JP6708857B2 - X線検査装置 - Google Patents

X線検査装置 Download PDF

Info

Publication number
JP6708857B2
JP6708857B2 JP2017200834A JP2017200834A JP6708857B2 JP 6708857 B2 JP6708857 B2 JP 6708857B2 JP 2017200834 A JP2017200834 A JP 2017200834A JP 2017200834 A JP2017200834 A JP 2017200834A JP 6708857 B2 JP6708857 B2 JP 6708857B2
Authority
JP
Japan
Prior art keywords
ray
objects
image
inspected
images
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017200834A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019074415A5 (enExample
JP2019074415A (ja
Inventor
木下 修
修 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JED CO., LTD
Original Assignee
JED CO., LTD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JED CO., LTD filed Critical JED CO., LTD
Priority to JP2017200834A priority Critical patent/JP6708857B2/ja
Priority to EP18867989.8A priority patent/EP3608658A4/en
Priority to PCT/JP2018/035629 priority patent/WO2019077950A1/ja
Priority to US16/605,654 priority patent/US20200132611A1/en
Publication of JP2019074415A publication Critical patent/JP2019074415A/ja
Publication of JP2019074415A5 publication Critical patent/JP2019074415A5/ja
Application granted granted Critical
Publication of JP6708857B2 publication Critical patent/JP6708857B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays

Landscapes

  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Theoretical Computer Science (AREA)
  • Engineering & Computer Science (AREA)
  • Radiology & Medical Imaging (AREA)
  • Pulmonology (AREA)
  • Toxicology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2017200834A 2017-10-17 2017-10-17 X線検査装置 Active JP6708857B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017200834A JP6708857B2 (ja) 2017-10-17 2017-10-17 X線検査装置
EP18867989.8A EP3608658A4 (en) 2017-10-17 2018-09-26 X-RAY INSPECTION DEVICE
PCT/JP2018/035629 WO2019077950A1 (ja) 2017-10-17 2018-09-26 X線検査装置
US16/605,654 US20200132611A1 (en) 2017-10-17 2018-09-26 X-ray inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017200834A JP6708857B2 (ja) 2017-10-17 2017-10-17 X線検査装置

Publications (3)

Publication Number Publication Date
JP2019074415A JP2019074415A (ja) 2019-05-16
JP2019074415A5 JP2019074415A5 (enExample) 2019-07-04
JP6708857B2 true JP6708857B2 (ja) 2020-06-10

Family

ID=66173702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017200834A Active JP6708857B2 (ja) 2017-10-17 2017-10-17 X線検査装置

Country Status (4)

Country Link
US (1) US20200132611A1 (enExample)
EP (1) EP3608658A4 (enExample)
JP (1) JP6708857B2 (enExample)
WO (1) WO2019077950A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6973536B2 (ja) * 2020-03-11 2021-12-01 オムロン株式会社 X線検査装置およびx線検査方法
CN112053409B (zh) * 2020-07-24 2024-05-28 重庆真测科技股份有限公司 基于双旋转台ct扫描系统的非对称数据重建方法
DE102023206858A1 (de) * 2023-07-19 2025-01-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Röntgensystem und CT-System

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60256034A (ja) * 1984-06-01 1985-12-17 Toshiba Corp 産業用ctスキヤナ
JPS61240145A (ja) * 1985-04-17 1986-10-25 Hitachi Medical Corp 産業用x線ct装置
US7356115B2 (en) * 2002-12-04 2008-04-08 Varian Medical Systems Technology, Inc. Radiation scanning units including a movable platform
JP2004245685A (ja) * 2003-02-13 2004-09-02 Toshiba It & Control Systems Corp X線マイクロ断層撮影装置
JP4488885B2 (ja) * 2004-12-17 2010-06-23 株式会社日立製作所 Ct装置
JP4632891B2 (ja) * 2005-07-22 2011-02-16 株式会社モリタ製作所 X線ct撮影装置およびx線ct撮影方法
JP5011998B2 (ja) 2006-12-13 2012-08-29 株式会社島津製作所 X線ct装置
JP5045134B2 (ja) * 2007-02-06 2012-10-10 株式会社島津製作所 X線ct装置
JP5251264B2 (ja) * 2007-06-04 2013-07-31 株式会社島津製作所 X線ct装置
JPWO2009078415A1 (ja) * 2007-12-17 2011-04-28 株式会社ユニハイトシステム X線検査装置および方法
US7876875B2 (en) * 2008-04-09 2011-01-25 United Technologies Corp. Computed tomography systems and related methods involving multi-target inspection
JP5884351B2 (ja) * 2011-09-14 2016-03-15 オムロン株式会社 X線検査装置、x線検査装置の制御方法、x線検査装置を制御するためのプログラム、および、当該プログラムを格納したコンピュータ読み取り可能な記録媒体
JP6153105B2 (ja) * 2013-01-10 2017-06-28 東芝Itコントロールシステム株式会社 Ct装置
GB2520711B (en) * 2013-11-28 2018-06-20 Nikon Metrology Nv Calibration apparatus and method for computed tomography
CN105717145B (zh) * 2016-02-03 2019-01-01 北京航空航天大学 多联装三维锥束计算机层析成像方法及装置

Also Published As

Publication number Publication date
WO2019077950A1 (ja) 2019-04-25
JP2019074415A (ja) 2019-05-16
EP3608658A4 (en) 2021-04-07
EP3608658A1 (en) 2020-02-12
US20200132611A1 (en) 2020-04-30

Similar Documents

Publication Publication Date Title
JP4488885B2 (ja) Ct装置
JP6708857B2 (ja) X線検査装置
JPWO2016170685A1 (ja) X線検査装置、x線検査方法および構造物の製造方法
EP2466295A3 (en) Method and apparatus for laminography inspection
TW200848723A (en) X ray inspecting method and X ray inspecting device
JP3694833B2 (ja) ユーセントリック型傾斜三次元x線ct及びそれによる三次元画像の撮影方法
JP4711759B2 (ja) X線検査装置
JP2015094621A (ja) 外観検査装置
JP2000235007A (ja) X線ctスキャナ装置およびx線貨物検査方法
WO2019065701A1 (ja) 検査位置の特定方法、3次元画像の生成方法、及び検査装置
JP6943944B2 (ja) 中性子ラジオグラフィの実現のための方法及び装置
JP2014044070A (ja) 食品検査装置
KR101480968B1 (ko) X-선 ct 및 레이저 표면 검사를 이용하는 검사 장치 및 검사 방법
JP2019074415A5 (enExample)
JP6738363B2 (ja) 画像取得システムおよび画像取得方法
JP4906602B2 (ja) 多結晶シリコン基板の欠陥検査装置および欠陥検査方法
JP2009156788A5 (ja) X線検査装置
US10627353B2 (en) X-ray inspection apparatus and method for controlling X-ray inspection apparatus
JP2019060808A (ja) 検査位置の特定方法及び検査装置
JP5125297B2 (ja) X線検査装置およびx線検査方法
JP6376698B2 (ja) X線検査装置およびx線検査装置の調整方法
JP6920520B2 (ja) 画像取得システムおよび画像取得方法
JP2006071472A (ja) Ct法およびct装置
JP5138279B2 (ja) コンピュータ断層撮影装置
JP4926645B2 (ja) 放射線検査装置、放射線検査方法および放射線検査プログラム

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190528

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20190528

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190610

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20200318

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20200408

R150 Certificate of patent or registration of utility model

Ref document number: 6708857

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250