JP6683535B2 - 光結合方式 - Google Patents
光結合方式 Download PDFInfo
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- JP6683535B2 JP6683535B2 JP2016092362A JP2016092362A JP6683535B2 JP 6683535 B2 JP6683535 B2 JP 6683535B2 JP 2016092362 A JP2016092362 A JP 2016092362A JP 2016092362 A JP2016092362 A JP 2016092362A JP 6683535 B2 JP6683535 B2 JP 6683535B2
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- 238000010168 coupling process Methods 0.000 title claims description 72
- 230000003287 optical effect Effects 0.000 title claims description 41
- 238000005253 cladding Methods 0.000 claims description 98
- 238000005859 coupling reaction Methods 0.000 claims description 67
- 230000008878 coupling Effects 0.000 claims description 66
- 239000000463 material Substances 0.000 claims description 38
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 34
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 21
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000010410 layer Substances 0.000 description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 22
- 229910052710 silicon Inorganic materials 0.000 description 22
- 239000010703 silicon Substances 0.000 description 22
- 238000004088 simulation Methods 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 238000010023 transfer printing Methods 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 10
- 230000007704 transition Effects 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 238000013459 approach Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 239000000835 fiber Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000011162 core material Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 208000036758 Postinfectious cerebellitis Diseases 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- NRNCYVBFPDDJNE-UHFFFAOYSA-N pemoline Chemical compound O1C(N)=NC(=O)C1C1=CC=CC=C1 NRNCYVBFPDDJNE-UHFFFAOYSA-N 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12002—Three-dimensional structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/121—Channel; buried or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12147—Coupler
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
Description
Claims (14)
- 光結合のための導波管構造であって、
第1の導波管であって、前記第1の導波管より低い屈折率のクラッディングに組み込んだ第1の導波管と、
前記クラッディングより高い屈折率を有する第2の導波管と、
少なくとも一部が前記第1の導波管および前記第2の導波管の間で配置された、中間導波管と、
を備え、
前記第1の導波管および前記第2の導波管はそれぞれ、前記中間導波管へおよび/または前記中間導波管から光を結合するためのテーパ・エンドを含み、
前記第1の導波管の前記テーパ・エンドと、前記第2の導波管の前記テーパ・エンドと、前記中間導波管とは、前記第1および第2の導波管の延伸方向で重なり合い、前記第1の導波管および前記第2の導波管は、前記第1の導波管および前記第2の導波管のテーパ部分のみで重なり合い、
前記中間導波管は、前記クラッディングの一部において形成され、かつ、前記第1および第2の導波管の前記テーパ・エンドの間に配置され、
前記中間導波管は、前記クラッディングよりは高い屈折率を有するが、前記第1の導波管および第2の導波管よりは低い屈折率を有する、
導波管構造。 - 前記導波管構造は、一部が除去された基板上に形成され、
前記中間導波管は、前記クラッディングの一部において形成され、かつ、前記導波管構造は、梁風の構造を有し、
前記梁風の構造の中央部分は、前記除去された部分上に形成される、請求項1に記載の導波管構造。 - 前記第1の導波管の前記テーパ・エンドは前記梁風の構造に組み込まれている、請求項2に記載の導波管構造。
- 前記梁風の構造の少なくとも一部はそれぞれ前記第1の導波管および第2の導波管の前記テーパ・エンドの間に配置され、前記クラッディングより低い屈折率の材料に接している、請求項2または3に記載の導波管構造。
- 前記中間導波管は前記クラッディング内で充填トレンチにより形成され、前記トレンチの充填材料は、前記クラッディングよりは高い屈折率を有するが、前記第1の導波管および第2の導波管よりは低い屈折率を有する、請求項1に記載の導波管構造。
- 前記クラッディングは下方クラッディング層と上方クラッディング層を含み、前記下方クラッディング層と前記上方クラッディング層は前記第1の導波管を挟み、
前記充填トレンチは完全に前記上方クラッディング層内で提供され、それぞれ前記第1の導波管および第2の導波管の前記テーパ・エンドの間に配置される、
請求項5に記載の導波管構造。 - 前記第2の導波管および/または前記第1の導波管は1.8以上の屈折率を有し、
前記クラッディングは1.5以下の屈折率を有する、
請求項1乃至6の何れか1項に記載の導波管構造。 - 前記第1の導波管および第2の導波管の前記テーパ・エンドは、大よそ200乃至800μmの長さにわたって大よそ0.4乃至1μmの幅から大よそ0.1乃至0.2μmの幅に先細りする、請求項1乃至7の何れか1項に記載の導波管構造。
- 前記中間導波管は大よそ2μm乃至4μmの幅を有し、かつ/または
前記第1の導波管および第2の導波管はそれぞれ大よそ0.2乃至1μmの幅および大よそ0.05乃至0.4μmの厚さを有し、かつ/または
前記第1の導波管および前記第2の導波管の間の距離は大よそ2乃至4μm、好ましくは大よそ3μmである、請求項1乃至8の何れか1項に記載の導波管構造。 - 前記第2の導波管および/または前記第1の導波管は窒化ケイ素から作られている、請求項1乃至9の何れか1項に記載の導波管構造。
- 前記第1の導波管および第2の導波管は1つのチップに属し、
前記第2の導波管は前記チップの表面の近くまたは前記チップの表面の上で提供される、
請求項1乃至10の何れか1項に記載の導波管構造。 - 前記第1の導波管は第1のチップに属し、
前記第2の導波管は第2のチップに属し、前記第2のチップは前記第1のチップに転写印刷されている、
請求項1乃至10の何れか1項に記載の導波管構造。 - チップであって、前記チップは、少なくとも1つの導波管を含む物に、前記チップを光学的に結合するための請求項1乃至11の何れか1項に記載の導波管構造を含む、チップ。
- 光結合のための導波管構造の製造方法であって、
テーパ・エンドを有する第1の導波管を形成するステップと、
前記第1の導波管を前記第1の導波管より低い屈折率のクラッディングに組み込むステップと、
テーパ・エンドを有する第2の導波管を形成するステップと、
中間導波管を形成するステップであって、前記中間導波管の少なくとも一部は前記第1の導波管および前記第2の導波管の間で形成されている、ステップと、
を含み、
前記第1の導波管および第2の導波管の前記テーパ・エンドはそれぞれ、前記中間導波管へおよび/または前記中間導波管から光を結合するために設計されており、
前記第1の導波管の前記テーパ・エンドと、前記第2の導波管の前記テーパ・エンドと、前記中間導波管とは、前記第1および第2の導波管の延伸方向で重なり合い、前記第1の導波管および前記第2の導波管は、前記第1の導波管および前記第2の導波管のテーパ部分のみで重なり合い、
前記中間導波管は、前記クラッディングの一部において形成され、かつ、前記第1および第2の導波管の前記テーパ・エンドの間に配置され、
前記中間導波管は、前記クラッディングよりは高い屈折率を有するが、前記第1の導波管および第2の導波管よりは低い屈折率を有する、
方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15166333.3 | 2015-05-05 | ||
EP15166333.3A EP3091379B1 (en) | 2015-05-05 | 2015-05-05 | Optical coupling scheme |
Publications (2)
Publication Number | Publication Date |
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JP2016212415A JP2016212415A (ja) | 2016-12-15 |
JP6683535B2 true JP6683535B2 (ja) | 2020-04-22 |
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JP2016092362A Active JP6683535B2 (ja) | 2015-05-05 | 2016-05-02 | 光結合方式 |
Country Status (4)
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US (1) | US9746607B2 (ja) |
EP (1) | EP3091379B1 (ja) |
JP (1) | JP6683535B2 (ja) |
CN (1) | CN106125195A (ja) |
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US9746607B2 (en) | 2017-08-29 |
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EP3091379B1 (en) | 2020-12-02 |
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