JP6621581B2 - 渦電流形変位センサ - Google Patents
渦電流形変位センサ Download PDFInfo
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- JP6621581B2 JP6621581B2 JP2015017164A JP2015017164A JP6621581B2 JP 6621581 B2 JP6621581 B2 JP 6621581B2 JP 2015017164 A JP2015017164 A JP 2015017164A JP 2015017164 A JP2015017164 A JP 2015017164A JP 6621581 B2 JP6621581 B2 JP 6621581B2
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- eddy current
- sensor
- displacement sensor
- ground electrode
- measured
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
11 センサコイル
12 コンデンサ
14 グランド電極
141 フレキシブルプリント配線板
142 金属線
17 共振回路
2 被測定物
Claims (3)
- 被測定物に対向する被測定物対向面を有するセンサコイルと、
前記センサコイルに並列接続され、前記センサコイルとともに共振回路を構成するコンデンサと、
高周波信号を発生させて前記共振回路に該高周波信号を供給する発振回路と、
前記共振回路のグランド電位に接続され、開ループ状にパターン形成された金属線からなり、被測定物との間の静電容量によるセンサ出力の変動を低下させるために前記センサコイルの被測定物対向面を覆って配置されたグランド電極とを備える渦電流形変位センサ。 - 前記金属線がフレキシブルプリント配線板上にパターン形成されている請求項1に記載の渦電流形変位センサ。
- 前記グランド電極が前記センサコイルの被測定物対向面および側面を覆っている請求項1または請求項2に記載の渦電流形変位センサ。
Priority Applications (1)
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JP2015017164A JP6621581B2 (ja) | 2015-01-30 | 2015-01-30 | 渦電流形変位センサ |
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JP2015017164A JP6621581B2 (ja) | 2015-01-30 | 2015-01-30 | 渦電流形変位センサ |
Publications (2)
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JP2016142574A JP2016142574A (ja) | 2016-08-08 |
JP6621581B2 true JP6621581B2 (ja) | 2019-12-18 |
Family
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Family Applications (1)
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JP2015017164A Active JP6621581B2 (ja) | 2015-01-30 | 2015-01-30 | 渦電流形変位センサ |
Country Status (1)
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JP (1) | JP6621581B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6896250B2 (ja) * | 2016-11-17 | 2021-06-30 | 新川センサテクノロジ株式会社 | オープン形コイルの渦電流形センサ及びこれを用いたレール変位測定方法 |
JP7103632B2 (ja) * | 2018-04-23 | 2022-07-20 | 株式会社山崎歯車製作所 | レール頭面測定装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5846681B2 (ja) * | 1976-02-13 | 1983-10-18 | 株式会社トキメック | 厚さ測定装置 |
JPS5848756Y2 (ja) * | 1978-03-31 | 1983-11-08 | オムロン株式会社 | 近接スイッチ |
JPS5582013A (en) * | 1978-12-14 | 1980-06-20 | Shinkawa Denki Kk | Eddy current type displacement meter |
JPS6222051Y2 (ja) * | 1979-09-18 | 1987-06-04 | ||
JPS5818102A (ja) * | 1981-07-24 | 1983-02-02 | Nippon Steel Corp | 容量式変位計 |
US4782282A (en) * | 1986-07-09 | 1988-11-01 | Dickey-John Corporation | Capacitive-type seed sensor for a planter monitor |
US4875007A (en) * | 1988-02-17 | 1989-10-17 | The Indikon Company, Inc. | Eddy current proximity system |
US6288537B1 (en) * | 1999-12-22 | 2001-09-11 | General Electric Company | Eddy current probe with foil sensor mounted on flexible probe tip and method of use |
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2015
- 2015-01-30 JP JP2015017164A patent/JP6621581B2/ja active Active
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