JP6641663B2 - ガラス板の製造方法及びその製造装置 - Google Patents

ガラス板の製造方法及びその製造装置 Download PDF

Info

Publication number
JP6641663B2
JP6641663B2 JP2015179729A JP2015179729A JP6641663B2 JP 6641663 B2 JP6641663 B2 JP 6641663B2 JP 2015179729 A JP2015179729 A JP 2015179729A JP 2015179729 A JP2015179729 A JP 2015179729A JP 6641663 B2 JP6641663 B2 JP 6641663B2
Authority
JP
Japan
Prior art keywords
air supply
glass plate
supply port
region
processing gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015179729A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017052678A (ja
Inventor
祐之 高橋
祐之 高橋
大野　和宏
和宏 大野
弘樹 中塚
弘樹 中塚
隼人 奥
隼人 奥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Electric Glass Co Ltd
Original Assignee
Nippon Electric Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co Ltd filed Critical Nippon Electric Glass Co Ltd
Priority to JP2015179729A priority Critical patent/JP6641663B2/ja
Priority to KR1020177032752A priority patent/KR102497944B1/ko
Priority to CN201680038292.5A priority patent/CN107709261B/zh
Priority to PCT/JP2016/074525 priority patent/WO2017043305A1/ja
Publication of JP2017052678A publication Critical patent/JP2017052678A/ja
Application granted granted Critical
Publication of JP6641663B2 publication Critical patent/JP6641663B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Drying Of Semiconductors (AREA)
JP2015179729A 2015-09-11 2015-09-11 ガラス板の製造方法及びその製造装置 Active JP6641663B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015179729A JP6641663B2 (ja) 2015-09-11 2015-09-11 ガラス板の製造方法及びその製造装置
KR1020177032752A KR102497944B1 (ko) 2015-09-11 2016-08-23 유리판의 제조 방법 및 그 제조 장치
CN201680038292.5A CN107709261B (zh) 2015-09-11 2016-08-23 玻璃板的制造方法及其制造装置
PCT/JP2016/074525 WO2017043305A1 (ja) 2015-09-11 2016-08-23 ガラス板の製造方法及びその製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015179729A JP6641663B2 (ja) 2015-09-11 2015-09-11 ガラス板の製造方法及びその製造装置

Publications (2)

Publication Number Publication Date
JP2017052678A JP2017052678A (ja) 2017-03-16
JP6641663B2 true JP6641663B2 (ja) 2020-02-05

Family

ID=58240695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015179729A Active JP6641663B2 (ja) 2015-09-11 2015-09-11 ガラス板の製造方法及びその製造装置

Country Status (4)

Country Link
JP (1) JP6641663B2 (zh)
KR (1) KR102497944B1 (zh)
CN (1) CN107709261B (zh)
WO (1) WO2017043305A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7290103B2 (ja) * 2019-11-19 2023-06-13 日本電気硝子株式会社 ガラス板の製造装置及びその製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4857142A (en) * 1988-09-22 1989-08-15 Fsi International, Inc. Method and apparatus for controlling simultaneous etching of front and back sides of wafers
JP2009129997A (ja) * 2007-11-20 2009-06-11 Sekisui Chem Co Ltd 表面処理装置
JP2009194014A (ja) * 2008-02-12 2009-08-27 Sharp Corp プロセス処理装置
TWI543948B (zh) * 2009-05-07 2016-08-01 日本電氣硝子股份有限公司 玻璃基板及其製造方法
WO2011105331A1 (ja) * 2010-02-25 2011-09-01 積水化学工業株式会社 エッチング方法及び装置
JP6048817B2 (ja) * 2012-12-27 2016-12-21 日本電気硝子株式会社 板状ガラスの表面処理装置及び表面処理方法
CN203382660U (zh) * 2013-06-27 2014-01-08 彩虹显示器件股份有限公司 玻璃表面刻蚀装置

Also Published As

Publication number Publication date
KR102497944B1 (ko) 2023-02-09
CN107709261B (zh) 2020-06-30
WO2017043305A1 (ja) 2017-03-16
KR20180050251A (ko) 2018-05-14
JP2017052678A (ja) 2017-03-16
CN107709261A (zh) 2018-02-16

Similar Documents

Publication Publication Date Title
JP5998086B2 (ja) 浮上用エアプレート
JP4494269B2 (ja) 基板処理装置
JP6641663B2 (ja) ガラス板の製造方法及びその製造装置
KR102588108B1 (ko) 유리판의 제조 방법 및 그 제조 장치
KR102423339B1 (ko) 유리 기판의 제조 방법
JP6076606B2 (ja) 浮上搬送装置および浮上搬送方法
WO2018025495A1 (ja) レーザ剥離装置、レーザ剥離方法、及び有機ｅｌディスプレイの製造方法
JP6562208B2 (ja) ガラス板の製造方法及びその製造装置
WO2018092556A1 (ja) ガラス基板の製造方法
JP7290103B2 (ja) ガラス板の製造装置及びその製造方法
KR102373643B1 (ko) 유리 기판의 제조 방법
TWI735698B (zh) 玻璃基板之製造方法
KR20180053274A (ko) 유리 기판의 제조 방법 및 유리 기판의 제조 장치
JP2008188547A (ja) ノズル機構及び，これを適用した連続する長尺物の搬送装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180410

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190627

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190722

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20191202

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20191215

R150 Certificate of patent or registration of utility model

Ref document number: 6641663

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150