JP6649726B2 - 半導体発光装置およびその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 225
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 230000003287 optical effect Effects 0.000 claims description 52
- 238000000034 method Methods 0.000 claims description 21
- 238000002834 transmittance Methods 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 132
- 229920005989 resin Polymers 0.000 description 99
- 239000011347 resin Substances 0.000 description 99
- 239000000758 substrate Substances 0.000 description 51
- 229910052751 metal Inorganic materials 0.000 description 31
- 239000002184 metal Substances 0.000 description 31
- 239000000463 material Substances 0.000 description 29
- 230000035882 stress Effects 0.000 description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 12
- 229910052802 copper Inorganic materials 0.000 description 12
- 239000010949 copper Substances 0.000 description 12
- 229910000679 solder Inorganic materials 0.000 description 10
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910002601 GaN Inorganic materials 0.000 description 7
- 238000000605 extraction Methods 0.000 description 7
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 238000013459 approach Methods 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 238000001579 optical reflectometry Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 230000001629 suppression Effects 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229920002050 silicone resin Polymers 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 235000005811 Viola adunca Nutrition 0.000 description 1
- 240000009038 Viola odorata Species 0.000 description 1
- 235000013487 Viola odorata Nutrition 0.000 description 1
- 235000002254 Viola papilionacea Nutrition 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005987 sulfurization reaction Methods 0.000 description 1
- 208000005123 swayback Diseases 0.000 description 1
- 239000002470 thermal conductor Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
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- H01L33/0004—Devices characterised by their operation
- H01L33/0008—Devices characterised by their operation having p-n or hi-lo junctions
- H01L33/0012—Devices characterised by their operation having p-n or hi-lo junctions p-i-n devices
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16245—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
Description
図2(a)は、実施形態の半導体発光装置におけるp側電極16と、n側電極17との平面レイアウトの一例を示す模式平面図である。図1は、図2(a)におけるA−A’断面に対応する。図2(a)は、図1における各配線部41、43、樹脂層25、絶縁膜18、および反射膜51を取り除いて半導体層15の第2面15bから見た図に対応する。
図3(a)に示すように、例えば、MOCVD(metal organic chemical vapor deposition)法により、基板10の主面側に、第1の半導体層11、発光層13および第2の半導体層12が順にエピタキシャル成長される。
樹脂層25は、p側配線部41およびn側配線部43を覆う。また、樹脂層25は、反射膜51を覆う。
他の実施形態において、上述した実施形態との主な差異は、配線周辺の構成である。そのため、上述した実施形態と同様の部分に関しては、説明を一部省略する。
Claims (9)
- 第1の半導体層と、第2の半導体層と、前記第1の半導体層と前記第2の半導体層との間に設けられた発光層と、第1面と、前記第1面に対向する第2面と、を有する半導体層と、
前記第2の半導体層と接するp側電極と、
前記第1の半導体層と接するn側電極と、
前記第2面側に設けられ、前記p側電極と接するp側ピラーと、
前記第2面側に設けられ、前記n側電極と接するn側ピラーと、
前記半導体層の側面の外側に設けられた第1絶縁層と、
前記第1の半導体層の前記第1面上および前記第1絶縁層上に設けられた光学層と、
前記第1絶縁層の側面の外側および前記光学層の側面の外側に設けられた第2絶縁層と、
前記第2絶縁層上および前記光学層上に設けられ、前記光学層の上面、側面および角部と接し、光透過性を有する第1層であって、
前記光学層の前記側面および前記第2絶縁層の上面と接する第1下端部と、
前記第2絶縁層の前記上面と接し、前記光学層と離間し、前記光学層の前記角部の高さよりも低く、前記第1下端部の高さ以上の高さに設けられた第2下端部と、
を有する第1層と、
前記p側ピラーに接し、前記第1絶縁層および前記第2絶縁層と重なる領域に延びるp側配線と、
前記n側ピラーに接し、前記第1絶縁層および前記第2絶縁層と重なる領域に延び、前記p側配線と離間するn側配線と、
を備え、
前記第1層は、前記光学層の前記側面に対して傾斜する傾斜部を有し、
前記傾斜部は、前記第1下端部から前記第2下端部まで連続して設けられた半導体発光装置。 - 前記第2下端部から前記第1層の上面までの間の距離は、前記光学層の前記上面から前記第1層の前記上面までの間の距離よりも大きい請求項1記載の半導体発光装置。
- 前記第1層の前記傾斜部は、曲面を有する請求項1記載の半導体発光装置。
- 前記第1層上に設けられ、光透過性を有する第2層をさらに備えた請求項1乃至3のいずれか1項に記載の半導体発光装置。
- 第1の半導体層と、第2の半導体層と、前記第1の半導体層と前記第2の半導体層との間に設けられた発光層と、第1面と、前記第1面に対向する第2面と、を有する半導体層と、
前記第2の半導体層と接するp側電極と、
前記第1の半導体層と接するn側電極と、
前記第2面側に設けられ、前記p側電極と接するp側ピラーと、
前記第2面側に設けられ、前記n側電極と接するn側ピラーと、
前記半導体層の側面の外側に設けられた第1絶縁層と、
前記半導体層の前記第1面上および前記第1絶縁層上に設けられた光学層と、
前記第1絶縁層の側面の外側および前記光学層の側面の外側に設けられた第2絶縁層であって、前記光学層の上面の高さよりも前記半導体層に近い高さに設けられ、一部が前記光学層の前記側面に対して傾斜し、前記光学層の上面、側面及び前記第2絶縁層の上面を覆う光透過性を有する第1層と接触しながら前記光学層の前記側面から離れるにつれて前記光学層の上面の高さに近づく上面を有する第2絶縁層と、
前記p側ピラーに接し、前記第1絶縁層および前記第2絶縁層と重なる領域に延びるp側配線と、
前記n側ピラーに接し、前記第1絶縁層および前記第2絶縁層と重なる領域に延び、前記p側配線と離間するn側配線と、
を備えた半導体発光装置。 - 前記第2絶縁層の前記上面の傾斜は、曲面を有する請求項5記載の半導体発光装置。
- 前記第2絶縁層上および前記光学層上に設けられ、前記光学層の上面、側面および角部と接し、光透過性を有する第1層をさらに備えた請求項5または6に記載の半導体発光装置。
- 前記第1層上に設けられ、光透過性を有する第2層をさらに備えた請求項7記載の半導体発光装置。
- 第1の半導体層と、第2の半導体層と、前記第1の半導体層と前記第2の半導体層との間に設けられた発光層と、を有する半導体層を形成する工程と、
前記半導体層と接するp側電極およびn側電極を形成する工程と、
前記p側電極と電気的に接続するp側ピラーを形成する工程と、
前記n側電極と電気的に接続し、第1絶縁層を介して前記p側ピラーと離間するn側ピラーを形成する工程と、
前記p側電極の側面、前記n側電極の側面および前記半導体層の側面に前記第1絶縁層を形成する工程と、
前記半導体層上および前記第1絶縁層上に光学層を形成する工程と、
光透過性を有する第1層に前記光学層の表面を貼り合わせ、前記光学層の側面に対して傾斜し、前記光学層の側面に接する傾斜部を前記第1層の表面に形成する工程と、
前記第1絶縁層の側面、前記光学層の前記側面および前記傾斜部と接する第2絶縁層を形成する工程と、
前記p側ピラーと電気的に接続し、前記第1絶縁層、前記第2絶縁層および前記p側ピラーと重なるp側配線を一体に形成する工程と、
前記n側ピラーと電気的に接続し、前記第1絶縁層、前記第2絶縁層および前記n側ピラーと重なるn側配線を一体に形成する工程と、
を備えた半導体発光装置の製造方法。
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Application Number | Priority Date | Filing Date | Title |
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JP2015179421A JP6649726B2 (ja) | 2015-09-11 | 2015-09-11 | 半導体発光装置およびその製造方法 |
US15/065,146 US9543484B1 (en) | 2015-09-11 | 2016-03-09 | Semiconductor light emitting device and method for manufacturing same |
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