JP6486033B2 - 有機ｅｌ素子封止膜の形成方法 - Google Patents

有機ｅｌ素子封止膜の形成方法 Download PDF

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Publication number
JP6486033B2
JP6486033B2 JP2014168458A JP2014168458A JP6486033B2 JP 6486033 B2 JP6486033 B2 JP 6486033B2 JP 2014168458 A JP2014168458 A JP 2014168458A JP 2014168458 A JP2014168458 A JP 2014168458A JP 6486033 B2 JP6486033 B2 JP 6486033B2
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Prior art keywords
film
organic
forming
laminated
hard mask
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JP2014168458A
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English (en)
Japanese (ja)
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JP2016046035A (ja
Inventor
昇 安本
昇 安本
章雄 内藤
章雄 内藤
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2014168458A priority Critical patent/JP6486033B2/ja
Priority to TW104126986A priority patent/TWI658517B/zh
Priority to KR1020150116667A priority patent/KR20160023577A/ko
Priority to CN201510518299.4A priority patent/CN105390622B/zh
Publication of JP2016046035A publication Critical patent/JP2016046035A/ja
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Publication of JP6486033B2 publication Critical patent/JP6486033B2/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/842—Containers
    • H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Inorganic Chemistry (AREA)
JP2014168458A 2014-08-21 2014-08-21 有機ｅｌ素子封止膜の形成方法 Active JP6486033B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014168458A JP6486033B2 (ja) 2014-08-21 2014-08-21 有機ｅｌ素子封止膜の形成方法
TW104126986A TWI658517B (zh) 2014-08-21 2015-08-19 有機ｅｌ元件密封膜之形成方法
KR1020150116667A KR20160023577A (ko) 2014-08-21 2015-08-19 유기 el 소자 봉지막의 형성 방법
CN201510518299.4A CN105390622B (zh) 2014-08-21 2015-08-21 有机el元件密封膜的形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014168458A JP6486033B2 (ja) 2014-08-21 2014-08-21 有機ｅｌ素子封止膜の形成方法

Publications (2)

Publication Number Publication Date
JP2016046035A JP2016046035A (ja) 2016-04-04
JP6486033B2 true JP6486033B2 (ja) 2019-03-20

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ID=55422680

Family Applications (1)

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JP2014168458A Active JP6486033B2 (ja) 2014-08-21 2014-08-21 有機ｅｌ素子封止膜の形成方法

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JP (1) JP6486033B2 (zh)
KR (1) KR20160023577A (zh)
CN (1) CN105390622B (zh)
TW (1) TWI658517B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6636865B2 (ja) * 2016-06-24 2020-01-29 株式会社ジャパンディスプレイ 表示装置の製造方法及び表示装置
CN109860410B (zh) * 2017-11-30 2024-06-25 京东方科技集团股份有限公司 显示面板及其封装方法、显示装置
KR102092020B1 (ko) * 2018-07-13 2020-03-23 주식회사 에스에프에이 디스플레이용 기판 증착 시스템
CN110165074B (zh) * 2019-04-30 2021-08-06 武汉天马微电子有限公司 显示面板及其制作方法
KR102259240B1 (ko) * 2019-08-09 2021-06-01 순천향대학교 산학협력단 Rtp 방법을 이용한 봉지층의 제조방법
JP7442419B2 (ja) * 2020-10-29 2024-03-04 東京エレクトロン株式会社 有機ｅｌパネルの製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6866901B2 (en) * 1999-10-25 2005-03-15 Vitex Systems, Inc. Method for edge sealing barrier films
JP4185341B2 (ja) * 2002-09-25 2008-11-26 パイオニア株式会社 多層バリア膜構造、有機エレクトロルミネッセンス表示パネル及び製造方法
JP2005034831A (ja) * 2003-07-01 2005-02-10 Sumitomo Heavy Ind Ltd バリア多層膜及びその製造方法
JP2007005189A (ja) 2005-06-24 2007-01-11 Tokki Corp 有機膜形成用マスク，封止膜形成装置並びに封止膜の形成方法
US20090075034A1 (en) * 2007-09-19 2009-03-19 Nobuhiro Nishita Patterning method and display device
JP2014002880A (ja) * 2012-06-18 2014-01-09 Canon Inc 有機ｅｌ装置の製造方法
JP6186697B2 (ja) * 2012-10-29 2017-08-30 セイコーエプソン株式会社 有機ｅｌ装置の製造方法、有機ｅｌ装置、電子機器
KR102037051B1 (ko) * 2012-12-29 2019-10-28 엘지디스플레이 주식회사 유기전계발광표시장치 및 그 제조방법

Also Published As

Publication number Publication date
TW201622020A (zh) 2016-06-16
KR20160023577A (ko) 2016-03-03
CN105390622B (zh) 2018-09-07
TWI658517B (zh) 2019-05-01
JP2016046035A (ja) 2016-04-04
CN105390622A (zh) 2016-03-09

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