JP6738997B2 - Screen printer - Google Patents

Description

The present invention relates to a screen printing apparatus that slides a squeegee on a mask plate brought into contact with a substrate to fill the openings in the mask plate with paste.

A screen printing device that prints a paste such as solder on a substrate contacts a substrate with a mask plate having openings provided corresponding to the electrodes of the substrate, and slides a squeegee on the mask plate to scrape the paste. Fill the opening with paste. After the opening is filled with the paste, the plate is separated from the mask plate to separate the substrate, and the paste is transferred to the electrode of the substrate. In such a screen printing apparatus, when the plate-removing property at the time of separating the plate, that is, the transfer property of the paste filled in the opening to the substrate is poor, the amount of the paste transferred to the electrode is insufficient and printing failure occurs. It will be easier.

Printing failure due to insufficient paste amount is likely to occur in a situation where the substrate and the mask plate are not completely in close contact with each other and the paste filled in the openings does not reach the surface of the substrate sufficiently. Therefore, conventionally, a screen printing apparatus has been devised in which a substrate is brought into contact with a mask plate and then the mask plate is vacuum-sucked toward the substrate to enhance the degree of adhesion between the substrate and the mask plate. For example, Patent Document 1 below discloses a configuration in which a suction hole is provided in a box-shaped member having a top plate portion that contacts the lower surface of the substrate, and the mask plate is also suctioned while sucking the substrate through the suction hole. ing.

JP, 2015-214088, A

However, in the screen printing apparatus having the above configuration, the box-shaped member in which the suction holes for sucking the substrate and the mask plate are formed is not general-purpose, and it is necessary to individually manufacture the box-shaped member according to the substrate and the mask plate, so that the cost is high. There was a problem that it would be expensive.

Therefore, it is an object of the present invention to provide a screen printing apparatus which has an inexpensive structure and can reduce the occurrence of printing defects due to insufficient paste amount.

In the screen printing apparatus of the present invention, a mask plate having an opening provided corresponding to an electrode of the substrate is brought into contact with the substrate, and a squeegee is slid on the mask plate to scrape the paste to the opening. A screen printing device for filling a paste, which moves following the squeegee sliding on the mask plate, and a region on the mask plate on which the squeegee slides is in non-contact with the mask plate. A cover member that covers in a state, and an air supply unit that supplies air to an internal space formed by the cover member, and the paste filled in the opening in the region on the mask plate covered by the cover member is , Is pressed down toward the substrate side by receiving the pressure in the internal space supplied with air from the air supply unit , the cover member is movable up and down with respect to the squeegee, and is attached to the mask plate by an elastic member. It is biased to the by floating with respect to the mask plate under the pressure in the internal space, ing in a non-contact state with respect to the mask plate.

According to the present invention, it is possible to reduce the occurrence of printing defects due to insufficient paste amount with an inexpensive configuration.

1 is a perspective view of a screen printing device according to a first embodiment of the present invention. The side view of the screen printing apparatus in 1st Embodiment of this invention. A perspective view of a part of the screen printing apparatus according to the first embodiment of the present invention. The top view of a part of screen printing apparatus in 1st Embodiment of this invention. Configuration diagram of a print head included in the screen printing apparatus according to the first embodiment of the present invention The exploded perspective view of the squeegee unit with which the print head of the screen printing apparatus in 1st Embodiment of this invention is equipped. Block diagram showing a control system of the screen printing apparatus in the first embodiment of the present invention (A) (b) Operation explanatory drawing of the screen printing apparatus in 1st Embodiment of this invention (A) (b) Operation explanatory drawing of the screen printing apparatus in 1st Embodiment of this invention (A) (b) Operation explanatory drawing of the screen printing apparatus in 1st Embodiment of this invention (A) (b) Operation explanatory drawing of the screen printing apparatus in 1st Embodiment of this invention (A) (b) Operation explanatory drawing of the filling assistance part with which the squeegee unit of the screen printing apparatus in 1st Embodiment of this invention is equipped. (A) (b) The figure explaining the mode that the paste in an opening is pushed down by the filling assistance part with which the squeegee unit of the screen printing apparatus in 1st Embodiment of this invention is equipped. Configuration diagram of a print head included in a screen printing apparatus according to a second embodiment of the present invention

(First embodiment)
First, the first embodiment of the present invention will be described. FIG. 1 shows a screen printing apparatus 1 according to the first embodiment of the present invention. The screen printing apparatus 1 carries in and positions the substrate 2 from the upstream process side, screen-prints a paste Pst such as solder on each electrode 2d of the substrate 2 and carries it out to the downstream process side. Here, for convenience of explanation, the left-right direction viewed from the operator OP is the X-axis direction, the left side is the upstream process side, and the right side is the downstream process side. Further, the front-back direction viewed from the operator OP is the Y-axis direction, and the up-down direction is the Z-axis direction.

1, FIG. 2 and FIG. 3, the screen printing apparatus 1 is provided with a carry-in conveyor 12, a substrate elevating mechanism 13 and an unloading conveyor 14 on a base 11, and above the substrate elevating mechanism 13 a mask plate 15 and a camera. The unit 16 and the print head 17 are provided. The substrate elevating mechanism 13 is provided in the center of the base 11, and the carry-in conveyor 12 is provided on the left side of the substrate elevating mechanism 13. The carry-out conveyor 14 is provided on the right side of the substrate elevating mechanism 13 (see also FIG. 4).

2 and 3, the substrate elevating mechanism 13 includes a substrate holding unit 21 and an elevating mechanism unit 22. The substrate holding unit 21 includes a positioning conveyor 31, a lower receiving unit 32, and a pair of front and rear clampers 33 (see also FIG. 4). The positioning conveyor 31 positions the substrate 2 received from the carry-in conveyor 12 at a predetermined clamp position. The lower receiving portion 32 supports the substrate 2 positioned at the clamp position from below. The clamper 33 clamps and holds the substrate 2 supported by the lower receiving portion 32 from the side (Y-axis direction). The elevating mechanism unit 22 is composed of an XYθ table in which a plurality of table members are stacked in multiple stages, and moves the substrate holding unit 21 in the horizontal plane and in the vertical direction.

1, FIG. 2 and FIG. 4, the mask plate 15 is made of a rectangular flat plate-shaped metal member extending in the XY plane. The outer periphery of the mask plate 15 is supported by the frame member 15W. A large number of openings 15H are provided in the central portion of the mask plate 15 (FIG. 4). These openings 15H are provided corresponding to the electrodes 2d of the substrate 2.

In FIG. 2, the camera unit 16 includes an upper imaging section 16a having an imaging field of view directed upward and a lower imaging section 16b having an imaging field of field directed downward. The camera unit 16 is driven by a camera unit moving mechanism 16K (see also FIG. 1) having a ball screw mechanism as an actuator to move in the XY plane.

1 and 2, the print head 17 includes a moving base 41, two squeegee lifting cylinders 42, and two squeegee units 43. The moving base 41 extends in the X-axis direction and is driven by the print head moving mechanism 17K including a ball screw mechanism to move the mask base 15 above the mask plate 15 in the Y-axis direction.

1 and 2, the two squeegee lifting cylinders 42 are provided on the upper surface of the moving base 41 side by side in the Y-axis direction. Each squeegee lifting cylinder 42 has a piston rod 42R protruding below the moving base 41 (FIG. 5).

In FIGS. 5 and 6, the two squeegee units 43 each include a holder 51, a squeegee 52, and a filling assist portion 53. The holder 51 is attached to the lower end of the piston rod 42R of the squeegee lifting cylinder 42.

In FIGS. 5 and 6, the squeegee 52 is made of a “spatular” member extending in the X-axis direction. When the two squeegees 52 are viewed from the width direction (X-axis direction), the two squeegees 52 extend obliquely in a posture of spreading downward (FIGS. 2 and 5). The surfaces of the two squeegees 52 facing each other are surfaces that scrape the paste Pst, and are referred to as scraping surfaces in the following description. The surface opposite to the scraping surface is referred to as the back surface. When the squeegee lifting cylinder 42 operates the piston rod 42R in the vertical direction, the squeegee unit 43 moves up and down below the moving base 41 with respect to the moving base 41.

5 and 6, each filling assist portion 53 includes a plurality of guide pins 61 attached to the holder 51, a cover member 62 connected to the guide pins 61, and a plurality of spring members inserted into the guide pins 61. It is equipped with 63. Each guide pin 61 vertically penetrates a vertical through hole 51a provided in the holder 51. A stopper portion 61a having a larger outer shape than the vertical through hole 51a is provided at the upper end of each guide pin 61, and a screw portion 61b is formed at the lower end.

The cover member 62 has a box shape that opens downward and has a space (hereinafter, referred to as an internal space 62R) formed therein. The cover member 62 is located on the back side of the squeegee 52, and the screw portion 61b of the guide pin 61 is screwed into the screw mounting hole 62a provided on the upper surface. The spring member 63 is contracted between the holder 51 and the cover member 62, and biases the cover member 62 downward with respect to the holder 51. In this way, the cover member 62 can be moved up and down with respect to the holder 51 (and thus with respect to the squeegee 52) by the guide pin 61, and downward (that is, toward the mask plate 15 side) by the spring member 63 that is an elastic member. It is in a biased state. The elastic member that biases the cover member 62 toward the mask plate 15 is made of the spring member 63 here, but may be made of another member having a cushioning property such as sponge or urethane.

When the pushing force from below is not applied to the cover member 62, the cover member 62 is suspended by its own weight and the biasing force of the spring member 63 (FIG. 5). At this time, the stopper portion 61a of the guide pin 61 contacts the upper surface of the holder 51, and the lower surface of the cover member 62 is positioned at substantially the same height as the lower end of the squeegee 52 (or slightly below the lower end of the squeegee 52). When the cover member 62 in the hanging state receives a pushing-up force, the cover member 62 pushes and contracts the spring member 63, and lifts up relative to the holder 51 while separating the stopper portion 61a of the guide pin 61 above the holder 51. ..

In FIG. 5, an air pressure generation source 70 supplies air whose pressure has been raised to a predetermined level into an air pipe 71. The air supplied into the air duct 71 is adjusted (pressure adjusted) to a predetermined level of at least atmospheric pressure or more by the pressure adjusting valve 72. The air duct 71 through which the air whose pressure is regulated by the pressure regulating valve 72 passes is opened or closed by the opening/closing valve 73. The air pipeline 71 branches into two air supply passages 74 via an opening/closing valve 73, and when the opening/closing valve 73 opens the air pipeline 71, air is supplied to one of the two air supply passages 74 ( Air pressure) is supplied. Each of the two air supply passages 74 is connected to the cover member 62. Each air supply path 74 communicates with the internal space 62R formed by the cover member 62 on the connected side (FIG. 5).

The air pressure generation source 70, the air pipe 71, the pressure adjustment valve 72, the opening/closing valve 73, and the air supply passage 74 constitute an air supply portion 75 that supplies air (air pressure) to the internal space 62R of the cover member 62 (FIG. 5). ). When the opening/closing valve 73 opens the air supply passage 74 connected to the front cover member 62 (closes the air supply passage 74 connected to the rear cover member 62), the air pressure-controlled by the pressure adjusting valve 72 is applied to the front cover member 62. Is supplied to the inner space 62R. On the other hand, when the opening/closing valve 73 opens the air supply passage 74 connected to the rear cover member 62 (closes the air supply passage 74 connected to the front cover member 62), the air pressure-controlled by the pressure adjusting valve 72 is applied to the rear cover. It is supplied to the inner space 62R of the member 62.

In FIG. 5, a pressure sensor 76 is provided in each of the two air supply passages 74. These pressure sensors 76 measure the pressure in the corresponding air supply passage 74, and use the measured information as the pressure in the internal space 62R of the cover member 62 to which the air supply passage 74 is connected, and use that information as the control device 80. Output to. The pressure sensor 76 may be installed in the internal space 62R.

In FIGS. 5 and 6, an air outlet 62H is provided on the side surface of the cover member 62. The air outlet 62H connects the inner space 62R of the cover member 62 to the outside of the cover member 62. The air flow outlet 62H is provided with a flow rate adjusting valve 62V. The operator OP can change the opening degree of the air outlet 62H by operating the flow rate adjusting valve 62V.

In FIG. 7, the control device 80 included in the screen printing apparatus 1 controls each of the transfer operation of the board 2 by the carry-in conveyor 12, the holding and moving operation of the board 2 by the board elevating mechanism 13, and the transfer operation of the board 2 by the carry-out conveyor 14. I do. The control device 80 also moves the print head 17 by the print head moving mechanism 17K, moves the squeegee unit 43 up and down by the squeegee lifting cylinder 42, moves the camera unit 16 by the camera unit moving mechanism 16K, and captures the image of the camera unit 16. Perform each control of operation.

In FIG. 7, the control device 80 controls each of the pressure adjusting valve 72 and the opening/closing valve 73 that configure the air supply unit 75 (see also FIG. 5). The image data obtained by the imaging operation of the camera unit 16 is sent to the control device 80, and the control device 80 causes the image recognition section 80a to perform image recognition based on the sent image data. Information on the pressure in the internal space 62R of the two cover members 62 measured by the two pressure sensors 76 is also input to the control device 80 (see also FIG. 5).

In FIG. 7, a touch panel 81 as an input/output device is connected to the control device 80. The touch panel 81 functions as an input device for the operator OP to make a required input to the control device 80, and the control device 80 displays the state of the screen printing device 1 to the worker OP and gives a work instruction to the worker OP. Function as an output device.

When performing the screen printing work of printing the paste Pst on the substrate 2 by the screen printing device 1, the operator OP performs a work start operation from the touch panel 81. When the operator OP performs a work start operation from the touch panel 81, the carry-in conveyor 12 is controlled and operated by the control device 80 to receive the substrate 2 supplied from the outside and deliver it to the substrate holding unit 21. Upon receiving the substrate 2 by the positioning conveyor 31, the substrate holding unit 21 conveys the substrate 2 and positions it at a predetermined clamp position, supports the substrate 2 from below by the lower receiving unit 32, and clamps it by the clamper 33. (FIG. 8A. Arrow A shown in the figure).

When the substrate holder 21 holds the substrate 2, the camera unit moving mechanism 16K operates to move the camera unit 16 between the substrate 2 and the mask plate 15. As a result, the upper imaging unit 16a of the camera unit 16 images the mask side mark 15m (FIG. 4) provided on the mask plate 15 from below (FIG. 8B), and the lower imaging unit 16b is the substrate side mark of the substrate 2. An image of 2 m (FIG. 3) is taken from above (FIG. 9(a)).

After capturing the mask side mark 15m and the board side mark 2m, the camera unit 16 transmits the image data to the control device 80. Upon receiving the image data, the control device 80 recognizes the image in the image recognition unit 80a and calculates the positions of the mask side mark 15m and the substrate side mark 2m.

After the positions of the mask-side mark 15m and the substrate-side mark 2m are calculated, the substrate elevating mechanism 13 moves the substrate 2 to match the mask-side mark 15m and the substrate-side mark 2m in plan view. When the mask-side mark 15m and the substrate-side mark 2m coincide with each other in plan view, the substrate elevating mechanism 13 raises the substrate 2 to bring the upper surface of the substrate 2 into contact with the lower surface of the mask plate 15 (FIG. 9B). Arrow B) shown inside. As a result, the electrode 2d of the substrate 2 is exposed on the upper surface of the mask plate 15 through the corresponding opening 15H.

When the substrate 2 contacts the mask plate 15, one squeegee lifting cylinder 42 lowers the squeegee 52 to bring it into contact with the mask plate 15. When the squeegee 52 contacts the mask plate 15, the print head moving mechanism 17K moves the moving base 41 in the Y-axis direction. The moving direction of the squeegee 52 is from the front to the rear for the front squeegee 52 (FIG. 10A to FIG. 10B), and for the rear squeegee 52, the direction from the rear to the front. (FIG. 11(a)→FIG. 11(b)). Since the squeegee 52 sliding on the mask plate 15 scrapes the paste Pst by the scraping surface, the paste Pst is filled in each opening 15H in the region on the mask plate 15 through which the squeegee 52 has passed.

When the opening 15H is filled with the paste Pst as described above, the filling assist unit 53 assists the filling. The filling assist by the filling assist portion 53 is performed while the squeegee 52 is sliding on the mask plate 15. Therefore, the supply of air (air pressure) to the inner space 62R of the cover member 62 is started after the squeegee 52 contacts the mask plate 15.

When the squeegee 52 contacts the mask plate 15, the cover member 62 also contacts the mask plate 15 (FIG. 12A). At this point, the air is not yet supplied to the inner space 62R, and the pressure in the inner space 62R remains at the atmospheric pressure level. When the cover member 62 comes into contact with the mask plate 15, the cover member 62 receives the push-up force from the mask plate 15 and compresses the spring member 63, so that a reaction force from the spring member 63 acts on the cover member 62. Then, the mask plate 15 is pressed (arrow C shown in FIG. 12A).

When the squeegee 52 and the cover member 62 come into contact with the mask plate 15 and the squeegee 52 starts sliding on the mask plate 15, the control device 80 operates the opening/closing valve 73 to make the cover member 62 in contact with the mask plate 15. The air is supplied to the inner space 62R of. As a result, the pressure in the inner space 62R rises, and the cover member 62 receives the pressure in the inner space 62R and tries to float up from the mask plate 15. Here, when the pressure in the internal space 62R reaches a predetermined pressure (a pressure that causes the spring member 63 to urge the cover member 62 downward and a force that exceeds the sum of the weight of the cover member 62), the cover member 62. Float above the mask plate 15 and a gap Sk is formed between the cover member 62 and the mask plate 15 (FIG. 12B). Note that the air supply to the internal space 62R may be started before the squeegee 52 and the cover member 62 are brought into contact with the mask plate 15. In this case, the cover member 62 does not come into contact with the mask plate 15 and the mask plate 15 is not brought into contact with the mask plate 15. There is a possibility that it will be lifted from 15.

The air supply to the internal space 62R is continued while the squeegee 52 slides on the mask plate 15. Therefore, the state in which the cover member 62 is lifted from the mask plate 15 is maintained while the squeegee 52 slides on the mask plate 15. When the cover member 62 is lifted from the mask plate 15 and the gap Sk is formed, a part of the air in the internal space 62R flows out of the cover member 62 through the gap Sk (see FIG. 12B). Indicated arrow f1).

When the squeegee 52 slides on the mask plate 15, the cover member 62 located on the back side of the squeegee 52 moves following the squeegee 52 sliding on the mask plate 15, and the squeegee 52 slides. The area on the mask plate 15 is covered in a non-contact state with the mask plate 15. Since air having a pressure equal to or higher than atmospheric pressure is supplied to the inner space 62R of the cover member 62 from the air supply portion 75, the opening 15H in the region on the mask plate 15 covered by the cover member 62 is filled. The paste Pst receives the pressure Pr in the internal space 62R supplied with air from the air supply unit 75 and is pushed down toward the substrate 2 side (FIG. 13(a)→FIG. 13(b)). As a result, even when the substrate 2 and the mask plate 15 are not completely in close contact with each other and there is a gap KG between them, as shown in FIGS. The filled paste Pst surely reaches the substrate 2 (FIG. 13B).

Here, the control device 80 is the side to which the air is supplied based on the information on the pressure in the air supply path 74 sent from the two pressure sensors 76 interposed in the two air supply paths 74, respectively. The pressure adjusting valve 72 is controlled so that the pressure in the inner space 62R of the cover member 62 becomes a predetermined pressure. Therefore, the pressure in the internal space 62R is maintained at a predetermined pressure, and the pressure (pressing pressure) when pressing down the paste Pst filled in the opening 15H can be maintained at a desired value. Further, since the pressing down pressure can be set arbitrarily, even if it is desired to change the pressing down pressure depending on the size of the opening 15H, the viscosity of the paste Pst, etc., this can be easily dealt with.

As described above, the pressure adjusting valve 72 included in the air supply unit 75 adjusts the level of the pressure of the air supplied to the internal space 62R of the cover member 62, and further, inside the internal space 62R sent from the pressure sensor 76. It is a pressure adjusting means for maintaining the pressure in the internal space 62R at a predetermined pressure based on the information on the pressure.

Here, since the cover member 62 is not in contact with the mask plate 15, the cover member 62 that moves following the squeegee 52 can cover the paste Pst left behind by the squeegee 52. ing. Further, since a part of the air in the internal space 62R flows out to the outside from the gap Sk formed between the cover member 62 and the mask plate 15, the pressure in the internal space 62R becomes excessive. Is prevented. Further, since the cover member 62 can be moved up and down with respect to the squeegee 52 (that is, with respect to the mask plate 15), the spring member 63 can be replaced (by another spring member 63 having a different spring constant) or the like, so that the gap The size of Sk can be changed. Therefore, the size of the gap Sk formed between the cover member 62 and the mask plate 15 can be set to an optimum value.

As described above, a part of the air in the inner space 62R of the cover member 62 flows out of the cover member 62 through the gap Sk between the cover member 62 and the mask plate 15, but the air in the inner space 62R does not. Can also flow out from the air outlet 62H provided on the side surface of the cover member 62 (arrow f2 shown in FIG. 12B). The air flowing out from the gap Sk between the cover member 62 and the mask plate 15 may scatter the paste Pst in the opening 15H covered by the cover member 62, but the air in the internal space 62R is aired. By flowing out from the outlet 62H as well, the flow rate of the air flowing out from the gap Sk can be reduced, and the disadvantage that the paste Pst is scattered can be prevented.

As described above, the air outlet 62H provided on the side surface of the cover member 62 covers the air in the internal space 62R with a flow path different from the flow path passing through the gap Sk between the cover member 62 and the mask plate 15. It is made to flow out of 62. As described above, the air flow outlet 62H is provided with the flow rate adjusting valve 62V, and the flow rate adjusting valve 62V is operated to change the opening degree of the air flow outlet 62H. Since the flow rate can be adjusted freely, the flow rate of the air flowing out from the gap Sk can be finely controlled.

When the front or rear squeegee 52 completes filling the opening 15H of the mask plate 15 with the paste Pst as described above, the substrate elevating mechanism 13 causes the elevating mechanism unit 22 to lower the substrate holding unit 21 to mask the substrate 2. The plate 15 is separated and the plate is separated. As a result, the paste Pst filled in the openings 15H of the mask plate 15 is transferred onto each electrode 2d of the substrate 2. The substrate elevating mechanism 13 opens the clamper 33 of the substrate holding unit 21 after releasing the plate to release the holding of the substrate 2 and operates the positioning conveyor 31 to transfer it to the carry-out conveyor 14. The carry-out conveyor 14 carries out the received substrate 2 to the downstream process side, and the screen printing for each substrate 2 is completed.

(Second embodiment)
Next, a second embodiment of the present invention will be described. The screen printing apparatus 1 according to the second embodiment differs from the screen printing apparatus 1 according to the first embodiment described above only in the filling assist unit 53. FIG. 14 shows the configuration of the filling assist unit 53 of the screen printing apparatus 1 in the second embodiment, and those having the same functions as those in the first embodiment are designated by the same reference numerals as those in the first embodiment. There is.

In FIG. 14, the holder 51 is provided with a cover member elevating cylinder 90 as a cover member elevating means. The upper surface of the cover member 62 is coupled to the lower end of the piston rod extending below the cover member elevating cylinder 90. As described above, in the second embodiment, the cover member 62 is configured to be movable up and down by the cover member lift cylinder 90 attached to the holder 51 (thus moving along with the squeegee 52).

As shown in FIG. 14, the operation of each of the two cover member elevating cylinders 90 is controlled by the controller 80. The cover member raising/lowering cylinder 90 controlled by the controller 80 raises/lowers the cover member 62 with respect to the mask plate 15 and separates the cover member 62 from the mask plate 15 to move the cover member 62 to the mask plate 15. It is in a non-contact state.

When the cover member 62 is in a non-contact state with the mask plate 15, a gap Sk is formed between the cover member 62 and the mask plate 15 so that the air in the internal space 62R flows out to the outside. The cover member lifting cylinder 90 maintains the state in which the cover member 62 is separated from the mask plate 15 while the squeegee 52 slides on the mask plate 15. In the state where the cover member 62 is separated from the mask plate 15 in this way, a part of the air in the internal space 62R flows out of the cover member 62 through the gap Sk.

Even in such a configuration, the paste Pst filling the openings 15H in the region on the mask plate 15 covered by the cover member 62 has the internal space of the cover member 62 supplied with air from the air supply unit 75. The pressure Pr in 62R is received and pushed down to the substrate 2 side (FIG. 13(a)→FIG. 13(b)). As a result, even if the substrate 2 and the mask plate 15 are not completely in close contact with each other and there is a gap KG between them, as shown in FIGS. The filled paste Pst surely reaches the substrate 2 (FIG. 13B). Although the cover member elevating means for elevating and lowering the cover member 62 is made up of a cylinder (cover member elevating cylinder 90) here, the cover member 62 is elevating and lowering by a mechanism combining a motor and a ball screw. May be.

As described above, in the screen printing apparatus 1 according to the above-described first and second embodiments, the squeegee 52 that slides on the mask plate 15 follows and moves, and the squeegee 52 slides on the mask plate 15. The air is supplied to the inner space 62R of the cover member 62 that covers the area of the mask plate 15 in a non-contact state, and the opening in the area on the mask plate 15 covered by the cover member 62. The paste Pst filled in 15H is pushed down toward the substrate 2 side by receiving the pressure of the internal space 62R supplied with air. Therefore, the paste Pst with which the opening 15H is filled surely reaches the substrate 2, and the plate removal property at the time of plate separation is improved. Since these screen printing apparatuses 1 can be used universally regardless of the substrate 2 and the mask plate 15, it is possible to reduce the occurrence of printing defects due to an insufficient paste amount with an inexpensive configuration.

Provided is a screen printing device which has an inexpensive structure and can reduce the occurrence of printing defects due to insufficient paste amount.

1 Screen Printing Device 2 Substrate 2d Electrode 15 Mask Plate 15H Opening 52 Squeegee 62 Cover Member 62R Internal Space 62H Air Outlet 62V Flow Control Valve 63 Spring Member (Elastic Member)
75 air supply unit 90 cover member lifting cylinder (cover member lifting means)
Sk gap Pst paste

Claims (4)

In a screen printing device in which a mask plate having an opening provided corresponding to an electrode of a substrate is brought into contact with the substrate and a squeegee is slid on the mask plate to scrape the paste to fill the opening with the paste. There
A cover member that moves following the squeegee sliding on the mask plate and covers a region on the mask plate on which the squeegee slides in a non-contact state with the mask plate;
An air supply unit for supplying air to the internal space formed by the cover member,
The paste filled in the opening in the area on the mask plate covered by the cover member is pressed down to the substrate side by receiving the pressure in the internal space supplied with air from the air supply unit. ,
The cover member is movable up and down with respect to the squeegee, is biased toward the mask plate by an elastic member, and is lifted with respect to the mask plate by receiving the pressure in the internal space. screen printing apparatus according to claim Rukoto such a non-contact state relative to the plate. The screen printing apparatus according to claim 1, wherein the air supply unit includes a pressure adjusting unit that adjusts a level of pressure of air supplied to the internal space. The side surface of the cover member is provided with an air outlet for flowing the air in the internal space to the outside of the cover member through a flow path different from the flow path passing through the gap between the cover member and the mask plate. screen printing apparatus according to claim 1 or 2, characterized in that. The screen printing apparatus according to claim 3 , wherein the air outlet is provided with a flow rate adjusting valve that adjusts a flow rate of the air flowing out of the cover member from the air outlet.

Images