JP6773896B2 - アリル配位子を含む金属錯体 - Google Patents
アリル配位子を含む金属錯体 Download PDFInfo
- Publication number
- JP6773896B2 JP6773896B2 JP2019513826A JP2019513826A JP6773896B2 JP 6773896 B2 JP6773896 B2 JP 6773896B2 JP 2019513826 A JP2019513826 A JP 2019513826A JP 2019513826 A JP2019513826 A JP 2019513826A JP 6773896 B2 JP6773896 B2 JP 6773896B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- metal complex
- ald
- alkyl
- nickel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 150000004696 coordination complex Chemical class 0.000 title claims description 66
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 title description 13
- 239000003446 ligand Substances 0.000 title description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 125
- 229910052751 metal Inorganic materials 0.000 claims description 98
- 239000002184 metal Substances 0.000 claims description 91
- 238000000231 atomic layer deposition Methods 0.000 claims description 81
- 238000000034 method Methods 0.000 claims description 79
- 238000005229 chemical vapour deposition Methods 0.000 claims description 62
- 229910052739 hydrogen Inorganic materials 0.000 claims description 59
- 239000001257 hydrogen Substances 0.000 claims description 56
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 53
- 239000000758 substrate Substances 0.000 claims description 50
- 229910052759 nickel Inorganic materials 0.000 claims description 47
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 37
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 27
- 239000000376 reactant Substances 0.000 claims description 25
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 24
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 18
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 17
- 150000002431 hydrogen Chemical class 0.000 claims description 17
- 229910052760 oxygen Inorganic materials 0.000 claims description 17
- 229910052799 carbon Inorganic materials 0.000 claims description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 238000005019 vapor deposition process Methods 0.000 claims description 15
- 125000004429 atom Chemical group 0.000 claims description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 239000001301 oxygen Substances 0.000 claims description 10
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 claims description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 8
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 7
- 229910000085 borane Inorganic materials 0.000 claims description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 4
- 229910021529 ammonia Inorganic materials 0.000 claims description 4
- 229910000077 silane Inorganic materials 0.000 claims description 4
- 239000003570 air Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000010408 film Substances 0.000 description 86
- 230000008569 process Effects 0.000 description 32
- 239000002243 precursor Substances 0.000 description 28
- 125000000217 alkyl group Chemical group 0.000 description 25
- 238000000151 deposition Methods 0.000 description 25
- 239000010409 thin film Substances 0.000 description 24
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 22
- 230000008021 deposition Effects 0.000 description 21
- 238000007740 vapor deposition Methods 0.000 description 16
- 239000007788 liquid Substances 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 14
- 238000002347 injection Methods 0.000 description 11
- 239000007924 injection Substances 0.000 description 11
- 239000012528 membrane Substances 0.000 description 11
- 239000012159 carrier gas Substances 0.000 description 10
- 239000007789 gas Substances 0.000 description 10
- -1 nickel metals Chemical class 0.000 description 10
- 238000002411 thermogravimetry Methods 0.000 description 10
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 9
- 229910052742 iron Inorganic materials 0.000 description 9
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 9
- 229910052707 ruthenium Inorganic materials 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 229910017052 cobalt Inorganic materials 0.000 description 8
- 239000010941 cobalt Substances 0.000 description 8
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 6
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000010926 purge Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 5
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 239000011541 reaction mixture Substances 0.000 description 5
- 230000009257 reactivity Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 150000002429 hydrazines Chemical class 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 4
- 238000005979 thermal decomposition reaction Methods 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000001928 direct liquid injection chemical vapour deposition Methods 0.000 description 3
- 150000002430 hydrocarbons Chemical group 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 239000011572 manganese Substances 0.000 description 3
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- 150000002815 nickel Chemical class 0.000 description 3
- 229910000480 nickel oxide Inorganic materials 0.000 description 3
- 125000002524 organometallic group Chemical group 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 3
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 3
- 238000000197 pyrolysis Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910021332 silicide Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000006557 surface reaction Methods 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- 125000004665 trialkylsilyl group Chemical group 0.000 description 3
- 230000004580 weight loss Effects 0.000 description 3
- RHUYHJGZWVXEHW-UHFFFAOYSA-N 1,1-Dimethyhydrazine Chemical compound CN(C)N RHUYHJGZWVXEHW-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- MZRVEZGGRBJDDB-UHFFFAOYSA-N N-Butyllithium Chemical compound [Li]CCCC MZRVEZGGRBJDDB-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 239000012043 crude product Substances 0.000 description 2
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- FMQXRRZIHURSLR-UHFFFAOYSA-N dioxido(oxo)silane;nickel(2+) Chemical compound [Ni+2].[O-][Si]([O-])=O FMQXRRZIHURSLR-UHFFFAOYSA-N 0.000 description 2
- 238000000921 elemental analysis Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- BKIMMITUMNQMOS-UHFFFAOYSA-N nonane Chemical compound CCCCCCCCC BKIMMITUMNQMOS-UHFFFAOYSA-N 0.000 description 2
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 125000000025 triisopropylsilyl group Chemical group C(C)(C)[Si](C(C)C)(C(C)C)* 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- DIIIISSCIXVANO-UHFFFAOYSA-N 1,2-Dimethylhydrazine Chemical compound CNNC DIIIISSCIXVANO-UHFFFAOYSA-N 0.000 description 1
- 238000005160 1H NMR spectroscopy Methods 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- DCERHCFNWRGHLK-UHFFFAOYSA-N C[Si](C)C Chemical compound C[Si](C)C DCERHCFNWRGHLK-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 238000004639 Schlenk technique Methods 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 125000000304 alkynyl group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000004104 aryloxy group Chemical group 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000003877 atomic layer epitaxy Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 150000004292 cyclic ethers Chemical class 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000000869 ion-assisted deposition Methods 0.000 description 1
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- HDZGCSFEDULWCS-UHFFFAOYSA-N monomethylhydrazine Chemical compound CNN HDZGCSFEDULWCS-UHFFFAOYSA-N 0.000 description 1
- YWFWDNVOPHGWMX-UHFFFAOYSA-N n,n-dimethyldodecan-1-amine Chemical compound CCCCCCCCCCCCN(C)C YWFWDNVOPHGWMX-UHFFFAOYSA-N 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- BMGNSKKZFQMGDH-FDGPNNRMSA-L nickel(2+);(z)-4-oxopent-2-en-2-olate Chemical compound [Ni+2].C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O BMGNSKKZFQMGDH-FDGPNNRMSA-L 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 1
- IOQPZZOEVPZRBK-UHFFFAOYSA-N octan-1-amine Chemical compound CCCCCCCCN IOQPZZOEVPZRBK-UHFFFAOYSA-N 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 125000003538 pentan-3-yl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])C([H])([H])[H] 0.000 description 1
- HKOOXMFOFWEVGF-UHFFFAOYSA-N phenylhydrazine Chemical group NNC1=CC=CC=C1 HKOOXMFOFWEVGF-UHFFFAOYSA-N 0.000 description 1
- 229940067157 phenylhydrazine Drugs 0.000 description 1
- 239000011941 photocatalyst Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- LPNYRYFBWFDTMA-UHFFFAOYSA-N potassium tert-butoxide Chemical compound [K+].CC(C)(C)[O-] LPNYRYFBWFDTMA-UHFFFAOYSA-N 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 125000003548 sec-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 239000005348 self-cleaning glass Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 125000000547 substituted alkyl group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- ILMRJRBKQSSXGY-UHFFFAOYSA-N tert-butyl(dimethyl)silicon Chemical compound C[Si](C)C(C)(C)C ILMRJRBKQSSXGY-UHFFFAOYSA-N 0.000 description 1
- 125000001981 tert-butyldimethylsilyl group Chemical group [H]C([H])([H])[Si]([H])(C([H])([H])[H])[*]C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- MUQNAPSBHXFMHT-UHFFFAOYSA-N tert-butylhydrazine Chemical compound CC(C)(C)NN MUQNAPSBHXFMHT-UHFFFAOYSA-N 0.000 description 1
- 125000001973 tert-pentyl group Chemical group [H]C([H])([H])C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- ZUHZGEOKBKGPSW-UHFFFAOYSA-N tetraglyme Chemical compound COCCOCCOCCOCCOC ZUHZGEOKBKGPSW-UHFFFAOYSA-N 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- HYWCXWRMUZYRPH-UHFFFAOYSA-N trimethyl(prop-2-enyl)silane Chemical compound C[Si](C)(C)CC=C HYWCXWRMUZYRPH-UHFFFAOYSA-N 0.000 description 1
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
- C07F15/04—Nickel compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F13/00—Compounds containing elements of Groups 7 or 17 of the Periodic Table
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
- C07F15/0006—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table compounds of the platinum group
- C07F15/0046—Ruthenium compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
- C07F15/02—Iron compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
- C07F15/06—Cobalt compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/406—Oxides of iron group metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02249—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by combined oxidation and nitridation performed simultaneously
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Power Engineering (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Vapour Deposition (AREA)
Description
本技術は、一般に、2つのアリル配位子を含む金属錯体、およびその金属錯体を用いて金属含有薄膜を製造する方法に関する。
薄膜を形成するために様々な前駆体が使用され、様々な蒸着技術が用いられてきた。当該技術としては、反応性スパッタリング、イオンアシスト蒸着、ゾルゲル蒸着、化学気相蒸着(CVD)(有機金属CVDまたはMOCVDとしても知られている)、および原子層堆積(ALD)(原子層エピタキシーとしても知られている)が挙げられる。CVDおよびALDプロセスは、合成制御の向上、高い膜均一性、およびドーピングの効果的な制御といった利点を有するため、ますます使用されている。さらに、CVDおよびALDプロセスは、現代の超小型デバイスに関連する高度な非平面の構造において優れたコンフォーマルな段差被覆性を提供する。
一態様によれば、式Iの金属錯体が提供される:
R1、R2、R3、R4、R5、R6、R7、R8、R9およびR10はそれぞれ独立して、水素またはC1〜C5−アルキルである。
図1は、ビス−(1−トリメチルシリルアリル)ニッケル(II)(Ni(TMS−アリル)2)の減量%と温度とのデータを示す熱重量分析(TGA)のグラフ表示である。
本技術のいくつかの実施形態の例を説明する前に、本技術は、以下の記述で説明される構成またはプロセス段階の細部に限定されないことを理解されたい。本技術は他の実施形態が可能であり、様々な方法で実施または実行されることが可能である。また、金属錯体および他の化合物は、特定の立体化学的な配置を有する構造式を用いて本明細書に例示することができることも理解されたい。これらの例示は例としてのみ意図しており、開示された構造を特定の立体化学的な配置に限定するものとして解釈されるべきではない。むしろ、記載された構造は、示された化学式を有する全ての金属錯体および化合物を包含することを意図する。
a.基板温度:50〜200℃、
b.エバポレータ温度(金属前駆体温度):0〜70℃、
c.反応器圧力:0〜10Torr、
d.アルゴンまたは窒素キャリアガスの流量:0〜50sccm、
e.オゾン処理の酸素流量:0〜300sccm、
f.水素流量:0〜50sccm、
g.実行時間:所望の膜厚によって異なる。
a.基板温度:0〜275℃、
b.エバポレータ温度(金属前駆体温度):0〜70℃、
c.反応器圧力:0〜10Torr、
d.アルゴンまたは窒素キャリアガスの流量:0〜50sccm、
e.反応ガス流量:0〜300sccm、
f.パルスシーケンス(金属錯体/パージ/反応ガス/パージ):チャンバの大きさによって異なる、
g.回転数:所望の膜厚によって異なる。
特に断りのない限り、全ての合成操作は当技術分野で一般に知られている空気反応性物質を取り扱うための技術(例えば、シュレンク技術)を用いて、不活性雰囲気(例えば、精製窒素またはアルゴン)中で行われる。
500mLのシュレンクフラスコに、アリルトリメチルシラン(26.0g、230mmol)および200mLの無水ヘキサンを入れ、溶液を形成した。当該溶液を−78℃に冷却し、ヘキサン(143.75mL、230mmol)中のn−ブチルリチウムの1.6M溶液を−78℃で滴下して添加し、反応混合物を形成した。反応混合物は淡黄色に変化した。−78℃で30分間以下の時間、撹拌した後、反応混合物を室温(18℃〜25℃)に温め、さらに4〜5時間撹拌して黄白色の透明な溶液を形成した。カリウムtert−ブトキシド(33.6g、299mmol)をN2下で上記溶液に添加し、これを室温で一晩(6時間〜12時間)撹拌した。淡黄色の沈殿物が形成された。沈殿物を、グローブボックス中の焼結漏斗を通して濾過し、ペンタンで数回洗浄し、一晩(6時間〜12時間)乾燥させ、オフホワイト(淡黄色)の生成物、K−トリメチルシリルアリルを33gの収率で得て、C6D6中の1H−NMRによって同定した。
500mLのシュレンクフラスコに、NiBr2・1,2−ジメトキシエタン(10g、32.4mmol)および150mLの無水テトラヒドロフラン(THF)を入れた。K−トリメチルシリルアリル(10g、65.8mmol)のTHF溶液100mLを−78℃で滴下して添加し、反応混合物を形成した。反応混合物を室温(18℃〜25℃)までゆっくりと温め、N2下で一晩(6時間〜12時間)撹拌した。溶媒を除去した後、残渣をペンタンで抽出した。ペンタンを除去し、暗褐色の液体(7.3g、75.5%)として粗生成物を生成した。粗生成物の蒸留を80℃、1.5Torrで行い、橙色の液体(62.1%)として6gのNi(TMS−アリル)2を生成した。元素分析は、C12H26Si2Niについて同定した:C,50.54;H,9.19。検出:C,47.88;H,8.91。
(一般的な方法)
Ni(TMS−アリル)2をステンレス製バブラーで50℃、または蒸気吸引アンプルで60〜70℃に加熱し、窒素をキャリアガスとして用いてALD/CVD反応器に送達し、ALDまたはパルスCVDによって蒸着させた。オゾン(O3)を酸素ガスからその場で、室温で生成し、共反応物としてニードルバルブを通してALD/CVD反応器に送達した。O3濃度をモニターし、200g/m3以下に維持した。使用した基板は以下の通りであった:厚さ測定、XPS(X線光電子分光法)およびSIMS(二次イオン質量分析法)解析に使用する場合、14〜17Åの厚さの範囲のネイティブなSiO2層を有するシリコンチップ;または抵抗率測定に使用する場合、1kÅ以下の厚さの熱的SiO2。H2Oを室温でニードルバルブを通してステンレス製アンプルに送達した。他のガス共反応物、H2、NH3、N2OまたはO2を、圧縮ガスシリンダーからニードルバルブを通して送達した。蒸着したままの膜を、光学エリプソメーターを用いた厚さおよび光学特性の測定、および4点プローブを用いたシート抵抗の測定に使用した。XPSおよびSIMS元素分析を、選択されたサンプルについて種々のフィルム深度で実施した。報告されたXPSおよびSIMSデータは、空気曝露に起因して存在し得る表面汚染物質を実質的に含まない膜を分析するために、NiO膜の表面層をスパッタ除去または除去した後で得られた。
Ni(TMS−アリル)2を、キャリアガスとして20sccmの窒素を用いてALD/CVD反応器中に送達し、バブラーから5秒間パルスし、続いて10〜20秒間パージし、そして200℃〜275℃の複数の温度で280サイクルまで、共反応物なしで、または5〜10秒間パルスの還元ガス、H2もしくはNH3を用いて蒸着させ、続いて20sccmの窒素を用いて10〜20秒間パージした。蒸着したままの膜を取り出す前に窒素パージ下で、反応器中で50℃以下に冷却した。約580Åまでの膜厚が蒸着された。サイクルあたりの成長速度のデータを図1にプロットした。種々の抵抗率を有する導電性フィルムを得た。250℃で共反応物を使用しなかった場合、270〜920μΩ−cmの範囲の低い抵抗率が、蒸着したままの膜で達成された。
Ni(TMS−アリル)2を、キャリアガスとして10〜20sccmの窒素を用いてALD/CVD反応器中に送達し、蒸気吸引アンプルから1〜2秒間パルスし、続いて8〜15秒間パージし、次いでH2Oの1秒間パルスおよび15〜17秒間パージして、そして137〜268℃の温度で400サイクルまで蒸着させた。1サイクルあたりの成長速度は180℃以下ではほぼ0であり、蒸着温度の上昇に伴って急速に増加し、図2に示すような共反応物なし処理と同様の傾向を示した。表1に示すような組成を決定するために、選択された膜をXPSによって分析した。225℃および246℃で蒸着された膜のXPSは、結合エネルギーによって決定されるように、主にNi金属であること、ならびにいくらかのNiOおよび6%以下のSi不純物であるが、炭素または窒素を有さないことを明らかにした。
Ni(TMS−アリル)2を、20sccmの窒素をキャリアガスとして用いてALD/CVD反応器中に送達し、バブラーから5秒間パルスし、続いて11秒間パージし、次いでニードルバルブを通してN2OまたはO2を10秒間パルスし、14秒間パージし、そして175℃、300サイクルで蒸着した。1サイクルあたりの成長速度(約0.05Å/サイクル以下)も図2にプロットした。175℃でのこれらの酸化剤による熱分解はほとんどないか、または最小限の酸化しか示さず、180℃以下でのH2Oプロセスと類似していた。
Ni(TMS−アリル)2を、キャリアガスとして20sccmの窒素を用いてALD/CVD反応器中に送達し、バブラーから5秒間パルスし、次いで20〜30秒間パージし、次いでニードルバルブを通して10秒間オゾンをパルスし、14秒間パージし、100〜225℃で275サイクルまで蒸着させた。1サイクルあたりの飽和温度依存性成長速度を図3にプロットした。ALDウィンドウを125℃〜200℃まで観察し、成長速度はNi(acac)2、Ni(thd)2、およびNi(EtCp)2などの他の多くの既知のNi前駆体(1Å/サイクル以下)よりも有意に高い1.5Å/サイクル以下でほぼ一定だった。Varun Sharma, Master Thesis "Evaluation of Novel Metalorganic Precursors for Atomic Layer Deposition of Nickel-based Thin Films", Technische Univerisitat Dresden, 2015, p. 15を参照されたい。ALDウィンドウの上限値はALD/CVD反応器における前駆体の非常に短い接触時間に起因してTGA熱分解温度(160℃以下)よりも高く、図1に示すSi基板上の熱分解データとも一致する。
パルスCVDプロセスでは、Ni(TMS−アリル)2を、30sccmのN2をキャリアガスとして用いてALD/CVD反応器に送達し、バブラーから3秒間パルスし、続いて120〜220mTorrの分圧でオゾンの連続流中で12秒間パージし、60〜200℃で200パルスまで蒸着させた。同じ量のNi(TMS−アリル)2を用いたNiOの成長速度は図5に示すように蒸着温度の低下と共に急速に増加し、これは表面基板の前駆体の吸着の増加によるものと考えられる。60℃での成長速度の低下は、この温度でのNi(TMS−アリル)2とO3との反応性の低下によるものと考えられる。
ALDとパルスCVDにより蒸着したNiO膜の633nmにおける屈折率n(633)の実数部を偏光解析法により求め、その値を図6に示すように比較した。特に高温では傾向に差が見られた。ALD NiO膜は125℃以上でALDウィンドウ内に蒸着されたとき、有意に高いn(633)を有するが、パルスCVD膜のn(633)はALDプロセスよりも低く、変動が少ない。図7に示されるSIMS分析結果は、ALDおよびパルスCVD NiOの間の炭素濃度のより大きな差異を明らかにした。
Claims (13)
- 構造が式Iに対応する金属錯体:
R1、R2、R3、R4、R5、およびR 6 がそれぞれ独立して、C 1〜C5−アルキルであり、R 7 、R 8 、R 9 およびR 10 がそれぞれ独立して、水素である。 - 上記R1、R2、R3、R4、R5、およびR 6 がそれぞれ独立して、C 1〜C4−アルキルである、請求項1に記載の金属錯体。
- 上記R1、R2、R3、R4、R5およびR6がそれぞれ独立してメチルまたはエチルである、請求項1または2に記載の金属錯体。
- 上記錯体が
- 気相蒸着プロセスにより金属含有膜を形成する方法であって、構造が式Iに対応する少なくとも1つの金属錯体を蒸発させる工程を含む方法:
R1、R2、R3、R4、R5、およびR 6 がそれぞれ独立して、C 1〜C5−アルキルであり;
および、R 7 、R 8 、R 9 およびR 10 がそれぞれ独立して、水素である。 - 上記R1、R2、R3、R4、R5、およびR 6 がそれぞれ独立して、C 1〜C4−アルキルである、請求項5に記載の方法。
- 上記R1、R2、R3、R4、R5およびR6がそれぞれ独立してメチルまたはエチルである、請求項5または6に記載の方法。
- 上記錯体が
- 上記気相蒸着プロセスが化学蒸着または原子層堆積である、請求項5〜8のいずれか1項に記載の方法。
- 上記気相蒸着プロセスが化学蒸着であって、少なくとも1つの金属錯体が50℃〜70℃の温度で蒸発し、前記金属含有膜が1×1021原子/立方センチメートル〜2×1022原子/立方センチメートルの炭素濃度を有する、請求項9に記載の方法。
- 上記気相蒸着プロセスが原子層堆積であって、少なくとも1つの金属錯体が50℃〜70℃の温度で蒸発し、前記金属含有膜が5×1019原子/立方センチメートル〜5×1021原子/立方センチメートルの炭素濃度を有する、請求項9に記載の方法。
- 上記金属錯体が、酸素供給源のパルスと交互のパルスで基板に送達され、前記酸素供給源がH2O、H2O2、O2、オゾン、空気、i−PrOH、t−BuOH、およびN2Oからなる群より選択される、請求項5〜11のいずれか1項に記載の方法。
- 水素、水素プラズマ、酸素、空気、水、アンモニア、ヒドラジン、ボラン、シラン、オゾン、およびそれらの任意の2つ以上の組み合わせからなる群より選択される少なくとも1つの共反応物を蒸発させる工程をさらに含む、請求項5〜12のいずれか1項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662385356P | 2016-09-09 | 2016-09-09 | |
US62/385,356 | 2016-09-09 | ||
PCT/EP2017/071927 WO2018046391A1 (en) | 2016-09-09 | 2017-08-31 | Metal complexes containing allyl ligands |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020118582A Division JP2020189841A (ja) | 2016-09-09 | 2020-07-09 | アリル配位子を含む金属錯体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019529403A JP2019529403A (ja) | 2019-10-17 |
JP6773896B2 true JP6773896B2 (ja) | 2020-10-21 |
Family
ID=59811301
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019513826A Active JP6773896B2 (ja) | 2016-09-09 | 2017-08-31 | アリル配位子を含む金属錯体 |
JP2020118582A Pending JP2020189841A (ja) | 2016-09-09 | 2020-07-09 | アリル配位子を含む金属錯体 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020118582A Pending JP2020189841A (ja) | 2016-09-09 | 2020-07-09 | アリル配位子を含む金属錯体 |
Country Status (8)
Country | Link |
---|---|
US (1) | US10723749B2 (ja) |
EP (1) | EP3510038B1 (ja) |
JP (2) | JP6773896B2 (ja) |
KR (1) | KR102030104B1 (ja) |
CN (1) | CN109803974B (ja) |
IL (1) | IL265052B (ja) |
TW (1) | TWI727091B (ja) |
WO (1) | WO2018046391A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020189841A (ja) * | 2016-09-09 | 2020-11-26 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングMerck Patent Gesellschaft mit beschraenkter Haftung | アリル配位子を含む金属錯体 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI745704B (zh) * | 2019-06-21 | 2021-11-11 | 國立陽明交通大學 | 氧化鎳晶片、其製備方法及用途 |
JP7259609B2 (ja) * | 2019-07-17 | 2023-04-18 | 株式会社デンソー | 半導体装置 |
KR20210034953A (ko) | 2019-09-23 | 2021-03-31 | 삼성전자주식회사 | 발광소자, 발광소자의 제조 방법과 표시 장치 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07107190B2 (ja) | 1984-03-30 | 1995-11-15 | キヤノン株式会社 | 光化学気相成長方法 |
WO2004050947A1 (ja) | 2002-12-03 | 2004-06-17 | Jsr Corporation | ルテニウム化合物および金属ルテニウム膜の製造法 |
KR101159073B1 (ko) * | 2005-09-23 | 2012-06-25 | 삼성전자주식회사 | 새로운 유기금속 전구체 물질 및 이를 이용한 금속박막의제조방법 |
JPWO2009081797A1 (ja) | 2007-12-25 | 2011-05-06 | 昭和電工株式会社 | ニッケル含有膜形成材料およびその製造方法 |
US20130168614A1 (en) * | 2011-12-29 | 2013-07-04 | L'Air Liquide Société Anonyme pour ''Etude et l'Exploitation des Procédés Georges Claude | Nickel allyl amidinate precursors for deposition of nickel-containing films |
US9194040B2 (en) * | 2012-07-25 | 2015-11-24 | Applied Materials, Inc. | Methods for producing nickel-containing films |
EP3063157B8 (en) * | 2013-10-28 | 2019-07-10 | Safc Hitech, Inc. | Metal complexes containing amidoimine ligands |
CN106460170B (zh) * | 2014-03-13 | 2019-12-06 | 默克专利股份有限公司 | 甲硅烷基环戊二烯基钼和甲硅烷基烯丙基配合物及其在薄膜沉积中的应用 |
EP3510038B1 (en) * | 2016-09-09 | 2021-02-17 | Merck Patent GmbH | Metal complexes containing allyl ligands |
-
2017
- 2017-08-31 EP EP17764356.6A patent/EP3510038B1/en active Active
- 2017-08-31 CN CN201780055438.1A patent/CN109803974B/zh active Active
- 2017-08-31 WO PCT/EP2017/071927 patent/WO2018046391A1/en unknown
- 2017-08-31 JP JP2019513826A patent/JP6773896B2/ja active Active
- 2017-08-31 US US16/330,610 patent/US10723749B2/en active Active
- 2017-08-31 KR KR1020197009829A patent/KR102030104B1/ko active IP Right Grant
- 2017-09-08 TW TW106130712A patent/TWI727091B/zh active
-
2019
- 2019-02-26 IL IL265052A patent/IL265052B/en active IP Right Grant
-
2020
- 2020-07-09 JP JP2020118582A patent/JP2020189841A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020189841A (ja) * | 2016-09-09 | 2020-11-26 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングMerck Patent Gesellschaft mit beschraenkter Haftung | アリル配位子を含む金属錯体 |
Also Published As
Publication number | Publication date |
---|---|
US20190359640A1 (en) | 2019-11-28 |
CN109803974A (zh) | 2019-05-24 |
EP3510038A1 (en) | 2019-07-17 |
TW201819394A (zh) | 2018-06-01 |
CN109803974B (zh) | 2023-04-14 |
WO2018046391A1 (en) | 2018-03-15 |
KR20190040354A (ko) | 2019-04-17 |
JP2019529403A (ja) | 2019-10-17 |
TWI727091B (zh) | 2021-05-11 |
KR102030104B1 (ko) | 2019-10-08 |
JP2020189841A (ja) | 2020-11-26 |
US10723749B2 (en) | 2020-07-28 |
IL265052A (en) | 2019-03-31 |
EP3510038B1 (en) | 2021-02-17 |
IL265052B (en) | 2021-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101659725B1 (ko) | 휘발성 디하이드로피라지닐 및 디하이드로피라진 금속 착화합물 | |
JP6596737B2 (ja) | アミドイミン配位子を含む金属複合体 | |
JP6471371B2 (ja) | モリブデンシルシクロペンタジエニル錯体、シリルアリル錯体、及び、薄膜堆積におけるその使用 | |
JP2020189841A (ja) | アリル配位子を含む金属錯体 | |
JP7026683B2 (ja) | シクロペンタジエニル配位子を含む金属錯体 | |
TWI742022B (zh) | 生成金屬膜的方法 | |
TWI794671B (zh) | 用於選擇性形成含金屬膜之化合物及方法 | |
KR20080101573A (ko) | 금속 박막 또는 세라믹 박막 증착용 유기 금속 전구체화합물 및 이를 이용한 박막 제조 방법 | |
WO2018086730A9 (en) | Metal complexes containing cyclopentadienyl ligands | |
KR20210031492A (ko) | 금속 또는 반금속-함유 필름의 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190510 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190510 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20190510 |
|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20190718 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190723 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20191021 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200120 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20200310 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200709 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20200709 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20200720 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20200728 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200915 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20201001 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6773896 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |