JP2017076886A5 - - Google Patents

Download PDF

Info

Publication number
JP2017076886A5
JP2017076886A5 JP2015203588A JP2015203588A JP2017076886A5 JP 2017076886 A5 JP2017076886 A5 JP 2017076886A5 JP 2015203588 A JP2015203588 A JP 2015203588A JP 2015203588 A JP2015203588 A JP 2015203588A JP 2017076886 A5 JP2017076886 A5 JP 2017076886A5
Authority
JP
Japan
Prior art keywords
excitation
piezoelectric vibrating
vibrating piece
piece according
outer edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015203588A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017076886A (ja
JP6647001B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2015203588A priority Critical patent/JP6647001B2/ja
Priority claimed from JP2015203588A external-priority patent/JP6647001B2/ja
Publication of JP2017076886A publication Critical patent/JP2017076886A/ja
Publication of JP2017076886A5 publication Critical patent/JP2017076886A5/ja
Application granted granted Critical
Publication of JP6647001B2 publication Critical patent/JP6647001B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015203588A 2015-10-15 2015-10-15 圧電振動片及び圧電振動子 Active JP6647001B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015203588A JP6647001B2 (ja) 2015-10-15 2015-10-15 圧電振動片及び圧電振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015203588A JP6647001B2 (ja) 2015-10-15 2015-10-15 圧電振動片及び圧電振動子

Publications (3)

Publication Number Publication Date
JP2017076886A JP2017076886A (ja) 2017-04-20
JP2017076886A5 true JP2017076886A5 (enExample) 2018-11-22
JP6647001B2 JP6647001B2 (ja) 2020-02-14

Family

ID=58549585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015203588A Active JP6647001B2 (ja) 2015-10-15 2015-10-15 圧電振動片及び圧電振動子

Country Status (1)

Country Link
JP (1) JP6647001B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7077539B2 (ja) 2017-06-23 2022-05-31 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP7365182B2 (ja) * 2019-10-04 2023-10-19 日本電波工業株式会社 振動子及び発振器
CN114244313A (zh) * 2021-12-02 2022-03-25 泰晶科技股份有限公司 一种高基频石英晶体谐振器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004200777A (ja) * 2002-12-16 2004-07-15 Toyo Commun Equip Co Ltd メサ構造の圧電基板、圧電振動素子、圧電振動子、及び圧電発振器
JP5123043B2 (ja) * 2008-04-26 2013-01-16 京セラクリスタルデバイス株式会社 水晶振動子および水晶発振器
JP5245731B2 (ja) * 2008-11-06 2013-07-24 セイコーエプソン株式会社 圧電素子製造方法
JP5991464B2 (ja) * 2012-03-19 2016-09-14 セイコーエプソン株式会社 振動片およびその製造方法、振動素子、振動子、電子デバイス、並びに電子機器
JP5413486B2 (ja) * 2012-05-22 2014-02-12 セイコーエプソン株式会社 振動片、振動デバイス、発振器、及び電子機器
JP6167520B2 (ja) * 2013-01-08 2017-07-26 セイコーエプソン株式会社 素子の製造方法
JP6338367B2 (ja) * 2013-12-24 2018-06-06 日本電波工業株式会社 水晶振動子

Similar Documents

Publication Publication Date Title
JP2018006919A5 (enExample)
US10382008B2 (en) Surface acoustic wave device for suppressing transverse mode
JP2017520899A5 (enExample)
JP6424958B2 (ja) 弾性波装置
JP2014526387A5 (enExample)
JP2010263317A5 (enExample)
JP2017076886A5 (enExample)
JP2016040992A5 (enExample)
JP2015076544A5 (enExample)
KR20180084667A (ko) 기판 프로세싱 방법
JP2012199861A5 (enExample)
JP2012160996A5 (enExample)
WO2017082104A1 (ja) 圧電たわみセンサ
KR102431710B1 (ko) 횡모드 억제를 위한 표면 탄성파 디바이스
JP2013141311A5 (ja) 振動素子の製造方法
JP2017118412A5 (enExample)
JP5751278B2 (ja) 圧電バルク波共振子
JP5399888B2 (ja) 音叉型屈曲水晶振動素子
JP2016046393A5 (enExample)
JP6647001B2 (ja) 圧電振動片及び圧電振動子
US20160182012A1 (en) Tuning fork vibrator
JP2015070588A5 (enExample)
JP6086762B2 (ja) 水晶振動素子
JP6525821B2 (ja) 音叉型水晶素子
JP2015026811A5 (enExample)