JP6647001B2 - 圧電振動片及び圧電振動子 - Google Patents

圧電振動片及び圧電振動子 Download PDF

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JP6647001B2
JP6647001B2 JP2015203588A JP2015203588A JP6647001B2 JP 6647001 B2 JP6647001 B2 JP 6647001B2 JP 2015203588 A JP2015203588 A JP 2015203588A JP 2015203588 A JP2015203588 A JP 2015203588A JP 6647001 B2 JP6647001 B2 JP 6647001B2
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piezoelectric vibrating
vibrating reed
electrode
outer edge
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JP2017076886A (ja
JP2017076886A5 (enExample
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勉 齊藤
勉 齊藤
耕太郎 河田
耕太郎 河田
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River Eletec Corp
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River Eletec Corp
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2015203588A 2015-10-15 2015-10-15 圧電振動片及び圧電振動子 Active JP6647001B2 (ja)

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JP2017076886A5 JP2017076886A5 (enExample) 2018-11-22
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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7077539B2 (ja) 2017-06-23 2022-05-31 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP7365182B2 (ja) * 2019-10-04 2023-10-19 日本電波工業株式会社 振動子及び発振器
CN114244313A (zh) * 2021-12-02 2022-03-25 泰晶科技股份有限公司 一种高基频石英晶体谐振器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004200777A (ja) * 2002-12-16 2004-07-15 Toyo Commun Equip Co Ltd メサ構造の圧電基板、圧電振動素子、圧電振動子、及び圧電発振器
JP5123043B2 (ja) * 2008-04-26 2013-01-16 京セラクリスタルデバイス株式会社 水晶振動子および水晶発振器
JP5245731B2 (ja) * 2008-11-06 2013-07-24 セイコーエプソン株式会社 圧電素子製造方法
JP5991464B2 (ja) * 2012-03-19 2016-09-14 セイコーエプソン株式会社 振動片およびその製造方法、振動素子、振動子、電子デバイス、並びに電子機器
JP5413486B2 (ja) * 2012-05-22 2014-02-12 セイコーエプソン株式会社 振動片、振動デバイス、発振器、及び電子機器
JP6167520B2 (ja) * 2013-01-08 2017-07-26 セイコーエプソン株式会社 素子の製造方法
JP6338367B2 (ja) * 2013-12-24 2018-06-06 日本電波工業株式会社 水晶振動子

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