光重合開始剤の作用で重合可能な化合物であれば特に限定されないが、好ましくは、単官能光重合性化合物、2官能光重合性化合物、または3官能以上の多官能光重合性化合物などが挙げられる。
光重合開始剤(D)は、光重合性化合物(C)を重合できるものであればその種類を特に制限することなく使用できる。
溶剤(E)は、赤外線透過感光性樹脂組成物に含まれる他の成分を溶解させるのに効果的なものであれば、通常の半導体用フォトレジストにおいて用いられる溶剤を特に制限なく使用でき、特に、エーテル類、芳香族炭化水素類、ケトン類、アルコール類、エステル類、またはアミド類などが好ましい。
本発明は、前記赤外線透過感光性樹脂組成物から製造された赤外線透過画素を提供する。
攪拌機、温度計、還流冷却管、滴下ロート及び窒素導入管を備えたフラスコを用意した。その一方で、モノマー滴下ロートで、3,4−エポキシトリシクロデカン−8−イル(メタ)アクリレートと3,4−エポキシトリシクロデカン−9−イル(メタ)アクリレートとの混合物(50:50のモル比)40重量部、メチルメタクリレート50重量部、アクリル酸40重量部、ビニルトルエン70重量部、t−ブチルパーオキシ−2−エチルヘキサノエート4重量部、プロピレングリコールモノメチルエーテルアセテート(PGMEA)40重量部を投入後、攪拌混合して混合液を用意した。また、連鎖移動剤の滴下槽として、n−ドデカンチオール6重量部、PGMEA24重量部を入れて撹拌混合したものを準備した。
装置:HLC−8120GPC(東ソー(株)製)
カラム:TSK−GELG4000HXL+TSK−GELG2000HXL(直列接続)
カラム温度:40℃
移動相溶媒:テトラヒドロフラン
流速:1.0mL/min
注入量:50μL
検出器:RI
測定試料濃度:0.6質量%(溶媒:テトラヒドロフラン)
校正用標準物質:TSK STANDARD POLYSTYRENE F−40、F−4、F−1、A−2500、A−500(東ソー(株)製)
下記表1の記載に従い、製造例1〜4及び比較製造例1〜5の顔料分散組成物を調製した。具体的には、下記表1に記載の重量部で顔料分散組成物を調製した。表1に記載の重量部の色材と分散樹脂(メタクリル酸とベンジルメタクリレートとの共重合体であり、メタクリル酸単位とベンジルメタクリレート単位との比は、モル比として31:69で、ポリスチレン換算の重量平均分子量は15,000である。)、分散剤と分散助剤としてのアジスパー PB−821(味の素ファインテクノ社製)とBYK−180(BYK社製)、及び分散溶媒としてのプロピレングリコールモノメチルエーテルアセテート(PGMEA)を、ビーズミルにより2時間混合及び分散し、顔料分散組成物を調製した。
下記表2の記載に従い、ブラックマトリックス用の感光性樹脂組成物を製造した。具体的には、前記合成例1で製造したアルカリ可溶性樹脂、前記製造例で調製した顔料分散組成物、光重合性化合物(KAYARAD DPHA、日本化薬社製)、光重合性開始剤(Irgacure OXE01、BASF社製)、および溶剤(プロピレングリコールモノメチルエーテルアセテート、PGMEA)を混合し、表2の重量部で実施例及び比較例の赤外線透過感光性樹脂組成物を調製した。
前記のようにして得られたパターンに対して、下記のような物性評価を行い、その結果を下記表3に示した。
製造されたパターンの300nm〜1100nmにおける透過率を測定した。そして、赤外線720nmにおける透過率を測定し、その結果を下記表3に示した。
前記で得られたパターンを、CD−SEM(8100XP;KLA−Tencor製)を用いてパターンサイズを測定し、パターンの直線性、残渣、及びパターンの垂れを観察し、下記表3に示した。
<評価基準>
・パターンの直線性
1:非常に不良、2:不良、3:普通、4:良好、5:非常に良好
・残渣
1:非常に不良、2:不良、3:普通、4:良好、5:非常に良好
Claims (7)
- (A)色材(a1)、分散剤及び分散溶媒を含む顔料分散組成物と、(B)アルカリ可溶性樹脂と、(C)光重合性化合物と、(D)光重合開始剤と、(E)溶剤とを含み、
前記色材(a1)は、青色(blue)顔料40〜70重量%、赤色(red)顔料10〜40重量%、黄色(yellow)顔料10〜30重量%、及び黒色顔料0超過5重量%以下のみで構成されることを特徴とする、赤外線透過感光性樹脂組成物。 - 前記色材(a1)は、固形分を基準として、組成物の全重量に対して40〜70重量%で含まれる、請求項1に記載の赤外線透過感光性樹脂組成物。
- 前記青色顔料は、C.I.ピグメントブルー15:3、15:4、15:6、16、21、28、60、64及び76からなる群より選ばれる1種以上であり、
前記赤色顔料は、C.I.ピグメントレッド9、97、105、122、123、144、149、166、168、176、177、179、180、192、215、216、224、242、254、255及び264からなる群より選ばれる1種以上であり、
前記黄色顔料は、C.I.ピグメントイエロー20、24、31、53、83、86、93、94、109、110、117、125、137、138、139、147、148、150、153、154、166、173、180及び185からなる群より選ばれる1種以上である、請求項1または2に記載の赤外線透過感光性樹脂組成物。 - 請求項1〜3のいずれか1項に記載の赤外線透過感光性樹脂組成物から製造された赤外線透過画素。
- 波長390nmにおける透過率が10%以下であり、波長650nmにおける透過率が40%以下であり、波長720nmから1100nmまでの領域における透過率が90%以上である、請求項4に記載の赤外線透過画素。
- 請求項4または5に記載の赤外線透過画素を含むカラーフィルタアレイ。
- 請求項6に記載のカラーフィルタアレイを含むイメージセンサ。
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