JP6399272B1 - パワーモジュール及びその製造方法並びに電力変換装置 - Google Patents
パワーモジュール及びその製造方法並びに電力変換装置 Download PDFInfo
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- JP6399272B1 JP6399272B1 JP2018536217A JP2018536217A JP6399272B1 JP 6399272 B1 JP6399272 B1 JP 6399272B1 JP 2018536217 A JP2018536217 A JP 2018536217A JP 2018536217 A JP2018536217 A JP 2018536217A JP 6399272 B1 JP6399272 B1 JP 6399272B1
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- base plate
- case member
- power module
- insulating substrate
- peripheral side
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- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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Abstract
Description
図1は、この発明の実施の形態1におけるパワーモジュールを示す平面構造模式図である。図2は、この発明の実施の形態1におけるパワーモジュールを示す断面構造模式図である。図1中の一点鎖線AAにおける断面構造模式図が図2である。図において、パワーモジュール100は、半導体素子1、絶縁基板5、接合材6、ケース部材7、電極端子8、接着部材である接着剤9、ベース板10、配線部材であるボンディングワイヤ11、充填部材12を備えている。また、ケース部材7は、傾斜面71、突出部72を備えている。
本実施の形態2においては、実施の形態1で用いたケース部材7の底面に設けた傾斜面71の内周側であるベース板10の表面と接する側に平坦部73を設けた点が異なる。このように、ケース部材7の底面の傾斜面71よりも内側に平坦部73を形成したので、接着剤9から充填部材12までの距離を稼ぐことができ、接着剤9の充填部材12側への流動を効果的に抑制することができる。また、平坦部73を設けたので、ケース部材7に働く力を分散することができる。その結果、充填部材12と接着剤9との接触を抑制でき、充填部材12の剥離を抑制することができる。さらに、パワーモジュールの信頼性を向上させることができる。なお、その他の点については、実施の形態1と同様であるので、詳しい説明は省略する。
本実施の形態3においては、実施の形態1で用いたケース部材7の底面に設けた突出部72の内周側(ベース板10の側面に対向する面側)をベース板10の裏面側へ向かうほどベース板10の側面から遠ざかる(第二の傾斜面74を有する)形状とした点が異なる。このように、ケース部材7の突出部72をベース板10の裏面側へ向かうほどベース板10の側面から遠ざかる形状としたので、ケース部材7とベース板10との接着時における充填部材12の外部側への流動を効率的に行うことができ、接着剤9の充填部材12側への流動を効果的に抑制することができる。その結果、充填部材12と接着剤9との接触を無くしたので充填部材12の剥離を抑制することができる。また、パワーモジュールの信頼性を向上させることができる。なお、その他の点については、実施の形態1と同様であるので、詳しい説明は省略する。
本実施の形態4においては、実施の形態1で用いたケース部材7の底面に設けた傾斜面71の内周部側であるベース板10の表面と接する側に嵌込部75、ベース板10の表面に嵌込部75の受けとなる凹部76を設けた点が異なる。このように、ケース部材7の底面の内側に嵌込部75を形成し、凹部76へ嵌込む構成としたので、充填部材12までの距離を稼ぐことができ、接着剤9の充填部材12側への流動を効果的に抑制することができる。その結果、充填部材12と接着剤9との接触が無くしたので充填部材12の剥離を抑制することができる。また、ケース部材7に嵌込部75を設けて、凹部76に嵌込む構成としたので、ケース部材7とベース板10との固定が補強され、接着強度を向上させることができる。さらに、パワーモジュールの信頼性を向上させることができる。なお、その他の点については、実施の形態1と同様であるので、詳しい説明は省略する。
本実施の形態5においては、実施の形態1で用いたケース部材7の底面にケース部材7の内周部側から外周部側まで(全面)に形成された傾斜面71を設けた点が異なる。このように、ケース部材7の底面の全面に傾斜面71を形成したので、充填部材12と接着剤9とが接すること無く分離でき、接着剤9の充填部材12側への流動を効果的に抑制することができる。その結果、充填部材12と接着剤9との接触を無くしたので充填部材12の剥離をすることができる。また、パワーモジュールの信頼性を向上させることができる。なお、その他の点については、実施の形態1と同様であるので、詳しい説明は省略する。
本実施の形態6は、上述した実施の形態1から5にかかるパワーモジュールを電力変換装置に適用したものである。本発明は特定の電力変換装置に限定されるものではないが、以下、実施の形態6として、三相のインバータに本発明を適用した場合について説明する。
まず、はじめに、この発明の比較例の評価用サンプルの評価結果について説明する。第一条件(−40℃〜125℃)の試験評価では、1台のサンプルにおいて、500サイクル後に導通不良が生じた。このため、寿命試験では「△」と記載した。また、第二条件(−40℃〜150℃)の試験評価では、3台のサンプルにおいて、100サイクル後に導通不良が生じた。このため、寿命試験では「×」と記載した。寿命試験後の構造解析により、いずれの導通不良サンプルにおいても、故障モードは「剥離」であった。すなわち、比較例の評価用サンプルでは、パワーモジュール600は、第一条件においては、導通不良が発生する場合が認められる場合があり、第二条件においては、現状の構造では、パワーモジュールの動作不良を回避することが難しいことがわかった(表1参照)。
次に、実施の形態1の評価用サンプルの評価結果について説明する。実施の形態1では、ケース部材7の底面は、平面視において、ベース板10の表面と重なる箇所が、断面視において、充填部材12と接するケース部材7の内周側がベース板10の表面に接する傾斜面71(先細りしたテーパ形状)を備えている。このため、シリコーン接着剤とエポキシ樹脂とが接触しない構造となっている。
次に、実施の形態2の評価用サンプルの評価結果について説明する。実施の形態2では、ケース部材7の底面は、平面視において、ベース板10の表面と重なる箇所が、断面視において、充填部材12と接するケース部材7の内周側がベース板10の表面に接する傾斜面71(先細りしたテーパ形状)を備えている。また、ケース部材7の内周側にベース板10の表面と接する平坦部73を備えている。このため、シリコーン接着剤(接着剤9)とエポキシ樹脂(充填部材12)とが接触しない構造となっている。
次に、実施の形態3の評価用サンプルの評価結果について説明する。実施の形態3では、ケース部材7の底面は、平面視において、ベース板10の表面と重なる箇所が、断面視において、充填部材12と接するケース部材7の内周側がベース板10の表面に接する傾斜面71(先細りしたテーパ形状)を備えている。また、ケース部材7の突出部72は、内周側に、ベース板10の裏面側へ向かうほどベース板10の側面から遠ざかる第二の傾斜面74を備えている。このため、シリコーン接着剤とエポキシ樹脂とが接触しない構造となっている。
次に、実施の形態4の評価用サンプルの評価結果について説明する。実施の形態4では、ケース部材7の底面は、平面視において、ベース板10の表面と重なる箇所が、断面視において、充填部材12と接するケース部材7の内周側がベース板10の表面に接する傾斜面71(先細りしたテーパ形状)を備えている。また、ケース部材7の内周側にベース板10の表面の凹部76に嵌込む嵌込部75を備えている。このため、シリコーン接着剤とエポキシ樹脂とが接触しない構造となっている。
次に、実施の形態5の評価用サンプルの評価結果について説明する。実施の形態5では、ケース部材7の底面は、平面視において、ベース板10の表面と重なる箇所が、断面視において、充填部材12と接するケース部材7の内周側がベース板10の表面に接する傾斜面71(先細りしたテーパ形状)を備えている。実施の形態5では、ケース部材7の底面のケース部材の内周部側から外周部側まで(全面)が傾斜面71となっている。このため、シリコーン接着剤とエポキシ樹脂とが接触しない構造となっている。
Claims (13)
- 表面に半導体素子が搭載された絶縁基板と、
前記絶縁基板の裏面に接合された平坦な板状のベース板と、
前記絶縁基板を取り囲み、底面の内周部側が前記ベース板の表面と接し、前記底面には前記ベース板の外周側へ向かうほど前記平坦な板状の前記ベース板の表面から遠ざかる傾斜部を設けたケース部材と、
前記ベース板と前記傾斜部との間に充填され前記ベース板と前記ケース部材とを接着する接着部材と、
前記ベース板と前記ケース部材とで囲まれた領域に充填される充填部材と、
を備えたパワーモジュール。 - 前記底面は、前記傾斜部よりも外側に前記ベース板側へ突出した突出部を備えた請求項1に記載のパワーモジュール。
- 前記底面は、前記傾斜部よりも内側に前記ベース板と接する平坦部を備えた請求項2に記載のパワーモジュール。
- 前記突出部は、前記ベース板の裏面側へ向かうほど前記ベース板の側面から遠ざかる請求項2に記載のパワーモジュール。
- 表面に半導体素子が接合された絶縁基板と、
前記絶縁基板の裏面に接合されたベース板と、
前記ベース板とで前記絶縁基板を取り囲み、底面の内周部側が前記ベース板の表面と接し、前記底面には前記ベース板の外周側へ向かうほど前記ベース板の表面から遠ざかる傾斜面と前記傾斜面よりも外側に前記ベース板側へ突出した突出部と前記傾斜面よりも内側に前記ベース板と接する平坦部とを設けたケース部材と、
前記ベース板と前記傾斜面との間に充填され前記ベース板と前記ケース部材とを接着する接着部材と、
前記ベース板と前記ケース部材とで囲まれた領域に充填される充填部材と、
を備えたパワーモジュール。 - 表面に半導体素子が接合された絶縁基板と、
前記絶縁基板の裏面に接合されたベース板と、
前記ベース板とで前記絶縁基板を取り囲み、底面の内周部側が前記ベース板の表面と接し、前記底面には前記ベース板の外周側へ向かうほど前記ベース板の表面から遠ざかる傾斜面と前記傾斜面よりも外側に前記ベース板側へ突出し、内周側が前記ベース板の裏面側へ向かうほど前記ベース板の側面から遠ざかる突出部とを設けたケース部材と、
前記ベース板と前記傾斜面との間に充填され前記ベース板と前記ケース部材とを接着する接着部材と、
前記ベース板と前記ケース部材とで囲まれた領域に充填される充填部材と、
を備えたパワーモジュール。 - 前記底面は、前記内周部側に前記ベース板に嵌込む嵌込部を備えた請求項1から請求項6のいずれか1項に記載のパワーモジュール。
- 前記傾斜部は、前記底面の全面に形成された請求項1に記載のパワーモジュール。
- 表面に半導体素子が接合された絶縁基板と、
前記絶縁基板の裏面に接合されたベース板と、
前記ベース板とで前記絶縁基板を取り囲み、底面の内周部側が前記ベース板の表面と接し、前記底面には前記ベース板の外周側へ向かうほど前記ベース板の表面から遠ざかり、前記内周部側から外周部側までに形成された傾斜面を設けたケース部材と、
前記ベース板と前記傾斜面との間に充填され前記ベース板と前記ケース部材とを接着する接着部材と、
前記ベース板と前記ケース部材とで囲まれた領域に充填される充填部材と、
を備えたパワーモジュール。 - 絶縁基板の表面に半導体素子を接合材で接合する半導体素子接合工程と、
前記絶縁基板の裏面と平坦な板状のベース板とを接合材で接合するに絶縁基板接合工程と、
前記ベース板とで前記絶縁基板を取り囲み、ケース部材の底面の内周部側が前記ベース板の表面と接し、前記底面に設けられた前記ベース板の外周側へ向かうほど前記平坦な板状の前記ベース板の表面から遠ざかる傾斜面と前記ベース板との間に充填された接着部材で前記ベース板と前記ケース部材とを接着するケース部材接着工程と、
前記ベース板と前記ケース部材とで囲まれた領域に充填部材を充填する充填部材充填工程と、
を備えたパワーモジュールの製造方法。 - 前記ケース部材接着工程は、前記底面を上向きにし、前記底面と前記ベース板の表面とを接して配置し、前記傾斜面と前記ベース板とで囲まれる領域に前記接着部材を充填する接着部材充填工程を備えた請求項10に記載のパワーモジュールの製造方法。
- 絶縁基板の表面に半導体素子を接合する半導体素子接合工程と、前記絶縁基板の裏面とベース板とを接合する絶縁基板接合工程と、
前記ベース板とで前記絶縁基板を取り囲み、ケース部材の底面の内周部側が前記ベース板の表面と接し、前記底面に設けられた前記ベース板の外周側へ向かうほど前記ベース板の表面から遠ざかる傾斜面と前記ベース板との間に充填された接着部材で前記ベース板と前記ケース部材とを接着するケース部材接着工程と、
前記ベース板と前記ケース部材とで囲まれた領域に充填部材を充填する充填部材充填工程と、
を備え、
前記ケース部材接着工程は、前記底面を上向きにし、前記底面と前記ベース板の表面とを接して配置し、前記傾斜面と前記ベース板とで囲まれる領域に前記接着部材を充填する接着部材充填工程を備えたパワーモジュールの製造方法。 - 請求項1から請求項9のいずれか1項に記載のパワーモジュールを有し、入力される電力を変換して出力する主変換回路と、
前記主変換回路を制御する制御信号を前記主変換回路に出力する制御回路と、
を備えた電力変換装置。
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