CN109313013B - 光学传感器 - Google Patents

光学传感器 Download PDF

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Publication number
CN109313013B
CN109313013B CN201780034865.1A CN201780034865A CN109313013B CN 109313013 B CN109313013 B CN 109313013B CN 201780034865 A CN201780034865 A CN 201780034865A CN 109313013 B CN109313013 B CN 109313013B
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China
Prior art keywords
light
optical fiber
receiving
optical
plate
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CN201780034865.1A
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English (en)
Chinese (zh)
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CN109313013A (zh
Inventor
近藤明生
大西智之
宫本贵洋
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Mitsubishi Heavy Industries Ltd
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Mitsubishi Heavy Industries Ltd
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Publication of CN109313013A publication Critical patent/CN109313013A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D21/00—Shutting-down of machines or engines, e.g. in emergency; Regulating, controlling, or safety means not otherwise provided for
    • F01D21/003—Arrangements for testing or measuring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2270/00—Control
    • F05D2270/80—Devices generating input signals, e.g. transducers, sensors, cameras or strain gauges
    • F05D2270/804—Optical devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201780034865.1A 2016-06-07 2017-06-07 光学传感器 Active CN109313013B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016-113203 2016-06-07
JP2016113203A JP6599285B2 (ja) 2016-06-07 2016-06-07 光学センサ
PCT/JP2017/021053 WO2017213161A1 (ja) 2016-06-07 2017-06-07 光学センサ

Publications (2)

Publication Number Publication Date
CN109313013A CN109313013A (zh) 2019-02-05
CN109313013B true CN109313013B (zh) 2021-06-01

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Family Applications (1)

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CN201780034865.1A Active CN109313013B (zh) 2016-06-07 2017-06-07 光学传感器

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US (1) US10760897B2 (enExample)
JP (1) JP6599285B2 (enExample)
CN (1) CN109313013B (enExample)
WO (1) WO2017213161A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12339113B2 (en) * 2022-06-30 2025-06-24 Ge Infrastructure Technology Llc Apparatus and method for transmitting radiation to a rotating component
US12692798B2 (en) 2023-10-13 2026-07-28 Ge Infrastructure Technology Llc Apparatus for diverting radiation emitted from source

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EP0027774A1 (en) * 1979-08-21 1981-04-29 United Technologies Corporation Long stroke, high resolution optical position sensor
EP1108979A2 (en) * 1999-12-13 2001-06-20 Ebara Corporation Method and apparatus for substrate film thickness measurement and substrate processing
CN1489714A (zh) * 2001-01-09 2004-04-14 ¡ 用于多芯光纤的连接器组件、套圈及其制造方法
EP1413935A2 (en) * 2002-10-21 2004-04-28 Seiko Instruments Inc. Rotational position detection device, hand position detection device and clock using the hand position detection device
CN1523391A (zh) * 2003-02-17 2004-08-25 ������������ʽ���� 光模块及其制造方法、光通信装置、光电混合集成电路、电路板、电子设备
EP1475613A2 (en) * 2003-05-07 2004-11-10 Mitutoyo Corporation Encoder using fiber optic receiver channels
KR200444690Y1 (ko) * 2009-02-03 2009-05-28 (주)위니테크놀러지 광케이블 여장처리구조가 구비된 다심형 화이버 광스위치 모듈
CN201477265U (zh) * 2009-08-19 2010-05-19 浙江万马集团电子有限公司 光分路器模块夹具插片

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JPS59134026A (ja) 1983-01-24 1984-08-01 Nissan Motor Co Ltd 自動車用キヤリア
US5274721A (en) 1992-03-05 1993-12-28 American Sigma, Inc. Fiber optic system and method
US5299141A (en) 1989-12-22 1994-03-29 American Sigma, Inc. Automatic fluid monitoring and sampling apparatus and method
JPH0518981A (ja) * 1991-07-10 1993-01-26 Nippon Kagaku Kogyo Kk 気液二相流の計測装置
JPH0763509A (ja) 1993-06-30 1995-03-10 Mitsubishi Rayon Co Ltd 光ファイバセンサヘッド
JPH10132752A (ja) 1996-09-04 1998-05-22 Asahi Kooden Kk ライトガイド
ATE247183T1 (de) 1997-11-06 2003-08-15 Eastman Chem Co Copolyester-binderfasern
DE50213746D1 (de) * 2002-12-12 2009-09-17 Siemens Ag Verfahren zur Messung des Abstands eines an einer Referenzfläche vorbei gefürhrten Bauteils und Durchführung des Verfahrens
JP4634741B2 (ja) * 2004-05-17 2011-02-16 株式会社キーエンス 光電センサ
US20080291456A1 (en) * 2007-05-24 2008-11-27 Ghislain Lucien P Sensor apparatus and method using optical interferometry
CN201965258U (zh) 2010-12-10 2011-09-07 富士康(昆山)电脑接插件有限公司 光纤连接器
CN202166608U (zh) 2011-06-30 2012-03-14 深圳市汇松科技发展有限公司 一种多通道酶标仪的检测体组
JP6143085B2 (ja) * 2013-06-14 2017-06-07 三菱重工業株式会社 チップクリアランス計測装置
CN104501728A (zh) * 2014-12-12 2015-04-08 天津大学 一种基于全光纤叶尖定时的叶尖间隙测量方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0027774A1 (en) * 1979-08-21 1981-04-29 United Technologies Corporation Long stroke, high resolution optical position sensor
EP1108979A2 (en) * 1999-12-13 2001-06-20 Ebara Corporation Method and apparatus for substrate film thickness measurement and substrate processing
CN1489714A (zh) * 2001-01-09 2004-04-14 ¡ 用于多芯光纤的连接器组件、套圈及其制造方法
EP1413935A2 (en) * 2002-10-21 2004-04-28 Seiko Instruments Inc. Rotational position detection device, hand position detection device and clock using the hand position detection device
CN1523391A (zh) * 2003-02-17 2004-08-25 ������������ʽ���� 光模块及其制造方法、光通信装置、光电混合集成电路、电路板、电子设备
EP1475613A2 (en) * 2003-05-07 2004-11-10 Mitutoyo Corporation Encoder using fiber optic receiver channels
CN1550763A (zh) * 2003-05-07 2004-12-01 ������������ʽ���� 采用纤维光学接收通道的微型二维编码器读头
KR200444690Y1 (ko) * 2009-02-03 2009-05-28 (주)위니테크놀러지 광케이블 여장처리구조가 구비된 다심형 화이버 광스위치 모듈
CN201477265U (zh) * 2009-08-19 2010-05-19 浙江万马集团电子有限公司 光分路器模块夹具插片

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
《燃气轮机叶片叶尖间隙光纤测量系统设计》;贾丙辉 等;《计算机测量与控制》;20150123;第22卷(第11期);第3497-3499页 *

Also Published As

Publication number Publication date
JP6599285B2 (ja) 2019-10-30
US10760897B2 (en) 2020-09-01
JP2017219391A (ja) 2017-12-14
WO2017213161A1 (ja) 2017-12-14
US20190310075A1 (en) 2019-10-10
CN109313013A (zh) 2019-02-05

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