JP6594602B2 - ロータ、真空ポンプ、及び、真空ポンプの組立方法 - Google Patents

ロータ、真空ポンプ、及び、真空ポンプの組立方法 Download PDF

Info

Publication number
JP6594602B2
JP6594602B2 JP2012086499A JP2012086499A JP6594602B2 JP 6594602 B2 JP6594602 B2 JP 6594602B2 JP 2012086499 A JP2012086499 A JP 2012086499A JP 2012086499 A JP2012086499 A JP 2012086499A JP 6594602 B2 JP6594602 B2 JP 6594602B2
Authority
JP
Japan
Prior art keywords
rotor
cylindrical portion
reinforcing ring
ring member
inner diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012086499A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013217226A (ja
JP2013217226A5 (enExample
Inventor
好伸 大立
靖 前島
勉 高阿田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Priority to JP2012086499A priority Critical patent/JP6594602B2/ja
Publication of JP2013217226A publication Critical patent/JP2013217226A/ja
Publication of JP2013217226A5 publication Critical patent/JP2013217226A5/ja
Application granted granted Critical
Publication of JP6594602B2 publication Critical patent/JP6594602B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2012086499A 2012-04-05 2012-04-05 ロータ、真空ポンプ、及び、真空ポンプの組立方法 Active JP6594602B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012086499A JP6594602B2 (ja) 2012-04-05 2012-04-05 ロータ、真空ポンプ、及び、真空ポンプの組立方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012086499A JP6594602B2 (ja) 2012-04-05 2012-04-05 ロータ、真空ポンプ、及び、真空ポンプの組立方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2019133928A Division JP6752945B2 (ja) 2019-07-19 2019-07-19 ロータ、真空ポンプ、及び、真空ポンプの組立方法

Publications (3)

Publication Number Publication Date
JP2013217226A JP2013217226A (ja) 2013-10-24
JP2013217226A5 JP2013217226A5 (enExample) 2015-05-21
JP6594602B2 true JP6594602B2 (ja) 2019-10-23

Family

ID=49589627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012086499A Active JP6594602B2 (ja) 2012-04-05 2012-04-05 ロータ、真空ポンプ、及び、真空ポンプの組立方法

Country Status (1)

Country Link
JP (1) JP6594602B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6427963B2 (ja) * 2014-06-03 2018-11-28 株式会社島津製作所 真空ポンプ
JP7108377B2 (ja) * 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
JP7590851B2 (ja) 2020-11-04 2024-11-27 エドワーズ株式会社 真空ポンプ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0191096U (enExample) * 1987-12-07 1989-06-15
JP3160039B2 (ja) * 1991-08-22 2001-04-23 エヌティエヌ株式会社 ターボ分子ポンプと動翼の加工方法
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
JP4133233B2 (ja) * 2002-11-06 2008-08-13 株式会社島津製作所 ターボ分子ポンプおよびそのロータ
JP5577798B2 (ja) * 2010-04-02 2014-08-27 株式会社島津製作所 ターボ分子ポンプ
CN102834620B (zh) * 2010-09-28 2016-03-02 埃地沃兹日本有限公司 排气泵

Also Published As

Publication number Publication date
JP2013217226A (ja) 2013-10-24

Similar Documents

Publication Publication Date Title
JP5767636B2 (ja) 真空ポンプ
JP5763660B2 (ja) 排気ポンプ
JP6752945B2 (ja) ロータ、真空ポンプ、及び、真空ポンプの組立方法
KR102106658B1 (ko) 로터, 및, 이 로터를 구비한 진공 펌프
JP5062257B2 (ja) ターボ分子ポンプ
JP6594602B2 (ja) ロータ、真空ポンプ、及び、真空ポンプの組立方法
KR101883026B1 (ko) 진공 펌프와 그 로터
WO2012105116A1 (ja) 真空ポンプの回転体と、これに対向設置する固定部材、及び、これらを備えた真空ポンプ
JP2006046074A (ja) 真空ポンプ
JP6288516B2 (ja) インペラ、及び回転機械
JP5664253B2 (ja) 高真空ポンプ
US20150176421A1 (en) Final-Stage Internal Collar Gasket Of An Axial Turbine Engine Compressor
WO2008035497A1 (en) Vacuum pump and flange
KR101980405B1 (ko) 진공 펌프
JP6758865B2 (ja) 真空ポンプ
JP6047091B2 (ja) ロータ及び真空ポンプ
JP6393978B2 (ja) ターボ分子ポンプ
JP5577798B2 (ja) ターボ分子ポンプ
KR102820278B1 (ko) 진공 펌프, 케이싱 및 흡기구 플랜지
JP6119251B2 (ja) ターボ分子ポンプ
KR102492461B1 (ko) 진공 펌프
JP2012219631A (ja) ターボ分子ポンプ
JP2015206346A (ja) 真空ポンプ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150331

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150331

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160404

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20160530

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160803

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170118

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170317

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170510

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170728

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170912

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20171122

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20171204

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180305

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20180313

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20180511

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190306

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190719

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190925

R150 Certificate of patent or registration of utility model

Ref document number: 6594602

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250