JP6444507B2 - 研磨パッドの製造方法 - Google Patents
研磨パッドの製造方法 Download PDFInfo
- Publication number
- JP6444507B2 JP6444507B2 JP2017529389A JP2017529389A JP6444507B2 JP 6444507 B2 JP6444507 B2 JP 6444507B2 JP 2017529389 A JP2017529389 A JP 2017529389A JP 2017529389 A JP2017529389 A JP 2017529389A JP 6444507 B2 JP6444507 B2 JP 6444507B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing pad
- polishing
- produced
- urethane prepolymer
- pores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 238000005498 polishing Methods 0.000 title claims description 153
- 238000004519 manufacturing process Methods 0.000 title claims description 16
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- 238000009835 boiling Methods 0.000 claims description 38
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- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims description 35
- 229920000642 polymer Polymers 0.000 claims description 33
- 238000002156 mixing Methods 0.000 claims description 27
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- 239000004697 Polyetherimide Substances 0.000 claims description 2
- 239000004698 Polyethylene Substances 0.000 claims description 2
- 229920002873 Polyethylenimine Polymers 0.000 claims description 2
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 2
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- 239000000470 constituent Substances 0.000 description 6
- IBOFVQJTBBUKMU-UHFFFAOYSA-N 4,4'-methylene-bis-(2-chloroaniline) Chemical compound C1=C(Cl)C(N)=CC=C1CC1=CC=C(N)C(Cl)=C1 IBOFVQJTBBUKMU-UHFFFAOYSA-N 0.000 description 5
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
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- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
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- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
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- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
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- 229910052704 radon Inorganic materials 0.000 description 1
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- 230000035484 reaction time Effects 0.000 description 1
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- 238000009834 vaporization Methods 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
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- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
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- C08J2203/00—Foams characterized by the expanding agent
- C08J2203/18—Binary blends of expanding agents
- C08J2203/182—Binary blends of expanding agents of physical blowing agents, e.g. acetone and butane
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2207/00—Foams characterised by their intended use
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2375/00—Characterised by the use of polyureas or polyurethanes; Derivatives of such polymers
- C08J2375/04—Polyurethanes
- C08J2375/08—Polyurethanes from polyethers
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
Description
<実験例1>
<実験例2>
<実験例3>
<実験例4>
[109]
<実験例5>
<実験例6>
<実験例7>
Casting Machineを用いて実験例2のイソシアネート予備重合体100kgとMOCA29kg、不活性ガスと低沸点発泡剤を5000rpmのMixing Headを介して吐出する。この際に、不活性ガスであるN2 gasを体積比20%で、低沸点発泡剤を体積比2%でMixing Headに投与する。
Claims (5)
- (a)複数分子のポリマーを混合して当該複数分子のポリマーの粘度よりも大きい粘度20,000cps(25℃)〜40,000cps(25℃)のウレタン予備重合体を生成する工程と、
(b)前記工程(a)で生成したウレタン予備重合体に不活性ガスと沸点が60℃〜150℃である低沸点発泡剤を混合する工程と、
(c)前記工程(b)で生成された混合物を所定の鋳型でゲル化及び硬化させて多孔性ポアを含む研磨層を製造する工程と、
を備え、
前記工程(b)では、前記工程(b)で生成される混合物の総体積を基準に5%〜30%の不活性ガスと0.1%〜10%の低沸点発泡剤を、前記工程(a)で生成されたウレタン予備重合体に混合して生成されるポアの平均サイズが31μm以下になるようにする、
研磨パッドの製造方法。 - 前記工程(a)では、四価以上の水酸基を有するポリマーを混合して前記ウレタン予備重合体を生成し、
生成されたウレタン予備重合体と硬化剤の混合によって3次元結合構造のポリウレタンを形成する工程をさらに備え、
グレージング現象の発生を抑制した研磨層を生成する、
請求項1に記載の研磨パッドの製造方法。 - 前記ウレタン予備重合体を生成するために混合する前記複数分子のポリマーは、ポリプロピレングリコール、ポリウレタン、ポリエーテル、ポリエステル、ポリスルホン、ポリアクリル、ポリカーボネート、ポリエチレン、ポリメチルメタクリレート、ポリビニルアセテート、ポリビニルクロライド、ポリエチレンイミン、ポリエーテルスルホン、ポリエーテルイミド、ポリケトン、メラミン、ナイロン及びフッ化炭化水素からなる群より選択された一つまたは二つ以上の混合物を含む、
請求項2に記載の研磨パッドの製造方法。 - 前記四価以上の水酸基を有するポリマーは、生成されるウレタン予備重合体の質量を基準に1%〜30%含量で含まれる、
請求項2に記載の研磨パッドの製造方法。 - 前記研磨層を加工して表面に前記多孔性ポアの開放による気孔を分布させる工程をさらに備える、
請求項1に記載の研磨パッドの製造方法。
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PCT/KR2016/003562 WO2017175894A1 (ko) | 2016-04-06 | 2016-04-06 | 연마패드 제조 방법 |
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JP2018521860A JP2018521860A (ja) | 2018-08-09 |
JP6444507B2 true JP6444507B2 (ja) | 2018-12-26 |
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US (1) | US10457790B2 (ja) |
EP (1) | EP3442007B1 (ja) |
JP (1) | JP6444507B2 (ja) |
CN (1) | CN107646138B (ja) |
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- 2016-04-06 CN CN201680003771.3A patent/CN107646138B/zh active Active
- 2016-04-06 JP JP2017529389A patent/JP6444507B2/ja active Active
- 2016-04-06 EP EP16858489.4A patent/EP3442007B1/en active Active
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JP2018521860A (ja) | 2018-08-09 |
US20180118908A1 (en) | 2018-05-03 |
EP3442007A4 (en) | 2019-10-09 |
EP3442007A1 (en) | 2019-02-13 |
CN107646138A (zh) | 2018-01-30 |
SG11201704554SA (en) | 2017-11-29 |
US10457790B2 (en) | 2019-10-29 |
WO2017175894A1 (ko) | 2017-10-12 |
EP3442007B1 (en) | 2020-11-25 |
CN107646138B (zh) | 2020-11-06 |
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