TWI702386B - 遠心亮場與環形暗場無縫融合式照射 - Google Patents

遠心亮場與環形暗場無縫融合式照射 Download PDF

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Publication number
TWI702386B
TWI702386B TW104123054A TW104123054A TWI702386B TW I702386 B TWI702386 B TW I702386B TW 104123054 A TW104123054 A TW 104123054A TW 104123054 A TW104123054 A TW 104123054A TW I702386 B TWI702386 B TW I702386B
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Taiwan
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optical
illumination
unified
central
peripheral
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TW104123054A
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English (en)
Chinese (zh)
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TW201604535A (zh
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塔利 郝维思
艾里 梅茂
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以色列商奧寶科技股份有限公司
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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Microscoopes, Condenser (AREA)
TW104123054A 2014-07-17 2015-07-16 遠心亮場與環形暗場無縫融合式照射 TWI702386B (zh)

Applications Claiming Priority (2)

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US201462026030P 2014-07-17 2014-07-17
US62/026,030 2014-07-17

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TW201604535A TW201604535A (zh) 2016-02-01
TWI702386B true TWI702386B (zh) 2020-08-21

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JP (1) JP6670561B2 (enExample)
KR (1) KR102373287B1 (enExample)
CN (1) CN105424600B (enExample)
TW (1) TWI702386B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101839207B1 (ko) * 2016-05-20 2018-04-26 한국광기술원 광원 모듈용 집광렌즈 및 이를 이용한 광원모듈
US10872418B2 (en) * 2016-10-11 2020-12-22 Kabushiki Kaisha Toshiba Edge detection device, an edge detection method, and an object holding device
CN108072659B (zh) * 2016-11-11 2022-05-31 三星显示有限公司 多光学视觉设备
WO2020148749A1 (en) * 2019-01-14 2020-07-23 Orbotech Ltd. Multiplexed image acquisition device for optical system
TWI845693B (zh) * 2019-07-11 2024-06-21 以色列商奧寶科技有限公司 用於檢驗之光學設備及方法
KR102224835B1 (ko) * 2021-01-06 2021-03-08 (주)하이비젼시스템 결함 검사 분야에 적용 가능한 광학 프리즘 및 이를 이용한 암시야 조명계
CN113532800B (zh) * 2021-05-21 2024-08-16 杭州涂鸦信息技术有限公司 透光区域的分析方法以及相关设备、装置

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US20080024794A1 (en) * 2004-06-04 2008-01-31 Yoko Miyazaki Semiconductor Surface Inspection Apparatus and Method of Illumination
CN101315470A (zh) * 2007-05-30 2008-12-03 赖秀惠 用于检测设备的透镜拼接方法及其系统
US7714996B2 (en) * 2007-01-23 2010-05-11 3i Systems Corporation Automatic inspection system for flat panel substrate
JP2012220610A (ja) * 2011-04-06 2012-11-12 Nikon Corp 顕微鏡装置

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IL94368A (en) * 1990-05-11 1993-07-08 Orbot Systems Ltd Optic inspection apparatus and illumination system particularly useful therein
JP3386269B2 (ja) * 1995-01-25 2003-03-17 株式会社ニュークリエイション 光学検査装置
JPH09288237A (ja) * 1996-02-20 1997-11-04 Bunshi Bio Photonics Kenkyusho:Kk 暗視野落射顕微鏡
JPH09171150A (ja) * 1997-01-22 1997-06-30 Matsushita Electric Ind Co Ltd 照明光学装置とそれを用いた投写型表示装置
DE19903486C2 (de) * 1999-01-29 2003-03-06 Leica Microsystems Verfahren und Vorrichtung zur optischen Untersuchung von strukturierten Oberflächen von Objekten
JP2001154103A (ja) * 1999-11-30 2001-06-08 Mitsutoyo Corp 光学器械の照明装置
JP2003149169A (ja) * 2001-11-16 2003-05-21 Tokyo Seimitsu Co Ltd ウエハ欠陥検査装置
DE10339618A1 (de) * 2003-08-28 2005-03-24 Leica Microsystems (Schweiz) Ag Leuchtdioden-Beleuchtung für ein optisches Beobachtungsgerät, insbesondere ein Stereo- oder ein Stereooperationsmikroskop
US7300177B2 (en) * 2004-02-11 2007-11-27 3M Innovative Properties Illumination system having a plurality of light source modules disposed in an array with a non-radially symmetrical aperture
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IL188825A0 (en) * 2008-01-16 2008-11-03 Orbotech Ltd Inspection of a substrate using multiple cameras
KR101697240B1 (ko) * 2008-04-04 2017-01-17 난다 테크놀로지스 게엠베하 광학 검사 시스템 및 방법
KR20110043616A (ko) * 2008-07-22 2011-04-27 오르보테크 엘티디. 효과적인 원격중심 광학 시스템(ｅｔｏｓ)
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JP2010243283A (ja) * 2009-04-03 2010-10-28 Hitachi High-Technologies Corp 欠陥検査方法および欠陥検査装置
CN102023164B (zh) * 2009-09-23 2015-09-16 法国圣-戈班玻璃公司 用于检测透明平板的局部缺陷的装置和方法
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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4881802A (en) * 1987-05-05 1989-11-21 Ernst Leitz Wetzlar Gmbh Combined bright field-dark field incident light illumination apparatus
US20080024794A1 (en) * 2004-06-04 2008-01-31 Yoko Miyazaki Semiconductor Surface Inspection Apparatus and Method of Illumination
US7714996B2 (en) * 2007-01-23 2010-05-11 3i Systems Corporation Automatic inspection system for flat panel substrate
CN101315470A (zh) * 2007-05-30 2008-12-03 赖秀惠 用于检测设备的透镜拼接方法及其系统
JP2012220610A (ja) * 2011-04-06 2012-11-12 Nikon Corp 顕微鏡装置

Also Published As

Publication number Publication date
TW201604535A (zh) 2016-02-01
JP6670561B2 (ja) 2020-03-25
KR20160010364A (ko) 2016-01-27
CN105424600A (zh) 2016-03-23
CN105424600B (zh) 2019-08-09
JP2016024195A (ja) 2016-02-08
KR102373287B1 (ko) 2022-03-10

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