JP6635839B2 - 窒化膜の形成方法 - Google Patents
窒化膜の形成方法 Download PDFInfo
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- JP6635839B2 JP6635839B2 JP2016057910A JP2016057910A JP6635839B2 JP 6635839 B2 JP6635839 B2 JP 6635839B2 JP 2016057910 A JP2016057910 A JP 2016057910A JP 2016057910 A JP2016057910 A JP 2016057910A JP 6635839 B2 JP6635839 B2 JP 6635839B2
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- 238000000034 method Methods 0.000 title claims description 60
- 150000004767 nitrides Chemical class 0.000 title claims description 45
- 238000012545 processing Methods 0.000 claims description 122
- 239000000460 chlorine Substances 0.000 claims description 77
- 238000005121 nitriding Methods 0.000 claims description 54
- 239000000758 substrate Substances 0.000 claims description 47
- 229910052801 chlorine Inorganic materials 0.000 claims description 42
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 39
- 239000002994 raw material Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 11
- 238000003860 storage Methods 0.000 claims description 10
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 6
- -1 silane compound Chemical class 0.000 claims description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 3
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 3
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 3
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 2
- 150000002429 hydrazines Chemical class 0.000 claims description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 2
- 239000005052 trichlorosilane Substances 0.000 claims description 2
- 229910000077 silane Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 description 287
- 239000010408 film Substances 0.000 description 206
- 235000012431 wafers Nutrition 0.000 description 50
- 230000007246 mechanism Effects 0.000 description 35
- 238000010926 purge Methods 0.000 description 31
- 238000011534 incubation Methods 0.000 description 30
- 230000015572 biosynthetic process Effects 0.000 description 19
- 238000000231 atomic layer deposition Methods 0.000 description 17
- 239000011261 inert gas Substances 0.000 description 15
- 238000000926 separation method Methods 0.000 description 14
- 238000012546 transfer Methods 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 12
- 239000006185 dispersion Substances 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000009257 reactivity Effects 0.000 description 4
- 150000004756 silanes Chemical class 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 238000002407 reforming Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- HDZGCSFEDULWCS-UHFFFAOYSA-N monomethylhydrazine Chemical compound CNN HDZGCSFEDULWCS-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical class [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45534—Use of auxiliary reactants other than used for contributing to the composition of the main film, e.g. catalysts, activators or scavengers
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02211—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28202—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a nitrogen-containing ambient, e.g. nitride deposition, growth, oxynitridation, NH3 nitridation, N2O oxidation, thermal nitridation, RTN, plasma nitridation, RPN
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
Description
一般的に、サーマルALDによりSiN膜を形成する際には、被処理基板を処理容器内に収容し、Si原料ガスとしてDCSガス、および窒化ガスとしてNH3ガスを用い、被処理基板を所定温度に加熱した状態で、DCSガスの供給と、NH3ガスの供給を所定回数繰り返すことにより、被処理基板の表面に所定膜厚のSiN膜を形成する。
次に、本発明の窒化膜の形成方法の一実施形態について説明する。本実施形態では窒化膜としてシリコン窒化膜(SiN膜)を形成する場合を例にとって説明する。
次に、上記実施形態によりSiN膜を実際に成膜した場合と、従来のサーマルALDにより成膜した場合とでインキュベーションタイムを比較した実験例について説明する。
ここでは、下地膜を熱酸化膜(SiO2膜)とし、その上に上記実施形態の図2のシーケンスに従って、DCS→Cl2→NH3→DCS・・・・と繰り返して膜形成を行った場合(ケースE)、下地膜をSiN膜とし、その上に同様に図2のシーケンスに従って膜形成を行った場合(ケースF)、下地膜を熱酸化膜(SiO2膜)とし、その上に従来のサーマルALDであるDCS→NH3→DCS→NH3・・・・と繰り返して膜形成を行った場合(ケースG)、下地膜をSiN膜とし、その上にケースGと同様に従来のサーマルALDにより膜形成を行った場合(ケースH)について、サイクル数とSiN膜の膜厚の関係を求めた。その結果を図8に示す。
次に、本発明の窒化膜の形成方法を実施するための成膜装置の例について説明する。
本例では成膜装置として縦型バッチ式成膜装置の例を示す。
図9は本発明に係る窒化膜の形成方法を実施するための成膜装置の第1の例を示す縦断面図、図10は図9の成膜装置を示す横断面図である。なお、図10においては、加熱装置を省略している。
DCSガス流量:500〜2000sccm
Cl2ガス流量:50〜5000sccm
NH3ガス流量:1000〜10000sccm
N2ガス(パージガス)流量:50〜5000sccm
1回当たりのDCSガス供給時間:3〜60sec
1回当たりのCl2ガス供給時間:1〜60sec
1回当たりのNH3ガス供給時間:5〜60sec
1回当たりのパージ時間:1〜30sec
本例では成膜装置として水平バッチ式成膜装置の例を示す。
図11は本発明に係る窒化膜の形成方法を実施するための成膜装置の第2の例を概略的に示す水平断面図である。
処理容器61内の搬入出口63に対応する部分は搬入出部65となっており、この搬入出部65において、ターンテーブル62上へのウエハWの搬入およびターンテーブル62上のウエハWの搬出が行われる。
DCSガス流量:500〜2000sccm
Cl2ガス流量:50〜5000sccm
NH3ガス流量:1000〜10000sccm
N2ガス(不活性ガス)流量:50〜10000sccm
本例では成膜装置として枚葉式成膜装置の例を示す。
図12は本発明に係る窒化膜の形成方法を実施するための成膜装置の第3の例を概略的に示す水平断面図である。
DCSガス流量:10〜2000sccm
Cl2ガス流量:10〜5000sccm
NH3ガス流量:1000〜5000sccm
N2ガス(パージガス)流量:50〜5000sccm
1回当たりのDCSガス供給時間:0.1〜60sec
1回当たりのCl2ガス供給時間:0.1〜60sec
1回当たりのNH3ガス供給時間:0.1〜60sec
1回当たりのパージ時間:0.1〜60sec
以上、本発明の実施形態について説明したが、本発明は、上記の実施形態に限定されず、その思想を逸脱しない範囲で種々変形可能である。
5;ウエハボート
14;窒化ガス供給機構
15;Si原料ガス供給機構
16;塩素含有ガス供給機構
26;パージガス供給機構
41;排気機構
42;加熱装置
62;ターンテーブル
65;搬入出部
71;第1処理エリア(Si原料ガス供給エリア)
72;第2処理エリア(塩素含有ガス供給エリア)
73;第3処理エリア(窒化エリア)
100,101,102;成膜装置
112;基板載置台
113;加熱ヒータ
114;Si原料ガス配管
115;塩素含有ガス配管
116;窒化ガス配管
117;パージガス配管
118;排気管
201;半導体基体
202;下地膜
W;半導体ウエハ
Claims (11)
- 被処理基板を所定温度に加熱し、前記被処理基板に成膜しようとする窒化膜を構成する第1の元素を含む成膜原料を供給して、前記被処理基板に吸着させる工程と、前記被処理基板に窒化ガスを供給する工程とを繰り返すサーマルALDにより被処理基板に窒化膜を形成する窒化膜の形成方法であって、
前記成膜原料を供給する工程の後に、前記被処理基板に塩素含有ガスを供給して、前記被処理基板に吸着している前記成膜原料ガスにおいて前記第1の元素に結合している塩素以外の結合種を塩素に置換する工程を実施することを特徴とする窒化膜の形成方法。 - 最初に、前記成膜原料を供給する工程を実施することを特徴とする請求項1に記載の窒化膜の形成方法。
- 最初に、前記窒化ガスを供給する工程を実施することを特徴とする請求項1に記載の窒化膜の形成方法。
- 前記塩素含有ガスは、Cl2ガス、HClガス、BCl3ガスから選択された少なくとも1種のガスであることを特徴とする請求項1から請求項3のいずれか1項に記載の窒化膜の形成方法。
- 前記窒化ガスは、アンモニアガス、またはヒドラジンガス、またはヒドラジンの誘導体のガスであることを特徴とする請求項1から請求項4のいずれか1項に記載の窒化膜の形成方法。
- 被処理基板は、窒化膜を形成するための下地膜を表面に有し、前記下地膜は、SiO2膜およびSiN膜のいずれか、または両方であることを特徴とする請求項1から請求項5のいずれか1項に記載の窒化膜の形成方法。
- 前記成膜原料ガスは、前記第1の元素がSiであるSi原料ガスであり、窒化膜としてシリコン窒化膜を形成することを特徴とする請求項1から請求項6のいずれか1項に記載の窒化膜の形成方法。
- 前記成膜原料ガスであるSi原料ガスは、その分子におけるSiの結合手の少なくとも一つにClが結合していないものであることを特徴とする請求項7に記載の窒化膜の形成方法。
- 前記Si原料ガスは、ジクロロシラン、モノクロロシラン、トリクロロシラン、モノシラン、ジシラン、有機シラン系化合物のいずれかであることを特徴とする請求項7または請求項8に記載の窒化膜の形成方法。
- 被処理基板の加熱温度は、400〜700℃であることを特徴とする請求項7から請求項9のいずれか1項に記載の窒化膜の形成方法。
- コンピュータ上で動作し、処理装置を制御するためのプログラムが記憶された記憶媒体であって、前記プログラムは、実行時に、請求項1から請求項10のいずれかの窒化膜の形成方法が行われるように、コンピュータに前記処理装置を制御させることを特徴とする記憶媒体。
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