JP6720963B2 - 薄膜トランジスタアレイ、画像表示装置および薄膜トランジスタアレイの製造方法 - Google Patents
薄膜トランジスタアレイ、画像表示装置および薄膜トランジスタアレイの製造方法 Download PDFInfo
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Description
なお、ゲート電極、ゲート電極に接続されたゲート配線、キャパシタ電極、及びキャパシタ電極に接続されたキャパシタ配線は、ソース電極とドレイン電極よりも下部(絶縁基板側)に形成しても良いし(ボトムゲート型)、上部に形成しても良い(トップゲート型)。
なお、ゲート電極、ゲート電極に接続されたゲート配線、キャパシタ電極、及びキャパシタ電極に接続されたキャパシタ配線は、ソース電極とドレイン電極よりも下部(絶縁基板側)に形成しても良いし(ボトムゲート型)、上部に形成しても良い(トップゲート型)。
図1に、第1の実施形態に係る薄膜トランジスタアレイ100を示す。薄膜トランジスタアレイ100は、絶縁基板1と、絶縁基板1上に形成された、複数のゲート電極2、ゲート電極2に接続された複数のゲート配線2’、複数のキャパシタ電極10、及びキャパシタ電極10に接続された複数のキャパシタ配線10’と、絶縁基板1、ゲート電極2、ゲート配線2’、キャパシタ電極10、及びキャパシタ電極10上に形成されたゲート絶縁膜3と、ゲート絶縁膜3上に形成された複数のソース電極4、ソース電極4に接続された複数のソース配線4’、複数のドレイン電極5、及びドレイン電極5に接続された複数の画素電極7とを有し、画素電極7はゲート絶縁膜3を介してキャパシタ電極10と重なっていて蓄積容量を有し、ソース電極4とドレイン電極5とがゲート絶縁膜3を介してゲート電極2と重なっており、ソース電極4とドレイン電極5との間に半導体層6を有し、キャパシタ配線10’の途中には抵抗12を備える。ただし図1では、わかりやすいように配線図の形で記載している。
図4に、第2の実施形態に係る薄膜トランジスタアレイ200を示す。薄膜トランジスタアレイ200は、絶縁基板1と、絶縁基板1上に形成された、複数のゲート電極2、ゲート電極2に接続された複数のゲート配線2’、複数のキャパシタ電極10、及びキャパシタ電極10に接続された複数のキャパシタ配線10’と、絶縁基板1、ゲート電極2、ゲート配線2’、キャパシタ電極10、及びキャパシタ電極10上に形成されたゲート絶縁膜3と、ゲート絶縁膜3上に形成された複数のソース電極4、ソース電極4に接続された複数のソース配線4’、複数のドレイン電極5、及びドレイン電極5に接続された複数の画素電極7とを有し、画素電極7はゲート絶縁膜3を介してキャパシタ電極10と重なっていて蓄積容量を有し、ソース電極4とドレイン電極5とがゲート絶縁膜3を介してゲート電極2と重なっており、ソース電極4とドレイン電極5との間に半導体層6を有し、キャパシタ配線10’の途中には抵抗12を備え、抵抗12は、ゲート電極2、ゲート配線2’、キャパシタ電極10、キャパシタ配線10’と同時に印刷で形成される。なお、薄膜トランジスタアレイ200と薄膜トランジスタアレイ100とは、抵抗12の形成方法及び構造が異なり、その他の構造については同様であるため、図4では、ゲート配線2’、キャパシタ配線10’、抵抗12のみを示して、それ以外の構成の記載を省略する。
具体的な実施例について説明する。実施例1として、図2Aに示す薄膜トランジスタアレイ100を、図3A〜図3Gに示す工程で作製した。まず、絶縁基板1としてガラス基板を用意し、Agインキをオフセット印刷・焼成して、ゲート電極2、ゲート配線2’、キャパシタ電極10、キャパシタ配線10’を形成した(図3A)。
実施例2として、図4に示す薄膜トランジスタアレイ200を、図5A〜図5Hに示す工程で作製した。まず、絶縁基板1としてPEN基板を用意し、Agインキをオフセット印刷・焼成して、ゲート電極2、ゲート配線2’、キャパシタ電極10、キャパシタ配線10’、抵抗12を形成した(図5A)。抵抗12の値は10kΩであった。
実施例3として、図4に示す薄膜トランジスタアレイ200を、図6A〜図6Gに示す工程で作製した。まず、絶縁基板1としてPEN基板を用意し、Agインキをオフセット印刷・焼成して、ソース電極4、ソース配線4’、ドレイン電極5、画素電極7を形成した(図6A)。
抵抗12を挿入しなかったこと以外は、実施例1と同様の工程にて、薄膜トランジスタアレイを作製した。キャパシタ配線10’を1本にまとめた部分からキャパシタ給電部10sまでのキャパシタ配線10’の抵抗値をテスターで測ると、50Ωであった。
抵抗12の値が100kΩであったこと以外は、実施例1と同様の工程にて、薄膜トランジスタアレイを作製した。
2 ゲート電極
2’ ゲート配線
3 ゲート絶縁膜
4 ソース電極
4’ ソース配線
5 ドレイン電極
6 半導体層
6’ 保護層
7 画素電極
8 層間絶縁膜
9 上部画素電極
10 キャパシタ電極
10’ キャパシタ配線
10s キャパシタ給電部
11 キャパシタ電源
11a コモン電源
12 抵抗
13 フレキシブルプリント基板
14 ゲートドライバ
20 短絡部
30 対向基板
31 対向電極
32 表示媒体
100、200、500 薄膜トランジスタアレイ
Claims (13)
- 絶縁基板と、
ゲート絶縁膜と、
複数のゲート電極、前記ゲート電極に接続された複数のゲート配線、複数のキャパシタ電極、前記キャパシタ電極に接続された複数のキャパシタ配線と、これらとの間に前記ゲート絶縁膜を挟む、複数のソース電極、前記ソース電極に接続された複数のソース配線、複数のドレイン電極、前記ドレイン電極に接続された複数の画素電極とを備え、
前記画素電極は前記ゲート絶縁膜を介して前記キャパシタ電極と重なっていて蓄積容量を有し、
前記ソース電極と前記ドレイン電極とが前記ゲート絶縁膜を介して前記ゲート電極と重なっており、
前記ソース電極と前記ドレイン電極との間に半導体層を有し、
複数の前記キャパシタ配線は1本になって電源に接続されており、複数の前記キャパシタ配線が集まって1本になっている部分に抵抗が設けられる、薄膜トランジスタアレイ。 - 前記ゲート電極、前記ゲート配線、前記キャパシタ電極、及び前記キャパシタ配線は、前記絶縁基板上に形成され、
前記ゲート絶縁膜は、前記絶縁基板、前記ゲート電極、前記ゲート配線、前記キャパシタ電極、及び前記キャパシタ配線上に形成され、
前記ソース電極、前記ソース配線、前記ドレイン電極、及び前記画素電極は、前記ゲート絶縁層膜上に形成される、請求項1に記載の薄膜トランジスタアレイ。 - 前記ソース電極、前記ソース配線、前記ドレイン電極、及び前記画素電極は、前記絶縁基板上に形成され、
前記ゲート絶縁膜は、前記絶縁基板、前記ソース電極、前記ソース配線、前記ドレイン電極、及び前記画素電極上に形成され、
前記ゲート電極、前記ゲート配線、前記キャパシタ電極、及び前記キャパシタ配線は、前記ゲート絶縁膜上に形成される、請求項1に記載の薄膜トランジスタアレイ。 - 少なくとも前記ゲート電極と、前記ゲート配線と、前記キャパシタ電極と、前記キャパシタ配線とが、同一材料からなる、請求項1〜3のいずれかに記載の薄膜トランジスタアレイ。
- 前記抵抗の電気抵抗値が、フレーム時間を、前記キャパシタ配線に接続された全蓄積容量で割った値より小さい、請求項1〜4のいずれに記載の薄膜トランジスタアレイ。
- 前記抵抗の電気抵抗値が、前記ゲート配線と前記キャパシタ配線との間の電圧の絶対値を、ゲートドライバの最大許容出力電流で割った値より大きい、請求項1〜5のいずれかに記載の薄膜トランジスタアレイ。
- 前記抵抗が、前記キャパシタ配線の途中に形成された長配線部である、請求項1〜6のいずれかに記載の薄膜トランジスタアレイ。
- 前記抵抗が、前記キャパシタ配線の途中に挿入された別部品である、請求項1〜6のいずれかに記載の薄膜トランジスタアレイ。
- 請求項1〜8のいずれかに記載の薄膜トランジスタアレイを組み込んだことを特徴とする画像表示装置。
- 絶縁基板上に、複数のゲート電極、前記ゲート電極に接続された複数のゲート配線、複数のキャパシタ電極、前記キャパシタ電極に接続され、集まって一本になって電源に接続された複数のキャパシタ配線を印刷法により形成する工程と、
複数の前記キャパシタ配線が集まって1本になっている部分に抵抗を形成する工程と、
前記ゲート電極、前記ゲート配線、前記キャパシタ電極、及び前記キャパシタ配線上にゲート絶縁膜を形成する工程と、
前記ゲート絶縁膜の上に複数のソース電極、前記ソース電極に接続された複数のソース配線、複数のドレイン電極、及び前記ドレイン電極に接続された複数の画素電極とを形成する工程と、
前記ソース電極、及び前記ドレイン電極の間に半導体層を形成する工程とを含む、薄膜トランジスタアレイの製造方法。 - 絶縁基板上に、複数のソース電極、前記ソース電極に接続された複数のソース配線、複数のドレイン電極、及び前記ドレイン電極に接続された複数の画素電極とを形成する工程と、
前記ソース電極、及び前記ドレイン電極の間に半導体層を形成する工程と、
前記ソース電極、前記ソース配線、前記ドレイン電極、及び前記画素電極の上に、前記画素電極上に開口を有するゲート絶縁膜を形成する工程と、
前記ゲート絶縁膜の上に複数のゲート電極、前記ゲート電極に接続された複数のゲート配線、複数のキャパシタ電極、前記キャパシタ電極に接続され、集まって一本になって電源に接続された複数のキャパシタ配線を印刷法により形成する工程と、
複数の前記キャパシタ配線が集まって1本になっている部分に抵抗を形成する工程と、
前記ゲート絶縁膜、前記ゲート電極、前記ゲート配線、前記キャパシタ電極、及び前記キャパシタ配線の上に、前記ゲート絶縁膜開口上に開口を有する層間絶縁膜を形成する工程と、
前記層間絶縁膜の上に上部画素電極を形成する工程とを含む、薄膜トランジスタアレイの製造方法。 - 前記抵抗を形成する工程は、前記抵抗となる長配線部の形成を、前記キャパシタ配線を形成する工程と同時に行う、請求項10または11記載の薄膜トランジスタアレイの製造方法。
- 前記抵抗を形成する工程は、前記キャパシタ配線を形成する工程の後に前記抵抗となる別部品を挿入することにより行う、請求項10または11記載の薄膜トランジスタアレイの製造方法。
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