JP6616606B2 - 産業用ロボット - Google Patents

産業用ロボット Download PDF

Info

Publication number
JP6616606B2
JP6616606B2 JP2015139565A JP2015139565A JP6616606B2 JP 6616606 B2 JP6616606 B2 JP 6616606B2 JP 2015139565 A JP2015139565 A JP 2015139565A JP 2015139565 A JP2015139565 A JP 2015139565A JP 6616606 B2 JP6616606 B2 JP 6616606B2
Authority
JP
Japan
Prior art keywords
hand
motor
guide mechanism
guide
drive motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015139565A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017019061A (ja
Inventor
隆之 矢澤
洋 荒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to JP2015139565A priority Critical patent/JP6616606B2/ja
Priority to TW105118025A priority patent/TWI714598B/zh
Priority to KR1020160072280A priority patent/KR102539039B1/ko
Priority to CN201610525554.2A priority patent/CN106346458B/zh
Publication of JP2017019061A publication Critical patent/JP2017019061A/ja
Application granted granted Critical
Publication of JP6616606B2 publication Critical patent/JP6616606B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/003—Programme-controlled manipulators having parallel kinematics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/025—Arms extensible telescopic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
    • B25J9/0087—Dual arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2015139565A 2015-07-13 2015-07-13 産業用ロボット Active JP6616606B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015139565A JP6616606B2 (ja) 2015-07-13 2015-07-13 産業用ロボット
TW105118025A TWI714598B (zh) 2015-07-13 2016-06-07 產業用機器人
KR1020160072280A KR102539039B1 (ko) 2015-07-13 2016-06-10 산업용 로봇
CN201610525554.2A CN106346458B (zh) 2015-07-13 2016-07-06 工业用机器人

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015139565A JP6616606B2 (ja) 2015-07-13 2015-07-13 産業用ロボット

Publications (2)

Publication Number Publication Date
JP2017019061A JP2017019061A (ja) 2017-01-26
JP6616606B2 true JP6616606B2 (ja) 2019-12-04

Family

ID=57843107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015139565A Active JP6616606B2 (ja) 2015-07-13 2015-07-13 産業用ロボット

Country Status (4)

Country Link
JP (1) JP6616606B2 (ko)
KR (1) KR102539039B1 (ko)
CN (1) CN106346458B (ko)
TW (1) TWI714598B (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6998687B2 (ja) * 2017-06-29 2022-01-18 日本電産サンキョー株式会社 産業用ロボットのハンドおよび産業用ロボット
JP7092469B2 (ja) * 2017-06-29 2022-06-28 日本電産サンキョー株式会社 産業用ロボットのハンドおよび産業用ロボット
JP2019010691A (ja) 2017-06-29 2019-01-24 日本電産サンキョー株式会社 産業用ロボットのハンドおよび産業用ロボット
JP6869136B2 (ja) * 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
JP6869137B2 (ja) * 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
JP6873881B2 (ja) * 2017-10-13 2021-05-19 日本電産サンキョー株式会社 産業用ロボット
CN108555936B (zh) * 2018-06-14 2024-09-06 上海众鸿电子科技有限公司 一种晶圆搬运机械手臂
JP7495271B2 (ja) * 2020-04-28 2024-06-04 ニデックインスツルメンツ株式会社 産業用ロボット

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001300879A (ja) * 2000-04-24 2001-10-30 Ishikawajima Harima Heavy Ind Co Ltd 基板搬送用汎用ハンド
JP2003203963A (ja) * 2002-01-08 2003-07-18 Tokyo Electron Ltd 搬送機構、処理システム及び搬送方法
JP3933524B2 (ja) * 2002-05-30 2007-06-20 東京エレクトロン株式会社 基板処理装置
JP2004342933A (ja) * 2003-05-16 2004-12-02 Kondo Seisakusho:Kk ウエハハンド
JP2006272526A (ja) * 2005-03-30 2006-10-12 Nidec Sankyo Corp 搬送用ロボットのハンド及びそのハンドを有する搬送用ロボット
JP2007005435A (ja) * 2005-06-22 2007-01-11 Rorze Corp 処理装置
JP5402233B2 (ja) * 2009-05-19 2014-01-29 株式会社安川電機 ロボット及び物品搬送システム
EP2743975A4 (en) * 2011-08-10 2015-06-03 Kawasaki Heavy Ind Ltd END EFFECTOR DEVICE AND SUBSTRATE TRANSPORT ROBOT WITH THIS END EFFECTOR DEVICE
JP6084618B2 (ja) * 2011-09-16 2017-02-22 パーシモン テクノロジーズ コーポレイションＰｅｒｓｉｍｍｏｎ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｃｏｒｐ． 低変動ロボット
CN104517879A (zh) * 2013-09-28 2015-04-15 沈阳新松机器人自动化股份有限公司 手指间距可调的搬运机械手及其晶圆搬运装置
CN104511907B (zh) * 2013-09-28 2017-04-12 沈阳新松机器人自动化股份有限公司 手指间距可调的机械手及其晶圆搬运装置
JP6190692B2 (ja) 2013-10-22 2017-08-30 日本電産サンキョー株式会社 産業用ロボット

Also Published As

Publication number Publication date
CN106346458A (zh) 2017-01-25
TW201702025A (zh) 2017-01-16
TWI714598B (zh) 2021-01-01
CN106346458B (zh) 2021-05-28
KR20170008150A (ko) 2017-01-23
JP2017019061A (ja) 2017-01-26
KR102539039B1 (ko) 2023-06-02

Similar Documents

Publication Publication Date Title
JP6616606B2 (ja) 産業用ロボット
JP6607661B2 (ja) 水平多関節ロボット
CN108656123B (zh) 工业机器人
JP2010179420A (ja) 産業用ロボット
JP5303301B2 (ja) 産業用ロボット
JP2006272526A (ja) 搬送用ロボットのハンド及びそのハンドを有する搬送用ロボット
JP6309756B2 (ja) エンドエフェクタ装置
JP2006278508A (ja) 基板搬送装置および基板搬送方法
JP2016107378A (ja) 産業用ロボットおよび産業用ロボットの教示方法
JP4697211B2 (ja) 基板アライメント機構を備えた搬送ロボット及びそれを備えた半導体製造装置または基板検査装置
JP2019010693A (ja) 産業用ロボットのハンドおよび産業用ロボット
JP6998687B2 (ja) 産業用ロボットのハンドおよび産業用ロボット
JP6190692B2 (ja) 産業用ロボット
JP2017119325A (ja) 水平多関節ロボットおよび製造システム
CN110198902B (zh) 面板搬运机器人
WO2017037824A1 (ja) 部品実装機、ノズル撮像方法
JP4518269B2 (ja) 荷位置決め装置
WO2017026256A1 (ja) 産業用ロボット
KR102340217B1 (ko) 산업용 로봇
JP2017120818A (ja) 製造システム
JP2020167256A (ja) パネル搬送装置およびパネル搬送システム
JP2012094653A (ja) 電子部品実装装置
JP2020021794A (ja) 搬送システム
JP7530792B2 (ja) 産業用ロボットのハンド、産業用ロボット
JP2022059946A (ja) 産業用ロボットのハンド、産業用ロボット

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180611

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20190515

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190523

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190709

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20191028

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20191108

R150 Certificate of patent or registration of utility model

Ref document number: 6616606

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150