JP6556998B2 - 表示装置 - Google Patents
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- JP6556998B2 JP6556998B2 JP2014234093A JP2014234093A JP6556998B2 JP 6556998 B2 JP6556998 B2 JP 6556998B2 JP 2014234093 A JP2014234093 A JP 2014234093A JP 2014234093 A JP2014234093 A JP 2014234093A JP 6556998 B2 JP6556998 B2 JP 6556998B2
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- Prior art keywords
- film
- insulating film
- oxide semiconductor
- transistor
- oxide
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- 239000004065 semiconductor Substances 0.000 claims description 277
- 239000003990 capacitor Substances 0.000 claims description 91
- 229910044991 metal oxide Inorganic materials 0.000 claims description 64
- 150000004706 metal oxides Chemical class 0.000 claims description 64
- 230000005540 biological transmission Effects 0.000 claims description 34
- 150000004767 nitrides Chemical class 0.000 claims description 19
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims 1
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 49
- 238000010438 heat treatment Methods 0.000 description 40
- 239000001257 hydrogen Substances 0.000 description 36
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- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 29
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- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 7
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- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 6
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 5
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- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 4
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 4
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- 238000003892 spreading Methods 0.000 description 1
- 230000004936 stimulating effect Effects 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- LXEXBJXDGVGRAR-UHFFFAOYSA-N trichloro(trichlorosilyl)silane Chemical compound Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl LXEXBJXDGVGRAR-UHFFFAOYSA-N 0.000 description 1
- MCULRUJILOGHCJ-UHFFFAOYSA-N triisobutylaluminium Chemical compound CC(C)C[Al](CC(C)C)CC(C)C MCULRUJILOGHCJ-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/1336—Illuminating devices
- G02F1/133621—Illuminating devices providing coloured light
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133345—Insulating layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134345—Subdivided pixels, e.g. for grey scale or redundancy
- G02F1/134354—Subdivided pixels, e.g. for grey scale or redundancy the sub-pixels being capacitively coupled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
Description
本実施の形態では、本発明の一態様である表示装置について、図面を用いて説明する。
図1(A)に、表示装置が有する画素部及び該画素部の駆動するための回路のブロック図を示す。
画素が有するRGBWの各副画素に与える、第1のデータ信号及び第2のデータ信号は、RGBの3原色にWを加えたRGBWのデータ信号である。第1のデータ信号及び第2のデータ信号は、RGBの3原色のデータ信号をもとに、生成すればよい。一例として第1のデータ信号及び第2のデータ信号は、図33に示すブロック図の構成を用いて生成すればよい。
上述した、Wの副画素の開口部の面積を、RGBの副画素の開口部の面積よりも小さくすること、画素を制御する配線数を削減するよう副画素の配置を2行2列の配置とすることに加えて、本発明の一態様では、各副画素が有するトランジスタの半導体膜を酸化物半導体膜とし、容量素子を構成する電極が、透光性を有する導電膜で構成されるものとする。そこで、図面を用いて副画素が有するトランジスタ及び容量素子の構成について説明する。
次いで、副画素が有するトランジスタ及び容量素子の構成について説明する。特に本発明の一態様では、各副画素が有するトランジスタの半導体膜を酸化物半導体膜とし、容量素子を構成する電極が、透光性を有する導電膜で構成されるものとする特徴を有する。そして本発明の一態様では、容量素子を構成する透光性を有する導電膜は、工程数を増やすことなく、形成可能な材料を用いて作製できるものとする。以下では、素子基板側に設けられるトランジスタ、容量素子等、及び対向基板側に設けられるカラーフィルタ等を有する副画素の構成について詳述する。
上記説明した図6及び図7では、透光性を有する層53Wを設ける構成について示したが、これに限らず図8(A)に示すように、透光性を有する層53Wを設けない構成としてもよい。この場合、断面構造は、図8(A)の鎖線E−F間の断面を例に挙げると、図8(B)に示すように表すことができる。該構成により、透光性を有する層53Wとなる部材の削減、加えて透光性を有する層53Wを形成する工程の削減を図ることができる。
次いで素子基板側での各部材の作製方法について説明する。ここでは、上記図7に示す基板60上に設けられた各部材の作製方法について、図12乃至図15を用いて説明する。なお、素子基板である基板60上に設けられた部材としては、基板60と配向膜88に挟まれた領域にある部材のことをさす。なお以下では、素子基板側にある部材の作製方法について、図7で示した図5(A)における鎖線A−B、C−Dにおける断面構造を用い、説明する。
次いで対向基板側での各部材の作製方法について説明する。ここでは、上記図7に示す基板90上に設けられた遮光膜及びカラーフィルタの作製方法について、図16至図17を用いて説明する。なお、対向基板である基板90上に設けられた部材としては、基板90と配向膜96に挟まれた領域にある部材のことをさす。なお以下では、対向基板側にある部材の作製方法について、図7で示した図6における鎖線A−B、C−Dにおける断面構造を用い、説明する。
ここで、酸化物半導体で形成される膜(以下、酸化物半導体膜(OS)という。)及び酸化物導電体で形成される膜(以下、酸化物導電体膜(OC)という。)それぞれにおける、抵抗率の温度依存性について、図34を用いて説明する。図34において、横軸に測定温度を示し、縦軸に抵抗率を示す。また、酸化物半導体膜(OS)の測定結果を丸印で示し、酸化物導電体膜(OC)の測定結果を四角印で示す。
本実施の形態では、実施の形態1で説明した素子基板、及び/又は対向基板に形成した部材の変形例について、図18乃至図25を用いて説明する。
実施の形態1の図7に示す画素部が有するトランジスタ21B(21R、21Bあるいは21W)の変形例として、図18に示したように、酸化物半導体膜68と重なる位置に絶縁膜98を設ける構成としてもよい。
実施の形態1の図12(D)に示す酸化物半導体膜68,69の変形例として、図20(A)、(B)に示すように、酸化物半導体膜を積層構造とすることができる。
実施の形態1の図13(B)に示すトランジスタ21Bの変形例として、図21(A)、(B)に示すように、酸化物半導体膜上に保護膜として機能する絶縁膜を設けたチャネル保護構造とすることができる。
実施の形態1の図15(B)に示す導電膜86の変形例について、図22(A)乃至(C)を用いて説明する。
実施の形態1の図7のA−Bにおける断面図の変形例について、図23(A)、(B)を用いて説明する。
実施の形態1の図7のA−Bにおける断面図の変形例について、図24を用いて説明する。特に基板90側に設けた遮光膜BM及びカラーフィルタ53R及び53Bを基板60側に設けた変形例について説明する。
実施の形態1の図7のA−Bにおける断面図の変形例について、図25(A)、(B)を用いて説明する。
実施の形態では、上記実施の形態で説明した表示装置に含まれているトランジスタにおいて、酸化物半導体膜に適用可能な一態様について説明する。
実施の形態1で述べたように、酸化物半導体膜を用いたトランジスタは、オフ状態における電流値(オフ電流値)を低く制御することができる。よって、画像信号等の電気信号の保持時間を長くすることができ、書き込み間隔も長く設定できる。
本実施の形態では、本発明の一態様の表示装置が適用された電子機器の構成例について説明する。また、本実施の形態では、本発明の一態様の表示装置を適用した表示モジュールについて、図30を用いて説明を行う。
L2 配線
L3 配線
L4 配線
L5 配線
10 画素部
11 回路
12 回路
13 画素
14 副画素
14B 副画素
14G 副画素
14R 副画素
14W 副画素
15 走査線
15_m 導電膜
16 信号線
16_n 導電膜
17 容量線
17p 導電膜
21 トランジスタ
21_A トランジスタ
21_B トランジスタ
21B トランジスタ
21G トランジスタ
21R トランジスタ
21W トランジスタ
22 容量素子
22B 容量素子
22G 容量素子
22R 容量素子
22W 容量素子
23 液晶素子
23B 液晶素子
23G 液晶素子
23R 液晶素子
23W 液晶素子
25 容量線
31 トランジスタ
32 トランジスタ
33 容量素子
34 トランジスタ
35 発光素子
36 配線
37 配線
38 配線
41B 酸化物半導体膜
41G 酸化物半導体膜
41R 酸化物半導体膜
41W 酸化物半導体膜
43RB 金属酸化物膜
43GW 金属酸化物膜
45B 導電膜
45G 導電膜
45R 導電膜
45W 導電膜
47B 開口部
47G 開口部
47R 開口部
47W 開口部
49B 導電膜
49G 導電膜
49R 導電膜
49W 導電膜
50RB 開口部
50GW 開口部
53B カラーフィルタ
53G カラーフィルタ
53R カラーフィルタ
53W 透光性を有する層
55B 開口部
55G 開口部
55R 開口部
55W 開口部
60 基板
62 導電膜
64 絶縁膜
66 絶縁膜
67 酸化物半導体膜
68 酸化物半導体膜
68A 酸化物半導体膜
68B 酸化物半導体膜
68C 酸化物半導体膜
69 酸化物半導体膜
69A 酸化物半導体膜
69B 酸化物半導体膜
69C 酸化物半導体膜
70 金属酸化物膜
170 電子銃室
70F 金属酸化物膜
70G 金属酸化物膜
71 導電膜
172 光学系
72 導電膜
174 試料室
74 導電膜
176 光学系
76 導電膜
77 絶縁膜
178 カメラ
78 絶縁膜
79 絶縁膜
180 観察室
80 絶縁膜
81 絶縁膜
182 フィルム室
82 絶縁膜
83 絶縁膜
84 絶縁膜
184 電子
85 導電膜
86 導電膜
86_A 導電膜
86_B 導電膜
86_C 導電膜
88 配向膜
188 物質
90 基板
192 蛍光板
92 絶縁膜
94 導電膜
95 液晶層
96 配向膜
98 絶縁膜
100 表示装置
101 絶縁膜
101A 絶縁膜
101E 絶縁膜
110 絶縁膜
111 EL層
112 導電層
113 EL素子
114 絶縁膜
200 表示コントローラ
210 信号変換回路
220 データ信号演算回路
230 バックライトユニット
5000 筐体
5001 表示部
5002 表示部
5003 スピーカー
5004 LEDランプ
5005 操作キー
5006 接続端子
5007 センサ
5008 マイクロフォン
5009 スイッチ
5010 赤外線ポート
5011 記録媒体読込部
5012 支持部
5013 イヤホン
5014 アンテナ
5015 シャッターボタン
5016 受像部
5017 充電器
5018 支持台
5019 外部接続ポート
5020 ポインティングデバイス
5021 リーダ/ライタ
5022 筐体
5023 表示部
5024 リモコン装置
5025 スピーカー
5026 表示モジュール
5027 ユニットバス
5028 表示モジュール
5029 車体
5030 天井
5031 表示モジュール
5032 ヒンジ部
8000 表示モジュール
8001 上部カバー
8002 下部カバー
8003 FPC
8004 タッチパネル
8005 FPC
8006 表示パネル
8007 バックライトユニット
8008 光源
8009 フレーム
8010 プリント基板
8011 バッテリー
Claims (4)
- 第1乃至第4の副画素を有し、
前記第1乃至第3の副画素は、赤、緑、又は青のいずれか一の光の透過を制御する機能を有し、
前記第4の副画素は、白色の光の透過を制御する機能を有し、
前記第4の副画素の開口部の面積は、前記第1乃至第3の副画素の開口部の面積よりも小さく、
前記第1乃至第4の副画素は、トランジスタ及び容量素子をそれぞれ有し、
前記トランジスタは、酸化物半導体を含む半導体膜を有し、
前記容量素子は、第1の電極及び第2の電極を有し、
前記第1の電極は、金属酸化物を含み、
前記第1の電極は、前記トランジスタ上に設けられた窒化物絶縁膜に接する領域を有し、
前記トランジスタと前記窒化物絶縁膜との間に、前記半導体膜上面に接する領域を有する酸化物絶縁膜を有し、
前記第2の電極は、前記窒化物絶縁膜上に設けられ、且つ前記酸化物絶縁膜及び前記窒化物絶縁膜に設けられた第1の開口を介して、前記トランジスタと電気的に接続されており、
前記第2の電極は、前記酸化物絶縁膜に設けられた第2の開口において、前記窒化物絶縁膜を介して前記第1の電極と重なる領域を有することを特徴とする表示装置。 - 第1乃至第4の副画素を有し、
前記第1乃至第3の副画素は、赤、緑、又は青のいずれか一の光の透過を制御する機能を有し、
前記第4の副画素は、白色の光の透過を制御する機能を有し、
前記第4の副画素の開口部の面積は、前記第1乃至第3の副画素の開口部の面積よりも小さく、
前記第1乃至第4の副画素は、トランジスタ及び容量素子をそれぞれ有し、
前記トランジスタは、酸化物半導体を含む半導体膜を有し、
前記容量素子は、第1の電極及び第2の電極を有し、
前記第1の電極は、金属酸化物を含み、
前記第1の電極は、前記トランジスタ上に設けられた窒化物絶縁膜に接する領域を有し、
前記トランジスタと前記窒化物絶縁膜との間に、前記半導体膜上面に接する領域を有する酸化物絶縁膜を有し、
前記第2の電極は、前記窒化物絶縁膜上に設けられ、且つ前記酸化物絶縁膜及び前記窒化物絶縁膜に設けられた第1の開口を介して、前記トランジスタと電気的に接続されており、
前記第2の電極は、前記酸化物絶縁膜に設けられた第2の開口において、前記窒化物絶縁膜を介して前記第1の電極と重なる領域を有し、
前記第1の電極は、前記第1の電極上の配線と電気的に接続されており、
前記トランジスタのソース電極またはドレイン電極と、前記配線とは、同一の層上に位置することを特徴とする表示装置。 - 請求項1又は2において、
平面視において、前記第1の副画素は、前記配線を介して前記第2の副画素と隣り合うように配置されていることを特徴とする表示装置。 - 請求項1乃至3のいずれか一において、
前記酸化物半導体及び前記金属酸化物は、In、Ga、及びZnを含むことを特徴とする表示装置。
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JP2016027597A (ja) * | 2013-12-06 | 2016-02-18 | 株式会社半導体エネルギー研究所 | 半導体装置 |
CN104678668A (zh) * | 2015-02-09 | 2015-06-03 | 深超光电(深圳)有限公司 | 薄膜晶体管阵列基板及液晶显示面板 |
CN105425451B (zh) * | 2015-11-23 | 2018-08-14 | 上海中航光电子有限公司 | 一种彩膜基板、显示面板及显示装置 |
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JP6759801B2 (ja) * | 2016-07-22 | 2020-09-23 | 凸版印刷株式会社 | カラーフィルタ、反射型表示装置、およびカラーフィルタの製造方法 |
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