KR102373287B1 - 이음새없이 형성된 텔레센트릭 명시야 및 환형 암시야 조명 - Google Patents

이음새없이 형성된 텔레센트릭 명시야 및 환형 암시야 조명 Download PDF

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KR102373287B1
KR102373287B1 KR1020150101695A KR20150101695A KR102373287B1 KR 102373287 B1 KR102373287 B1 KR 102373287B1 KR 1020150101695 A KR1020150101695 A KR 1020150101695A KR 20150101695 A KR20150101695 A KR 20150101695A KR 102373287 B1 KR102373287 B1 KR 102373287B1
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illumination
optical
integrated
central
segment
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Korean (ko)
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KR20160010364A (ko
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탈리 허비츠
엘리 메이모운
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오르보테크 엘티디.
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/04—Refractors for light sources of lens shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F21S2/005—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction of modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V19/00—Fastening of light sources or lamp holders
    • F21V19/02—Fastening of light sources or lamp holders with provision for adjustment, e.g. for focusing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/007—Array of lenses or refractors for a cluster of light sources, e.g. for arrangement of multiple light sources in one plane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/02—Refractors for light sources of prismatic shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/04—Refractors for light sources of lens shape
    • F21V5/045—Refractors for light sources of lens shape the lens having discontinuous faces, e.g. Fresnel lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21W—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO USES OR APPLICATIONS OF LIGHTING DEVICES OR SYSTEMS
    • F21W2131/00—Use or application of lighting devices or systems not provided for in codes F21W2102/00-F21W2121/00
    • F21W2131/40—Lighting for industrial, commercial, recreational or military use
    • F21W2131/403—Lighting for industrial, commercial, recreational or military use for machines

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Microscoopes, Condenser (AREA)
KR1020150101695A 2014-07-17 2015-07-17 이음새없이 형성된 텔레센트릭 명시야 및 환형 암시야 조명 Active KR102373287B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462026030P 2014-07-17 2014-07-17
US62/026,030 2014-07-17

Publications (2)

Publication Number Publication Date
KR20160010364A KR20160010364A (ko) 2016-01-27
KR102373287B1 true KR102373287B1 (ko) 2022-03-10

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Country Status (4)

Country Link
JP (1) JP6670561B2 (enExample)
KR (1) KR102373287B1 (enExample)
CN (1) CN105424600B (enExample)
TW (1) TWI702386B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101839207B1 (ko) * 2016-05-20 2018-04-26 한국광기술원 광원 모듈용 집광렌즈 및 이를 이용한 광원모듈
US10872418B2 (en) * 2016-10-11 2020-12-22 Kabushiki Kaisha Toshiba Edge detection device, an edge detection method, and an object holding device
CN108072659B (zh) * 2016-11-11 2022-05-31 三星显示有限公司 多光学视觉设备
CN113287001B (zh) * 2019-01-14 2023-04-04 奥宝科技有限公司 用于光学系统的多重图像获取装置
TWI845693B (zh) 2019-07-11 2024-06-21 以色列商奧寶科技有限公司 用於檢驗之光學設備及方法
KR102224835B1 (ko) * 2021-01-06 2021-03-08 (주)하이비젼시스템 결함 검사 분야에 적용 가능한 광학 프리즘 및 이를 이용한 암시야 조명계
CN113532800B (zh) * 2021-05-21 2024-08-16 杭州涂鸦信息技术有限公司 透光区域的分析方法以及相关设备、装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2664407B2 (ja) * 1987-05-05 1997-10-15 ライカ インドゥストリーフェルヴァルツング ゲゼルシャフト ミット ベシュレンクテル ハフツング 明視野・暗視野組合せ落射照明装置
JP2001154103A (ja) * 1999-11-30 2001-06-08 Mitsutoyo Corp 光学器械の照明装置
JP2010243283A (ja) * 2009-04-03 2010-10-28 Hitachi High-Technologies Corp 欠陥検査方法および欠陥検査装置
JP2011510289A (ja) * 2008-01-16 2011-03-31 オルボテック リミテッド 複数のカメラを使用した基板検査

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54103362A (en) * 1978-01-31 1979-08-14 Matsushita Electric Ind Co Ltd Optical observation apparatus
IL94368A (en) * 1990-05-11 1993-07-08 Orbot Systems Ltd Optic inspection apparatus and illumination system particularly useful therein
JP3386269B2 (ja) * 1995-01-25 2003-03-17 株式会社ニュークリエイション 光学検査装置
JPH09288237A (ja) * 1996-02-20 1997-11-04 Bunshi Bio Photonics Kenkyusho:Kk 暗視野落射顕微鏡
JPH09171150A (ja) * 1997-01-22 1997-06-30 Matsushita Electric Ind Co Ltd 照明光学装置とそれを用いた投写型表示装置
DE19903486C2 (de) * 1999-01-29 2003-03-06 Leica Microsystems Verfahren und Vorrichtung zur optischen Untersuchung von strukturierten Oberflächen von Objekten
JP2003149169A (ja) * 2001-11-16 2003-05-21 Tokyo Seimitsu Co Ltd ウエハ欠陥検査装置
DE10339618A1 (de) * 2003-08-28 2005-03-24 Leica Microsystems (Schweiz) Ag Leuchtdioden-Beleuchtung für ein optisches Beobachtungsgerät, insbesondere ein Stereo- oder ein Stereooperationsmikroskop
US7300177B2 (en) * 2004-02-11 2007-11-27 3M Innovative Properties Illumination system having a plurality of light source modules disposed in an array with a non-radially symmetrical aperture
US20050254065A1 (en) * 2004-05-12 2005-11-17 Stokowski Stanley E Method and apparatus for detecting surface characteristics on a mask blank
JPWO2005119227A1 (ja) * 2004-06-04 2008-04-03 株式会社東京精密 半導体外観検査装置及び照明方法
JP4332559B2 (ja) * 2004-11-24 2009-09-16 貴司 吉峰 対物レンズ及びコンデンサ
US7714996B2 (en) * 2007-01-23 2010-05-11 3i Systems Corporation Automatic inspection system for flat panel substrate
CN101315470A (zh) * 2007-05-30 2008-12-03 赖秀惠 用于检测设备的透镜拼接方法及其系统
WO2009121628A2 (en) * 2008-04-04 2009-10-08 Nanda Technologies Gmbh Optical inspection system and method
WO2010010556A1 (en) * 2008-07-22 2010-01-28 Orbotech Ltd. Efficient telecentric optical system (etos)
US8724882B2 (en) * 2008-07-29 2014-05-13 Applied Materials Israel, Ltd. Mapping variations of a surface
CN102023164B (zh) * 2009-09-23 2015-09-16 法国圣-戈班玻璃公司 用于检测透明平板的局部缺陷的装置和方法
JP2012220610A (ja) * 2011-04-06 2012-11-12 Nikon Corp 顕微鏡装置
US20130148115A1 (en) * 2011-12-12 2013-06-13 Yoav Berlatzky Optical system and method for inspection of patterned samples

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2664407B2 (ja) * 1987-05-05 1997-10-15 ライカ インドゥストリーフェルヴァルツング ゲゼルシャフト ミット ベシュレンクテル ハフツング 明視野・暗視野組合せ落射照明装置
JP2001154103A (ja) * 1999-11-30 2001-06-08 Mitsutoyo Corp 光学器械の照明装置
JP2011510289A (ja) * 2008-01-16 2011-03-31 オルボテック リミテッド 複数のカメラを使用した基板検査
JP2010243283A (ja) * 2009-04-03 2010-10-28 Hitachi High-Technologies Corp 欠陥検査方法および欠陥検査装置

Also Published As

Publication number Publication date
TW201604535A (zh) 2016-02-01
KR20160010364A (ko) 2016-01-27
TWI702386B (zh) 2020-08-21
CN105424600A (zh) 2016-03-23
JP6670561B2 (ja) 2020-03-25
CN105424600B (zh) 2019-08-09
JP2016024195A (ja) 2016-02-08

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