JP6394605B2 - 薄膜トランジスタアレイ、及び画像表示装置 - Google Patents
薄膜トランジスタアレイ、及び画像表示装置 Download PDFInfo
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- JP6394605B2 JP6394605B2 JP2015538884A JP2015538884A JP6394605B2 JP 6394605 B2 JP6394605 B2 JP 6394605B2 JP 2015538884 A JP2015538884 A JP 2015538884A JP 2015538884 A JP2015538884 A JP 2015538884A JP 6394605 B2 JP6394605 B2 JP 6394605B2
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- drain electrode
- thin film
- insulating film
- transistor array
- film transistor
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- 239000000741 silica gel Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- PYJJCSYBSYXGQQ-UHFFFAOYSA-N trichloro(octadecyl)silane Chemical compound CCCCCCCCCCCCCCCCCC[Si](Cl)(Cl)Cl PYJJCSYBSYXGQQ-UHFFFAOYSA-N 0.000 description 1
- RCHUVCPBWWSUMC-UHFFFAOYSA-N trichloro(octyl)silane Chemical compound CCCCCCCC[Si](Cl)(Cl)Cl RCHUVCPBWWSUMC-UHFFFAOYSA-N 0.000 description 1
- FZMJEGJVKFTGMU-UHFFFAOYSA-N triethoxy(octadecyl)silane Chemical compound CCCCCCCCCCCCCCCCCC[Si](OCC)(OCC)OCC FZMJEGJVKFTGMU-UHFFFAOYSA-N 0.000 description 1
- NMEPHPOFYLLFTK-UHFFFAOYSA-N trimethoxy(octyl)silane Chemical compound CCCCCCCC[Si](OC)(OC)OC NMEPHPOFYLLFTK-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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- G02F1/1362—Active matrix addressed cells
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
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- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
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Description
本発明は、上記問題に鑑みたビアホールの構造に関し、層間絶縁膜のドレイン電極部分に予め開口を開けておき、そこにインクジェット法で撥液処理インキを塗布することによって、ドレイン電極のビアホール部のみを撥液性にすることで、印刷法による層間絶縁膜を形成できる構造と製造方法を提供する。
また、本実施の形態に係る画像表示装置は、本実施の形態に係る薄膜トランジスタアレイ50、51と、画像表示媒体(例えば画像表示パネル)とを備える。例えば、画像表示媒体は電気泳動方式によるものである。
なお、薄膜トランジスタアレイ50、51を製造する際には、ドレイン電極14のうちビアホール形成予定部に予め開口を開けておき、そこにインクジェット法で撥液処理インキを塗布する。撥液処理インキをビアホール形成予定部のドレイン電極14のみに成膜する。これにより、ドレイン電極14上の所望の領域のみ撥液性になり、印刷法にて成膜した層間絶縁膜17がビアホール形成予定部のドレイン電極14に選択的に塗布されない。これにより層間絶縁膜17に印刷法にてビアホール40を形成することができる。
ゲート電極11の配置以外の構造の違いとして、半導体層15の位置が異なるボトムコンタクト型、トップコンタクト型であってもよいが、半導体層15として有機半導体材料を用いる場合にはボトムコンタクト型とすることが好ましい。ボトムコンタクト型は、トップコンタクト型に比べてチャネル長を短くでき、大きなドレイン電流を得ることができるためである。
<実施例1>
図4の(a)に示すように、インクジェット印刷により、インクジェットヘッド21から吐出した撥液処理インキ22を、ビアホール形成予定部のドレイン電極14に塗布する。撥液処理インキ22は、チオール化合物またはジスルフィド化合物を含む。溶媒には高沸点のアルコール溶媒を好適に用いることができる。チオール化合物またはジスルフィド化合物の硫黄原子は、ドレイン電極14の金属原子と速やかに化合するため、ビアホール形成予定部のドレイン電極14を容易に撥液性にすることができる。チオール化合物またはジスルフィド化合物がフッ素化アルキル鎖を含んでいると撥液性が増す。
図4の(b)は、インクジェットヘッド21より吐出された撥液処理インキ22がビアホール形成予定部のドレイン電極14の内側に着弾した状態を示す。感光性樹脂で形成されたゲート絶縁膜12の表面は撥液性があり、着弾した撥液処理インキ22はドレイン電極14の開口内に一時的に溜まるが、すぐに図4の(c)に示すように、ゲート絶縁膜12より相対的に濡れ性の良いドレイン電極14に濡れ広がる。ドレイン電極14の開口径と撥液処理インキ22の塗布量を調整することにより、ビアホール形成予定部のドレイン電極14のみに撥液処理インキ22を印刷することができる。
基板に層間絶縁膜形成材料のインキが印刷された際にインキが流動するが、ビアホール形成予定部のドレイン電極14の表面が撥液性となっているため、図4の(e)に示すように、ドレイン電極14のエッジ部分で層間絶縁膜材の流動が止まり、ビアホール形成予定部のドレイン電極14の外周形状にビアホール40を設けることができる。
<比較例1>
11 ゲート電極
12 ゲート絶縁膜
13A ソース電極
13B ソース電極
14 ドレイン電極
15 半導体層
16 保護層
17 層間絶縁膜
18 画素電極
19 キャパシタ電極
20 電気泳動媒体
21 インクジェットヘッド
22 撥液処理インキ
31 第一層間絶縁膜
32 第二層間絶縁膜
40 ビアホール
50 薄膜トランジスタアレイ
51 薄膜トランジスタアレイ
52 薄膜トランジスタアレイ
Claims (8)
- 少なくとも、絶縁基板と、ゲート電極と、ゲート絶縁膜と、ソース電極と、ドレイン電極と、半導体層と、前記半導体層を覆う保護層と、画素電極と、前記ドレイン電極と前記画素電極の間に形成された層間絶縁膜とを備えた薄膜トランジスタアレイであって、
前記層間絶縁膜は、有機膜、又は、有機と無機の混合膜であり、
前記画素電極を前記ドレイン電極に接続するために、前記層間絶縁膜は、前記ドレイン電極が形成された箇所の一部にビアホールを有し、
前記ドレイン電極は、前記ビアホール内に位置して電極材に開口が形成された開口部を有し、
前記ビアホール内の前記ドレイン電極上にチオール基またはジスルフィド基が存在する、薄膜トランジスタアレイ。 - 前記ビアホールの開口端が、前記ドレイン電極の端、又は、前記ドレイン電極上に存在する、請求項1に記載の薄膜トランジスタアレイ。
- 前記層間絶縁膜の厚みが0.5μm以上5μm以下である、請求項1または請求項2に記載の薄膜トランジスタアレイ。
- 前記層間絶縁膜は、インクジェット印刷法、スクリーン印刷法、又はグラビアオフセット印刷法により形成されている、請求項1乃至3のいずれか一項に記載の薄膜トランジスタアレイ。
- 前記半導体層が有機半導体層である、請求項1乃至4のいずれか一項に記載の薄膜トランジスタアレイ。
- 前記絶縁基板がプラスチック基板である、請求項1乃至5のいずれか一項に記載の薄膜トランジスタアレイ。
- 請求項1乃至6のいずれか一項に記載の薄膜トランジスタアレイと、
画像表示媒体とを備える、画像表示装置。 - 前記画像表示媒体が電気泳動方式によるものである、請求項7に記載の画像表示装置。
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