JP6452140B2 - 距離センサ及び計測方法 - Google Patents

距離センサ及び計測方法 Download PDF

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Publication number
JP6452140B2
JP6452140B2 JP2014029936A JP2014029936A JP6452140B2 JP 6452140 B2 JP6452140 B2 JP 6452140B2 JP 2014029936 A JP2014029936 A JP 2014029936A JP 2014029936 A JP2014029936 A JP 2014029936A JP 6452140 B2 JP6452140 B2 JP 6452140B2
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JP
Japan
Prior art keywords
electrode
guard electrode
sensor
insulator
conductor
Prior art date
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Active
Application number
JP2014029936A
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English (en)
Japanese (ja)
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JP2015152584A (ja
JP2015152584A5 (enExample
Inventor
謙司 松本
謙司 松本
雄司 三原
雄司 三原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Gotoh Educational Corp
Original Assignee
Honda Motor Co Ltd
Gotoh Educational Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd, Gotoh Educational Corp filed Critical Honda Motor Co Ltd
Priority to JP2014029936A priority Critical patent/JP6452140B2/ja
Priority to US14/625,018 priority patent/US9891035B2/en
Publication of JP2015152584A publication Critical patent/JP2015152584A/ja
Publication of JP2015152584A5 publication Critical patent/JP2015152584A5/ja
Application granted granted Critical
Publication of JP6452140B2 publication Critical patent/JP6452140B2/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP2014029936A 2014-02-19 2014-02-19 距離センサ及び計測方法 Active JP6452140B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014029936A JP6452140B2 (ja) 2014-02-19 2014-02-19 距離センサ及び計測方法
US14/625,018 US9891035B2 (en) 2014-02-19 2015-02-18 Distance sensor and measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014029936A JP6452140B2 (ja) 2014-02-19 2014-02-19 距離センサ及び計測方法

Publications (3)

Publication Number Publication Date
JP2015152584A JP2015152584A (ja) 2015-08-24
JP2015152584A5 JP2015152584A5 (enExample) 2017-04-06
JP6452140B2 true JP6452140B2 (ja) 2019-01-16

Family

ID=53797828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014029936A Active JP6452140B2 (ja) 2014-02-19 2014-02-19 距離センサ及び計測方法

Country Status (2)

Country Link
US (1) US9891035B2 (enExample)
JP (1) JP6452140B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9798429B2 (en) * 2014-02-28 2017-10-24 Synaptics Incorporated Guard electrodes in a sensing stack
JP6961180B2 (ja) * 2017-08-21 2021-11-05 ユニパルス株式会社 隙間測定装置、測定子
DE102017223390A1 (de) * 2017-12-20 2019-06-27 Zf Friedrichshafen Ag Gleitlageranordnung für eine schwere Welle, insbesondere einer Windkraftanlage, sowie Steuersystem und Verfahren zur Betriebssteuerung derselben
EP3608624B1 (de) 2018-08-06 2022-06-29 Hexagon Technology Center GmbH Kapazitiver distanzsensor

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4422035A (en) * 1981-12-11 1983-12-20 Extrude Hone Corporation Capacitance measurement probe
US4766368A (en) * 1986-09-30 1988-08-23 Cox Harold A Capacitive sensor
US5070302A (en) * 1989-09-05 1991-12-03 Eastman Kodak Company Capacitance probe for measuring a width of a clearance between parts
GB9009005D0 (en) * 1990-04-21 1990-06-20 Coopers Payen Limited Measuring apparatus
JP2724419B2 (ja) * 1990-08-28 1998-03-09 日本特殊陶業株式会社 圧力センサ
JP2802868B2 (ja) * 1992-12-22 1998-09-24 大日本スクリーン製造株式会社 半導体ウエハの非接触電気測定用センサおよびその製造方法、並びに、そのセンサを用いた測定方法
US5802911A (en) * 1994-09-13 1998-09-08 Tokyo Gas Co., Ltd. Semiconductor layer pressure switch
WO1998012528A1 (fr) * 1996-09-19 1998-03-26 Hokuriku Electric Industry Co., Ltd. Capteur de pression a capacite electrostatique
JP4124867B2 (ja) * 1998-07-14 2008-07-23 松下電器産業株式会社 変換装置
JP2001091205A (ja) * 1999-07-22 2001-04-06 Sumitomo Metal Ind Ltd 物体搭載装置
US6828806B1 (en) 1999-07-22 2004-12-07 Sumitomo Metal Industries, Ltd. Electrostatic capacitance sensor, electrostatic capacitance sensor component, object mounting body and object mounting apparatus
JP2005183744A (ja) * 2003-12-22 2005-07-07 Nikon Corp 露光装置及びデバイス製造方法
JP5006022B2 (ja) * 2006-12-25 2012-08-22 株式会社リコー 距離センサ及び画像形成装置
US8570055B2 (en) 2009-12-31 2013-10-29 Mapper Lithography Ip B.V. Capacitive sensing system
US8734105B2 (en) * 2010-09-16 2014-05-27 Vestas Wind Systems A/S Control system for a wind turbine and method of operating a wind turbine based on monitoring a bearing
JP5353991B2 (ja) * 2010-11-30 2013-11-27 株式会社日本自動車部品総合研究所 静電容量式乗員検知装置
US9797850B2 (en) * 2012-10-15 2017-10-24 Nanolab, Inc. Sensor for wear measurement, method of making, and method of operating same

Also Published As

Publication number Publication date
US20150233696A1 (en) 2015-08-20
US9891035B2 (en) 2018-02-13
JP2015152584A (ja) 2015-08-24

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