JP6492790B2 - 物理量センサー、電子機器、及び移動体 - Google Patents

物理量センサー、電子機器、及び移動体 Download PDF

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Publication number
JP6492790B2
JP6492790B2 JP2015045574A JP2015045574A JP6492790B2 JP 6492790 B2 JP6492790 B2 JP 6492790B2 JP 2015045574 A JP2015045574 A JP 2015045574A JP 2015045574 A JP2015045574 A JP 2015045574A JP 6492790 B2 JP6492790 B2 JP 6492790B2
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Japan
Prior art keywords
amplifier circuit
physical quantity
circuit
signal
detection
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JP2015045574A
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English (en)
Japanese (ja)
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JP2016166749A (ja
JP2016166749A5 (enExample
Inventor
豊 ▲高▼田
豊 ▲高▼田
佐藤　健二
健二 佐藤
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2015045574A priority Critical patent/JP6492790B2/ja
Priority to US15/051,224 priority patent/US9927238B2/en
Priority to CN201610127765.0A priority patent/CN105953782B/zh
Publication of JP2016166749A publication Critical patent/JP2016166749A/ja
Publication of JP2016166749A5 publication Critical patent/JP2016166749A5/ja
Application granted granted Critical
Publication of JP6492790B2 publication Critical patent/JP6492790B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5649—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
JP2015045574A 2015-03-09 2015-03-09 物理量センサー、電子機器、及び移動体 Active JP6492790B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015045574A JP6492790B2 (ja) 2015-03-09 2015-03-09 物理量センサー、電子機器、及び移動体
US15/051,224 US9927238B2 (en) 2015-03-09 2016-02-23 Physical quantity sensor, electronic apparatus, and moving object
CN201610127765.0A CN105953782B (zh) 2015-03-09 2016-03-07 物理量传感器、电子设备以及移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015045574A JP6492790B2 (ja) 2015-03-09 2015-03-09 物理量センサー、電子機器、及び移動体

Publications (3)

Publication Number Publication Date
JP2016166749A JP2016166749A (ja) 2016-09-15
JP2016166749A5 JP2016166749A5 (enExample) 2018-03-29
JP6492790B2 true JP6492790B2 (ja) 2019-04-03

Family

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JP2015045574A Active JP6492790B2 (ja) 2015-03-09 2015-03-09 物理量センサー、電子機器、及び移動体

Country Status (3)

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US (1) US9927238B2 (enExample)
JP (1) JP6492790B2 (enExample)
CN (1) CN105953782B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7251385B2 (ja) 2019-07-30 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5880827A (en) * 1997-11-11 1999-03-09 Raytek Subsidiary, Inc., Measurement System with large dynamic range
JP3334794B2 (ja) * 1999-01-14 2002-10-15 日本電気株式会社 振幅制限増幅回路
CN1307750A (zh) * 1999-02-25 2001-08-08 三菱电机株式会社 无线电终端装置
US6837108B2 (en) * 2002-04-23 2005-01-04 Honeywell International Inc. Increasing the dynamic range of a MEMS gyroscope
JP4449504B2 (ja) 2004-03-15 2010-04-14 パナソニック株式会社 角速度センサ
JP4534741B2 (ja) * 2004-12-10 2010-09-01 株式会社デンソー ジャイロセンサ
JP4671305B2 (ja) * 2006-02-17 2011-04-13 シチズンホールディングス株式会社 物理量センサ
JP4396725B2 (ja) * 2006-05-12 2010-01-13 セイコーエプソン株式会社 検出装置、ジャイロセンサ及び電子機器
JP2008070132A (ja) 2006-09-12 2008-03-27 Matsushita Electric Ind Co Ltd 角速度センサ
JP5368181B2 (ja) * 2009-06-12 2013-12-18 セイコーエプソン株式会社 物理量検出装置並びに物理量検出装置の制御方法、異常診断システム及び異常診断方法
JP5552976B2 (ja) * 2010-09-07 2014-07-16 セイコーエプソン株式会社 角速度検出装置及び電子機器
JP2013019834A (ja) * 2011-07-13 2013-01-31 Seiko Epson Corp 角速度検出回路、集積回路装置及び角速度検出装置
KR101298286B1 (ko) * 2011-11-30 2013-08-20 삼성전기주식회사 자이로센서 오프셋 자동 보정회로, 자이로센서 시스템 및 자이로센서 오프셋 자동 보정방법
JP2014149229A (ja) 2013-02-01 2014-08-21 Panasonic Corp 角速度センサ

Also Published As

Publication number Publication date
CN105953782A (zh) 2016-09-21
CN105953782B (zh) 2021-02-05
JP2016166749A (ja) 2016-09-15
US9927238B2 (en) 2018-03-27
US20160265915A1 (en) 2016-09-15

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