JP6685916B2 - 光学素子及び光学素子を備えた光学装置 - Google Patents
光学素子及び光学素子を備えた光学装置 Download PDFInfo
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Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
- G02B27/005—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for correction of secondary colour or higher-order chromatic aberrations
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
- G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0891—Ultraviolet [UV] mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
- G03F7/70266—Adaptive optics, e.g. deformable optical elements for wavefront control, e.g. for aberration adjustment or correction
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
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- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
- G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
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- G—PHYSICS
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- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
Description
Claims (21)
- 少なくとも1つの光学素子(1、126、M2)を備えた光学装置(10、101、202)であって、前記光学素子(1、126、M2)は、
基板(2)と、
前記基板(2)に施されたコーティング(3、9、5;3、9、5’)であり、使用波長(λEUV、λVUV)を有する放射線(4)を反射するよう具現された反射多層コーティング(5b、5’)、及び前記基板(2)と前記反射多層コーティング(5b、5’)との間に配置されて前記使用波長(λEUV、λVUV)とは異なる加熱波長(λH)を有し前記基板の前記反射多層コーティングから離れた側から該基板を通して放射される加熱放射線(7)の反射を弱め合う干渉により抑制する反射防止コーティング(3)を含むコーティング(3、9、5;3、9、5’)と
を備え、
前記基板(2)は、前記加熱放射線(7)に対して少なくとも部分的に透明な材料から形成され、
前記反射防止コーティングは、前記加熱波長の波長域において反射率が最小となるように最適化され、
前記コーティング(3、9、5;3、9、5’)は、前記加熱放射線(7)を99%より多く吸収するよう具現され、
該光学装置(10、101、202)は、加熱放射線(7)を発生させる少なくとも1つの加熱光源(8)を備えた前記光学素子(1、126、M2)の熱操作用の少なくとも1つのデバイス(11)をさらに備える光学装置。 - 請求項1に記載の光学装置において、前記反射防止コーティング(3)は、前記加熱放射線(7)を少なくとも部分的に吸収するよう具現される光学装置。
- 請求項1または2に記載の光学装置において、前記コーティングは、前記加熱放射線(7)を少なくとも部分的に吸収する吸収コーティング(9、5a)をさらに含む光学装置。
- 請求項3に記載の光学装置において、前記吸収コーティング(9、5a)は、前記反射防止コーティング(3)と前記反射多層コーティング(5b、5’)との間に配置される光学装置。
- 請求項3又は4に記載の光学装置において、前記吸収コーティング(9、5a)は多層コーティングである光学装置。
- 請求項3〜5のいずれか1項に記載の光学装置において、前記吸収コーティング(9、5a)は少なくとも1つの金属材料を含む光学装置。
- 請求項1〜6のいずれか1項に記載の光学装置において、前記反射防止コーティング(3)による前記加熱放射線(7)の反射の抑制は、400nmを超え、900nm未満の加熱波長(λH)に関して最大である光学装置。
- 請求項1〜7のいずれか1項に記載の光学装置において、前記反射防止コーティング(3)は、B4C、Si、Si3N4、C、Ru、Mo、Ni、ZrN、SiC、ZrO2、La、Bを含む群から選択される少なくとも1つの材料を含む光学装置。
- 請求項1〜8のいずれか1項に記載の光学装置において、前記反射防止コーティング(3)は500nm未満の厚さ(d)を有する光学装置。
- 請求項1〜9のいずれか1項に記載の光学装置において、前記反射多層コーティング(5b)の反射率(REUV)は、1nm〜35nmの波長域の使用波長(λEUV)を有するEUV放射線(4)に関して最大である光学装置。
- 請求項10に記載の光学装置において、前記光学素子はEUVミラー(1、126)又はEUVマスク(130)として具現される光学装置。
- 請求項1〜9のいずれか1項に記載の光学装置において、前記反射多層コーティング(5’)の反射率は、150nm〜260nmの波長域の使用波長(λVUV)を有するVUV放射線(4)に関して最大である光学装置。
- 請求項12に記載の光学装置において、前記反射多層コーティング(5’)は、前記加熱波長(λH)の前記加熱放射線(7)を少なくとも部分的に吸収する少なくとも1つの層(5a’)を含む光学装置。
- 請求項1〜13のいずれか1項に記載の光学装置において、前記熱操作用デバイス(11)は、格子状配置の複数の加熱光源(8)を備える光学装置。
- 請求項1〜14のいずれか1項に記載の光学装置において、前記熱操作用デバイス(11)は、基板(2)を通して反射防止コーティング(3)に前記加熱放射線(7)を放射するよう具現される光学装置。
- 請求項1〜15のいずれか1項に記載の光学装置において、前記少なくとも1つの加熱光源(8)、前記加熱放射線(7)を偏向させる偏向デバイス(17)、及び/又は前記加熱放射線(7)を誘導するビーム誘導デバイス(14)が、前記光学素子(1)を冷却する冷却体(12)に取り付けられる光学装置。
- 請求項1〜16のいずれか1項に記載の光学装置において、該光学装置はEUVリソグラフィ装置(101)として具現される光学装置。
- 請求項17に記載の光学装置において、前記光学素子は移動方向(X)に変位可能なEUVマスク(130)である光学装置。
- 請求項18に記載の光学装置において、前記熱操作用デバイス(11)は、固定的に配置されるか、又は前記加熱放射線(7)を前記EUVマスク(130)上に位置合わせする前記少なくとも1つの加熱光源(8)、前記加熱放射線(7)を前記EUVマスク(130)上へ偏向させる偏向デバイス(17)、及び/又は前記加熱放射線(7)を前記EUVマスク(130)へ誘導するビーム誘導デバイス(14)は、前記EUVマスク(130)と共に移動方向(X)に変位可能である光学装置。
- 請求項1〜16のいずれか1項に記載の光学装置において、該光学装置はEUVマイクロリソグラフィ用の反射屈折投影レンズ(202)として具現される光学装置。
- 請求項20に記載の光学装置において、前記光学素子(M2)は、前記反射屈折投影レンズ(202)の瞳平面の領域に配置される光学装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014204171.6A DE102014204171A1 (de) | 2014-03-06 | 2014-03-06 | Optisches Element und optische Anordnung damit |
DE102014204171.6 | 2014-03-06 | ||
PCT/EP2015/054295 WO2015132198A1 (en) | 2014-03-06 | 2015-03-02 | Optical element and optical arrangement therewith |
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JP2017510842A JP2017510842A (ja) | 2017-04-13 |
JP6685916B2 true JP6685916B2 (ja) | 2020-04-22 |
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JP2016555708A Active JP6685916B2 (ja) | 2014-03-06 | 2015-03-02 | 光学素子及び光学素子を備えた光学装置 |
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US (1) | US10474036B2 (ja) |
JP (1) | JP6685916B2 (ja) |
CN (1) | CN106104317B (ja) |
DE (1) | DE102014204171A1 (ja) |
TW (1) | TWI666523B (ja) |
WO (1) | WO2015132198A1 (ja) |
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DE102010061950A1 (de) * | 2010-11-25 | 2012-05-31 | Carl Zeiss Smt Gmbh | Verfahren sowie Anordnung zum Bestimmen des Erwärmungszustandes eines Spiegels in einem optischen System |
DE102014216458A1 (de) | 2014-08-19 | 2016-02-25 | Carl Zeiss Smt Gmbh | Optisches Element mit einer Beschichtung zur Beeinflussung von Heizstrahlung und optische Anordnung |
DE102015200328A1 (de) | 2015-01-13 | 2016-07-14 | Carl Zeiss Smt Gmbh | Verfahren zum Herstellen eines optischen Elements für ein optisches System, insbesondere für einemikrolithographische Projektionsbelichtungsanlage |
DE102015225509A1 (de) * | 2015-12-16 | 2017-06-22 | Carl Zeiss Smt Gmbh | Reflektives optisches Element |
KR102501192B1 (ko) * | 2016-04-25 | 2023-02-21 | 에이에스엠엘 네델란즈 비.브이. | Euv 리소그래피를 위한 멤브레인 |
TWI613729B (zh) * | 2016-09-23 | 2018-02-01 | 恆勁科技股份有限公司 | 基板結構及其製法 |
DE102016224200A1 (de) * | 2016-12-06 | 2018-06-07 | Carl Zeiss Smt Gmbh | Verfahren zum Reparieren von reflektiven optischen Elementen für die EUV-Lithographie |
DE102017205212A1 (de) | 2017-03-28 | 2018-10-04 | Carl Zeiss Smt Gmbh | Verfahren zum Detektieren von Partikeln an der Oberfläche eines Objekts, Wafer und Maskenblank |
WO2019042656A1 (en) * | 2017-09-04 | 2019-03-07 | Asml Netherlands B.V. | HEATING SYSTEM FOR AN OPTICAL COMPONENT OF A LITHOGRAPHIC APPARATUS |
DE102017217105A1 (de) | 2017-09-26 | 2019-03-28 | Robert Bosch Gmbh | Kühlvorrichtung und Verfahren zur Kühlung eines zu kühlenden Elements |
CH714230A2 (de) * | 2017-10-11 | 2019-04-15 | Daetwyler Schweiz Ag | Verfahren zum Umformen eines flächenförmigen Substrats. |
DE102017220726A1 (de) * | 2017-11-20 | 2018-12-13 | Carl Zeiss Smt Gmbh | Verfahren zum Betreiben eines reflektiven optischen Elements |
KR102374206B1 (ko) | 2017-12-05 | 2022-03-14 | 삼성전자주식회사 | 반도체 장치 제조 방법 |
CN108359950B (zh) * | 2018-02-28 | 2019-12-31 | 同济大学 | 一种单色器用钌/碳化硼多层膜反射镜制备方法 |
DE102018203241A1 (de) | 2018-03-05 | 2019-09-05 | Carl Zeiss Smt Gmbh | Optisches Element, sowie Verfahren zur Korrektur der Wellenfrontwirkung eines optischen Elements |
KR20200043767A (ko) | 2018-10-18 | 2020-04-28 | 삼성전자주식회사 | Euv 노광 장치와 노광 방법, 및 그 노광 방법을 포함한 반도체 소자 제조 방법 |
KR20220098373A (ko) * | 2019-11-08 | 2022-07-12 | 비아비 솔루션즈 아이엔씨. | 광학 코팅 및 광학 코팅을 포함하는 장치 |
DE102020207750A1 (de) * | 2020-06-23 | 2021-04-01 | Carl Zeiss Smt Gmbh | Baugruppe in einem optischen System, insbesondere in einer mikrolithographischen Projektionsbelichtungsanlage |
CN115997170A (zh) * | 2020-08-07 | 2023-04-21 | 卡尔蔡司Smt有限责任公司 | 反射镜、特别是用于微光刻投射曝光设备的反射镜 |
IL304070A (en) * | 2020-12-30 | 2023-08-01 | Asml Netherlands Bv | Apparatus and method for cleaning a test system |
EP4083708A1 (en) * | 2021-04-29 | 2022-11-02 | ASML Netherlands B.V. | Mirror system |
DE102022204268A1 (de) * | 2022-04-29 | 2023-11-02 | Carl Zeiss Smt Gmbh | Optisches Bauteil für eine Lithographieanlage |
DE102022205302A1 (de) | 2022-05-25 | 2023-11-30 | Carl Zeiss Smt Gmbh | Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage |
DE102022211637A1 (de) | 2022-11-04 | 2023-09-07 | Carl Zeiss Smt Gmbh | Thermisch deformierbares Spiegelelement und dessen Verwendung, thermisches Deformationssystem und Lithographiesystem |
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WO2015132198A1 (en) | 2015-09-11 |
US10474036B2 (en) | 2019-11-12 |
CN106104317B (zh) | 2019-12-24 |
DE102014204171A1 (de) | 2015-09-24 |
TWI666523B (zh) | 2019-07-21 |
US20160377988A1 (en) | 2016-12-29 |
CN106104317A (zh) | 2016-11-09 |
JP2017510842A (ja) | 2017-04-13 |
TW201546566A (zh) | 2015-12-16 |
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