JP2016143558A5 - - Google Patents

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Publication number
JP2016143558A5
JP2016143558A5 JP2015018549A JP2015018549A JP2016143558A5 JP 2016143558 A5 JP2016143558 A5 JP 2016143558A5 JP 2015018549 A JP2015018549 A JP 2015018549A JP 2015018549 A JP2015018549 A JP 2015018549A JP 2016143558 A5 JP2016143558 A5 JP 2016143558A5
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Japan
Prior art keywords
multipole
stage
charged particle
particle beam
deflection
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JP2015018549A
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English (en)
Japanese (ja)
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JP2016143558A (ja
JP6438780B2 (ja
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Publication of JP2016143558A5 publication Critical patent/JP2016143558A5/ja
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JP2015018549A 2015-02-02 2015-02-02 荷電粒子線装置および収差補正方法 Expired - Fee Related JP6438780B2 (ja)

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Application Number Priority Date Filing Date Title
JP2015018549A JP6438780B2 (ja) 2015-02-02 2015-02-02 荷電粒子線装置および収差補正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015018549A JP6438780B2 (ja) 2015-02-02 2015-02-02 荷電粒子線装置および収差補正方法

Publications (3)

Publication Number Publication Date
JP2016143558A JP2016143558A (ja) 2016-08-08
JP2016143558A5 true JP2016143558A5 (cg-RX-API-DMAC10.html) 2017-04-13
JP6438780B2 JP6438780B2 (ja) 2018-12-19

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JP2015018549A Expired - Fee Related JP6438780B2 (ja) 2015-02-02 2015-02-02 荷電粒子線装置および収差補正方法

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JP (1) JP6438780B2 (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6821471B2 (ja) * 2017-02-28 2021-01-27 株式会社荏原製作所 光軸調整方法および電子線検査装置
JP7735441B2 (ja) * 2022-02-14 2025-09-08 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004006163A (ja) * 2002-06-03 2004-01-08 Shimadzu Corp 荷電粒子ビーム軸の調整方法及び荷電粒子ビーム応用機器
JP4628076B2 (ja) * 2004-10-14 2011-02-09 日本電子株式会社 収差補正方法及び収差補正装置
EP1670028B1 (en) * 2004-12-07 2017-02-08 JEOL Ltd. Apparatus for automatically correcting a charged-particle beam
JP2008112718A (ja) * 2006-10-02 2008-05-15 Jeol Ltd 電子線装置における自動軸調整方法
JP6150991B2 (ja) * 2012-07-18 2017-06-21 株式会社日立ハイテクノロジーズ 電子ビーム照射装置
JP6134145B2 (ja) * 2013-01-24 2017-05-24 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び荷電粒子線装置における軌道修正方法

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