JP6501627B2 - レーザ加工装置 - Google Patents
レーザ加工装置 Download PDFInfo
- Publication number
- JP6501627B2 JP6501627B2 JP2015112762A JP2015112762A JP6501627B2 JP 6501627 B2 JP6501627 B2 JP 6501627B2 JP 2015112762 A JP2015112762 A JP 2015112762A JP 2015112762 A JP2015112762 A JP 2015112762A JP 6501627 B2 JP6501627 B2 JP 6501627B2
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- film
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- liquid material
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- 238000012545 processing Methods 0.000 title claims description 16
- 239000010410 layer Substances 0.000 claims description 98
- 239000004020 conductor Substances 0.000 claims description 90
- 239000002344 surface layer Substances 0.000 claims description 55
- 239000000758 substrate Substances 0.000 claims description 44
- 239000011344 liquid material Substances 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000003860 storage Methods 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 24
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 18
- 239000011888 foil Substances 0.000 description 17
- 239000011889 copper foil Substances 0.000 description 15
- 239000000463 material Substances 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 239000001569 carbon dioxide Substances 0.000 description 9
- 229910002092 carbon dioxide Inorganic materials 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 239000004593 Epoxy Substances 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 239000000843 powder Substances 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
- H05K3/0047—Drilling of holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
- H01L21/02063—Cleaning during device manufacture during, before or after processing of insulating layers the processing being the formation of vias or contact holes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
- H01L21/02288—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating printing, e.g. ink-jet printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/7687—Thin films associated with contacts of capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76886—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
- H01L21/76892—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances modifying the pattern
- H01L21/76894—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances modifying the pattern using a laser, e.g. laser cutting, laser direct writing, laser repair
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
- H05K2203/107—Using laser light
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- High Energy & Nuclear Physics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Description
内部導体層、絶縁層、及び表層導体層がこの順番に積み重ねられた積層構造を含む基板に、表層膜の液状材料を塗布する塗布機構と、
赤外域のレーザビームを出力するレーザ光源と、
前記基板に塗布された前記液状材料によって形成された前記表層膜に、平面視において前記表層膜の外周線の内側にビームスポットが配置される条件で、前記レーザ光源から出力されたレーザビームを前記表層膜に入射させる導光光学系と、
前記レーザ光源からの前記レーザビームの出力、前記塗布機構による前記液状材料の塗布を制御して、前記塗布機構によって塗布された前記液状材料からなる前記表層膜及び前記表層導体層に穴を形成する制御装置と
を有するレーザ加工装置が提供される。
・パルスエネルギ 4mJ
・パルス幅 4.3μs
・ビームスポット直径(半値全幅) 60μm
・入射ショット数 1ショット
11 絶縁層
12 内部導体層
13 絶縁層
15 キャリア付導体箔
16 表層導体層
17 剥離層
18 キャリア導体箔
20 基板
25 表層膜
26 表層膜の液状材料
27 表層膜の開口
30 開口
31 ビアホール
32 非分布領域
34 ビア導体
50 インクジェットヘッド
51 硬化用光源
52 硬化用の光
55 レーザビーム
56 ビームスポット
60 レーザ光源
61 導光光学系
62 ビーム走査器
63 レンズ
70 制御装置
71 塗布領域算出部
72 インク吐出制御部
73 硬化用光源制御部
74 ビーム走査器制御部
75 レーザ出力制御部
76 ビアホール位置データ
77 塗布領域定義データ
81 繰り出しロール
82 繰り出しロール
83 巻き取りロール
84 巻き取りロール
85 熱圧着装置
90 表層導体層圧着部
91 表層膜形成部
92 レーザ加工部
Claims (2)
- 内部導体層、絶縁層、及び表層導体層がこの順番に積み重ねられた積層構造を含む基板
に、表層膜の液状材料を塗布する塗布機構と、
赤外域のレーザビームを出力するレーザ光源と、
前記基板に塗布された前記液状材料によって形成された前記表層膜に、平面視において
前記表層膜の外周線の内側にビームスポットが配置される条件で、前記レーザ光源から出
力されたレーザビームを前記表層膜に入射させる導光光学系と、
前記レーザ光源からの前記レーザビームの出力、前記塗布機構による前記液状材料の塗
布を制御して、前記塗布機構によって塗布された前記液状材料からなる前記表層膜及び前
記表層導体層に穴を形成する制御装置と
を有するレーザ加工装置。 - 前記塗布機構は、前記基板に向けて前記液状材料の液滴を吐出するインクジェットヘッ
ドを含み、
前記制御装置は、
前記レーザビームを入射させるべき前記基板内の位置を示す位置データを記憶する記憶
装置を含み、
前記位置データに基づいて、前記基板の表面のうち前記液状材料を塗布すべき塗布領域
を算出し、
前記塗布領域に前記液状材料が塗布されるように、前記インクジェットヘッドからの前
記液状材料の吐出を制御する請求項1に記載のレーザ加工装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015112762A JP6501627B2 (ja) | 2015-06-03 | 2015-06-03 | レーザ加工装置 |
KR1020160067893A KR101840932B1 (ko) | 2015-06-03 | 2016-06-01 | 기판 제조 방법 및 레이저 가공 장치 |
CN201610390237.4A CN106255319B (zh) | 2015-06-03 | 2016-06-02 | 基板制造方法及激光加工装置 |
TW105117381A TWI630857B (zh) | 2015-06-03 | 2016-06-02 | Substrate manufacturing method and laser processing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015112762A JP6501627B2 (ja) | 2015-06-03 | 2015-06-03 | レーザ加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016225554A JP2016225554A (ja) | 2016-12-28 |
JP6501627B2 true JP6501627B2 (ja) | 2019-04-17 |
Family
ID=57575233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015112762A Active JP6501627B2 (ja) | 2015-06-03 | 2015-06-03 | レーザ加工装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6501627B2 (ja) |
KR (1) | KR101840932B1 (ja) |
CN (1) | CN106255319B (ja) |
TW (1) | TWI630857B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7154147B2 (ja) * | 2019-01-31 | 2022-10-17 | 京セラ株式会社 | 印刷配線板の製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4078715B2 (ja) * | 1998-06-02 | 2008-04-23 | 三菱瓦斯化学株式会社 | 信頼性に優れたビア孔の形成方法 |
AU4108300A (en) * | 1999-03-23 | 2000-10-09 | Circuit Foil Luxembourg Trading S.A R.L. | Method for manufacturing a multilayer printed circuit board and composite foil for use therein |
JP2001144411A (ja) * | 1999-09-03 | 2001-05-25 | Mec Kk | プリント配線板の孔あけ法およびそれに用いる表面処理剤 |
JP2003248207A (ja) * | 2002-02-22 | 2003-09-05 | Fujitsu Display Technologies Corp | 液晶表示パネルの製造方法および製造装置 |
JP2006202840A (ja) * | 2005-01-18 | 2006-08-03 | Seiko Epson Corp | 配線基板の製造方法 |
WO2007029508A1 (ja) * | 2005-09-02 | 2007-03-15 | Konica Minolta Medical & Graphic, Inc. | 近赤外線吸収材料及びその製造方法 |
JP2011171724A (ja) * | 2010-01-19 | 2011-09-01 | Shibaura Mechatronics Corp | 基板の配線修正方法、基板の配線修正装置及び基板の配線形成装置 |
US9338898B2 (en) * | 2012-03-09 | 2016-05-10 | Mitsui Mining & Smelting Co., Ltd. | Method of producing a printed wiring board |
JP2014143237A (ja) * | 2013-01-22 | 2014-08-07 | Toppan Printing Co Ltd | ビアホールの形成方法及び多層プリント配線板の製造方法 |
-
2015
- 2015-06-03 JP JP2015112762A patent/JP6501627B2/ja active Active
-
2016
- 2016-06-01 KR KR1020160067893A patent/KR101840932B1/ko active IP Right Grant
- 2016-06-02 CN CN201610390237.4A patent/CN106255319B/zh not_active Expired - Fee Related
- 2016-06-02 TW TW105117381A patent/TWI630857B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN106255319B (zh) | 2019-03-08 |
KR101840932B1 (ko) | 2018-03-21 |
TWI630857B (zh) | 2018-07-21 |
CN106255319A (zh) | 2016-12-21 |
TW201701741A (zh) | 2017-01-01 |
KR20160142779A (ko) | 2016-12-13 |
JP2016225554A (ja) | 2016-12-28 |
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