JP6599285B2 - 光学センサ - Google Patents

光学センサ Download PDF

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Publication number
JP6599285B2
JP6599285B2 JP2016113203A JP2016113203A JP6599285B2 JP 6599285 B2 JP6599285 B2 JP 6599285B2 JP 2016113203 A JP2016113203 A JP 2016113203A JP 2016113203 A JP2016113203 A JP 2016113203A JP 6599285 B2 JP6599285 B2 JP 6599285B2
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JP
Japan
Prior art keywords
optical fiber
light
light receiving
optical
sensor
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Application number
JP2016113203A
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English (en)
Japanese (ja)
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JP2017219391A (ja
JP2017219391A5 (enExample
Inventor
明生 近藤
智之 大西
貴洋 宮本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
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Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP2016113203A priority Critical patent/JP6599285B2/ja
Priority to PCT/JP2017/021053 priority patent/WO2017213161A1/ja
Priority to CN201780034865.1A priority patent/CN109313013B/zh
Priority to US16/308,054 priority patent/US10760897B2/en
Publication of JP2017219391A publication Critical patent/JP2017219391A/ja
Publication of JP2017219391A5 publication Critical patent/JP2017219391A5/ja
Application granted granted Critical
Publication of JP6599285B2 publication Critical patent/JP6599285B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D21/00—Shutting-down of machines or engines, e.g. in emergency; Regulating, controlling, or safety means not otherwise provided for
    • F01D21/003—Arrangements for testing or measuring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2270/00—Control
    • F05D2270/80—Devices generating input signals, e.g. transducers, sensors, cameras or strain gauges
    • F05D2270/804—Optical devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2016113203A 2016-06-07 2016-06-07 光学センサ Active JP6599285B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016113203A JP6599285B2 (ja) 2016-06-07 2016-06-07 光学センサ
PCT/JP2017/021053 WO2017213161A1 (ja) 2016-06-07 2017-06-07 光学センサ
CN201780034865.1A CN109313013B (zh) 2016-06-07 2017-06-07 光学传感器
US16/308,054 US10760897B2 (en) 2016-06-07 2017-06-07 Optical sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016113203A JP6599285B2 (ja) 2016-06-07 2016-06-07 光学センサ

Publications (3)

Publication Number Publication Date
JP2017219391A JP2017219391A (ja) 2017-12-14
JP2017219391A5 JP2017219391A5 (enExample) 2019-04-04
JP6599285B2 true JP6599285B2 (ja) 2019-10-30

Family

ID=60578614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016113203A Active JP6599285B2 (ja) 2016-06-07 2016-06-07 光学センサ

Country Status (4)

Country Link
US (1) US10760897B2 (enExample)
JP (1) JP6599285B2 (enExample)
CN (1) CN109313013B (enExample)
WO (1) WO2017213161A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12339113B2 (en) * 2022-06-30 2025-06-24 Ge Infrastructure Technology Llc Apparatus and method for transmitting radiation to a rotating component
US12692798B2 (en) 2023-10-13 2026-07-28 Ge Infrastructure Technology Llc Apparatus for diverting radiation emitted from source

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4275965A (en) * 1979-08-21 1981-06-30 United Technologies Corporation Long stroke, high resolution optical position sensor
JPS59134026A (ja) 1983-01-24 1984-08-01 Nissan Motor Co Ltd 自動車用キヤリア
US5274721A (en) 1992-03-05 1993-12-28 American Sigma, Inc. Fiber optic system and method
US5299141A (en) 1989-12-22 1994-03-29 American Sigma, Inc. Automatic fluid monitoring and sampling apparatus and method
JPH0518981A (ja) * 1991-07-10 1993-01-26 Nippon Kagaku Kogyo Kk 気液二相流の計測装置
JPH0763509A (ja) 1993-06-30 1995-03-10 Mitsubishi Rayon Co Ltd 光ファイバセンサヘッド
JPH10132752A (ja) 1996-09-04 1998-05-22 Asahi Kooden Kk ライトガイド
ATE247183T1 (de) 1997-11-06 2003-08-15 Eastman Chem Co Copolyester-binderfasern
JP3854056B2 (ja) * 1999-12-13 2006-12-06 株式会社荏原製作所 基板膜厚測定方法、基板膜厚測定装置、基板処理方法及び基板処理装置
MXPA03006104A (es) * 2001-01-09 2005-10-05 Takahiko Mukouda Componente conector para fibra optica multifilar, manguito de empalme y metodo para fabricar los mismos.
US20040125702A1 (en) * 2002-10-21 2004-07-01 Hideki Kitajima Rotational position detection device, hand position detection device and clock using the hand position detection device
DE50213746D1 (de) * 2002-12-12 2009-09-17 Siemens Ag Verfahren zur Messung des Abstands eines an einer Referenzfläche vorbei gefürhrten Bauteils und Durchführung des Verfahrens
JP2004246279A (ja) * 2003-02-17 2004-09-02 Seiko Epson Corp 光モジュール及びその製造方法、光通信装置、光電気混載集積回路、回路基板、電子機器
US7091475B2 (en) 2003-05-07 2006-08-15 Mitutoyo Corporation Miniature 2-dimensional encoder readhead using fiber optic receiver channels
JP4634741B2 (ja) * 2004-05-17 2011-02-16 株式会社キーエンス 光電センサ
US20080291456A1 (en) * 2007-05-24 2008-11-27 Ghislain Lucien P Sensor apparatus and method using optical interferometry
KR200444690Y1 (ko) * 2009-02-03 2009-05-28 (주)위니테크놀러지 광케이블 여장처리구조가 구비된 다심형 화이버 광스위치 모듈
CN201477265U (zh) * 2009-08-19 2010-05-19 浙江万马集团电子有限公司 光分路器模块夹具插片
CN201965258U (zh) 2010-12-10 2011-09-07 富士康(昆山)电脑接插件有限公司 光纤连接器
CN202166608U (zh) 2011-06-30 2012-03-14 深圳市汇松科技发展有限公司 一种多通道酶标仪的检测体组
JP6143085B2 (ja) * 2013-06-14 2017-06-07 三菱重工業株式会社 チップクリアランス計測装置
CN104501728A (zh) * 2014-12-12 2015-04-08 天津大学 一种基于全光纤叶尖定时的叶尖间隙测量方法

Also Published As

Publication number Publication date
CN109313013B (zh) 2021-06-01
US10760897B2 (en) 2020-09-01
JP2017219391A (ja) 2017-12-14
WO2017213161A1 (ja) 2017-12-14
US20190310075A1 (en) 2019-10-10
CN109313013A (zh) 2019-02-05

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