JP6438780B2 - 荷電粒子線装置および収差補正方法 - Google Patents

荷電粒子線装置および収差補正方法 Download PDF

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JP6438780B2
JP6438780B2 JP2015018549A JP2015018549A JP6438780B2 JP 6438780 B2 JP6438780 B2 JP 6438780B2 JP 2015018549 A JP2015018549 A JP 2015018549A JP 2015018549 A JP2015018549 A JP 2015018549A JP 6438780 B2 JP6438780 B2 JP 6438780B2
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multipole
charged particle
particle beam
axis
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JP2016143558A5 (cg-RX-API-DMAC10.html
JP2016143558A (ja
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朝則 中野
朝則 中野
琴子 浦野
琴子 浦野
朝暉 程
朝暉 程
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Hitachi High-Tech Corp
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JP2015018549A 2015-02-02 2015-02-02 荷電粒子線装置および収差補正方法 Expired - Fee Related JP6438780B2 (ja)

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JP2016143558A5 JP2016143558A5 (cg-RX-API-DMAC10.html) 2017-04-13
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Publication number Priority date Publication date Assignee Title
JP6821471B2 (ja) * 2017-02-28 2021-01-27 株式会社荏原製作所 光軸調整方法および電子線検査装置
JP7735441B2 (ja) * 2022-02-14 2025-09-08 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
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JP2004006163A (ja) * 2002-06-03 2004-01-08 Shimadzu Corp 荷電粒子ビーム軸の調整方法及び荷電粒子ビーム応用機器
JP4628076B2 (ja) * 2004-10-14 2011-02-09 日本電子株式会社 収差補正方法及び収差補正装置
EP1670028B1 (en) * 2004-12-07 2017-02-08 JEOL Ltd. Apparatus for automatically correcting a charged-particle beam
JP2008112718A (ja) * 2006-10-02 2008-05-15 Jeol Ltd 電子線装置における自動軸調整方法
JP6150991B2 (ja) * 2012-07-18 2017-06-21 株式会社日立ハイテクノロジーズ 電子ビーム照射装置
JP6134145B2 (ja) * 2013-01-24 2017-05-24 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び荷電粒子線装置における軌道修正方法

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