JP6616421B2 - 流路部材 - Google Patents
流路部材 Download PDFInfo
- Publication number
- JP6616421B2 JP6616421B2 JP2017537852A JP2017537852A JP6616421B2 JP 6616421 B2 JP6616421 B2 JP 6616421B2 JP 2017537852 A JP2017537852 A JP 2017537852A JP 2017537852 A JP2017537852 A JP 2017537852A JP 6616421 B2 JP6616421 B2 JP 6616421B2
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- JP
- Japan
- Prior art keywords
- flow path
- oxide layer
- substrate
- oxide
- outflow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/04—Constructions of heat-exchange apparatus characterised by the selection of particular materials of ceramic; of concrete; of natural stone
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F1/00—Tubular elements; Assemblies of tubular elements
- F28F1/02—Tubular elements of cross-section which is non-circular
- F28F1/04—Tubular elements of cross-section which is non-circular polygonal, e.g. rectangular
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F19/00—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
- F28F19/02—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2245/00—Coatings; Surface treatments
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Geometry (AREA)
- Inorganic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Drying Of Semiconductors (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
を構成する前記基体の内面に、第2酸化層を備える。前記第1酸化層の表面から前記基体方向への深さ50nmにおける前記第1酸化層の酸素濃度をC1、前記第2酸化層の表面から前記基体方向への深さ50nmにおける前記第2酸化層の酸素濃度をC2としたとき、C2/C1が2以上10以下である。
1a:外面
1b:内面
2:流路
3:蓋体
4:中板
5:底板
6:流入口
7:流出口
8:第1酸化層
9:第2酸化層
10:流路部材
Claims (6)
- 非酸化物セラミックスからなる基体の内部に、流入口と流出口とを備える流路を有し、前記基体の外面に第1酸化層、前記流路を構成する前記基体の内面に、第2酸化層を備え、
前記第1酸化層の表面から前記基体方向への深さ50nmにおける前記第1酸化層の酸素濃度をC1、前記第2酸化層の表面から前記基体方向への深さ50nmにおける前記第2酸化層の酸素濃度をC2としたとき、C2/C1が2以上10以下である流路部材。 - 前記第1酸化層が、前記第2酸化層より厚い請求項1に記載の流路部材。
- 前記第2酸化層が、前記第1酸化層より厚い請求項1に記載の流路部材。
- 前記流路は、前記流出口に繋がる流出路と、該流出路および前記流入口の間の流通路とを有し、該流通路における前記第2酸化層の厚みは、前記流出路における前記第2酸化層の厚みよりも厚い請求項1乃至請求項3のいずれかに記載の流路部材。
- 非酸化物セラミックスからなる基体の内部に、流入口と流出口とを備える流路を有し、前記基体の外面に第1酸化層、前記流路を構成する前記基体の内面に、第2酸化層を備え、
前記流路は、前記流出口に繋がる流出路と、該流出路および前記流入口の間の流通路とを有し、該流通路における前記第2酸化層の厚みは、前記流出路における前記第2酸化層の厚みよりも厚い流路部材。 - 前記非酸化物セラミックスが、炭化珪素質セラミックスである請求項1乃至請求項5のいずれかに記載の流路部材。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015169293 | 2015-08-28 | ||
JP2015169293 | 2015-08-28 | ||
PCT/JP2016/075032 WO2017038700A1 (ja) | 2015-08-28 | 2016-08-26 | 流路部材 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017038700A1 JPWO2017038700A1 (ja) | 2018-07-26 |
JP6616421B2 true JP6616421B2 (ja) | 2019-12-04 |
Family
ID=58188582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017537852A Active JP6616421B2 (ja) | 2015-08-28 | 2016-08-26 | 流路部材 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10684081B2 (ja) |
EP (1) | EP3326988B1 (ja) |
JP (1) | JP6616421B2 (ja) |
KR (1) | KR102109491B1 (ja) |
WO (1) | WO2017038700A1 (ja) |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5946493A (ja) * | 1982-09-10 | 1984-03-15 | Toshiba Ceramics Co Ltd | 炭化珪素質熱交換器 |
US5004629A (en) * | 1989-06-16 | 1991-04-02 | General Electric Company | Transfer tube |
JPH07211832A (ja) * | 1994-01-03 | 1995-08-11 | Motorola Inc | 電力放散装置とその製造方法 |
US6436363B1 (en) * | 2000-08-31 | 2002-08-20 | Engelhard Corporation | Process for generating hydrogen-rich gas |
US6783824B2 (en) * | 2001-01-25 | 2004-08-31 | Hyper-Therm High-Temperature Composites, Inc. | Actively-cooled fiber-reinforced ceramic matrix composite rocket propulsion thrust chamber and method of producing the same |
US6929852B2 (en) * | 2002-08-08 | 2005-08-16 | Siemens Westinghouse Power Corporation | Protective overlayer for ceramics |
EP1721880A1 (en) * | 2004-02-09 | 2006-11-15 | Tokuyama Corporation | Metallized ceramic molding, process for producing the same and peltier device |
US7593229B2 (en) * | 2006-03-31 | 2009-09-22 | Hong Kong Applied Science & Technology Research Institute Co. Ltd | Heat exchange enhancement |
WO2009051735A2 (en) * | 2007-10-18 | 2009-04-23 | Roberts, Wayne | High efficiency, corrosion resistant heat exchanger and methods of use thereof |
JP2010173873A (ja) | 2009-01-28 | 2010-08-12 | Kyocera Corp | セラミック接合体およびこれを用いた支持部材 |
TW201043910A (en) * | 2009-06-03 | 2010-12-16 | High Conduction Scient Co Ltd | Water-cooling device and its manufacturing method |
DE102010004960A1 (de) * | 2010-01-20 | 2011-07-21 | J. Eberspächer GmbH & Co. KG, 73730 | Rohrkörper und Abgasanlage |
WO2012030557A1 (en) * | 2010-08-31 | 2012-03-08 | Corning Incorporated | Cellular ceramic articles with coated channels and methods for making the same |
US20120160361A1 (en) * | 2010-12-28 | 2012-06-28 | George Fischer | Construction and Manufacturing of Long Tubes with Embedded Corrosion- and Wear-Resistant Coatings Applied Directly to the Interior Surfaces |
JP6005930B2 (ja) * | 2011-07-28 | 2016-10-12 | 京セラ株式会社 | 流路部材、これを用いた熱交換器および電子部品装置ならびに半導体製造装置 |
JP5832212B2 (ja) * | 2011-09-21 | 2015-12-16 | 京セラ株式会社 | 流路部材およびこれを備える熱交換器 |
JP5869399B2 (ja) * | 2012-03-29 | 2016-02-24 | 京セラ株式会社 | 流路部材およびこれを用いた熱交換器ならびに半導体装置 |
JP5969325B2 (ja) * | 2012-08-30 | 2016-08-17 | 京セラ株式会社 | 流路部材およびこれを用いた電子装置 |
US9255036B2 (en) * | 2013-03-15 | 2016-02-09 | Corning Incorporated | Cellular ceramic article and method for manufacturing the same |
EP4353701A2 (en) * | 2013-11-26 | 2024-04-17 | RTX Corporation | Gas turbine engine component coating with self-healing barrier layer |
US9199269B2 (en) * | 2014-02-14 | 2015-12-01 | Arthur Mark Krawczyk | Pipe painting process |
-
2016
- 2016-08-26 EP EP16841732.7A patent/EP3326988B1/en active Active
- 2016-08-26 JP JP2017537852A patent/JP6616421B2/ja active Active
- 2016-08-26 KR KR1020187004933A patent/KR102109491B1/ko active IP Right Grant
- 2016-08-26 US US15/755,604 patent/US10684081B2/en active Active
- 2016-08-26 WO PCT/JP2016/075032 patent/WO2017038700A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
US10684081B2 (en) | 2020-06-16 |
WO2017038700A1 (ja) | 2017-03-09 |
EP3326988A1 (en) | 2018-05-30 |
KR102109491B1 (ko) | 2020-05-12 |
KR20180030689A (ko) | 2018-03-23 |
US20190024991A1 (en) | 2019-01-24 |
EP3326988A4 (en) | 2018-09-05 |
JPWO2017038700A1 (ja) | 2018-07-26 |
EP3326988B1 (en) | 2019-11-06 |
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