JP6197306B2 - 薄膜トランジスタの製造方法 - Google Patents
薄膜トランジスタの製造方法 Download PDFInfo
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- JP6197306B2 JP6197306B2 JP2013033081A JP2013033081A JP6197306B2 JP 6197306 B2 JP6197306 B2 JP 6197306B2 JP 2013033081 A JP2013033081 A JP 2013033081A JP 2013033081 A JP2013033081 A JP 2013033081A JP 6197306 B2 JP6197306 B2 JP 6197306B2
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- 239000010409 thin film Substances 0.000 title claims description 58
- 238000004519 manufacturing process Methods 0.000 title claims description 13
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- 239000011229 interlayer Substances 0.000 claims description 37
- 238000007645 offset printing Methods 0.000 claims description 20
- 238000007650 screen-printing Methods 0.000 claims description 18
- -1 thiol compound Chemical class 0.000 claims description 13
- 150000001875 compounds Chemical class 0.000 claims description 5
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 4
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- 238000000034 method Methods 0.000 description 50
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 239000012212 insulator Substances 0.000 description 12
- 239000003990 capacitor Substances 0.000 description 10
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- 230000007547 defect Effects 0.000 description 7
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- 239000002184 metal Substances 0.000 description 7
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
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- RMVRSNDYEFQCLF-UHFFFAOYSA-N thiophenol Chemical compound SC1=CC=CC=C1 RMVRSNDYEFQCLF-UHFFFAOYSA-N 0.000 description 3
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- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
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- DNJIEGIFACGWOD-UHFFFAOYSA-N ethanethiol Chemical compound CCS DNJIEGIFACGWOD-UHFFFAOYSA-N 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
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- SUVIGLJNEAMWEG-UHFFFAOYSA-N propane-1-thiol Chemical compound CCCS SUVIGLJNEAMWEG-UHFFFAOYSA-N 0.000 description 2
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- 239000003566 sealing material Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZRKMQKLGEQPLNS-UHFFFAOYSA-N 1-Pentanethiol Chemical compound CCCCCS ZRKMQKLGEQPLNS-UHFFFAOYSA-N 0.000 description 1
- UVAMFBJPMUMURT-UHFFFAOYSA-N 2,3,4,5,6-pentafluorobenzenethiol Chemical compound FC1=C(F)C(F)=C(S)C(F)=C1F UVAMFBJPMUMURT-UHFFFAOYSA-N 0.000 description 1
- WJTZZPVVTSDNJJ-UHFFFAOYSA-N 2-fluorobenzenethiol Chemical compound FC1=CC=CC=C1S WJTZZPVVTSDNJJ-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- VPIAKHNXCOTPAY-UHFFFAOYSA-N Heptane-1-thiol Chemical compound CCCCCCCS VPIAKHNXCOTPAY-UHFFFAOYSA-N 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XBDYBAVJXHJMNQ-UHFFFAOYSA-N Tetrahydroanthracene Natural products C1=CC=C2C=C(CCCC3)C3=CC2=C1 XBDYBAVJXHJMNQ-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007774 anilox coating Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- WQAQPCDUOCURKW-UHFFFAOYSA-N butanethiol Chemical compound CCCCS WQAQPCDUOCURKW-UHFFFAOYSA-N 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- VTXVGVNLYGSIAR-UHFFFAOYSA-N decane-1-thiol Chemical compound CCCCCCCCCCS VTXVGVNLYGSIAR-UHFFFAOYSA-N 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- 150000002019 disulfides Chemical class 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- SBRXLTRZCJVAPH-UHFFFAOYSA-N ethyl(trimethoxy)silane Chemical compound CC[Si](OC)(OC)OC SBRXLTRZCJVAPH-UHFFFAOYSA-N 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000007644 letterpress printing Methods 0.000 description 1
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- 229910001960 metal nitrate Inorganic materials 0.000 description 1
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- 150000004706 metal oxides Chemical class 0.000 description 1
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- QJAOYSPHSNGHNC-UHFFFAOYSA-N octadecane-1-thiol Chemical compound CCCCCCCCCCCCCCCCCCS QJAOYSPHSNGHNC-UHFFFAOYSA-N 0.000 description 1
- FTMKAMVLFVRZQX-UHFFFAOYSA-N octadecylphosphonic acid Chemical compound CCCCCCCCCCCCCCCCCCP(O)(O)=O FTMKAMVLFVRZQX-UHFFFAOYSA-N 0.000 description 1
- SLYCYWCVSGPDFR-UHFFFAOYSA-N octadecyltrimethoxysilane Chemical compound CCCCCCCCCCCCCCCCCC[Si](OC)(OC)OC SLYCYWCVSGPDFR-UHFFFAOYSA-N 0.000 description 1
- KZCOBXFFBQJQHH-UHFFFAOYSA-N octane-1-thiol Chemical compound CCCCCCCCS KZCOBXFFBQJQHH-UHFFFAOYSA-N 0.000 description 1
- MSRJTTSHWYDFIU-UHFFFAOYSA-N octyltriethoxysilane Chemical compound CCCCCCCC[Si](OCC)(OCC)OCC MSRJTTSHWYDFIU-UHFFFAOYSA-N 0.000 description 1
- 229960003493 octyltriethoxysilane Drugs 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
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- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 1
- PYJJCSYBSYXGQQ-UHFFFAOYSA-N trichloro(octadecyl)silane Chemical compound CCCCCCCCCCCCCCCCCC[Si](Cl)(Cl)Cl PYJJCSYBSYXGQQ-UHFFFAOYSA-N 0.000 description 1
- RCHUVCPBWWSUMC-UHFFFAOYSA-N trichloro(octyl)silane Chemical compound CCCCCCCC[Si](Cl)(Cl)Cl RCHUVCPBWWSUMC-UHFFFAOYSA-N 0.000 description 1
- FZMJEGJVKFTGMU-UHFFFAOYSA-N triethoxy(octadecyl)silane Chemical compound CCCCCCCCCCCCCCCCCC[Si](OCC)(OCC)OCC FZMJEGJVKFTGMU-UHFFFAOYSA-N 0.000 description 1
- NMEPHPOFYLLFTK-UHFFFAOYSA-N trimethoxy(octyl)silane Chemical compound CCCCCCCC[Si](OC)(OC)OC NMEPHPOFYLLFTK-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Landscapes
- Liquid Crystal (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Description
2・・・ゲート電極
3・・・キャパシタ電極
4・・・ゲート絶縁体層
5・・・ソース電極
6・・・ドレイン電極
7・・・半導体層
8・・・保護層
9・・・層間絶縁膜
9a・・・ビア開口部
10・・・画素電極
11・・・単分子膜
100・・・薄膜トランジスタ
200・・・薄膜トランジスタの配列の一部
300・・・薄膜トランジスタ
400・・・薄膜トランジスタの配列の一部
Claims (3)
- ドレイン電極と、
前記ドレイン電極上に形成されたビア開口部を有する層間絶縁膜と、
前記層間絶縁膜上に形成されるとともに前記ビア開口部を介して前記ドレイン電極に電気的に接続された画素電極と、
前記ビア開口部において前記層間絶縁膜から露出した前記ドレイン電極の表面に形成された単分子膜とを含む薄膜トランジスタの製造方法であって、
前記ドレイン電極上に前記ビア開口部を備える層間絶縁膜を形成する工程と、
前記ビア開口部において層間絶縁膜から露出したドレイン電極と、所定の化合物との反応により前記単分子膜を形成する工程と、
グラビアオフセット印刷またはスクリーン印刷により前記画素電極を形成する工程とを含む、薄膜トランジスタの製造方法。 - 前記単分子膜を形成する工程において、前記単分子膜が、前記ビア開口部において前記層間絶縁膜から露出した前記ドレイン電極と、チオール化合物、ジスルフィド化合物、シランカップリング剤又はホスホン酸化合物との反応により得られることを特徴とする請求項1に記載の薄膜トランジスタの製造方法。
- 前記単分子膜を形成する工程において形成される前記単分子膜は、末端に、アミノ基、エポキシ基、及びメルカプト基の少なくとも1つを有することを特徴とする請求項1または請求項2に記載の薄膜トランジスタの製造方法。
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Publications (2)
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JP2014165241A JP2014165241A (ja) | 2014-09-08 |
JP6197306B2 true JP6197306B2 (ja) | 2017-09-20 |
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JP3646784B2 (ja) * | 2000-03-31 | 2005-05-11 | セイコーエプソン株式会社 | 薄膜パタ−ンの製造方法および微細構造体 |
JP2005086147A (ja) * | 2003-09-11 | 2005-03-31 | Sony Corp | 金属単層膜形成方法、配線形成方法、及び、電界効果型トランジスタの製造方法 |
JP4252919B2 (ja) * | 2004-03-25 | 2009-04-08 | 富士フイルム株式会社 | 導電性パターン材料、金属微粒子パターン材料及びパターン形成方法 |
JP4907873B2 (ja) * | 2004-07-08 | 2012-04-04 | 株式会社リコー | 電子素子の製造方法 |
US7508078B2 (en) * | 2005-01-06 | 2009-03-24 | Ricoh Company, Ltd. | Electronic device, method for manufacturing electronic device, contact hole of electronic device, method for forming contact hole of electronic device |
JP2008085315A (ja) * | 2006-08-31 | 2008-04-10 | Toppan Printing Co Ltd | 薄膜トランジスタおよびその製造方法 |
JP2009231325A (ja) * | 2008-03-19 | 2009-10-08 | Toppan Printing Co Ltd | 薄膜トランジスタアレイ、その製造方法およびそれを用いたアクティブマトリクス型ディスプレイ |
JP5532553B2 (ja) * | 2008-06-11 | 2014-06-25 | 凸版印刷株式会社 | 薄膜トランジスタ、薄膜トランジスタの製造方法、薄膜トランジスタアレイ及び画像表示装置 |
JP5370636B2 (ja) * | 2008-08-05 | 2013-12-18 | 株式会社リコー | トランジスタアクティブ基板およびその製造方法並びに電気泳動ディスプレイ |
JP5158010B2 (ja) * | 2009-05-13 | 2013-03-06 | ソニー株式会社 | 電界効果型トランジスタの製造方法 |
JP2011082419A (ja) * | 2009-10-09 | 2011-04-21 | Sony Corp | 薄膜トランジスタ、薄膜トランジスタの製造方法、表示装置、および電子機器 |
JP4527194B1 (ja) * | 2009-12-11 | 2010-08-18 | エンパイア テクノロジー ディベロップメント エルエルシー | グラフェン構造体、グラフェン構造体の製造方法、及び電子デバイス |
JP2011186240A (ja) * | 2010-03-09 | 2011-09-22 | Bridgestone Corp | 情報表示用パネルの製造方法 |
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