JP6632481B2 - 弾性波共振器、フィルタおよびマルチプレクサ - Google Patents

弾性波共振器、フィルタおよびマルチプレクサ Download PDF

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Publication number
JP6632481B2
JP6632481B2 JP2016123972A JP2016123972A JP6632481B2 JP 6632481 B2 JP6632481 B2 JP 6632481B2 JP 2016123972 A JP2016123972 A JP 2016123972A JP 2016123972 A JP2016123972 A JP 2016123972A JP 6632481 B2 JP6632481 B2 JP 6632481B2
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Prior art keywords
electrode fingers
electrode
elastic wave
fingers
comparative example
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JP2016123972A
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Japanese (ja)
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JP2017228945A (ja
JP2017228945A5 (enExample
Inventor
匡郁 岩城
匡郁 岩城
松田　隆志
隆志 松田
堤　潤
潤 堤
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Taiyo Yuden Co Ltd
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Taiyo Yuden Co Ltd
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Priority to JP2016123972A priority Critical patent/JP6632481B2/ja
Priority to US15/599,367 priority patent/US10270425B2/en
Priority to CN201710478055.7A priority patent/CN107528564B/zh
Publication of JP2017228945A publication Critical patent/JP2017228945A/ja
Publication of JP2017228945A5 publication Critical patent/JP2017228945A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6489—Compensation of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02944—Means for compensation or elimination of undesirable effects of ohmic loss
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/14529—Distributed tap
    • H03H9/14535—Position weighting
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14552—Transducers of particular shape or position comprising split fingers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2016123972A 2016-06-22 2016-06-22 弾性波共振器、フィルタおよびマルチプレクサ Active JP6632481B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016123972A JP6632481B2 (ja) 2016-06-22 2016-06-22 弾性波共振器、フィルタおよびマルチプレクサ
US15/599,367 US10270425B2 (en) 2016-06-22 2017-05-18 Acoustic wave resonator, filter, and multiplexer
CN201710478055.7A CN107528564B (zh) 2016-06-22 2017-06-21 声波谐振器、滤波器和多工器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016123972A JP6632481B2 (ja) 2016-06-22 2016-06-22 弾性波共振器、フィルタおよびマルチプレクサ

Publications (3)

Publication Number Publication Date
JP2017228945A JP2017228945A (ja) 2017-12-28
JP2017228945A5 JP2017228945A5 (enExample) 2018-03-22
JP6632481B2 true JP6632481B2 (ja) 2020-01-22

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US (1) US10270425B2 (enExample)
JP (1) JP6632481B2 (enExample)
CN (1) CN107528564B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107852148B (zh) * 2015-08-31 2021-05-25 京瓷株式会社 声表面波元件
JP2020096226A (ja) * 2018-12-10 2020-06-18 太陽誘電株式会社 弾性波デバイス、フィルタおよびマルチプレクサ
WO2020121663A1 (ja) 2018-12-13 2020-06-18 株式会社村田製作所 弾性波装置
JP7530148B2 (ja) * 2019-01-30 2024-08-07 太陽誘電株式会社 フィルタおよびマルチプレクサ
JP6885526B2 (ja) * 2019-03-06 2021-06-16 株式会社村田製作所 フィルタ、マルチプレクサ、高周波フロントエンド回路及び通信装置
TWI772896B (zh) * 2019-09-18 2022-08-01 法商佛雷克恩股份有限公司 聲波裝置的換能器結構
JP7334786B2 (ja) * 2019-09-27 2023-08-29 株式会社村田製作所 弾性波フィルタ
JPWO2023085210A1 (enExample) * 2021-11-09 2023-05-19
CN119727661A (zh) * 2024-04-29 2025-03-28 锐石创芯(重庆)微电子有限公司 声表面波器件、滤波器和射频前端模组

Family Cites Families (22)

* Cited by examiner, † Cited by third party
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JPS59214315A (ja) * 1983-05-19 1984-12-04 Matsushita Electric Ind Co Ltd 弾性表面波装置
JPS60208110A (ja) * 1984-03-30 1985-10-19 Kazuhiko Yamanouchi 反射器内蔵型一方向性弾性表面波変換器
JPS616917A (ja) * 1984-06-20 1986-01-13 Kazuhiko Yamanouchi 電極幅の変化を用いた内部反射型一方向性弾性表面波変換器
JP2600146B2 (ja) * 1986-10-17 1997-04-16 松下電器産業株式会社 表面弾性波共振子
JPH0422210A (ja) * 1990-05-17 1992-01-27 Canon Inc 弾性表面波素子
US5073763A (en) * 1990-11-02 1991-12-17 R.F. Monolithics, Inc. Group single-phase unidirectional transducers with 3/8λand 5/8λ sampling
JP3040928B2 (ja) * 1995-01-23 2000-05-15 和彦 山之内 弾性表面波トランスデューサ
EP0782255B1 (en) * 1995-12-28 2002-03-27 Murata Manufacturing Co., Ltd. Longitudinal coupling type surface acoustic wave resonator filter
JP3119579B2 (ja) 1996-04-01 2000-12-25 弘明 佐藤 弾性表面波共振子
JP2000124763A (ja) * 1998-10-13 2000-04-28 Toyo Commun Equip Co Ltd Ｓａｗグレーティング導波路解析法
JP3432492B2 (ja) * 2000-09-28 2003-08-04 富士通株式会社 弾性表面波共振器及びこれを用いた弾性表面波フィルタ
JP4090250B2 (ja) * 2001-12-10 2008-05-28 富士通メディアデバイス株式会社 弾性表面波フィルタ
JP3818195B2 (ja) * 2002-03-29 2006-09-06 三菱マテリアル株式会社 表面弾性波素子
JP3704131B2 (ja) * 2003-04-10 2005-10-05 富士通株式会社 弾性表面波フィルタ
JP2005303893A (ja) * 2004-04-15 2005-10-27 Seiko Epson Corp 共振子型ｓａｗフィルタ
JP4345768B2 (ja) * 2006-04-05 2009-10-14 株式会社村田製作所 表面波装置
JP5028926B2 (ja) 2006-09-20 2012-09-19 パナソニック株式会社 弾性表面波共振子
US8344815B2 (en) * 2008-10-24 2013-01-01 Seiko Epson Corporation Surface acoustic wave resonator, surface acoustic wave oscillator, and surface acoustic wave module unit
JP2011087282A (ja) * 2009-09-15 2011-04-28 Murata Mfg Co Ltd 弾性境界波フィルタ及びそれを備える分波器
JP2013214954A (ja) * 2012-03-07 2013-10-17 Taiyo Yuden Co Ltd 共振子、周波数フィルタ、デュプレクサ、電子機器及び共振子の製造方法
JP6335473B2 (ja) * 2013-11-01 2018-05-30 太陽誘電株式会社 弾性表面波デバイス及びフィルタ
KR101700840B1 (ko) * 2014-11-13 2017-02-01 (주)와이솔 Saw 필터용 커패시터, saw 필터 및 그 제조 방법

Also Published As

Publication number Publication date
CN107528564A (zh) 2017-12-29
JP2017228945A (ja) 2017-12-28
CN107528564B (zh) 2020-10-30
US10270425B2 (en) 2019-04-23
US20170373669A1 (en) 2017-12-28

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