JP6670561B2 - テレセントリック明視野および環状暗視野のシームレス融合型照明 - Google Patents
テレセントリック明視野および環状暗視野のシームレス融合型照明 Download PDFInfo
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- JP6670561B2 JP6670561B2 JP2015141727A JP2015141727A JP6670561B2 JP 6670561 B2 JP6670561 B2 JP 6670561B2 JP 2015141727 A JP2015141727 A JP 2015141727A JP 2015141727 A JP2015141727 A JP 2015141727A JP 6670561 B2 JP6670561 B2 JP 6670561B2
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Optical Elements Other Than Lenses (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462026030P | 2014-07-17 | 2014-07-17 | |
| US62/026,030 | 2014-07-17 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016024195A JP2016024195A (ja) | 2016-02-08 |
| JP2016024195A5 JP2016024195A5 (enExample) | 2018-07-26 |
| JP6670561B2 true JP6670561B2 (ja) | 2020-03-25 |
Family
ID=55271028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015141727A Active JP6670561B2 (ja) | 2014-07-17 | 2015-07-16 | テレセントリック明視野および環状暗視野のシームレス融合型照明 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6670561B2 (enExample) |
| KR (1) | KR102373287B1 (enExample) |
| CN (1) | CN105424600B (enExample) |
| TW (1) | TWI702386B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101839207B1 (ko) * | 2016-05-20 | 2018-04-26 | 한국광기술원 | 광원 모듈용 집광렌즈 및 이를 이용한 광원모듈 |
| US10872418B2 (en) * | 2016-10-11 | 2020-12-22 | Kabushiki Kaisha Toshiba | Edge detection device, an edge detection method, and an object holding device |
| CN108072659B (zh) * | 2016-11-11 | 2022-05-31 | 三星显示有限公司 | 多光学视觉设备 |
| WO2020148749A1 (en) * | 2019-01-14 | 2020-07-23 | Orbotech Ltd. | Multiplexed image acquisition device for optical system |
| TWI845693B (zh) * | 2019-07-11 | 2024-06-21 | 以色列商奧寶科技有限公司 | 用於檢驗之光學設備及方法 |
| KR102224835B1 (ko) * | 2021-01-06 | 2021-03-08 | (주)하이비젼시스템 | 결함 검사 분야에 적용 가능한 광학 프리즘 및 이를 이용한 암시야 조명계 |
| CN113532800B (zh) * | 2021-05-21 | 2024-08-16 | 杭州涂鸦信息技术有限公司 | 透光区域的分析方法以及相关设备、装置 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54103362A (en) * | 1978-01-31 | 1979-08-14 | Matsushita Electric Ind Co Ltd | Optical observation apparatus |
| DE3714830A1 (de) * | 1987-05-05 | 1988-11-17 | Leitz Ernst Gmbh | Kombinierte hellfeld-dunkelfeld- auflichtbeleuchtungseinrichtung |
| IL94368A (en) * | 1990-05-11 | 1993-07-08 | Orbot Systems Ltd | Optic inspection apparatus and illumination system particularly useful therein |
| JP3386269B2 (ja) * | 1995-01-25 | 2003-03-17 | 株式会社ニュークリエイション | 光学検査装置 |
| JPH09288237A (ja) * | 1996-02-20 | 1997-11-04 | Bunshi Bio Photonics Kenkyusho:Kk | 暗視野落射顕微鏡 |
| JPH09171150A (ja) * | 1997-01-22 | 1997-06-30 | Matsushita Electric Ind Co Ltd | 照明光学装置とそれを用いた投写型表示装置 |
| DE19903486C2 (de) * | 1999-01-29 | 2003-03-06 | Leica Microsystems | Verfahren und Vorrichtung zur optischen Untersuchung von strukturierten Oberflächen von Objekten |
| JP2001154103A (ja) * | 1999-11-30 | 2001-06-08 | Mitsutoyo Corp | 光学器械の照明装置 |
| JP2003149169A (ja) * | 2001-11-16 | 2003-05-21 | Tokyo Seimitsu Co Ltd | ウエハ欠陥検査装置 |
| DE10339618A1 (de) * | 2003-08-28 | 2005-03-24 | Leica Microsystems (Schweiz) Ag | Leuchtdioden-Beleuchtung für ein optisches Beobachtungsgerät, insbesondere ein Stereo- oder ein Stereooperationsmikroskop |
| US7300177B2 (en) * | 2004-02-11 | 2007-11-27 | 3M Innovative Properties | Illumination system having a plurality of light source modules disposed in an array with a non-radially symmetrical aperture |
| US20050254065A1 (en) * | 2004-05-12 | 2005-11-17 | Stokowski Stanley E | Method and apparatus for detecting surface characteristics on a mask blank |
| WO2005119227A1 (ja) * | 2004-06-04 | 2005-12-15 | Tokyo Seimitsu Co., Ltd. | 半導体外観検査装置及び照明方法 |
| US7660045B2 (en) * | 2004-11-24 | 2010-02-09 | Takashi Yoshimine | Object lens and condenser |
| US7714996B2 (en) * | 2007-01-23 | 2010-05-11 | 3i Systems Corporation | Automatic inspection system for flat panel substrate |
| CN101315470A (zh) * | 2007-05-30 | 2008-12-03 | 赖秀惠 | 用于检测设备的透镜拼接方法及其系统 |
| IL188825A0 (en) * | 2008-01-16 | 2008-11-03 | Orbotech Ltd | Inspection of a substrate using multiple cameras |
| KR101697240B1 (ko) * | 2008-04-04 | 2017-01-17 | 난다 테크놀로지스 게엠베하 | 광학 검사 시스템 및 방법 |
| KR20110043616A (ko) * | 2008-07-22 | 2011-04-27 | 오르보테크 엘티디. | 효과적인 원격중심 광학 시스템(ｅｔｏｓ) |
| WO2010013232A1 (en) * | 2008-07-29 | 2010-02-04 | Applied Materials Israel Ltd. | Mapping variations of a surface |
| JP2010243283A (ja) * | 2009-04-03 | 2010-10-28 | Hitachi High-Technologies Corp | 欠陥検査方法および欠陥検査装置 |
| CN102023164B (zh) * | 2009-09-23 | 2015-09-16 | 法国圣-戈班玻璃公司 | 用于检测透明平板的局部缺陷的装置和方法 |
| JP2012220610A (ja) * | 2011-04-06 | 2012-11-12 | Nikon Corp | 顕微鏡装置 |
| US20130148115A1 (en) * | 2011-12-12 | 2013-06-13 | Yoav Berlatzky | Optical system and method for inspection of patterned samples |
-
2015
- 2015-07-16 JP JP2015141727A patent/JP6670561B2/ja active Active
- 2015-07-16 TW TW104123054A patent/TWI702386B/zh active
- 2015-07-17 CN CN201510423283.5A patent/CN105424600B/zh active Active
- 2015-07-17 KR KR1020150101695A patent/KR102373287B1/ko active Active
Also Published As
| Publication number | Publication date |
|---|---|
| TW201604535A (zh) | 2016-02-01 |
| KR20160010364A (ko) | 2016-01-27 |
| CN105424600A (zh) | 2016-03-23 |
| CN105424600B (zh) | 2019-08-09 |
| JP2016024195A (ja) | 2016-02-08 |
| KR102373287B1 (ko) | 2022-03-10 |
| TWI702386B (zh) | 2020-08-21 |
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