JP6706454B2 - ネガ型硬化性組成物、硬化物および積層体 - Google Patents
ネガ型硬化性組成物、硬化物および積層体 Download PDFInfo
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- JP6706454B2 JP6706454B2 JP2015216084A JP2015216084A JP6706454B2 JP 6706454 B2 JP6706454 B2 JP 6706454B2 JP 2015216084 A JP2015216084 A JP 2015216084A JP 2015216084 A JP2015216084 A JP 2015216084A JP 6706454 B2 JP6706454 B2 JP 6706454B2
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- -1 ester compound Chemical class 0.000 claims description 245
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- 125000000524 functional group Chemical group 0.000 claims description 38
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- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 11
- 125000001931 aliphatic group Chemical group 0.000 claims description 10
- 238000009835 boiling Methods 0.000 claims description 10
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- VJHINFRRDQUWOJ-UHFFFAOYSA-N dioctyl sebacate Chemical compound CCCCC(CC)COC(=O)CCCCCCCCC(=O)OCC(CC)CCCC VJHINFRRDQUWOJ-UHFFFAOYSA-N 0.000 claims description 6
- ALKCLFLTXBBMMP-UHFFFAOYSA-N 3,7-dimethylocta-1,6-dien-3-yl hexanoate Chemical compound CCCCCC(=O)OC(C)(C=C)CCC=C(C)C ALKCLFLTXBBMMP-UHFFFAOYSA-N 0.000 claims description 4
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- ZFMQKOWCDKKBIF-UHFFFAOYSA-N bis(3,5-difluorophenyl)phosphane Chemical compound FC1=CC(F)=CC(PC=2C=C(F)C=C(F)C=2)=C1 ZFMQKOWCDKKBIF-UHFFFAOYSA-N 0.000 claims description 4
- 229940116351 sebacate Drugs 0.000 claims description 4
- CXMXRPHRNRROMY-UHFFFAOYSA-L sebacate(2-) Chemical compound [O-]C(=O)CCCCCCCCC([O-])=O CXMXRPHRNRROMY-UHFFFAOYSA-L 0.000 claims description 4
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- GXFQQWKYCJDABX-UHFFFAOYSA-N bis(7-methyloctyl) nonanedioate Chemical compound CC(C)CCCCCCOC(=O)CCCCCCCC(=O)OCCCCCCC(C)C GXFQQWKYCJDABX-UHFFFAOYSA-N 0.000 claims description 3
- OAXZVLMNNOOMGN-UHFFFAOYSA-N bis(8-methylnonyl) decanedioate Chemical compound CC(C)CCCCCCCOC(=O)CCCCCCCCC(=O)OCCCCCCCC(C)C OAXZVLMNNOOMGN-UHFFFAOYSA-N 0.000 claims description 3
- XWVQUJDBOICHGH-UHFFFAOYSA-N dioctyl nonanedioate Chemical compound CCCCCCCCOC(=O)CCCCCCCC(=O)OCCCCCCCC XWVQUJDBOICHGH-UHFFFAOYSA-N 0.000 claims description 3
- MBGYSHXGENGTBP-UHFFFAOYSA-N 6-(2-ethylhexoxy)-6-oxohexanoic acid Chemical compound CCCCC(CC)COC(=O)CCCCC(O)=O MBGYSHXGENGTBP-UHFFFAOYSA-N 0.000 claims description 2
- WLLCYXDFVBWGBU-UHFFFAOYSA-N bis(8-methylnonyl) nonanedioate Chemical compound CC(C)CCCCCCCOC(=O)CCCCCCCC(=O)OCCCCCCCC(C)C WLLCYXDFVBWGBU-UHFFFAOYSA-N 0.000 claims description 2
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- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 9
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- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 8
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- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- FBCQUCJYYPMKRO-UHFFFAOYSA-N prop-2-enyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC=C FBCQUCJYYPMKRO-UHFFFAOYSA-N 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- RXHUEMZQJRTCIA-UHFFFAOYSA-N pyrrolidine-2,5-dione;trifluoromethanesulfonic acid Chemical compound O=C1CCC(=O)N1.OS(=O)(=O)C(F)(F)F RXHUEMZQJRTCIA-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 238000006798 ring closing metathesis reaction Methods 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- JIYNFFGKZCOPKN-UHFFFAOYSA-N sbb061129 Chemical class O=C1OC(=O)C2C1C1C=C(C)C2C1 JIYNFFGKZCOPKN-UHFFFAOYSA-N 0.000 description 1
- 125000005920 sec-butoxy group Chemical group 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 150000003458 sulfonic acid derivatives Chemical class 0.000 description 1
- 150000003459 sulfonic acid esters Chemical class 0.000 description 1
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 description 1
- 150000003462 sulfoxides Chemical class 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 125000004213 tert-butoxy group Chemical group [H]C([H])([H])C(O*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 150000003556 thioamides Chemical class 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 125000005323 thioketone group Chemical group 0.000 description 1
- OKYDCMQQLGECPI-UHFFFAOYSA-N thiopyrylium Chemical class C1=CC=[S+]C=C1 OKYDCMQQLGECPI-UHFFFAOYSA-N 0.000 description 1
- 150000003585 thioureas Chemical class 0.000 description 1
- KUAZQDVKQLNFPE-UHFFFAOYSA-N thiram Chemical class CN(C)C(=S)SSC(=S)N(C)C KUAZQDVKQLNFPE-UHFFFAOYSA-N 0.000 description 1
- 239000013008 thixotropic agent Substances 0.000 description 1
- 150000003606 tin compounds Chemical class 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 125000002088 tosyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1C([H])([H])[H])S(*)(=O)=O 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- GQIUQDDJKHLHTB-UHFFFAOYSA-N trichloro(ethenyl)silane Chemical compound Cl[Si](Cl)(Cl)C=C GQIUQDDJKHLHTB-UHFFFAOYSA-N 0.000 description 1
- DENFJSAFJTVPJR-UHFFFAOYSA-N triethoxy(ethyl)silane Chemical compound CCO[Si](CC)(OCC)OCC DENFJSAFJTVPJR-UHFFFAOYSA-N 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- QQQSFSZALRVCSZ-UHFFFAOYSA-N triethoxysilane Chemical compound CCO[SiH](OCC)OCC QQQSFSZALRVCSZ-UHFFFAOYSA-N 0.000 description 1
- UZIAQVMNAXPCJQ-UHFFFAOYSA-N triethoxysilylmethyl 2-methylprop-2-enoate Chemical compound CCO[Si](OCC)(OCC)COC(=O)C(C)=C UZIAQVMNAXPCJQ-UHFFFAOYSA-N 0.000 description 1
- WDUXKFKVDQRWJN-UHFFFAOYSA-N triethoxysilylmethyl prop-2-enoate Chemical compound CCO[Si](OCC)(OCC)COC(=O)C=C WDUXKFKVDQRWJN-UHFFFAOYSA-N 0.000 description 1
- SUXIKHBBPQWLHO-UHFFFAOYSA-N trihydroxy-(8-methylnonyl)-(8-methyl-1-phenylnonyl)-lambda5-phosphane Chemical compound CC(C)CCCCCCCP(O)(O)(O)C(CCCCCCC(C)C)C1=CC=CC=C1 SUXIKHBBPQWLHO-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- UOKUUKOEIMCYAI-UHFFFAOYSA-N trimethoxysilylmethyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)COC(=O)C(C)=C UOKUUKOEIMCYAI-UHFFFAOYSA-N 0.000 description 1
- JPPHEZSCZWYTOP-UHFFFAOYSA-N trimethoxysilylmethyl prop-2-enoate Chemical compound CO[Si](OC)(OC)COC(=O)C=C JPPHEZSCZWYTOP-UHFFFAOYSA-N 0.000 description 1
- FNZBSNUICNVAAM-UHFFFAOYSA-N trimethyl-[methyl-[methyl-(methyl-phenyl-trimethylsilyloxysilyl)oxy-phenylsilyl]oxy-phenylsilyl]oxysilane Chemical compound C=1C=CC=CC=1[Si](C)(O[Si](C)(C)C)O[Si](C)(C=1C=CC=CC=1)O[Si](C)(O[Si](C)(C)C)C1=CC=CC=C1 FNZBSNUICNVAAM-UHFFFAOYSA-N 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- WGKLOLBTFWFKOD-UHFFFAOYSA-N tris(2-nonylphenyl) phosphite Chemical compound CCCCCCCCCC1=CC=CC=C1OP(OC=1C(=CC=CC=1)CCCCCCCCC)OC1=CC=CC=C1CCCCCCCCC WGKLOLBTFWFKOD-UHFFFAOYSA-N 0.000 description 1
- GRPURDFRFHUDSP-UHFFFAOYSA-N tris(prop-2-enyl) benzene-1,2,4-tricarboxylate Chemical compound C=CCOC(=O)C1=CC=C(C(=O)OCC=C)C(C(=O)OCC=C)=C1 GRPURDFRFHUDSP-UHFFFAOYSA-N 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 150000007964 xanthones Chemical class 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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Description
R1−(COO−R2)m ・・・(1)
(式中、R1およびR2は、各々独立して、脂肪族鎖状炭化水素、脂肪族環状炭化水素または芳香族炭化水素であり、mは、2〜4の整数である)と、
(B)1分子中に光重合性官能基を少なくとも2個有し、かつ、
下記式(2)および(3)で示される構造;
を含有することを特徴とするネガ型硬化性組成物。
本発明の一実施形態に係るネガ型硬化性組成物は、(A)特定の構造を有するエステル化合物と、(B)1分子中に光重合性官能基を少なくとも2個有し、かつ、少なくとも一つの特定の酸性基を同一分子内に有する変性ポリオルガノシロキサン化合物と、を含有する。以下では、上記(A)特定の構造を有するエステル化合物を単に「(A)成分」と称し、上記(B)1分子中に光重合性官能基を少なくとも2個有し、かつ、少なくとも一つの特定の酸性基を同一分子内に有する変性ポリオルガノシロキサン化合物を単に「(B)成分」と称する場合もある。また、「硬化性組成物」は、「樹脂組成物」、「感光性樹脂組成物」または「感光性樹脂」と称する場合もある。
本ネガ型硬化性組成物は、(A)成分として、以下に示す化合物を含有する。本ネガ型硬化性組成物では、(A)成分を含有するために、タックおよびパターニング性に優れた硬化物の製造が可能になる。このことは、本発明者らが初めて見出した知見である。
R1−(COO−R2)m ・・・(1)
(式中、R1およびR2は、各々独立して、脂肪族鎖状炭化水素、脂肪族環状炭化水素または芳香族炭化水素であり、mは、2〜4の整数である)
で表されるエステル化合物である。
本ネガ型硬化性組成物は、(B)成分として、変性ポリオルガノシロキサン化合物(以下、単に「ポリシロキサン系化合物」と称することがある。)を含有する。(B)成分を含有することにより、アルカリ現像性を有すると共に、耐熱透明性に優れた硬化物を製造することができる。
ポリシロキサン系化合物は、下記式(2)および(3)で示される構造;
(α1)1分子中にSiH基との反応性を有する炭素−炭素二重結合を1個以上有し、かつ、上記式(2)〜(3)で示される構造と、フェノール性水酸基と、カルボキシル基とからなる群より選択される少なくとも1種を同一分子内に有する有機化合物、
(β)1分子中に少なくとも2個のSiH基を有するポリシロキサン化合物、および
(γ)1分子中に、光重合性官能基を少なくとも1個と、SiH基との反応性を有する炭素−炭素二重結合を1個以上とを有する化合物。
(α1)1分子中にSiH基との反応性を有する炭素−炭素二重結合を1個以上有し、かつ、上記式(2)〜(3)で示される構造と、フェノール性水酸基と、カルボキシル基とからなる群より選択される少なくとも1種を同一分子内に有する有機化合物、
(α2)1分子中にSiH基との反応性を有する炭素−炭素二重結合を1個以上有する化合物、
(β)1分子中に少なくとも2個のSiH基を有するポリシロキサン化合物、および
(γ)1分子中に、光重合性官能基を少なくとも1個と、SiH基との反応性を有する炭素−炭素二重結合を1個以上とを有する化合物。
化合物(α1)は、分子中に上記式(2)〜(3)で表される各構造と、フェノール性水酸基と、カルボキシル基とからなる群のいずれかの構造を有し、かつ、SiH基との反応性を有する炭素−炭素二重結合を1個以上同一分子内に有する有機化合物であれば特に限定されるものではない。
化合物(α2)は、上記化合物(α1)および後述する化合物(γ)に該当しない、1分子中にSiH基との反応性を有する炭素−炭素二重結合を1個以上有する化合物であれば特に限定されない。
化合物(β)については1分子中に少なくとも2個のSiH基を有するポリシロキサン化合物であれば特に限定されず、例えば国際公開WO96/15194に記載される化合物で、1分子中に少なくとも2個のSiH基を有するもの等が使用できる。
化合物(γ)は、1分子中に光重合性官能基を少なくとも1個と、SiH基との反応性を有する炭素−炭素二重結合を1個以上とを有する化合物であれば特に限定されない。なお、ここでいう光重合性官能基は、前述のポリシロキサン化合物が有する光重合性官能基と同一であって、好ましい態様も同様に好ましい。
化合物(α1)、(α2)、(β)および(γ)をヒドロシリル化反応させる場合の触媒としては、公知のヒドロシリル化触媒を用いればよい。
反応の順序、方法としては種々挙げられるが、合成工程が簡便であると言う観点からは、全ての化合物を1ポットでヒドロシリル化反応させ、最後に未反応の化合物を除去する方法が好ましい。
(ゲル化抑制剤)
得られる反応物の保存安定性を改良する目的、或いは化合物(α1)(態様によっては、さらに化合物(α2))、化合物(β)および化合物(γ)をヒドロシリル化反応させた後に、溶媒及び/又は未反応の化合物を減圧脱揮により除去する場合の、加熱処理による増粘等の変質を抑制する目的で、ゲル化抑制剤を使用することができる。ゲル化抑制剤としては、脂肪族不飽和結合を含有する化合物、有機リン化合物、有機イオウ化合物、窒素含有化合物、スズ系化合物、有機過酸化物等の公知のゲル化抑制剤を使用でき、これらを併用してもかまわない。
本ネガ型硬化性組成物は、光酸発生剤を含有していてもよい。上記光酸発生剤は、可視光、紫外線、赤外線、X線、α線、β線、γ線、i線等の活性エネルギー線を照射することにより、上記(B)成分中の架橋性シリル基を架橋させることができる酸性活性物質を放出することができる化合物であれば、特に限定されない。
本ネガ型硬化性組成物は、カチオン重合開始剤を含有していてもよい。上記カチオン重合開始剤としては、活性エネルギー線によりカチオン種又はルイス酸を発生する、活性エネルギー線カチオン重合開始剤、又は熱によりカチオン種又はルイス酸を発生する熱カチオン重合開始剤であれば、特に限定されず使用できる。上記カチオン種またはルイス酸により、上記(B)成分が有する光重合性官能基を架橋させることができる。
55号に記載されたようなチオピリリウム塩;米国特許第4161478号に記載されたようなMF6−陰イオン(ここでMは燐、アンチモン及び砒素から選択される)の形のVIa元素;米国特許第4231951号に記載されたようなアリールスルホニウム錯塩;米国特許第4256828号に記載されたような芳香族ヨードニウム錯塩及び芳香族スルホニウム錯塩;W.R.Wattらによって「ジャーナル・オブ・ポリマー・サイエンス、ポリマー・ケミストリー版」、第22巻、1789頁(1984年)に記載されたようなビス [4−(ジフェニルスルホニオ)フェニル] スルフィド−ビスヘキサフルオロ金属塩(例えば燐酸塩、砒酸塩、アンチモン酸塩等);陰イオンがB(C6F5)4−である芳香族ヨードニウム錯塩及び芳香族スルホニウム錯塩の1種以上が包含される。
16(和光純薬工業社)、RHODORSIL PI2074(ローディア社)として商品として入手できる。
本ネガ型硬化性組成物は、ラジカル重合開始剤を含有していてもよい。上記ラジカル重合開始剤としては、活性エネルギー線によりラジカル種を発生する、活性エネルギー線ラジカル重合開始剤、又は熱によりラジカル種を発生する熱ラジカル重合開始剤であれば、特に限定されず使用できる。上記ラジカル種により、(B)成分が有する光重合性官能基を架橋させることができる。
ベンゾフェノン系化合物の具体例としては、ベンジルジメチルケトン、ベンゾフェノン、4,4’−ビス(ジメチルアミノ)ベンゾフェノン、4,4’−ビス(ジエチルアミノ)ベンゾフェノン等が挙げられ、α−ジケトン系化合物の具体例としては、ジアセチル、ジベンゾイル、メチルベンゾイルホルメート等が挙げられ、ビイミダゾール系化合物の具体例としては、2,2’−ビス(2−クロロフェニル)−4,4’,5,5’−テトラキス(4−エトキシカルボニルフェニル)−1,2’−ビイミダゾール、2,2’−ビス(2,4−ジクロロフェニル)−4,4’,5,5’−テトラキス(4−エトキシカルボニルフェニル)−1,2’−ビイミダゾール、2,2’−ビス(2,4,6−トリクロロフェニル)−4,4’,5,5’−テトラキス(4−エトキシカルボニルフェニル)−1,2’−ビイミダゾール、2,2’−ビス(2−ブロモフェニル)−4,4’,5,5’−テトラキス(4−エトキシカルボニルフェニル)−1,2’−ビイミダゾール、2,2’−ビス(2,4−ジブロモフェニル)−4,4’,5,5’−テトラキス(4−エトキシカルボニルフェニル)−1,2’−ビイミダゾール、2,2’−ビス(2,4,6−トリブロモフェニル)−4,4’,5,5’−テトラキス(4−エトキシカルボニルフェニル)−1,2’−ビイミダゾール、2,2’−ビス(2−クロロフェニル)−4,4’,5,5’−テトラフェニル−1,2’−ビイミダゾール、2,2’−ビス(2,4−ジクロロフェニル)−4,4’,5,5’−テトラフェニル−1,2’−ビイミダゾール、2,2’−ビス(2,4,6−トリクロロフェニル)−4,4’,5,5’−テトラフェニル−1,2’−ビイミダゾール、2,2’−ビス(2−ブロモフェニル)−4,4’,5,5’−テトラフェニル−1,2’−ビイミダゾール、2,2’−ビス(2,4−ジブロモフェニル)−4,4’,5,5’−テトラフェニル−1,2’−ビイミダゾール、2,2’−ビス(2,4,6−トリブロモフェニル)−4,4’,5,5’−テトラフェニル−1,2’−ビイミダゾール等が挙げられ、多核キノン系化合物の具体例としては、アントラキノン、2−エチルアントラキノン、2−t−ブチルアントラキノン、1,4−ナフトキノン等が挙げられ、キサントン系化合物の具体例としては、キサントン、チオキサントン、2−クロロチオキサントン、2,5−ジエチルジオキサントン等が挙げられ、トリアジン系化合物の具体例としては、1,3,5−トリス(トリクロロメチル)−s−トリアジン、1,3−ビス(トリクロロメチル)−5−(2’−クロロフェニル)−s−トリアジン、1,3−ビス(トリクロロメチル)−5−(4’−クロロフェニル)−s−トリアジン、1,3−ビス(トリクロロメチル)−5−(2’−メトキシフェニル)−s−トリアジン、1,3−ビス(トリクロロメチル)−5−(4’−メトキシフェニル)−s−トリアジン、2−(2’−フリルエチリデン)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4’−メトキシスチリル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(3’,4’−ジメトキシスチリル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4’−メトキシナフチル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(2’−ブロモ−4’−メチルフェニル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(2’−チオフェニルエチリデン)−4,6−ビス(トリクロロメチル)−s−トリアジン等が挙げられる。
(架橋剤)
本ネガ型硬化性組成物には、作業性、反応性、接着性および硬化物強度の調整のために、光重合性官能基を1分子中に2個以上有する架橋剤を添加することができる。上記架橋剤としては、硬化反応形式によって選択すれば特に限定されず、エポキシ化合物、オキセタン化合物、アルコキシシラン化合物および(メタ)アクリレート化合物等が挙げられる。
本ネガ型硬化性組成物には、光エネルギーで硬化させる場合には、光の感度向上のおよびg線(436nm)、h線(405nm)、i線(365nm)と言われるような高波長の光に感度を持たせるために、適宜、増感剤を添加する事ができる。これら増感剤は、上記カチオン重合開始剤、ラジカル重合開始剤、光酸発生剤等と併用して使用し、硬化性の調整を行うことができる。
本ネガ型硬化性組成物をラジカル硬化系として使用する際には、反応性調整および酸素による硬化阻害抑制等のため、チオール化合物、アミン化合物、ホスフィン化合物等を添加する事ができる。
本ネガ型硬化性組成物には、接着性改良剤を添加することもできる。接着性改良剤としては一般に用いられている接着剤の他、例えば種々のカップリング剤、エポキシ化合物、オキセタン化合物、フェノール樹脂、クマロン−インデン樹脂、ロジンエステル樹脂、テルペン−フェノール樹脂、α−メチルスチレン−ビニルトルエン共重合体、ポリエチルメチルスチレン、芳香族ポリイソシアネート等を挙げることができる。
本ネガ型硬化性組成物を光又は熱により硬化させ、特に透明性を要求される用途で使用する場合は、光又は熱による硬化後の色相を改善するために、リン化合物を使用するのが好ましい。リン化合物の具体例としては、トリフェニルホスファイト、ジフェニルイソデシルホスファイト、フェニルジイソデシルホスファイト、トリス(ノニルフェニル)ホスファイト、ジイソデシルペンタエリスリトールジホスファイト、トリス(2,4−ジ−t−ブチルフェニル)ホスファイト、サイクリックネオペンタンテトライルビス(オクタデシルホスファイト)、サイクリックネオペンタンテトライルビス(2,4−ジ−t−ブチルフェニル)ホスファイト、サイクリックネオペンタンテトライルビス(2,6−ジ−t−ブチル−4−メチルフェニル)ホスファイト、ビス[2−t−ブチル−6−メチル−4−{2−(オクタデシルオキシカルボニル)エチル}フェニル] ヒドロゲンホスファイト等のホスファイト類から選ばれる酸化防止剤、又は、9,10−ジヒドロ−9−オキサ−10−ホスファフェナントレン−10−オキサイド、10−(3,5−ジ−t−ブチル−4−ヒドロキシベンジル)−9,10−ジヒドロ−9−オキサ−10−ホスファフェナントレン−10−オキサイド、10−デシロキシ−9,10−ジヒドロ−9−オキサ−10−ホスファフェナントレン−10−オキサイド等のオキサホスファフェナントレンオキサイド類から選ばれる着色防止剤が好ましく使用される。
硬化性組成物には特性を改質する等の目的で、種々の熱可塑性樹脂を添加することも可能である。熱可塑性樹脂としては種々のものを用いることができるが、例えば、メチルメタクリレートの単独重合体あるいはメチルメタクリレートと他モノマーとのランダム、ブロック、あるいはグラフト重合体等のポリメチルメタクリレート系樹脂(例えば日立化成社製オプトレッツ等)、ブチルアクリレートの単独重合体あるいはブチルアクリレートと他モノマーとのランダム、ブロック、あるいはグラフト重合体等のポリブチルアクリレート系樹脂等に代表されるアクリル系樹脂、ビスフェノールA、3,3,5−トリメチルシクロヘキシリデンビスフェノール等をモノマー構造として含有するポリカーボネート樹脂等のポリカーボネート系樹脂(例えば帝人社製APEC等)、ノルボルネン誘導体、ビニルモノマー等を単独あるいは共重合した樹脂、ノルボルネン誘導体を開環メタセシス重合させた樹脂、あるいはその水素添加物等のシクロオレフィン系樹脂(例えば、三井化学社製APEL、日本ゼオン社製ZEONOR、ZEONEX、JSR社製ARTON等)、エチレンとマレイミドの共重合体等のオレフィン−マレイミド系樹脂(例えば東ソー社製TI−PAS等)、ビスフェノールA、ビス(4−(2−ヒドロキシエトキシ)フェニル)フルオレン等のビスフェノール類やジエチレングリコール等のジオール類とテレフタル酸、イソフタル酸、等のフタル酸類や脂肪族ジカルボン酸類を重縮合させたポリエステル等のポリエステル系樹脂(例えば鐘紡社製O−PET等)、ポリエーテルスルホン樹脂、ポリアリレート樹脂、ポリビニルアセタール樹脂、ポリエチレン樹脂、ポリプロピレン樹脂、ポリスチレン樹脂、ポリアミド樹脂、シリコーン樹脂、フッ素樹脂等の他、天然ゴム、EPDMといったゴム状樹脂が例示されるがこれに限定されるものではない。
本ネガ型硬化性組成物には必要に応じて充填材を添加してもよい。
本ネガ型硬化性組成物には老化防止剤を添加してもよい。老化防止剤としては、ヒンダートフェノール系等一般に用いられている老化防止剤の他、クエン酸やリン酸、硫黄系老化防止剤等が挙げられる。
本ネガ型硬化性組成物にはラジカル禁止剤を添加してもよい。ラジカル禁止剤としては、例えば、2,6−ジ−t−ブチル−3−メチルフェノール(BHT)、2,2’−メチレン−ビス(4−メチル−6−t−ブチルフェノール)、テトラキス(メチレン−3(3,5−ジ−t−ブチル−4−ヒドロキシフェニル)プロピオネート)メタン等のフェノール系ラジカル禁止剤や、フェニル−β−ナフチルアミン、α−ナフチルアミン、N,N’−第二ブチル−p−フェニレンジアミン、フェノチアジン、N,N’−ジフェニル−p−フェニレンジアミン等のアミン系ラジカル禁止剤等が挙げられる。
本ネガ型硬化性組成物には紫外線吸収剤を添加してもよい。紫外線吸収剤としては、例えば2(2’−ヒドロキシ−3’,5’−ジ−t−ブチルフェニル)ベンゾトリアゾール、ビス(2,2,6,6−テトラメチル−4−ピペリジン)セバケート等が挙げられる。
本ネガ型硬化性組成物に使用される、ポリシロキサン系化合物が高粘度である場合、溶剤に溶解して用いることも可能である。使用できる溶剤は特に限定されるものではなく、具体的に例示すれば、ベンゼン、トルエン、ヘキサン、ヘプタン等の炭化水素系溶媒、テトラヒドロフラン、1,4−ジオキサン、1,3−ジオキソラン、ジエチルエーテル等のエーテル系溶媒、アセトン、メチルエチルケトン、メチルイソブチルケトン、シクロヘキサノン等のケトン系溶媒、プロピレングリコール−1−モノメチルエーテル−2−アセテート(PGMEA)、エチレングリコールジエチルエーテル等のグリコール系溶剤、クロロホルム、塩化メチレン、1,2−ジクロロエタン等のハロゲン系溶剤を好適に用いることができる。
本ネガ型硬化性組成物には、その他、着色剤、離型剤、難燃剤、難燃助剤、界面活性剤、消泡剤、乳化剤、レベリング剤、はじき防止剤、アンチモン−ビスマス等のイオントラップ剤、チクソ性付与剤、粘着性付与剤、保存安定改良剤、オゾン劣化防止剤、光安定剤、増粘剤、可塑剤、反応性希釈剤、酸化防止剤、熱安定化剤、導電性付与剤、帯電防止剤、放射線遮断剤、核剤、リン系過酸化物分解剤、滑剤、顔料、金属不活性化剤、熱伝導性付与剤、物性調整剤等を本発明の目的および効果を損なわない範囲において添加することができる。
本ネガ型硬化性組成物の調製方法は特に限定されず、種々の方法で調製可能である。各種成分を硬化直前に混合調製してもよく、全成分を予め混合調製した一液の状態で低温貯蔵しておいても良い。
本ネガ型硬化性組成物は、液状でハンドリングおよび溶液塗布により容易に薄膜形成できるため、基材上に層状硬化させることにより積層体を容易に形成させうる。
アルカリ現像によるパターニング形成について特に限定される方法はなく、一般的に行われる浸漬法やスプレー法等の現像方法により未露光部を溶解・除去し所望のパターン形成させることができる。
本ネガ型硬化性組成物およびその硬化物は、種々の用途に用いることができる。従来のアクリル樹脂およびエポキシ樹脂接着剤が使用される各種用途に応用することが可能である。
上記した以外にも、本発明は、以下の態様を含み得る。
(B)1分子中に光重合性官能基を少なくとも2個有し、かつ、上記式(2)および(3)で示される構造、フェノール性水酸基およびカルボキシル基からなる群より選択される少なくとも一つを同一分子内に有する変性ポリオルガノシロキサン化合物と、を含有することを特徴とするネガ型硬化性組成物。
(α1)1分子中にSiH基との反応性を有する炭素−炭素二重結合を1個以上有し、かつ、上記式(2)および(3)で示される構造と、フェノール性水酸基と、カルボキシル基とからなる群より選択される少なくとも1種を同一分子内に有する有機化合物、
(β)1分子中に少なくとも2個のSiH基を有するポリシロキサン化合物、および
(γ)1分子中に、光重合性官能基を少なくとも1個と、SiH基との反応性を有する炭素−炭素二重結合を1個以上とを有する化合物。
(α2)1分子中にSiH基との反応性を有する炭素−炭素二重結合を1個以上有する化合物。
実施例および比較例で示した樹脂組成物を用いて、タック評価サンプルを作製した。具体的には、ガラス基板に感光性樹脂組成物をスピンコーティングしたものを、100℃に加熱したホットプレート上で2分間加熱し、露光装置(高圧水銀ランプ、手動露光機、大日本科研社製)を用い、5μmのラインアンドスペースパターンが刻まれたマスクを通して、それぞれに最適な積算光量で露光し(ソフトコンタクト露光)、露光後は直ぐにマスクを剥した。
○:マスクを垂直に持ち上げたときに、マスクが樹脂膜から抵抗なく剥がれる
×:マスクを垂直に持ち上げたときに、マスクが樹脂膜から剥がれない
(パターニング性評価)
実施例および比較例で示した樹脂組成物を用いて、パターニング評価サンプルを作製した。具体的には、ガラス基板に樹脂組成物をスピンコーティングしたものを、100℃に加熱したホットプレート上で2分間加熱し、露光装置(高圧水銀ランプ、手動露光機、大日本科研社製)を用い、5μmのラインアンドスペースパターンが刻まれたマスクを通して、それぞれに最適な積算光量で露光し(ソフトコンタクト露光)、露光後1分間放置した後、アルカリ性現像液(TMAH2.38%水溶液)に80秒間浸漬後、30秒間水洗して、圧縮空気または圧縮窒素で表面の水分を除去してパターンを形成した。
○:5μmラインアンドスペースに残膜無し
×:5μmラインアンドスペースに残膜有り
×:パターン形状に膜減り有り
(合成実施例)
ジアリルイソシアヌル酸40g、ジアリルモノメチルイソシアヌル酸29gをジオキサン264gに溶解させ、白金ビニルシロキサン錯体のキシレン溶液(白金として3wt%含有する白金ビニルシロキサン錯体、ユミコアプレシャスメタルズジャパン製、Pt−VTSC−3X)143μLを加えた。このようにして得られた溶液を、3%酸素含有の窒素雰囲気下、105℃に加熱した1,3,5,7−テトラハイドロジェン−1,3,5,7−テトラメチルシクロテトラシロキサン88g、トルエン176gの溶液に3時間かけて滴下した。滴下終了から30分後に1H−NMRでアルケニル基の反応率が95%以上であることを確認した後、1−ビニル−3,4−エポキシシクロヘキサン62g、トルエン62gの溶液を1時間かけて滴下した。滴下終了から30分後に1H−NMRでアルケニル基の反応率が95%以上であることを確認した後、冷却により反応を終了した。溶媒のトルエンとジオキサンを減圧留去した後、プロピレングリコール−1−モノメチルエーテル−2−アセタートに置換し、無色透明の50wt%ポリシロキサン化合物溶液「反応物A」を得た。
合成実施例で得た反応物Aに対し、表1に示される配合組成で硬化性組成物を作製し、後述の評価を行った。その結果を表1に示す。硬化性組成物の具体的な作製方法は、まずPGMEA、BBI−103および9,10−ジブトキシアントラセンを均一に溶解し、次に反応物A、エステル化合物(DOA)を均一に混合することにより作製した。
DOAの組成比を変更した以外は、実施例1と同様の方法により樹脂組成物を製造した。
DOAの組成比を変更した以外は、実施例1と同様の方法により樹脂組成物を製造した。
DOAの組成比を変更した以外は、実施例1と同様の方法により樹脂組成物を製造した。
DOAの代わりにDIDAを使用し、かつ、その組成比を変更したこと以外は、実施例1と同様の方法により樹脂組成物を製造した。
DOAを使用しない(すなわち、(A)成分を含まない)こと以外は、実施例1と同様の方法により樹脂組成物を製造した。
DOAの組成比を変更した以外は、実施例1と同様の方法により樹脂組成物を製造した。
DOAの代わりにDIBAを使用し、かつ、その組成比を変更したこと以外は、実施例1と同様の方法により樹脂組成物を製造した。
実施例1〜5および比較例1〜3で得られた樹脂組成物について、タック評価およびパターニング性評価を行った結果を表1に示す。
Claims (5)
- (A)5mmHgにおける沸点が200℃以上であって、下記式(1)で表されるエステル化合物を(B)成分に対して0.01〜5重量部;
R1−(COO−R2)m ・・・(1)
(式中、R1およびR2は、各々独立して、脂肪族鎖状炭化水素、脂肪族環状炭化水素または芳香族炭化水素であり、mは、2〜4の整数である)と、
(B)1分子中に光重合性官能基を少なくとも2個有し、かつ、
下記式(2)および(3)で示される構造;
(C)光酸発生剤と、
を含有することを特徴とするネガ型硬化性組成物。 - 前記(A)のエステル化合物のR1およびR2が、脂肪族鎖状炭化水素であることを特徴とする、請求項1に記載のネガ型硬化性組成物。
- 前記(A)のエステル化合物が、アジピン酸ジオクチル、アジピン酸ジ(2−エチルヘキシル)、アジピン酸ジイソノニル、アジピン酸ジイソデシル、アゼライン酸ジオクチル、アゼライン酸ジ(2−エチルヘキシル)、アゼライン酸ジイソノニル、アゼライン酸ジイソデシル、セバシン酸ジオクチル、セバシン酸ジ(2−エチルヘキシル)、セバシン酸ジイソノニルまたはセバシン酸ジイソデシルであることを特徴とする、請求項1に記載のネガ型硬化性組成物。
- 請求項1〜3のいずれか一項に記載のネガ型硬化性組成物を硬化してなることを特徴とする、硬化物。
- 基材上に、請求項1〜3のいずれか1項に記載のネガ型硬化性組成物が硬化した硬化膜を備えることを特徴とする積層体。
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