JP6696059B1 - 基板処理装置のプロセス判定装置、基板処理システム及び基板処理装置のプロセス判定方法 - Google Patents

基板処理装置のプロセス判定装置、基板処理システム及び基板処理装置のプロセス判定方法 Download PDF

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JP6696059B1
JP6696059B1 JP2019557650A JP2019557650A JP6696059B1 JP 6696059 B1 JP6696059 B1 JP 6696059B1 JP 2019557650 A JP2019557650 A JP 2019557650A JP 2019557650 A JP2019557650 A JP 2019557650A JP 6696059 B1 JP6696059 B1 JP 6696059B1
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花田　克司
克司 花田
佑揮 藤原
佑揮 藤原
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JP2019557650A 2019-03-04 2019-03-04 基板処理装置のプロセス判定装置、基板処理システム及び基板処理装置のプロセス判定方法 Active JP6696059B1 (ja)

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JP7541182B2 (ja) * 2020-08-21 2024-08-27 リアルタイムテック カンパニー，リミテッド ディープラーニングベースのリアルタイム工程監視システム及びその方法
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JP7176143B2 (ja) * 2021-03-31 2022-11-21 Ｓｐｐテクノロジーズ株式会社 基板処理装置のプロセス判定装置、基板処理システム、基板処理装置のプロセス判定方法、学習モデル群、学習モデル群の生成方法及びプログラム
JP7041773B1 (ja) 2021-05-26 2022-03-24 Ｓｐｐテクノロジーズ株式会社 基板処理装置のプロセス判定装置、基板処理システム、基板処理装置のプロセス判定方法、学習モデルの生成方法及びプログラム
JP7041776B1 (ja) 2021-06-30 2022-03-24 Ｓｐｐテクノロジーズ株式会社 基板処理装置のプロセス判定装置、基板処理システム、基板処理装置のプロセス判定方法、学習モデルの生成方法及びプログラム
TW202310131A (zh) * 2021-08-24 2023-03-01 日商東京威力科創股份有限公司 基板處理裝置、模型資料產生裝置、基板處理方法、及模型資料產生方法
KR102673673B1 (ko) * 2021-12-09 2024-06-07 한국핵융합에너지연구원 Rf 신호를 이용한 플라즈마 상태 감지 장치 및 이를 이용한 플라즈마 상태 감지 방법
JP7750775B2 (ja) * 2022-03-02 2025-10-07 株式会社Ｓｃｒｅｅｎホールディングス 制御支援装置および制御支援方法
US20240012393A1 (en) * 2022-07-08 2024-01-11 Applied Materials, Inc. Sustainability monitoring platform with sensor support
KR102742969B1 (ko) * 2022-10-31 2024-12-16 김승민 Rf 플라스마 전력 시스템에서의 고장 진단 장치 및 그 방법

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JPWO2021241242A1 (enExample) * 2020-05-25 2021-12-02
WO2021241242A1 (ja) * 2020-05-25 2021-12-02 株式会社日立ハイテク 半導体装置製造システムおよび半導体装置製造方法
WO2021240572A1 (ja) * 2020-05-25 2021-12-02 株式会社日立ハイテク 半導体装置製造システムおよび半導体装置製造方法
KR20210148092A (ko) * 2020-05-25 2021-12-07 주식회사 히타치하이테크 반도체 장치 제조 시스템 및 반도체 장치 제조 방법
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CN111882030A (zh) * 2020-06-29 2020-11-03 武汉钢铁有限公司 一种基于深度强化学习的加锭策略方法
CN111882030B (zh) * 2020-06-29 2023-12-05 武汉钢铁有限公司 一种基于深度强化学习的加锭策略方法

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WO2020178945A1 (ja) 2020-09-10
JP7504863B2 (ja) 2024-06-24
KR20210134298A (ko) 2021-11-09
JPWO2020178945A1 (ja) 2021-03-18
KR102820933B1 (ko) 2025-06-16
CN112655077B (zh) 2023-10-20
WO2020179729A1 (ja) 2020-09-10
EP3819930A4 (en) 2021-10-27
CN112655077A (zh) 2021-04-13
US20220114484A1 (en) 2022-04-14
EP3819930A1 (en) 2021-05-12
JPWO2020179729A1 (enExample) 2020-09-10

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